EP2331454A4 - METHOD FOR MANUFACTURING MICROFLUIDIC DEVICE CHIP AND THEREFORE FORMED THEREBY - Google Patents

METHOD FOR MANUFACTURING MICROFLUIDIC DEVICE CHIP AND THEREFORE FORMED THEREBY

Info

Publication number
EP2331454A4
EP2331454A4 EP09747424.1A EP09747424A EP2331454A4 EP 2331454 A4 EP2331454 A4 EP 2331454A4 EP 09747424 A EP09747424 A EP 09747424A EP 2331454 A4 EP2331454 A4 EP 2331454A4
Authority
EP
European Patent Office
Prior art keywords
microfluidic device
device chip
manufacturing microfluidic
manufacturing
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09747424.1A
Other languages
German (de)
French (fr)
Other versions
EP2331454A1 (en
Inventor
Douglas Ray Sparks
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Integrated Sensing Systems Inc
Original Assignee
Integrated Sensing Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Integrated Sensing Systems Inc filed Critical Integrated Sensing Systems Inc
Publication of EP2331454A1 publication Critical patent/EP2331454A1/en
Publication of EP2331454A4 publication Critical patent/EP2331454A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78Direct mass flowmeters
    • G01F1/80Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84Coriolis or gyroscopic mass flowmeters
    • G01F1/8409Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/844Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
    • G01F1/8445Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters micromachined flowmeters
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/02Sensors
    • B81B2201/0214Biosensors; Chemical sensors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/02Sensors
    • B81B2201/0278Temperature sensors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/05Microfluidics
    • B81B2201/058Microfluidics not provided for in B81B2201/051 - B81B2201/054
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/0198Manufacture or treatment batch processes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/206Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/218Means to regulate or vary operation of device
    • Y10T137/2191By non-fluid energy field affecting input [e.g., transducer]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/206Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/2224Structure of body of device

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Dispersion Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
EP09747424.1A 2008-05-13 2009-05-13 METHOD FOR MANUFACTURING MICROFLUIDIC DEVICE CHIP AND THEREFORE FORMED THEREBY Withdrawn EP2331454A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12730308P 2008-05-13 2008-05-13
US12/464,426 US8021961B2 (en) 2008-05-13 2009-05-12 Process of fabricating microfluidic device chips and chips formed thereby
PCT/US2009/043720 WO2009140340A1 (en) 2008-05-13 2009-05-13 Process of fabricating microfluidic device chips and chips formed thereby

Publications (2)

Publication Number Publication Date
EP2331454A1 EP2331454A1 (en) 2011-06-15
EP2331454A4 true EP2331454A4 (en) 2014-11-26

Family

ID=41315348

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09747424.1A Withdrawn EP2331454A4 (en) 2008-05-13 2009-05-13 METHOD FOR MANUFACTURING MICROFLUIDIC DEVICE CHIP AND THEREFORE FORMED THEREBY

Country Status (3)

Country Link
US (1) US8021961B2 (en)
EP (1) EP2331454A4 (en)
WO (1) WO2009140340A1 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2719460B1 (en) * 2012-10-12 2016-12-14 Sony DADC Austria AG Microfluidic devices
EP2934754B1 (en) * 2012-12-21 2017-08-09 Endress+Hauser Flowtec AG Measuring system having a carrier element and a sensor
GB2515571A (en) 2013-06-28 2014-12-31 Ibm Fabrication of microfluidic chips having electrodes level with microchannel walls
JP2018507390A (en) * 2014-12-11 2018-03-15 ザ テクノロジー パートナーシップ パブリック リミテッド カンパニー Acoustic sensor
DE102016110905B4 (en) * 2016-06-14 2026-03-26 Endress+Hauser Flowtec Ag Measuring device for measuring a quantity of a flowing fluid
EP3139159A1 (en) 2016-08-23 2017-03-08 Sensirion AG Sensor assembly
EP3582894A4 (en) 2017-04-21 2020-03-04 Hewlett-Packard Development Company, L.P. MICROFLUIDIC CHIP
EP3582892A4 (en) 2017-04-21 2020-03-04 Hewlett-Packard Development Company, L.P. COPLANAR MICROFLUIDIC HANDLING
EP3583416B1 (en) 2017-04-21 2024-05-29 Hewlett-Packard Development Company, L.P. Chip to chip fluidic interconnect
USD849265S1 (en) * 2017-04-21 2019-05-21 Precision Nanosystems Inc Microfluidic chip
US11364496B2 (en) 2017-04-21 2022-06-21 Hewlett-Packard Development Company, L.P. Coplanar fluidic interconnect
CN108816301B (en) * 2018-08-09 2024-06-11 清华大学 Microfluidic chip and packaging method thereof, and packaging accessories for microfluidic chip packaging
DE102019102836B4 (en) 2019-02-05 2023-02-02 Infineon Technologies Ag METHODS OF PANEL BONDING ACTIONS AND ELECTRONIC DEVICES WITH CAVIES
JP2022514522A (en) * 2019-04-29 2022-02-14 ヒューレット-パッカード デベロップメント カンパニー エル.ピー. Corrosion resistant micro electromechanical fluid discharge device
EP3937512A1 (en) * 2020-07-10 2022-01-12 Infineon Technologies AG Method and structure for sensors on glass
US12296333B2 (en) * 2021-02-22 2025-05-13 Illumina, Inc. Hybrid glass plastic flow cell and fabrication methods

