CS302788A1 - Device for silicon crystals' radiation doping - Google Patents

Device for silicon crystals' radiation doping

Info

Publication number: CS302788A1
Authority: CS; Czechoslovakia
Prior art keywords: silicon crystals; doping; radiation; radiation doping; crystals
Prior art date: 1988-05-04

Application number

CS883027A

Other languages

English (en)

Other versions

CS267958B1 (cs

Inventor

Vaclav Ing Skaba

Lubos Ing Belohradsky

Original Assignee

Skaba Vaclav

Lubos Ing Belohradsky

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1988-05-04

Filing date

1988-05-04

Publication date

1989-07-12

1988-05-04 Application filed by Skaba Vaclav, Lubos Ing Belohradsky filed Critical Skaba Vaclav

1988-05-04 Priority to CS883027A priority Critical patent/CS267958B1/cs

1989-07-12 Publication of CS302788A1 publication Critical patent/CS302788A1/cs

1990-02-12 Publication of CS267958B1 publication Critical patent/CS267958B1/cs

Links

XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title 1
239000013078 crystal Substances 0.000 title 1
230000005855 radiation Effects 0.000 title 1
229910052710 silicon Inorganic materials 0.000 title 1
239000010703 silicon Substances 0.000 title 1

CS883027A 1988-05-04 1988-05-04 Zařízeni pro radiační dotování krystalů křemíku CS267958B1 (cs)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
CS883027A CS267958B1 (cs)	1988-05-04	1988-05-04	Zařízeni pro radiační dotování krystalů křemíku

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
CS883027A CS267958B1 (cs)	1988-05-04	1988-05-04	Zařízeni pro radiační dotování krystalů křemíku

Publications (2)

Publication Number	Publication Date
CS302788A1 true CS302788A1 (en)	1989-07-12
CS267958B1 CS267958B1 (cs)	1990-02-12

Family

ID=5369143

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CS883027A CS267958B1 (cs)	1988-05-04	1988-05-04	Zařízeni pro radiační dotování krystalů křemíku

Country Status (1)

Country	Link
CS (1)	CS267958B1 (cs)

1988
- 1988-05-04 CS CS883027A patent/CS267958B1/cs unknown

Also Published As

Publication number	Publication date
CS267958B1 (cs)	1990-02-12

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