EP1236810A1 - Procédé et appareil pour le traitement thermochimique partiel de pièces métalliques - Google Patents

Procédé et appareil pour le traitement thermochimique partiel de pièces métalliques Download PDF

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Publication number
EP1236810A1
EP1236810A1 EP02004013A EP02004013A EP1236810A1 EP 1236810 A1 EP1236810 A1 EP 1236810A1 EP 02004013 A EP02004013 A EP 02004013A EP 02004013 A EP02004013 A EP 02004013A EP 1236810 A1 EP1236810 A1 EP 1236810A1
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EP
European Patent Office
Prior art keywords
workpieces
molded body
plasma
treatment
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02004013A
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German (de)
English (en)
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EP1236810A8 (fr
Inventor
Udo Bardelmeier
Peter Dr. Minarski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vacuheat GmbH
Original Assignee
Vacuheat GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vacuheat GmbH filed Critical Vacuheat GmbH
Publication of EP1236810A1 publication Critical patent/EP1236810A1/fr
Publication of EP1236810A8 publication Critical patent/EP1236810A8/fr
Withdrawn legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/04—Treatment of selected surface areas, e.g. using masks

Definitions

  • the invention relates to a method for partial thermochemical Vacuum treatment of metallic workpieces according to the upper frame of claim 1 and a device therefor according to the preamble of claim 22.
  • thermochemical treatment of workpieces made of metals in one Gas atmosphere from decomposable carbon and / or nitrogen compounds, possibly in a mixture with other gases, e.g. Inert gases and / or Hydrogen is known.
  • DE 41 15 135 C1 describes a method for treating hollow bodies such as injection nozzles or of components with similarly difficult to access holes. In doing so the workpieces as bulk goods in the batch room without special arrangement or alignment placed. The result is a difficult to control Depth of penetration with a preference for the outer surfaces of the workpieces. If the outer surfaces are to be subsequently machined, so this is made difficult or impossible, because hardening after the Processing is ruled out due to the delay in hardness.
  • EP 0 818 555 A1 also deals with the carburizing of hollow bodies with blind holes, but the carburizing is preferred the outer surface of the hollow body takes place.
  • EP 0 695 813 A2 discloses the use of a carburizing agent Plasmas with a pulsating voltage between 200 and 2000 volts. Also however, the entire outer surface of the workpieces is always used carburized.
  • thermochemical surface treatment that the End of the workpiece with a cap that the said partial length against the influence of thermochemical surface treatment shields.
  • the largest part of the outer surface is the thermochemical Exposed to treatment.
  • thermochemical Exposed to treatment is also the case “Masking" the ends of individual workpieces. Injection parts for engines are not disclosed.
  • the invention is therefore based on the object of a method of the beginning Specify the type described with which several workpieces or batches of many workpieces partially, i.e. only at precisely specified inner surface areas, especially in defined cavities of workpieces, precisely specified and of workpiece too Workpiece at least largely identical and over many treatment cycles reproducible process parameters are exposed. So it's not just about making the workpieces of a batch even to be partially treated, but also the work piece or work pieces below Batches.
  • thermochemically can be treated. This happens with precisely specified and at least largely identical from workpiece to workpiece and Process parameters that can be reproduced over many treatment cycles. It is especially about not only the workpieces of a batch evenly and partially treated, but also the workpieces subsequent batches, e.g. in continuous or quasi-continuous Processes.
  • the essence of the invention is the outer surfaces of the workpieces not to be treated thermochemically, e.g. carburizing, nevertheless the thermochemical treatment of the inner surfaces, in whole or in part.
  • the invention is an inversion of the classic Procedure: It is no longer the largest part of the workpiece surface exposed to thermochemical gas treatment, with smaller ones Parts of the surface (s) covered against gas treatment or are isolated, but it is by the molded body according to the invention the entire outer workpiece surface, with one exception only of the inner surface areas to be treated, against the influence of gas protected. It is also not absolutely necessary that the Shaped body according to the invention the workpieces in complementary Shape without gaps and joints, but it is sufficient, e.g.
