EP4310051A4 - Method for producing silicon nitride powder for producing a substrate and silicon nitride powder produced thereby - Google Patents

Method for producing silicon nitride powder for producing a substrate and silicon nitride powder produced thereby

Info

Publication number
EP4310051A4
EP4310051A4 EP22771812.9A EP22771812A EP4310051A4 EP 4310051 A4 EP4310051 A4 EP 4310051A4 EP 22771812 A EP22771812 A EP 22771812A EP 4310051 A4 EP4310051 A4 EP 4310051A4
Authority
EP
European Patent Office
Prior art keywords
silicon nitride
producing
nitride powder
substrate
powder produced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP22771812.9A
Other languages
German (de)
French (fr)
Other versions
EP4310051A1 (en
Inventor
Kyu Hwan Park
Hun Cheong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Amotech Co Ltd
Original Assignee
Amotech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Amotech Co Ltd filed Critical Amotech Co Ltd
Publication of EP4310051A1 publication Critical patent/EP4310051A1/en
Publication of EP4310051A4 publication Critical patent/EP4310051A4/en
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0682—Preparation by direct nitridation of silicon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
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    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0687—After-treatment, e.g. grinding, purification
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    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
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    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
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  • Inorganic Chemistry (AREA)
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  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Products (AREA)
EP22771812.9A 2021-03-19 2022-03-18 Method for producing silicon nitride powder for producing a substrate and silicon nitride powder produced thereby Pending EP4310051A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020210035999A KR102704177B1 (en) 2021-03-19 2021-03-19 Method for manufacturing silicon nitride powder for manufacturing substrate and silicon nitride powder therefrom
PCT/KR2022/003813 WO2022197146A1 (en) 2021-03-19 2022-03-18 Method for preparing silicon nitride powder for manufacturing substrate and silicon nitride powder prepared thereby

Publications (2)

Publication Number Publication Date
EP4310051A1 EP4310051A1 (en) 2024-01-24
EP4310051A4 true EP4310051A4 (en) 2025-10-08

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP22771812.9A Pending EP4310051A4 (en) 2021-03-19 2022-03-18 Method for producing silicon nitride powder for producing a substrate and silicon nitride powder produced thereby

Country Status (6)

Country Link
US (1) US20240140798A1 (en)
EP (1) EP4310051A4 (en)
JP (1) JP7706633B2 (en)
KR (1) KR102704177B1 (en)
CN (1) CN117043101A (en)
WO (1) WO2022197146A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102704180B1 (en) * 2021-06-29 2024-09-06 주식회사 아모센스 Electrostatic chuck, electrostatic chuck heater and semiconductor holding device comprising the same
KR102995852B1 (en) * 2024-03-18 2026-07-27 국립금오공과대학교 산학협력단 Preparation of high-quality and highly crystalline silicon nitride powder from Si scrap

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1160217A (en) * 1997-08-13 1999-03-02 Shin Etsu Chem Co Ltd Method for producing silicon nitride powder
JP2011195395A (en) * 2010-03-19 2011-10-06 Kubota Corp Method for producing silicon nitride-based ceramic
US20160362592A1 (en) * 2014-03-31 2016-12-15 Japan Fine Ceramics Co., Ltd Method for producing silicon nitride substrate

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5238500A (en) * 1975-09-22 1977-03-25 Toshiba Corp Production of alpha-silicon nitride powder
US6007789A (en) * 1992-11-03 1999-12-28 Eaton Corporation Method of nitriding silicon
KR0177139B1 (en) 1995-11-07 1999-05-15 이진주 Process for the preparation of silicone powder from wastesilicone
DE19612926C2 (en) * 1996-04-01 1999-09-30 Fraunhofer Ges Forschung Silicon nitride composite powder for thermal coating technologies and processes for their production
JPH09301710A (en) * 1996-05-13 1997-11-25 Shin Etsu Chem Co Ltd Low oxygen silicon granules, method for producing the same, and method for producing silicon nitride
CN1245352C (en) * 2004-05-10 2006-03-15 三河燕郊新宇高新技术陶瓷材料有限公司 Production process for granulation combustion synthesis of silicon nitride
KR20110005084A (en) * 2009-07-09 2011-01-17 아주하이텍(주) Substrate storage container, and a substrate inspection device having the same
KR101140352B1 (en) * 2009-11-09 2012-05-03 한국기계연구원 Manufacturing method of pre-sintered porous Si granules for porous reaction-bonded silicon nitride, pre-sintered porous granules therefrom
US8673795B2 (en) * 2011-12-16 2014-03-18 Ceradyne, Inc. Si3N4 insulator material for corona discharge igniter systems
CN106132908B (en) * 2014-03-31 2017-08-25 日本精细陶瓷有限公司 Manufacturing method of silicon nitride substrate
US10399854B2 (en) * 2014-06-16 2019-09-03 Ube Industries, Ltd. Silicon nitride powder, silicon nitride sintered body and circuit substrate, and production method for said silicon nitride powder
KR20170060970A (en) * 2015-11-25 2017-06-02 국방과학연구소 Porous silicon nitride sintered body and method for manufacturing the same
CN105503198B (en) * 2015-11-30 2017-10-17 衡阳凯新特种材料科技有限公司 Silicon nitride material and preparation method thereof
KR20170135105A (en) * 2016-05-30 2017-12-08 한국세라믹기술원 Manufacturing method of sheet-type silicon nitride subststrate
KR20180081642A (en) * 2017-01-06 2018-07-17 국방과학연구소 Method for manufacturing the reaction bonding silicon nitride
JP6822362B2 (en) * 2017-04-26 2021-01-27 日立金属株式会社 Manufacturing method of silicon nitride substrate and silicon nitride substrate
KR102094454B1 (en) * 2017-09-20 2020-04-23 주식회사 엘지화학 Tape casting slurry composition for manufacturing silicon nitride sintered body
KR101972234B1 (en) 2017-10-25 2019-04-24 금오공과대학교 산학협력단 Manufacturing method of sintered reaction bonded silicon nitride ceramics from silicon scrap and sintered reaction bonded silicon nitride ceramics using the same
CN111727168A (en) * 2018-02-28 2020-09-29 株式会社德山 Manufacturing method of silicon nitride powder

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1160217A (en) * 1997-08-13 1999-03-02 Shin Etsu Chem Co Ltd Method for producing silicon nitride powder
JP2011195395A (en) * 2010-03-19 2011-10-06 Kubota Corp Method for producing silicon nitride-based ceramic
US20160362592A1 (en) * 2014-03-31 2016-12-15 Japan Fine Ceramics Co., Ltd Method for producing silicon nitride substrate

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2022197146A1 *

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