EP3053703A4 - Polishing device and polishing method - Google Patents

Polishing device and polishing method Download PDF

Info

Publication number
EP3053703A4
EP3053703A4 EP14851309.6A EP14851309A EP3053703A4 EP 3053703 A4 EP3053703 A4 EP 3053703A4 EP 14851309 A EP14851309 A EP 14851309A EP 3053703 A4 EP3053703 A4 EP 3053703A4
Authority
EP
European Patent Office
Prior art keywords
polishing
polishing device
polishing method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP14851309.6A
Other languages
German (de)
French (fr)
Other versions
EP3053703A1 (en
Inventor
Hitoshi Morinaga
Hiroshi Asano
Shingo OTSUKI
Kazusei Tamai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujimi Inc
Original Assignee
Fujimi Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujimi Inc filed Critical Fujimi Inc
Publication of EP3053703A1 publication Critical patent/EP3053703A1/en
Publication of EP3053703A4 publication Critical patent/EP3053703A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/08—Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding non-circular cross-sections, e.g. shafts of elliptical or polygonal cross-section
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/02—Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding grooves, e.g. on shafts, in casings, in tubes, homokinetic joint elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/002—Grinding heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/02—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B24B9/107—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass for glass plates while they are turning

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
EP14851309.6A 2013-10-04 2014-10-02 Polishing device and polishing method Withdrawn EP3053703A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013209602 2013-10-04
PCT/JP2014/076360 WO2015050186A1 (en) 2013-10-04 2014-10-02 Polishing device and polishing method

Publications (2)

Publication Number Publication Date
EP3053703A1 EP3053703A1 (en) 2016-08-10
EP3053703A4 true EP3053703A4 (en) 2017-07-26

Family

ID=52778773

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14851309.6A Withdrawn EP3053703A4 (en) 2013-10-04 2014-10-02 Polishing device and polishing method

Country Status (7)

Country Link
US (1) US20160236314A1 (en)
EP (1) EP3053703A4 (en)
JP (2) JPWO2015050186A1 (en)
KR (1) KR20160067106A (en)
CN (1) CN105658377A (en)
TW (1) TW201529224A (en)
WO (1) WO2015050186A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015174180A (en) * 2014-03-14 2015-10-05 株式会社東京精密 ultrasonic chamfering machine
JP6398902B2 (en) * 2014-08-19 2018-10-03 信越化学工業株式会社 Rectangular substrate for imprint lithography and method for manufacturing the same
JP6568006B2 (en) * 2016-04-08 2019-08-28 株式会社荏原製作所 Polishing apparatus and polishing method
CN108436650A (en) * 2018-03-08 2018-08-24 北京铂阳顶荣光伏科技有限公司 Edging method and device
CN113039040A (en) * 2018-10-04 2021-06-25 康宁公司 System and method for forming a multi-segment display
US11799150B2 (en) 2020-07-17 2023-10-24 Toyota Motor Engineering & Manufacturing North America, Inc. Cooling structure for hybrid-electric vehicle battery cell assemblies
CN115365928A (en) * 2022-08-23 2022-11-22 北京航空航天大学宁波创新研究院 Grinding method and grinding machine
CN117773697B (en) * 2024-02-23 2024-05-14 山东旭辉玻璃科技有限公司 Cutting corner polishing equipment for agricultural machinery glass

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4667443A (en) * 1984-09-06 1987-05-26 Kaoru Sakurai End face grinding apparatus
EP2537634A1 (en) * 2011-06-21 2012-12-26 WENDT GmbH Method for grinding the circulating edge surface of glazing