  • thermochemical gas treatment can not only a vacuum gas treatment used without plasma excitation at pressures up to 30,000 Pa be in which the molded body and possibly also the intermediate Sleeves also made from an electrically non-conductive material Ceramics can exist. Rather, it is in particular also possible Apply the method of plasma treatment, wherein the shaped body for this case preferably from an electrically conductive material, preferably made of graphite, so that the molded body as an electrode (Cathode) for plasma excitation. More details and advantages result from the detailed description.
  • thermochemical plasma treatment An embodiment of the subject of the invention and its mode of operation are subsequently based on Figures 1 to 6 in connection explained in more detail with a thermochemical plasma treatment.
  • FIG. 1 shows a sleeve-shaped workpiece 1 with an axis A-A, which has a cavity 2 in the form of a stepped bore from which the strongly rimmed inner cylindrical surface areas 3, 4 and 5 and the surface area 6, an annular end face, carburized should be, but not the other surface areas.
  • the highlighted surface areas 3, 4, 5 and 6 are in treatment exposed to a plasma in a carbon-containing atmosphere.
  • the workpiece 1 has a tubular extension 1a, the outside of which 1b must be protected against plasma bombardment. This happens through a sleeve 7 with a collar 7a, which the extension 1a with encloses the smallest possible play to prevent penetration of the plasma prevent.
  • the sleeve 7 can be made of a metallic material, but also consist of a non-metal that does not react with the workpiece 1 received.
  • the cavity 2 this point has a larger diameter
  • another sleeve 8 is with a collar 8a used, which has an annular gap with respect to the workpiece 9 leaves blank to compensate for tolerances and / or thermal expansion. It is important that no plasma can penetrate into a parting line 10.
  • the sleeve 8 can also be made of a metallic material, but also consist of a non-metal that does not react with the workpiece 1 received.
  • the workpiece 1 and the sleeves 7 and 8 form to a certain extent a rotationally symmetrical stack that described below Function. However, the rotational symmetry is not mandatory.
  • the stack described above is in a two-part molded body 11 used, which consists of a lower part 12 and an upper part 13, whose frames 12a and 13a are plasma-tight on a Z-shaped parting line 14 and reach over telescopically.
  • the lower part 12 has an opening 12b, in which the sleeve 7 - again plasma-tight - is inserted, and that Upper part 13 has an opening 13b, the edge of which the collar 8a of the sleeve 8 - again plasma-tight - overlaps.
  • the axes of the openings 12a and 13a are aligned. This supports the upper part 13, a kind Cover, on the stack from the workpiece 1 and the sleeves 7 and 8.
  • the clearly shown vertical play at the parting line 14 serves to tolerances and / or to compensate for thermal expansion.
  • the mold cavity 15 enclosing it cannot become plasma form.
  • the mold cavity 15 can tightly enclose each workpiece, however, it can also form free spaces around the workpiece, if only ensured is that between the openings 12a and 13a and the workpiece and / or the sleeves 7 and 8 no plasma can penetrate. Free rooms favor the insertion of workpieces with different Geometries.
  • the molded body 11 is preferably made of graphite or CFC, which the required properties with regard to service life, reusability, Temperature resistance, thermal expansion coefficient and has electrical conductivity.
  • the sleeves 7 and 8 are not mandatory required, but can be advantageous if the molded body 11 consists of graphite, which carburizes at unwanted points in the Workpiece could favor.
  • the interchangeable Sleeves 7 and / or 8 as an adapter for inserting workpieces with serve different geometries.
  • FIG. 2 now shows a top view of one end of such a shaped body 11 on a reduced scale, namely on the upper part 13 with a plurality of such openings 13b, but without workpieces, the Use in use corresponds to the number of openings 13b. That too here the mold cavity 15 can around each workpiece closed, but it can also around some or all workpieces be continuous around. Should such a molded body 11 only partially Workpieces are filled, it is sufficient to leave the otherwise free Close openings 12a and 13a by blind plugs.
  • Figures 3 and 4 show side views of a transport frame 16 with a batch 17 consisting of twelve moldings 11 in three floors.
  • the Transport frame 16 consists of a rectangular frame structure, whose individual frame elements coincide with the edges of the cuboid. A multitude of extends through the frame structure horizontal traverses 18 on which the shaped bodies 11 rest.
