CA2323189A1 - Actionneur electrostatique a double mouvement pour micro-relais de systemes mecaniques microelectroniques - Google Patents
Actionneur electrostatique a double mouvement pour micro-relais de systemes mecaniques microelectroniques Download PDFInfo
- Publication number
- CA2323189A1 CA2323189A1 CA 2323189 CA2323189A CA2323189A1 CA 2323189 A1 CA2323189 A1 CA 2323189A1 CA 2323189 CA2323189 CA 2323189 CA 2323189 A CA2323189 A CA 2323189A CA 2323189 A1 CA2323189 A1 CA 2323189A1
- Authority
- CA
- Canada
- Prior art keywords
- substrate
- micromachine
- electrode
- actuating
- actuating electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 230000009977 dual effect Effects 0.000 title claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 52
- 239000011810 insulating material Substances 0.000 claims description 4
- 238000002955 isolation Methods 0.000 claims description 3
- 239000012528 membrane Substances 0.000 abstract description 8
- 241000212384 Bifora Species 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 230000002301 combined effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000004353 relayed correlation spectroscopy Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
Landscapes
- Micromachines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US41942299A | 1999-10-15 | 1999-10-15 | |
| US09/419,422 | 1999-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2323189A1 true CA2323189A1 (fr) | 2001-04-15 |
Family
ID=23662195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA 2323189 Abandoned CA2323189A1 (fr) | 1999-10-15 | 2000-10-13 | Actionneur electrostatique a double mouvement pour micro-relais de systemes mecaniques microelectroniques |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP1093142A2 (fr) |
| JP (1) | JP2001179699A (fr) |
| CA (1) | CA2323189A1 (fr) |
Families Citing this family (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100387239B1 (ko) * | 2001-04-26 | 2003-06-12 | 삼성전자주식회사 | Ｍｅｍｓ 릴레이 및 그 제조방법 |
| JP3818176B2 (ja) | 2002-03-06 | 2006-09-06 | 株式会社村田製作所 | Ｒｆｍｅｍｓ素子 |
| EP1343190A3 (fr) | 2002-03-08 | 2005-04-20 | Murata Manufacturing Co., Ltd. | Elément à capacité variable |
| KR100492004B1 (ko) * | 2002-11-01 | 2005-05-30 | 한국전자통신연구원 | 미세전자기계적 시스템 기술을 이용한 고주파 소자 |
| CN100410165C (zh) | 2002-11-19 | 2008-08-13 | 宝兰微系统公司 | 小型继电器和相应的用途 |
| US7417782B2 (en) | 2005-02-23 | 2008-08-26 | Pixtronix, Incorporated | Methods and apparatus for spatial light modulation |
| WO2004114345A2 (fr) | 2003-06-26 | 2004-12-29 | Koninklijke Philips Electronics N.V. | Dispositif microelectromecanique, module et leur procede de fabrication |
| ES2217988B1 (es) * | 2003-11-18 | 2005-09-16 | Baolab Microsystems S.L. | Circuito regulador y usos correspondientes. |
| EP1747611A2 (fr) | 2004-05-19 | 2007-01-31 | Baolab Microsystems S.L. | Circuit regulateur et usages correspondants |
| KR100599115B1 (ko) | 2004-07-20 | 2006-07-12 | 삼성전자주식회사 | 진동형 멤스 스위치 및 그 제조방법 |
| US9158106B2 (en) | 2005-02-23 | 2015-10-13 | Pixtronix, Inc. | Display methods and apparatus |
| US8310442B2 (en) | 2005-02-23 | 2012-11-13 | Pixtronix, Inc. | Circuits for controlling display apparatus |
