CH304852A - Device for compensating the symmetry errors of electron lenses. - Google Patents

Device for compensating the symmetry errors of electron lenses.

Info

Publication number
CH304852A
CH304852A CH304852DA CH304852A CH 304852 A CH304852 A CH 304852A CH 304852D A CH304852D A CH 304852DA CH 304852 A CH304852 A CH 304852A
Authority
CH
Switzerland
Prior art keywords
compensating
electron lenses
symmetry errors
symmetry
errors
Prior art date
Application number
Other languages
German (de)
Inventor
Gmbh Sueddeutsche Laboratorien
Original Assignee
Sueddeutsche Lab Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sueddeutsche Lab Gmbh filed Critical Sueddeutsche Lab Gmbh
Publication of CH304852A publication Critical patent/CH304852A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Adjustable Resistors (AREA)
CH304852D 1948-10-02 1951-07-31 Device for compensating the symmetry errors of electron lenses. CH304852A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEP13553A DE950312C (en) 1948-10-02 1948-10-02 Device for compensating the symmetry errors of electron lenses

Publications (1)

Publication Number Publication Date
CH304852A true CH304852A (en) 1955-01-31

Family

ID=6119981

Family Applications (1)

Application Number Title Priority Date Filing Date
CH304852D CH304852A (en) 1948-10-02 1951-07-31 Device for compensating the symmetry errors of electron lenses.

Country Status (4)

Country Link
CH (1) CH304852A (en)
DE (1) DE950312C (en)
FR (1) FR1041901A (en)
NL (1) NL163078B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1187335B (en) * 1958-04-24 1965-02-18 Tesla Np Device for compensating the axial astigmatism of electron lenses

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE563662A (en) * 1957-01-03
DE1231035B (en) * 1962-08-03 1966-12-22 Siemens Ag Method and device for examining thin layers which show changes that can be observed under the influence of electrical fields, using a corpuscular optical microscope
DE1514706C2 (en) * 1966-03-15 1975-11-06 Siemens Ag, 1000 Berlin Und 8000 Muenchen Deflection system for corpuscular beam devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1187335B (en) * 1958-04-24 1965-02-18 Tesla Np Device for compensating the axial astigmatism of electron lenses

Also Published As

Publication number Publication date
NL163078B (en)
DE950312C (en) 1956-10-04
FR1041901A (en) 1953-10-27

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