DE69524298D1 - Apparat und Verfahren zum Messen einer Verschiebung - Google Patents

Apparat und Verfahren zum Messen einer Verschiebung

Info

Publication number
DE69524298D1
DE69524298D1 DE69524298T DE69524298T DE69524298D1 DE 69524298 D1 DE69524298 D1 DE 69524298D1 DE 69524298 T DE69524298 T DE 69524298T DE 69524298 T DE69524298 T DE 69524298T DE 69524298 D1 DE69524298 D1 DE 69524298D1
Authority
DE
Germany
Prior art keywords
measuring displacement
displacement
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69524298T
Other languages
English (en)
Other versions
DE69524298T2 (de
Inventor
Takahiro Matsumoto
Koichi Sentoku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69524298D1 publication Critical patent/DE69524298D1/de
Publication of DE69524298T2 publication Critical patent/DE69524298T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE69524298T 1994-06-20 1995-06-19 Apparat und Verfahren zum Messen einer Verschiebung Expired - Lifetime DE69524298T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6137406A JPH085314A (ja) 1994-06-20 1994-06-20 変位測定方法及び変位測定装置

Publications (2)

Publication Number Publication Date
DE69524298D1 true DE69524298D1 (de) 2002-01-17
DE69524298T2 DE69524298T2 (de) 2002-06-13

Family

ID=15197903

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69524298T Expired - Lifetime DE69524298T2 (de) 1994-06-20 1995-06-19 Apparat und Verfahren zum Messen einer Verschiebung

Country Status (4)

Country Link
US (1) US5818588A (de)
EP (1) EP0689030B1 (de)
JP (1) JPH085314A (de)
DE (1) DE69524298T2 (de)