| US7746529B2 (en) | 2005-02-23 | 2010-06-29 | Pixtronix, Inc. | MEMS display apparatus |
| US9261694B2 (en) | 2005-02-23 | 2016-02-16 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
| US8159428B2 (en) | 2005-02-23 | 2012-04-17 | Pixtronix, Inc. | Display methods and apparatus |
| US8519945B2 (en) | 2006-01-06 | 2013-08-27 | Pixtronix, Inc. | Circuits for controlling display apparatus |
| US7999994B2 (en) | 2005-02-23 | 2011-08-16 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
| US9229222B2 (en) | 2005-02-23 | 2016-01-05 | Pixtronix, Inc. | Alignment methods in fluid-filled MEMS displays |
| US9082353B2 (en) | 2010-01-05 | 2015-07-14 | Pixtronix, Inc. | Circuits for controlling display apparatus |
| US20070205969A1 (en) | 2005-02-23 | 2007-09-06 | Pixtronix, Incorporated | Direct-view MEMS display devices and methods for generating images thereon |
| US8482496B2 (en) | 2006-01-06 | 2013-07-09 | Pixtronix, Inc. | Circuits for controlling MEMS display apparatus on a transparent substrate |
| JP4703585B2 (ja) * | 2006-02-09 | 2011-06-15 | 株式会社東芝 | 半導体集積回路及び静電型アクチュエータの駆動方法 |
| KR100836980B1 (ko) | 2006-02-09 | 2008-06-10 | 가부시끼가이샤 도시바 | 정전형 액튜에이터를 구동하기 위한 회로를 포함하는반도체 집적 회로, ｍｅｍｓ 및 정전형 액튜에이터의 구동방법 |
| US8526096B2 (en) | 2006-02-23 | 2013-09-03 | Pixtronix, Inc. | Mechanical light modulators with stressed beams |
| JP4723033B2 (ja) * | 2006-12-22 | 2011-07-13 | アナログ デバイシス， インコーポレイテッド | スイッチを駆動する方法および装置 |
| US9176318B2 (en) | 2007-05-18 | 2015-11-03 | Pixtronix, Inc. | Methods for manufacturing fluid-filled MEMS displays |
| US8169679B2 (en) | 2008-10-27 | 2012-05-01 | Pixtronix, Inc. | MEMS anchors |
| CN101510486B (zh) * | 2009-03-24 | 2011-01-05 | 中北大学 | 微致动开关 |
| US7928333B2 (en) * | 2009-08-14 | 2011-04-19 | General Electric Company | Switch structures |
| US8115989B2 (en) | 2009-09-17 | 2012-02-14 | Qualcomm Mems Technologies, Inc. | Anti-stiction electrode |
| KR20120139854A (ko) | 2010-02-02 | 2012-12-27 | 픽스트로닉스 인코포레이티드 | 디스플레이 장치를 제어하기 위한 회로 |
| WO2011097252A2 (fr) | 2010-02-02 | 2011-08-11 | Pixtronix, Inc. | Procédés de fabrication d'un appareil d'affichage rempli de fluide et scellé à froid |
| JP5177209B2 (ja) | 2010-11-24 | 2013-04-03 | 株式会社デンソー | ファブリペロー干渉計 |
| FR2997247B1 (fr) | 2012-10-22 | 2016-12-09 | Commissariat Energie Atomique | Generateur d'electricite et recuperateur d'energie |
| US9134552B2 (en) | 2013-03-13 | 2015-09-15 | Pixtronix, Inc. | Display apparatus with narrow gap electrostatic actuators |
| US20140267443A1 (en) * | 2013-03-14 | 2014-09-18 | Qualcomm Mems Technologies, Inc. | Electromechanical systems device with segmented electrodes |
| KR101823329B1 (ko) * | 2016-04-04 | 2018-01-30 | 주식회사 풍산 | 전기식 기폭관용 mems 릴레이 및 이를 이용한 포일 폭발형 전기식 기폭장치 |
| CN112038091B (zh) | 2020-08-04 | 2022-08-19 | 厚元技术（香港）有限公司 | 一种基于mems结构的可调电容 |
-
2000
- 2000-10-13 CA CA 2323189 patent/CA2323189A1/fr not_active Abandoned
- 2000-10-16 JP JP2000315660A patent/JP2001179699A/ja active Pending
- 2000-10-16 EP EP20000203564 patent/EP1093142A2/fr not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001179699A (ja) | 2001-07-03 |
| EP1093142A2 (fr) | 2001-04-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| FZDE | Dead |