EP4632317A4 - Displacement measuring device and manufacturing method therefor - Google Patents
Displacement measuring device and manufacturing method thereforInfo
- Publication number
- EP4632317A4 EP4632317A4 EP23899274.7A EP23899274A EP4632317A4 EP 4632317 A4 EP4632317 A4 EP 4632317A4 EP 23899274 A EP23899274 A EP 23899274A EP 4632317 A4 EP4632317 A4 EP 4632317A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- manufacturing
- measuring device
- method therefor
- displacement measuring
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211545084.8A CN115560682B (en) | 2022-12-05 | 2022-12-05 | Displacement measuring device and manufacturing method thereof |
| PCT/CN2023/086034 WO2024119680A1 (en) | 2022-12-05 | 2023-04-03 | Displacement measurement device and manufacturing method therefor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP4632317A1 EP4632317A1 (en) | 2025-10-15 |
| EP4632317A4 true EP4632317A4 (en) | 2026-02-11 |
Family
ID=84770650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP23899274.7A Pending EP4632317A4 (en) | 2022-12-05 | 2023-04-03 | Displacement measuring device and manufacturing method therefor |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP4632317A4 (en) |
| CN (1) | CN115560682B (en) |
| WO (1) | WO2024119680A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115560682B (en) * | 2022-12-05 | 2023-02-03 | 上海拜安传感技术有限公司 | Displacement measuring device and manufacturing method thereof |
| CN115854889B (en) * | 2023-03-08 | 2023-06-06 | 上海拜安传感技术有限公司 | Contact type displacement measuring device |
| CN117928416B (en) * | 2024-03-22 | 2024-06-07 | 上海拜安传感技术有限公司 | MEMS optical fiber surface type strain gauge |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3101385A1 (en) * | 2015-06-05 | 2016-12-07 | Carl Zeiss Microscopy GmbH | Device and method for detecting surface topographies |
| EP3696494B1 (en) * | 2014-12-31 | 2022-07-06 | Rememdia LC | Position sensor and corresponding sensing method |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0179935B1 (en) * | 1984-10-31 | 1988-05-18 | Ibm Deutschland Gmbh | Interferometric thickness analyzer and measuring method |
| JPH06294608A (en) * | 1993-04-07 | 1994-10-21 | Res Dev Corp Of Japan | Fine linear reflection type micro displacement detector |
| JPH0973020A (en) * | 1995-09-05 | 1997-03-18 | Toshiba Corp | Optical multiplexer / demultiplexer |
| US6943950B2 (en) * | 2000-08-07 | 2005-09-13 | Texas Instruments Incorporated | Two-dimensional blazed MEMS grating |
| US7116430B2 (en) * | 2002-03-29 | 2006-10-03 | Georgia Technology Research Corporation | Highly-sensitive displacement-measuring optical device |
| JP5049108B2 (en) * | 2007-11-29 | 2012-10-17 | アンリツ株式会社 | Optical fiber sensor |
| CN101825434B (en) * | 2010-04-28 | 2011-09-14 | 东北大学 | Blazed fiber bragg grating demodulation-based micro-displacement sensor and detection method |
| CN201903327U (en) * | 2010-12-17 | 2011-07-20 | 刘晓旻 | Free space micro optics optical lever system for nanoscale micro-displacement measurement |
| CN102901840A (en) * | 2012-10-22 | 2013-01-30 | 浙江建设职业技术学院 | High-sensitivity FBG (Fiber Bragg Grating) acceleration sensor |
| CN204007519U (en) * | 2014-08-20 | 2014-12-10 | 武汉光驰科技有限公司 | Optical fiber optical grating sensing experiment instrument |
| CN104406525B (en) * | 2014-11-13 | 2017-02-15 | 浙江大学 | Grating group micro-displacement sensor and displacement measuring method using same |
| EP3173752A1 (en) * | 2015-11-27 | 2017-05-31 | Universite Libre De Bruxelles | Transducer with stiffness adjustment |
| CN107388982B (en) * | 2017-06-20 | 2019-11-08 | 西安交通大学 | Portable nano-machining on-line measuring device and measuring method |
| CN107917680B (en) * | 2017-11-07 | 2019-10-25 | 南京航空航天大学 | A fast recognition method for small angles based on blazed gratings |
| CN109506766A (en) * | 2018-12-21 | 2019-03-22 | 宁波中车时代传感技术有限公司 | It is a kind of to be shaken integrative sensor in parallel based on the optical fiber temperature of balzed grating, and fiber grating |
| CN113155332A (en) * | 2021-04-20 | 2021-07-23 | 云南省建设投资控股集团有限公司 | Stress measurement sensitivity enhancing device of fiber grating sensor and manufacturing method thereof |
| CN115560682B (en) * | 2022-12-05 | 2023-02-03 | 上海拜安传感技术有限公司 | Displacement measuring device and manufacturing method thereof |
-
2022
- 2022-12-05 CN CN202211545084.8A patent/CN115560682B/en active Active
-
2023
- 2023-04-03 EP EP23899274.7A patent/EP4632317A4/en active Pending
- 2023-04-03 WO PCT/CN2023/086034 patent/WO2024119680A1/en not_active Ceased
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3696494B1 (en) * | 2014-12-31 | 2022-07-06 | Rememdia LC | Position sensor and corresponding sensing method |
| EP3101385A1 (en) * | 2015-06-05 | 2016-12-07 | Carl Zeiss Microscopy GmbH | Device and method for detecting surface topographies |
Non-Patent Citations (2)
| Title |
|---|
| PIERCE D S ET AL: "A NOVEL LASER TRIANGULATION TECHNIQUE FOR HIGH PRECISION DISTANCE MEASUREMENT", PROCEEDINGS OF THE INDUSTRY APPLICATIONS SOCIETY ANNUAL MEETING. HOUSTON, OCT. 4 - 9, 1992; [PROCEEDINGS OF THE INDUSTRY APPLICATIONS SOCIETY ANNUAL MEETING], NEW YORK, IEEE, US, vol. 2, 1 January 1992 (1992-01-01), pages 1762 - 1769, XP000334204, ISBN: 978-0-7803-0635-6, DOI: 10.1109/IAS.1992.244524 * |
| See also references of WO2024119680A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115560682A (en) | 2023-01-03 |
| EP4632317A1 (en) | 2025-10-15 |
| WO2024119680A1 (en) | 2024-06-13 |
| CN115560682B (en) | 2023-02-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE |
|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE |
|
| 17P | Request for examination filed |
Effective date: 20250619 |
|
| AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
| A4 | Supplementary search report drawn up and despatched |
Effective date: 20260114 |
|
| RIC1 | Information provided on ipc code assigned before grant |
Ipc: G01B 11/02 20060101AFI20260108BHEP |
|
| DAV | Request for validation of the european patent (deleted) | ||
| DAX | Request for extension of the european patent (deleted) |