  • FIG. 5 shows a longitudinal section through a continuous system 19 Treatment of batches 17 according to Figures 3 and 4 in a highly schematic Presentation.
  • the continuous system 19 has a row arrangement - counted in the working direction - a total of five chambers 20, 21, 22, 23 and 24, which are separated by inner lock valves 25, 26, 27 and 28 are separated or separable.
  • the last chamber 24 is used Quenching chamber, at the same time as a discharge chamber.
  • the chamber 20 is a lock-in chamber and has a parking space for one Charge 17.
  • Chamber 21 is a heating chamber and has spaces for three batches 17 and three circulation fans 31.
  • the chamber 22 is one Carburizing chamber and has a space for a batch 17.
  • the Chamber 23 is a diffusion chamber and has spaces for two batches 17.
  • Chamber 24 is a cold high pressure quenching chamber and has a parking space for a batch 17, a circulation fan 32 and one Gas cooler 33.
  • the number of batches 17 in chambers 21, 22, 23 and 24 and the resulting corrugation times and chamber lengths are open a specific cycle time of 30 minutes, for example.
  • the heating process in chamber 21 is thus 90 minutes, and during this time, the batches move up every 30 minutes every 17 minutes.
  • the carburizing process in chamber 22 is thus a maximum of 30 minutes, can however within this time and after reaching the given Carburizing depth by interrupting the power supply for the Plasma generation can be stopped.
  • the diffusion process in the Chamber 23 is therefore 60 minutes, and during this time the Batches every 17 minutes every 30 minutes.
  • the quenching process in the Chamber 24 is therefore a maximum of 30 minutes, but experience has shown briefly ended.
  • the batches 17 are transported by a well-known walking beam system, but not for the sake of simplicity is shown.
  • the workpieces 1 remain in the Shaped bodies, so they do not have to be "unpacked” and reloaded. It has surprisingly been found that the encapsulation in the moldings also no negative influence on processes other than carburizing, especially on high pressure gas quenching. Much more the workpieces can be used even after complete quenching and for further after-treatments remain in the shaped bodies, for example in another plant for deep-freezing by gaseous Nitrogen of up to -150 ° C for the residual transformation of austenite and subsequent tempering.
  • FIG. 6 shows a detail from FIG. 5 on an enlarged scale and with additional details.
  • the carburizing chamber 22 is shown an array of heating rods 34 on either side of the transport path are arranged, and a stand 35, which rests on insulators 36.
  • the gas supply lines too for the different possible hydrocarbons like methane, Ethane, propane and acetylene and possibly inert gases such as nitrogen and argon and possibly a reducing gas such as hydrogen and mixtures of these gases are shown as little as the suction port of one Vacuum pump set.
  • Batches 17 were individually charged via chamber 20 and first in chamber 21 within 90 minutes using the heating elements 34 heated to a temperature of 960 ° C. After that the last of the batches 17 for carburizing at 960 ° C in the chamber 22 transported, and the power supply of this batch was 17 switched on for 20 minutes. The pulsating or clocked Voltage was - 700 volts.
  • the workpieces 1 After the subsequent freezing with gaseous nitrogen from to to - 150 ° C and the usual tempering was applied to the carburized areas the workpieces 1 measured a hardness HV of over 700, and on a micrograph showed a very uniform hardening depth of 0.7 to 0.8 mm determined. The distortion of the workpieces was within the specified Tolerances, and the workpieces 1 were absolutely free of cracks. The moldings 11 could be used as often as required without being distorted.
  • defined cavities 2 within a workpiece 1 are those that occur during the thermochemical Treatment in at least one place from the outside for the Furnace atmosphere are accessible, for example by at least one the openings 12b and / or 13b assigned to each workpiece.
  • the surface area 6 to be treated a circular ring-shaped end face, is assigned to the inner surface areas 3, 4 and 5, because this surface area 6 with the surface area 5, one Bore wall of the workpiece 11, is connected.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
EP02004013A 2001-02-28 2002-02-27 Procédé et appareil pour le traitement thermochimique partiel de pièces métalliques Withdrawn EP1236810A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10109565 2001-02-28
DE10109565A DE10109565B4 (de) 2001-02-28 2001-02-28 Verfahren und Vorrichtung zur partiellen thermochemischen Vakuumbehandlung von metallischen Werkstücken