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DE69722688T2 (de) * 1996-02-29 2004-01-15 Boeing Co Fiberoptisch-gekoppelter interferometrischer Sensor
JP3704650B2 (ja) * 1997-06-09 2005-10-12 松下電器産業株式会社 映像信号記録再生装置
WO1999005471A1 (en) * 1997-07-23 1999-02-04 Mitsubishi Denki Kabushiki Kaisha Length measuring instrument
US5999261A (en) * 1998-02-10 1999-12-07 Seagate Technology, Inc. Split phase high performance, high frequency, high dynamic range interferometer
JP4536873B2 (ja) * 2000-06-05 2010-09-01 キヤノン株式会社 三次元形状計測方法及び装置
EP1419361A1 (de) 2001-08-23 2004-05-19 Zygo Corporation Dynamische interferometrische steuerung der richtung eines eingangsstrahls
US6738143B2 (en) * 2001-11-13 2004-05-18 Agilent Technologies, Inc System and method for interferometer non-linearity compensation
US6792368B2 (en) * 2002-01-17 2004-09-14 Agilent Technologies, Inc. System and method for heterodyne interferometer high velocity type non-linearity compensation
JP4198929B2 (ja) * 2002-03-27 2008-12-17 パイオニア株式会社 レーザ測長器及びレーザ測長方法
KR100468155B1 (ko) * 2002-06-27 2005-01-26 한국과학기술원 이종모드 헬륨-네온 레이저와 슈퍼 헤테로다인위상측정법을 이용한 헤테로다인 레이저 간섭계
JP4547257B2 (ja) 2002-07-08 2010-09-22 ザイゴ コーポレーション 干渉計システムにおける周期誤差の補正
US7616322B2 (en) 2002-07-08 2009-11-10 Zygo Corporation Cyclic error compensation in interferometry systems
US7428685B2 (en) 2002-07-08 2008-09-23 Zygo Corporation Cyclic error compensation in interferometry systems
WO2005022078A1 (en) * 2003-08-27 2005-03-10 The University Of Queensland Method and apparatus for precision measurement of phase shifts
GB2407155A (en) * 2003-10-14 2005-04-20 Univ Kent Canterbury Spectral interferometry method and apparatus
US7239397B2 (en) * 2003-12-31 2007-07-03 Corning Incorporated Device for high-accuracy measurement of dimensional changes
JP4804058B2 (ja) * 2005-07-28 2011-10-26 キヤノン株式会社 干渉測定装置
US7576868B2 (en) 2007-06-08 2009-08-18 Zygo Corporation Cyclic error compensation in interferometry systems
JP5558768B2 (ja) * 2008-10-24 2014-07-23 キヤノン株式会社 測定装置、光源装置、干渉測定装置、露光装置、及びデバイス製造方法
JP5697323B2 (ja) * 2009-10-22 2015-04-08 キヤノン株式会社 ヘテロダイン干渉計測装置
JP5856184B2 (ja) * 2010-12-16 2016-02-09 ザイゴ コーポレーションＺｙｇｏ Ｃｏｒｐｏｒａｔｉｏｎ 干渉計エンコーダ・システムでのサイクリック・エラー補償
WO2012106246A2 (en) 2011-02-01 2012-08-09 Zygo Corporation Interferometric heterodyne optical encoder system
US8692999B1 (en) * 2011-06-23 2014-04-08 Exelis, Inc. Crosstalk cancellation for a simultaneous phase shifting interferometer
JP5793355B2 (ja) * 2011-06-24 2015-10-14 株式会社ミツトヨ 斜入射干渉計
CN102853771B (zh) * 2012-09-19 2015-07-29 哈尔滨工业大学 小型化高速超精密激光外差干涉测量方法及装置
CN102944176B (zh) * 2012-11-09 2015-06-17 清华大学 一种外差光栅干涉仪位移测量系统
CN103630077B (zh) * 2013-12-12 2016-05-11 哈尔滨工业大学 一种使用双频激光的两轴光栅位移测量系统
JP6664211B2 (ja) * 2015-12-22 2020-03-13 株式会社ミツトヨ エンコーダ
JP6947294B2 (ja) * 2018-03-28 2021-10-13 日本電気株式会社 測距装置及び制御方法
CN108592800B (zh) * 2018-05-02 2019-08-20 中国计量科学研究院 一种基于平面镜反射的激光外差干涉测量装置和方法
US11287322B2 (en) 2019-02-06 2022-03-29 California Institute Of Technology Compact hyperspectral mid-infrared spectrometer
EP3770546A1 (de) * 2019-07-25 2021-01-27 sentronics metrology GmbH Vorrichtung und verfahren zur messung von höhenprofilen an einem objekt
US11313722B2 (en) 2019-11-08 2022-04-26 California Institute Of Technology Infrared spectrometer having dielectric-polymer-based spectral filter
TWI721719B (zh) * 2019-12-19 2021-03-11 財團法人工業技術研究院 量測裝置
JP2021148634A (ja) * 2020-03-19 2021-09-27 株式会社ミツトヨ レーザ干渉装置
EP4070922A3 (de) 2021-04-06 2023-01-11 Canon Kabushiki Kaisha Robotersystem, steuerverfahren, bildverarbeitungsvorrichtung, bildverarbeitungsverfahren, verfahren zur herstellung von produkten, programm und aufzeichnungsmedium
US11409123B1 (en) * 2022-02-28 2022-08-09 Mloptic Corp. Active self-monitoring binocular calibration target

Family Cites Families (8)

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Publication number Priority date Publication date Assignee Title
US3790284A (en) * 1972-05-08 1974-02-05 Hewlett Packard Co Interferometer system for measuring straightness and roll
JPH01206283A (ja) * 1988-02-13 1989-08-18 Brother Ind Ltd 光ヘテロダイン測定装置
JPH029006A (ja) * 1988-06-28 1990-01-12 Matsushita Electric Ind Co Ltd 磁気記録装置
JP2514699B2 (ja) 1988-09-28 1996-07-10 日本電信電話株式会社 回折格子による位置ずれ検出方法および位置ずれ検出装置
JPH0674964B2 (ja) 1989-03-31 1994-09-21 通商産業省工業技術院長 ２周波偏光ヘテロダイン干渉測定における信号光ビート検出装置
US5204535A (en) * 1991-05-31 1993-04-20 Nikon Corporation Alignment device having irradiation and detection light correcting optical elements
JP3244769B2 (ja) * 1991-07-11 2002-01-07 キヤノン株式会社 測定方法及び測定装置
US5404220A (en) * 1991-10-03 1995-04-04 Canon Kabushiki Kaisha Measuring method and measuring apparatus for determining the relative displacement of a diffraction grating with respect to a plurality of beams

Also Published As

Publication number Publication date
EP0689030A2 (de) 1995-12-27
EP0689030B1 (de) 2001-12-05
JPH085314A (ja) 1996-01-12
DE69524298T2 (de) 2002-06-13
US5818588A (en) 1998-10-06
EP0689030A3 (de) 1996-07-03

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