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020185557A1 (en) * 2001-06-06 2002-12-12 Integrates Sensing Systems Micromachined lysing device and method for performing cell lysis
EP1443016A2 (en) * 2003-01-29 2004-08-04 Hewlett-Packard Development Company, L.P. Micro-Fabricated device and method of making same
DE102007050865A1 (en) * 2006-10-27 2008-05-08 Hitachi, Ltd. Functional component e.g. high frequency sensor, for use in micro electromechanical system, has reaction product layer produced on boundary layer when metal layer and substrate are connected together by anodic connection

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6477901B1 (en) * 1999-12-21 2002-11-12 Integrated Sensing Systems, Inc. Micromachined fluidic apparatus
KR100370398B1 (en) * 2000-06-22 2003-01-30 삼성전자 주식회사 Method for surface mountable chip scale packaging of electronic and MEMS devices
AUPR245601A0 (en) * 2001-01-10 2001-02-01 Silverbrook Research Pty Ltd An apparatus (WSM09)
US6647778B2 (en) * 2001-06-20 2003-11-18 Integrated Sensing Systems Integrated microtube sensing device
US6838056B2 (en) * 2002-07-08 2005-01-04 Innovative Micro Technology Method and apparatus for sorting biological cells with a MEMS device
US7094345B2 (en) * 2002-09-09 2006-08-22 Cytonome, Inc. Implementation of microfluidic components, including molecular fractionation devices, in a microfluidic system
US7381628B2 (en) * 2004-08-20 2008-06-03 Integrated Sensing Systems, Inc. Process of making a microtube and microfluidic devices formed therewith
US7351603B2 (en) * 2004-08-20 2008-04-01 Integrated Sensing Systems, Inc. Process of making a microtube and microfluidic devices formed therewith
US7568399B2 (en) * 2006-01-05 2009-08-04 Integrated Sensing Systems, Inc. Microfluidic device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020185557A1 (en) * 2001-06-06 2002-12-12 Integrates Sensing Systems Micromachined lysing device and method for performing cell lysis
EP1443016A2 (en) * 2003-01-29 2004-08-04 Hewlett-Packard Development Company, L.P. Micro-Fabricated device and method of making same
DE102007050865A1 (en) * 2006-10-27 2008-05-08 Hitachi, Ltd. Functional component e.g. high frequency sensor, for use in micro electromechanical system, has reaction product layer produced on boundary layer when metal layer and substrate are connected together by anodic connection

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
DANICK BRIAND ET AL: "Integration of robust fluidic interconnects using metal to glass anodic bonding; Integration of robust fluidic interconnects using metal to glass anodic bonding", JOURNAL OF MICROMECHANICS & MICROENGINEERING, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, vol. 15, no. 9, 1 September 2005 (2005-09-01), pages 1657 - 1663, XP020091663, ISSN: 0960-1317, DOI: 10.1088/0960-1317/15/9/007 *
See also references of WO2009140340A1 *

Also Published As

Publication number Publication date
US8021961B2 (en) 2011-09-20
EP2331454A1 (en) 2011-06-15
US20090283844A1 (en) 2009-11-19
WO2009140340A1 (en) 2009-11-19

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