Publications (2)

Publication Number Publication Date
EP1236810A1 true EP1236810A1 (fr) 2002-09-04
EP1236810A8 EP1236810A8 (fr) 2003-01-02

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US (1) US6776854B2 (fr)
EP (1) EP1236810A1 (fr)
DE (1) DE10109565B4 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10328293A1 (de) * 2003-06-23 2005-01-27 Volkswagen Ag Verfahren zum Beschichten eines Bauteiles und beschichtetes Bauteil
WO2009092729A3 (fr) * 2008-01-25 2009-10-29 Novartis Ag Appareil, support et procédé pour le traitement au plasma de moules
WO2011029565A1 (fr) * 2009-09-10 2011-03-17 Ald Vacuum Technologies Gmbh Procédé et dispositif de durcissement de pièces d'usinage ainsi que pièces d'usinage durcies obtenues par ce procédé
CN109097530A (zh) * 2018-08-20 2018-12-28 益发施迈茨工业炉（上海）有限公司 抽真空深冷回火炉及其深冷回火处理方法
US10196730B2 (en) 2009-09-10 2019-02-05 Ald Vacuum Technologies Gmbh Method and device for hardening workpieces, and workpieces hardened according to the method
CN111360199A (zh) * 2020-04-08 2020-07-03 安徽羿维表面工程技术有限公司 合金铸造侧导板合金成分
CN112899612A (zh) * 2021-01-20 2021-06-04 重庆齿轮箱有限责任公司 一种齿轮渗碳淬火工艺

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FR2863191B1 (fr) * 2003-12-04 2007-04-20 Snecma Moteurs Masque de protection pour le traitement de surface d'aubes de turbomachines
DE102009004542B4 (de) 2008-12-11 2018-09-06 Bayerische Motoren Werke Aktiengesellschaft Verfahren zur Herstellung eines Kurbelgehäuses eines Verbrennungsmotors
DE102009016138A1 (de) * 2009-04-03 2010-10-14 Ipsen International Gmbh Verfahren und Computer-Programm zur Steuerung der Wärmebehandlung von metallischen Werkstücken
CA2771090C (fr) 2009-08-07 2017-07-11 Swagelok Company Carburation a basse temperature sous vide partiel
DE102010030145A1 (de) * 2010-06-16 2011-12-22 Zf Friedrichshafen Ag Verfahren zur Verzugsreduzierung einsatzgehärteter oder carbonitrierter Bauteile
US9617632B2 (en) 2012-01-20 2017-04-11 Swagelok Company Concurrent flow of activating gas in low temperature carburization
CN104769148B (zh) * 2012-11-07 2016-11-23 阿海珐核能公司 用于在遮掩部分的同时热化学处理部件的方法及相应掩模
RU2532777C1 (ru) * 2013-04-19 2014-11-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский государственный технический университет имени Н.Э. Баумана" (МГТУ им. Н.Э. Баумана) Способ комбинированной химико-термической обработки деталей машин из теплостойких сталей
CN109913798B (zh) * 2017-12-13 2022-12-23 维达力实业(深圳)有限公司 表面硬化的石墨模具及其表面硬化的方法
CN111621628B (zh) * 2020-06-10 2021-03-30 燕山大学 马氏体钢深冷高压旋扭模具及方法

