DE10345577A1 - Vorrichtung zur Haarrißprüfung von Siliziumscheiben zur Bildung von Solarzellen - Google Patents

Vorrichtung zur Haarrißprüfung von Siliziumscheiben zur Bildung von Solarzellen Download PDF

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Publication number
DE10345577A1
DE10345577A1 DE2003145577 DE10345577A DE10345577A1 DE 10345577 A1 DE10345577 A1 DE 10345577A1 DE 2003145577 DE2003145577 DE 2003145577 DE 10345577 A DE10345577 A DE 10345577A DE 10345577 A1 DE10345577 A1 DE 10345577A1
Authority
DE
Germany
Prior art keywords
sound
slice
checking
manufacture
solar cells
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE2003145577
Other languages
English (en)
Inventor
Hans Thoma
Daniel Maurer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IFKEWITSCH BODO
Original Assignee
IFKEWITSCH BODO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IFKEWITSCH BODO filed Critical IFKEWITSCH BODO
Priority to DE2003145577 priority Critical patent/DE10345577A1/de
Publication of DE10345577A1 publication Critical patent/DE10345577A1/de
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
    • G01N29/27—Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the material relative to a stationary sensor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/225—Supports, positioning or alignment in moving situation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/4445—Classification of defects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/023—Solids
    • G01N2291/0237—Thin materials, e.g. paper, membranes, thin films
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/048—Transmission, i.e. analysed material between transmitter and receiver
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/269—Various geometry objects
    • G01N2291/2697—Wafer or (micro)electronic parts

Landscapes

  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Signal Processing (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

Die Erfindung betrifft eine Vorrichtung zur Haarrißprüfung von Siliziumscheiben 1, insbesondere von Siliziumscheiben 1 zur Bildung von Solarzellen, mit einem Schallgenerator 2 zur Erzeugung von Schallwellen zur Beaufschlagung einer zur überprüfenden Siliziumscheibe 1, einer Aufnahmevorrichtung 3 zur Erfassung der zu überprüfenden Siliziumscheibe 1, einem Meßwertaufnehmer 5 zur Aufnahme des von der Siliziumscheibe 1 abgestrahlten Schallsignals sowie einem Auswerteelement 6 zur Auswertung des Meßwertaufnehmers 5.
DE2003145577 2003-09-29 2003-09-29 Vorrichtung zur Haarrißprüfung von Siliziumscheiben zur Bildung von Solarzellen Withdrawn DE10345577A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE2003145577 DE10345577A1 (de) 2003-09-29 2003-09-29 Vorrichtung zur Haarrißprüfung von Siliziumscheiben zur Bildung von Solarzellen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2003145577 DE10345577A1 (de) 2003-09-29 2003-09-29 Vorrichtung zur Haarrißprüfung von Siliziumscheiben zur Bildung von Solarzellen

Publications (1)

Publication Number Publication Date
DE10345577A1 true DE10345577A1 (de) 2005-05-12

Family

ID=34428158

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2003145577 Withdrawn DE10345577A1 (de) 2003-09-29 2003-09-29 Vorrichtung zur Haarrißprüfung von Siliziumscheiben zur Bildung von Solarzellen

Country Status (1)

Country Link
DE (1) DE10345577A1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004022221A1 (de) * 2004-05-04 2006-03-16 Hans Thoma Verfahren zur Prüfung, insbesondere zur Haarriß- und Strukturprüfung, von Siliziumscheiben
DE102005028920A1 (de) * 2005-06-22 2006-12-28 Sks Holding Gmbh Verfahren zum Handhaben und Prüfen von Werkstücken sowie Vorrichtung zum Durchführen des Verfahrens
CN102956519A (zh) * 2011-08-23 2013-03-06 李昆达 检测太阳能电池板的音波检测装置及方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3477288A (en) * 1966-10-21 1969-11-11 Vyzk Ustav Kozedelny Testing apparatus and method for sheet material
WO1997020204A1 (en) * 1995-12-01 1997-06-05 System Planning Corporation Method and apparatus for detecting recyclable items
JP2002343989A (ja) * 2001-05-11 2002-11-29 Mitsubishi Electric Corp 基板スクリーニング装置および基板スクリーニング方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3477288A (en) * 1966-10-21 1969-11-11 Vyzk Ustav Kozedelny Testing apparatus and method for sheet material
WO1997020204A1 (en) * 1995-12-01 1997-06-05 System Planning Corporation Method and apparatus for detecting recyclable items
JP2002343989A (ja) * 2001-05-11 2002-11-29 Mitsubishi Electric Corp 基板スクリーニング装置および基板スクリーニング方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004022221A1 (de) * 2004-05-04 2006-03-16 Hans Thoma Verfahren zur Prüfung, insbesondere zur Haarriß- und Strukturprüfung, von Siliziumscheiben
DE102005028920A1 (de) * 2005-06-22 2006-12-28 Sks Holding Gmbh Verfahren zum Handhaben und Prüfen von Werkstücken sowie Vorrichtung zum Durchführen des Verfahrens
EP1736766A3 (de) * 2005-06-22 2007-12-05 SKS Holding Gmbh Verfahren zum Handhaben und Prüfen von Werkstücken sowie Vorrichtung zur Durchführung des Verfahrens
CN102956519A (zh) * 2011-08-23 2013-03-06 李昆达 检测太阳能电池板的音波检测装置及方法

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8139 Disposal/non-payment of the annual fee