CA2023209A1 - Abrasifs induits d'une matiere conductrice - Google Patents

Abrasifs induits d'une matiere conductrice

Info

Publication number
CA2023209A1
CA2023209A1 CA2023209A CA2023209A CA2023209A1 CA 2023209 A1 CA2023209 A1 CA 2023209A1 CA 2023209 A CA2023209 A CA 2023209A CA 2023209 A CA2023209 A CA 2023209A CA 2023209 A1 CA2023209 A1 CA 2023209A1
Authority
CA
Canada
Prior art keywords
coated abrasives
conductive coated
build
eliminate
construction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2023209A
Other languages
English (en)
Other versions
CA2023209C (fr
Inventor
Scott J. Buchanan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27015533&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CA2023209(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Publication of CA2023209A1 publication Critical patent/CA2023209A1/fr
Application granted granted Critical
Publication of CA2023209C publication Critical patent/CA2023209C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B24D3/342—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
    • B24D3/344—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent the bonding agent being organic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B3/00—Sharpening cutting edges, e.g. of tools; Accessories therefor, e.g. for holding the tools

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Paints Or Removers (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
CA002023209A 1989-08-21 1990-08-13 Abrasifs induits d'une matiere conductrice Expired - Fee Related CA2023209C (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US39651389A 1989-08-21 1989-08-21
US396,513 1989-08-21
US49545890A 1990-03-16 1990-03-16
US495,458 1990-03-16

Publications (2)

Publication Number Publication Date
CA2023209A1 true CA2023209A1 (fr) 1991-02-22
CA2023209C CA2023209C (fr) 2001-02-20

Family

ID=27015533

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002023209A Expired - Fee Related CA2023209C (fr) 1989-08-21 1990-08-13 Abrasifs induits d'une matiere conductrice

Country Status (9)

Country Link
US (1) US5108463B1 (fr)
EP (1) EP0414494B1 (fr)
JP (1) JP2869169B2 (fr)
KR (1) KR100197820B1 (fr)
AT (1) ATE107215T1 (fr)
AU (1) AU633956B2 (fr)
CA (1) CA2023209C (fr)
DE (1) DE69009903T2 (fr)
MY (1) MY107101A (fr)