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DE2523257A1 (de) * 1975-05-26 1976-12-09 Siemens Ag Verfahren zur gleichzeitigen beschichtung der innenflaechen mehrerer rohre mit tantal
DE2851983A1 (de) * 1978-12-01 1980-06-04 Degussa Verfahren zum aufkohlen von hohlkoerpern, insbesondere von duesen
US6039810A (en) * 1998-11-13 2000-03-21 General Electric Company High temperature vapor coating container
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EP1076111A2 (fr) * 1999-08-11 2001-02-14 General Electric Company Dispositif et procédé pour revêtir sélectivement les surfaces internes et externes d'une ailette

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US3540878A (en) * 1967-12-14 1970-11-17 Gen Electric Metallic surface treatment material
DE2523257A1 (de) * 1975-05-26 1976-12-09 Siemens Ag Verfahren zur gleichzeitigen beschichtung der innenflaechen mehrerer rohre mit tantal
DE2851983A1 (de) * 1978-12-01 1980-06-04 Degussa Verfahren zum aufkohlen von hohlkoerpern, insbesondere von duesen
US6129856A (en) * 1997-06-23 2000-10-10 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Process for surface-finishing inner surfaces of hollow bodies and apparatus for carrying out the process
US6039810A (en) * 1998-11-13 2000-03-21 General Electric Company High temperature vapor coating container
EP1076111A2 (fr) * 1999-08-11 2001-02-14 General Electric Company Dispositif et procédé pour revêtir sélectivement les surfaces internes et externes d'une ailette

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10328293A1 (de) * 2003-06-23 2005-01-27 Volkswagen Ag Verfahren zum Beschichten eines Bauteiles und beschichtetes Bauteil
DE10328293B4 (de) * 2003-06-23 2015-05-13 Volkswagen Ag Verfahren zur Herstellung eines als Führungsgelenk ausgeführten Bauteils und ein nach diesem Verfahren hergestelltes Führungsgelenk
WO2009092729A3 (fr) * 2008-01-25 2009-10-29 Novartis Ag Appareil, support et procédé pour le traitement au plasma de moules
WO2011029565A1 (fr) * 2009-09-10 2011-03-17 Ald Vacuum Technologies Gmbh Procédé et dispositif de durcissement de pièces d'usinage ainsi que pièces d'usinage durcies obtenues par ce procédé
CN102625859A (zh) * 2009-09-10 2012-08-01 Ald真空技术有限公司 用于对工件进行淬火的方法和装置以及根据该方法被淬火的工件
CN102625859B (zh) * 2009-09-10 2015-11-25 Ald真空技术有限公司 用于对工件进行硬化的方法和装置以及根据该方法被硬化的工件
US9518318B2 (en) 2009-09-10 2016-12-13 Ald Vacuum Technologies Gmbh Method and device for hardening work pieces and workpieces hardened according to said method
US10196730B2 (en) 2009-09-10 2019-02-05 Ald Vacuum Technologies Gmbh Method and device for hardening workpieces, and workpieces hardened according to the method
CN109097530A (zh) * 2018-08-20 2018-12-28 益发施迈茨工业炉（上海）有限公司 抽真空深冷回火炉及其深冷回火处理方法
CN109097530B (zh) * 2018-08-20 2024-01-30 益发施迈茨工业炉（上海）有限公司 抽真空深冷回火炉及其深冷回火处理方法
CN111360199A (zh) * 2020-04-08 2020-07-03 安徽羿维表面工程技术有限公司 合金铸造侧导板合金成分
CN112899612A (zh) * 2021-01-20 2021-06-04 重庆齿轮箱有限责任公司 一种齿轮渗碳淬火工艺

Also Published As

Publication number Publication date
DE10109565A1 (de) 2002-09-12
US6776854B2 (en) 2004-08-17
EP1236810A8 (fr) 2003-01-02
US20030047241A1 (en) 2003-03-13
DE10109565B4 (de) 2005-10-20

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