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1082418A (en) * 1966-07-22 1967-09-06 Toolmasters Ltd Improvements relating to grinding wheels
DE2646483A1 (en) * 1975-10-15 1977-04-21 Monsanto Co PROFILING ROLLER
JPS5388291A (en) * 1977-01-12 1978-08-03 Fukuyama Tetsukoushiyo Kk Machine for automatically pol shuing all circumference of plate glass
JPS591548U (en) * 1982-06-29 1984-01-07 小出　▲けん▼ Grinding wheel device for copying polishing
JPS60143646U (en) * 1984-03-02 1985-09-24 豊田工機株式会社 grinding equipment
JPS6165763A (en) * 1984-09-06 1986-04-04 Nippon Sheet Glass Co Ltd Grinding device for end face of a plate
JPH01170558U (en) * 1988-05-24 1989-12-01
US5083401A (en) * 1988-08-08 1992-01-28 Mitsubishi Denki Kabushiki Kaisha Method of polishing
JPH04360772A (en) * 1991-06-05 1992-12-14 Toto Ltd Plate chamfering grinding-wheel and plate chamfering device
JP2559650B2 (en) * 1991-11-27 1996-12-04 信越半導体株式会社 Wafer chamfer polishing device
KR100277320B1 (en) * 1992-06-03 2001-01-15 가나이 쓰도무 Rolling mill and rolling method with on-line roll grinding device and grinding wheel
JP3010572B2 (en) * 1994-09-29 2000-02-21 株式会社東京精密 Wafer edge processing equipment
JPH1170471A (en) * 1997-07-03 1999-03-16 Asahi Glass Co Ltd Glass chamfering method and apparatus
JPH11188590A (en) 1997-12-22 1999-07-13 Speedfam Co Ltd Edge polishing device
JP2000176805A (en) * 1998-12-17 2000-06-27 Mitsubishi Materials Silicon Corp Chamfering device for semiconductor-wafer
DE19914174A1 (en) * 1999-03-29 2000-10-12 Wernicke & Co Gmbh Method and device for shaping the peripheral edge of spectacle lenses
JP2001038589A (en) * 1999-08-03 2001-02-13 Speedfam Co Ltd Polishing device for outer peripheral part of work
JP2001062686A (en) * 1999-08-25 2001-03-13 Speedfam Co Ltd Index type edge polisher
JP2001205549A (en) 2000-01-25 2001-07-31 Speedfam Co Ltd One side polishing method and device for substrate edge portion
US6962521B2 (en) * 2000-07-10 2005-11-08 Shin-Etsu Handotai Co., Ltd. Edge polished wafer, polishing cloth for edge polishing, and apparatus and method for edge polishing
TWI352645B (en) * 2004-05-28 2011-11-21 Ebara Corp Apparatus for inspecting and polishing substrate r
JP2007088143A (en) * 2005-09-21 2007-04-05 Elpida Memory Inc Edge grinding device
ES2279719B1 (en) * 2006-01-26 2008-07-16 Timac Agro España, S.A. NEW METABOLIC AND NUTRITIONAL ACTIVATOR FOR PLANTS.
CN101284365A (en) * 2007-04-13 2008-10-15 奇美电子股份有限公司 Substrate rotating device, edge grinding device and edge grinding method
US20080293329A1 (en) * 2007-05-21 2008-11-27 Applied Materials, Inc. Methods and apparatus for identifying a substrate edge profile and adjusting the processing of the substrate according to the identified edge profile
WO2009116945A1 (en) * 2008-03-20 2009-09-24 Telefonaktiebolaget Lm Ericsson (Publ) Method and apparatus for communication of data packets between local networks
US8585467B2 (en) * 2008-10-31 2013-11-19 Corning Incorporated Linear pressure feed grinding with voice coil
JP2010182813A (en) * 2009-02-04 2010-08-19 Noritake Super Abrasive Co Ltd Cmp pad conditioner
CN201380419Y (en) * 2009-03-02 2010-01-13 湖北新火炬科技股份有限公司 Diamond roller grinding wheel for grinding inner roller way of hub assembly
JP5352331B2 (en) * 2009-04-15 2013-11-27 ダイトエレクトロン株式会社 Wafer chamfering method
JPWO2010131610A1 (en) * 2009-05-15 2012-11-01 旭硝子株式会社 Processing position setting method for grinding wheel for glass end face grinding
CN101612717A (en) * 2009-07-17 2009-12-30 李留江 Digital-controlled ball bear inner ring grooved railway multifunctional grinder
US8892238B2 (en) * 2009-10-06 2014-11-18 Edward T. Sweet Edge break details and processing
JP5519256B2 (en) * 2009-12-03 2014-06-11 株式会社荏原製作所 Method and apparatus for polishing a substrate whose back surface is ground
US8747188B2 (en) * 2011-02-24 2014-06-10 Apple Inc. Smart automation of robotic surface finishing
US8986072B2 (en) * 2011-05-26 2015-03-24 Corning Incorporated Methods of finishing an edge of a glass sheet
JP5898984B2 (en) * 2012-02-03 2016-04-06 中村留精密工業株式会社 Hard brittle plate side processing equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4667443A (en) * 1984-09-06 1987-05-26 Kaoru Sakurai End face grinding apparatus
EP2537634A1 (en) * 2011-06-21 2012-12-26 WENDT GmbH Method for grinding the circulating edge surface of glazing

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2015050186A1 *

Also Published As

Publication number Publication date
JP2018001406A (en) 2018-01-11
WO2015050186A1 (en) 2015-04-09
JPWO2015050186A1 (en) 2017-03-09
KR20160067106A (en) 2016-06-13
TW201529224A (en) 2015-08-01
US20160236314A1 (en) 2016-08-18
EP3053703A1 (en) 2016-08-10
CN105658377A (en) 2016-06-08

Similar Documents

Publication Publication Date Title
EP3017912A4 (en) Polishing device and polishing method
EP3062206A4 (en) Operation device and operation method
EP3070680A4 (en) Image-generating device and method
EP2997669A4 (en) Communication method and device
SG10201405189QA (en) Polishing method and polishing apparatus
EP3043724A4 (en) Hand held dermaplaning device and dermaplaning process
EP3085516A4 (en) Shaping device and shaping method
SG10201407062PA (en) Polishing apparatus and polishing method
EP3048709A4 (en) Coil-end-molding device and method
EP3059710A4 (en) Fitting support device and method
EP2974829A4 (en) Polishing pad and polishing method
EP3064284A4 (en) Sieving device and sieving method
EP3013190A4 (en) Pot device and method related thereto
EP3067172A4 (en) Conveyance device and conveyance method
EP3033911A4 (en) Method and apparatus
EP3051581A4 (en) Purging device and purging method
EP3007466A4 (en) Acoustic device and use method thereof
EP3053703A4 (en) Polishing device and polishing method
EP3033613A4 (en) Apparatus and method
EP3047865A4 (en) Display device and display method
EP3005874A4 (en) Food-dough cutting method and device
EP3020322A4 (en) Imaging device and imaging device operation method
EP3018469A4 (en) State determination method and state determination device
EP3030097A4 (en) Shrimp-processing apparatus and methods
EP3064609A4 (en) Deposition device and deposition method

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20160404

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

DAX Request for extension of the european patent (deleted)
A4 Supplementary search report drawn up and despatched

Effective date: 20170623

RIC1 Information provided on ipc code assigned before grant

Ipc: B24B 9/10 20060101ALI20170619BHEP

Ipc: B24B 9/00 20060101ALI20170619BHEP

Ipc: B24B 19/08 20060101AFI20170619BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Effective date: 20190829