Families Citing this family (113)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6406576B1 (en) 1991-12-20 2002-06-18 3M Innovative Properties Company Method of making coated abrasive belt with an endless, seamless backing
JPH07502458A (ja) * 1991-12-20 1995-03-16 ミネソタ・マイニング・アンド・マニュファクチュアリング・カンパニー エンドレスで継目のない支持体を有する被覆研磨剤ベルトおよびその製造方法
US6406577B1 (en) 1991-12-20 2002-06-18 3M Innovative Properties Company Method of making abrasive belt with an endless, seamless backing
JPH08502695A (ja) * 1992-02-12 1996-03-26 ミネソタ・マイニング・アンド・マニュファクチュアリング・カンパニー 電気伝導性支持体を含有する被覆研磨材物品
US5203884A (en) * 1992-06-04 1993-04-20 Minnesota Mining And Manufacturing Company Abrasive article having vanadium oxide incorporated therein
US5328716A (en) * 1992-08-11 1994-07-12 Minnesota Mining And Manufacturing Company Method of making a coated abrasive article containing a conductive backing
US5355636A (en) * 1992-10-01 1994-10-18 Minnesota Mining And Manufacturing Company Tear resistant coated abrasive article
US5304224A (en) * 1992-10-01 1994-04-19 Minnesota Mining And Manufacturing Company Coated abrasive article having a tear resistant backing
US5681612A (en) * 1993-06-17 1997-10-28 Minnesota Mining And Manufacturing Company Coated abrasives and methods of preparation
US5366524A (en) * 1993-11-12 1994-11-22 Martin Marietta Energy Systems, Inc. Ceramic-bonded abrasive grinding tools
US5421766A (en) * 1993-12-06 1995-06-06 Church & Dwight Co., Inc. Blast nozzle for preventing the accumulation of static electric charge during blast cleaning operations
US5578096A (en) * 1995-08-10 1996-11-26 Minnesota Mining And Manufacturing Company Method for making a spliceless coated abrasive belt and the product thereof
JPH0985631A (ja) * 1995-09-28 1997-03-31 Fuji Photo Film Co Ltd 研磨体
US5766277A (en) * 1996-09-20 1998-06-16 Minnesota Mining And Manufacturing Company Coated abrasive article and method of making same
US5908477A (en) * 1997-06-24 1999-06-01 Minnesota Mining & Manufacturing Company Abrasive articles including an antiloading composition
US6261682B1 (en) 1998-06-30 2001-07-17 3M Innovative Properties Abrasive articles including an antiloading composition
KR20010020807A (ko) * 1999-05-03 2001-03-15 조셉 제이. 스위니 고정 연마재 제품을 사전-조절하는 방법
US7374644B2 (en) 2000-02-17 2008-05-20 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US7066800B2 (en) * 2000-02-17 2006-06-27 Applied Materials Inc. Conductive polishing article for electrochemical mechanical polishing
US7303462B2 (en) * 2000-02-17 2007-12-04 Applied Materials, Inc. Edge bead removal by an electro polishing process
US6979248B2 (en) * 2002-05-07 2005-12-27 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US20080156657A1 (en) * 2000-02-17 2008-07-03 Butterfield Paul D Conductive polishing article for electrochemical mechanical polishing
US7029365B2 (en) 2000-02-17 2006-04-18 Applied Materials Inc. Pad assembly for electrochemical mechanical processing
US20050092621A1 (en) * 2000-02-17 2005-05-05 Yongqi Hu Composite pad assembly for electrochemical mechanical processing (ECMP)
US20040020789A1 (en) * 2000-02-17 2004-02-05 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US7059948B2 (en) * 2000-12-22 2006-06-13 Applied Materials Articles for polishing semiconductor substrates
US7125477B2 (en) * 2000-02-17 2006-10-24 Applied Materials, Inc. Contacts for electrochemical processing
US6962524B2 (en) * 2000-02-17 2005-11-08 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US6991528B2 (en) * 2000-02-17 2006-01-31 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US7678245B2 (en) * 2000-02-17 2010-03-16 Applied Materials, Inc. Method and apparatus for electrochemical mechanical processing
US7303662B2 (en) * 2000-02-17 2007-12-04 Applied Materials, Inc. Contacts for electrochemical processing
US7670468B2 (en) * 2000-02-17 2010-03-02 Applied Materials, Inc. Contact assembly and method for electrochemical mechanical processing
US8062098B2 (en) 2000-11-17 2011-11-22 Duescher Wayne O High speed flat lapping platen
US8256091B2 (en) * 2000-11-17 2012-09-04 Duescher Wayne O Equal sized spherical beads
US8545583B2 (en) * 2000-11-17 2013-10-01 Wayne O. Duescher Method of forming a flexible abrasive sheet article
US7632434B2 (en) 2000-11-17 2009-12-15 Wayne O. Duescher Abrasive agglomerate coated raised island articles
US7520800B2 (en) * 2003-04-16 2009-04-21 Duescher Wayne O Raised island abrasive, lapping apparatus and method of use
US20020146963A1 (en) * 2001-02-08 2002-10-10 3M Innovative Properties Company Composition containing graphite
US7137879B2 (en) * 2001-04-24 2006-11-21 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US7344432B2 (en) * 2001-04-24 2008-03-18 Applied Materials, Inc. Conductive pad with ion exchange membrane for electrochemical mechanical polishing
JP4737492B2 (ja) * 2001-09-04 2011-08-03 独立行政法人理化学研究所 メタルレスボンド砥石とそれによる電解ドレッシング研削方法及び装置
US6758734B2 (en) 2002-03-18 2004-07-06 3M Innovative Properties Company Coated abrasive article
US6773474B2 (en) 2002-04-19 2004-08-10 3M Innovative Properties Company Coated abrasive article
US6755878B2 (en) 2002-08-02 2004-06-29 3M Innovative Properties Company Abrasive articles and methods of making and using the same
US7169199B2 (en) * 2002-11-25 2007-01-30 3M Innovative Properties Company Curable emulsions and abrasive articles therefrom
US6979713B2 (en) * 2002-11-25 2005-12-27 3M Innovative Properties Company Curable compositions and abrasive articles therefrom
DE10256515A1 (de) * 2002-12-04 2004-07-29 Tesa Ag Antistatisches Haftklebeband
US7842169B2 (en) * 2003-03-04 2010-11-30 Applied Materials, Inc. Method and apparatus for local polishing control
US6843815B1 (en) * 2003-09-04 2005-01-18 3M Innovative Properties Company Coated abrasive articles and method of abrading
US20050121141A1 (en) * 2003-11-13 2005-06-09 Manens Antoine P. Real time process control for a polishing process
US7186164B2 (en) * 2003-12-03 2007-03-06 Applied Materials, Inc. Processing pad assembly with zone control
US20050178666A1 (en) * 2004-01-13 2005-08-18 Applied Materials, Inc. Methods for fabrication of a polishing article
US7121924B2 (en) * 2004-04-20 2006-10-17 3M Innovative Properties Company Abrasive articles, and methods of making and using the same
US7150771B2 (en) * 2004-06-18 2006-12-19 3M Innovative Properties Company Coated abrasive article with composite tie layer, and method of making and using the same
US7150770B2 (en) * 2004-06-18 2006-12-19 3M Innovative Properties Company Coated abrasive article with tie layer, and method of making and using the same
US20050282029A1 (en) * 2004-06-18 2005-12-22 3M Innovative Properties Company Polymerizable composition and articles therefrom
US20060030156A1 (en) * 2004-08-05 2006-02-09 Applied Materials, Inc. Abrasive conductive polishing article for electrochemical mechanical polishing
US20060026904A1 (en) * 2004-08-06 2006-02-09 3M Innovative Properties Company Composition, coated abrasive article, and methods of making the same
US7084064B2 (en) * 2004-09-14 2006-08-01 Applied Materials, Inc. Full sequence metal and barrier layer electrochemical mechanical processing
WO2006039436A2 (fr) * 2004-10-01 2006-04-13 Applied Materials, Inc. Modele de tampon pour polissage electrochimique mecanique
US7520968B2 (en) * 2004-10-05 2009-04-21 Applied Materials, Inc. Conductive pad design modification for better wafer-pad contact
US7591865B2 (en) * 2005-01-28 2009-09-22 Saint-Gobain Abrasives, Inc. Method of forming structured abrasive article
US8287611B2 (en) * 2005-01-28 2012-10-16 Saint-Gobain Abrasives, Inc. Abrasive articles and methods for making same
WO2006110517A1 (fr) * 2005-04-08 2006-10-19 Saint-Gobain Abrasives, Inc. Article abrasif ayant un groupe chromophore active par une reaction
US7427340B2 (en) * 2005-04-08 2008-09-23 Applied Materials, Inc. Conductive pad
US20060265966A1 (en) * 2005-05-24 2006-11-30 Rostal William J Abrasive articles and methods of making and using the same
US20060265967A1 (en) * 2005-05-24 2006-11-30 3M Innovative Properties Company Abrasive articles and methods of making and using the same
US7344575B2 (en) * 2005-06-27 2008-03-18 3M Innovative Properties Company Composition, treated backing, and abrasive articles containing the same
US7344574B2 (en) * 2005-06-27 2008-03-18 3M Innovative Properties Company Coated abrasive article, and method of making and using the same
US8062394B2 (en) 2005-06-29 2011-11-22 Saint-Gobain Abrasives, Inc. High-performance resin for abrasive products
TW200720494A (en) * 2005-11-01 2007-06-01 Applied Materials Inc Ball contact cover for copper loss reduction and spike reduction
US8435098B2 (en) * 2006-01-27 2013-05-07 Saint-Gobain Abrasives, Inc. Abrasive article with cured backsize layer
US20070218587A1 (en) * 2006-03-07 2007-09-20 Applied Materials, Inc. Soft conductive polymer processing pad and method for fabricating the same
CA2647881C (fr) * 2006-04-04 2012-02-14 Saint-Gobain Abrasives, Inc. Articles abrasifs traites par infrarouge et procede de fabrication
JP4937700B2 (ja) * 2006-11-07 2012-05-23 株式会社ディスコ 乾式研磨装置
CN101939140B (zh) * 2006-12-21 2012-11-28 圣戈本磨料股份有限公司 低腐蚀磨料制品及其制备方法
BRPI0806887A8 (pt) * 2007-01-23 2019-01-02 Saint Gobain Abrasifs Sa produtos abrasivos revestidos contendo agregados
US20080206631A1 (en) * 2007-02-27 2008-08-28 3M Innovative Properties Company Electrolytes, electrode compositions and electrochemical cells made therefrom
US20080293343A1 (en) * 2007-05-22 2008-11-27 Yuchun Wang Pad with shallow cells for electrochemical mechanical processing
US8449635B2 (en) * 2007-12-06 2013-05-28 Saint-Gobain Abrasives, Inc. Abrasive articles and methods for making same
EP2105456A1 (fr) * 2008-03-25 2009-09-30 KiOR Inc. Composition comportant une biomasse solide revêtue dans un catalyseur solide
US20100011672A1 (en) * 2008-07-16 2010-01-21 Kincaid Don H Coated abrasive article and method of making and using the same
KR20130038958A (ko) * 2008-07-22 2013-04-18 생-고벵 아브라시프 집합체들을 함유하는 코팅된 연마 제품들
MX2011005166A (es) 2008-11-17 2011-06-17 Saint Gobain Abrasives Inc Productos abrasivos de adhesion fenolicos de color estabilizado con acrilato y metodos para prepararlos.
DE102009047583A1 (de) * 2009-12-07 2011-06-09 Robert Bosch Gmbh Elektrisch leitfähiges Schleifwerkzeug
US8871331B2 (en) * 2009-12-29 2014-10-28 Saint-Gobain Abrasives, Inc. Anti-loading abrasive article
EP2658944A4 (fr) 2010-12-30 2017-08-02 Saint-Gobain Abrasives, Inc. Agrégats abrasifs revêtus et produits les contenant
US9168638B2 (en) 2011-09-29 2015-10-27 Saint-Gobain Abrasives, Inc. Abrasive products and methods for finishing hard surfaces
BR112014016015B1 (pt) 2011-12-31 2020-12-29 Saint-Gobain Abrasives, Inc. artigo abrasivo com distribuição não uniforme de aberturas
US9321947B2 (en) 2012-01-10 2016-04-26 Saint-Gobain Abrasives, Inc. Abrasive products and methods for finishing coated surfaces
CN104144769A (zh) 2012-03-16 2014-11-12 圣戈班磨料磨具有限公司 研磨制品和用于精修表面的方法
US8968435B2 (en) 2012-03-30 2015-03-03 Saint-Gobain Abrasives, Inc. Abrasive products and methods for fine polishing of ophthalmic lenses
WO2014106280A1 (fr) 2012-12-31 2014-07-03 Saint-Gobain Abrasives, Inc. Articles abrasifs comportant un mélange de grains abrasifs et procédé de fabrication correspondant
TWI589404B (zh) 2013-06-28 2017-07-01 聖高拜磨料有限公司 基於向日葵圖案之經塗佈的研磨製品
JP6735286B2 (ja) 2015-03-30 2020-08-05 スリーエム イノベイティブ プロパティズ カンパニー 被覆研磨物品及びその製造方法
US10759023B2 (en) 2015-12-30 2020-09-01 3M Innovative Properties Company Abrasive articles and related methods
WO2017117356A1 (fr) * 2015-12-30 2017-07-06 3M Innovative Properties Company Article abrasif
US11845885B2 (en) 2015-12-30 2023-12-19 3M Innovative Properties Company Dual stage structural bonding adhesive
DE102017204605A1 (de) 2017-03-20 2018-09-20 Robert Bosch Gmbh Verfahren zu einem elektrostatischen Streuen eines Schleifkorns
US11724363B2 (en) 2018-04-24 2023-08-15 3M Innovative Properties Company Method of making a coated abrasive article
US11602822B2 (en) 2018-04-24 2023-03-14 3M Innovative Properties Company Coated abrasive article and method of making the same
CN112004642A (zh) 2018-04-24 2020-11-27 3M创新有限公司 制备带涂层磨料制品的方法
US12459081B2 (en) 2018-10-09 2025-11-04 3M Innovative Properties Company Treated backing and coated abrasive article including the same
US11981000B2 (en) 2018-12-18 2024-05-14 3M Innovative Properties Company Coated abrasive articles and methods of making coated abrasive articles
EP3924149B1 (fr) 2019-02-11 2025-07-09 3M Innovative Properties Company Articles abrasifs et leurs procédés de fabrication et d'utilisation
CN114555296B (zh) 2019-10-17 2025-01-28 3M创新有限公司 带涂层磨料制品及其制备方法
WO2022003498A1 (fr) 2020-06-30 2022-01-06 3M Innovative Properties Company Articles abrasifs revêtus et leurs procédés de réalisation et d'utilisation
DE102020212004A1 (de) * 2020-09-24 2022-03-24 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zur Herstellung eines Schleifartikels sowie Schleifartikel
EP4237193A1 (fr) 2020-10-28 2023-09-06 3M Innovative Properties Company Procédé de fabrication d'un article abrasif revêtu et article abrasif revêtu
US20240253184A1 (en) 2021-06-15 2024-08-01 3M Innovative Properties Company Coated abrasive article including biodegradable thermoset resin and method of making and using the same
WO2023180877A1 (fr) 2022-03-21 2023-09-28 3M Innovative Properties Company Composition durcissable, support traité, articles abrasifs revêtus les comprenant et leurs procédés de fabrication et d'utilisation
EP4496679A1 (fr) 2022-03-21 2025-01-29 3M Innovative Properties Company Composition durcissable, article abrasif revêtu la contenant et procédés de fabrication et d'utilisation de celle-ci
EP4526081A1 (fr) 2022-05-20 2025-03-26 3M Innovative Properties Company Ensemble abrasif à segments abrasifs

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US3992178A (en) * 1973-04-17 1976-11-16 Fabrika Ab Eka Flexible coated abrasive with graphite outer layer
DE2813258C2 (de) * 1978-03-28 1985-04-25 Sia Schweizer Schmirgel- & Schleifindustrie Ag, Frauenfeld Schleifkörper
JPS54152197A (en) * 1978-05-23 1979-11-30 Furukawa Electric Co Ltd:The Manufacture of semiconductive mixture
DE2853761B1 (de) * 1978-12-13 1980-03-27 Hoechst Ag Verfahren zur Herstellung von Schleifmitteln
US4242106A (en) * 1979-01-02 1980-12-30 General Electric Company Composite of polycrystalline diamond and/or cubic boron nitride body/silicon carbide substrate
US4588419A (en) * 1980-10-08 1986-05-13 Carborundum Abrasives Company Resin systems for high energy electron curable resin coated webs
US4547204A (en) * 1980-10-08 1985-10-15 Carborundum Abrasives Company Resin systems for high energy electron curable resin coated webs
US4457766A (en) * 1980-10-08 1984-07-03 Kennecott Corporation Resin systems for high energy electron curable resin coated webs
JP2501781B2 (ja) * 1982-03-30 1996-05-29 日立マクセル株式会社 導電性研磨用部材
JPS61152373A (ja) * 1984-12-25 1986-07-11 Mitsui Toatsu Chem Inc 合成樹脂研磨材
US4751138A (en) * 1986-08-11 1988-06-14 Minnesota Mining And Manufacturing Company Coated abrasive having radiation curable binder
EP0298593A3 (fr) * 1987-05-19 1990-01-10 Kabushiki Kaisha Toshiba Matériau de matrice pour agglomérer un matériau abrasif et son procédé de préparation

Also Published As

Publication number Publication date
AU633956B2 (en) 1993-02-11
MY107101A (en) 1995-11-30
KR910004304A (ko) 1991-03-28
KR100197820B1 (ko) 1999-06-15
DE69009903T2 (de) 1995-01-05
EP0414494A3 (en) 1991-06-12
US5108463A (en) 1992-04-28
DE69009903D1 (de) 1994-07-21
AU6117290A (en) 1991-02-21
HK1006953A1 (en) 1999-03-26
ATE107215T1 (de) 1994-07-15
JP2869169B2 (ja) 1999-03-10
US5108463B1 (en) 1996-08-13
CA2023209C (fr) 2001-02-20
JPH03188187A (ja) 1991-08-16
EP0414494A2 (fr) 1991-02-27
EP0414494B1 (fr) 1994-06-15

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