FR2011034A1 - - Google Patents

Info

Publication number: FR2011034A1
Authority: FR; France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

FR6910808A

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

International Business Machines Corp

Original Assignee

International Business Machines Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1968-06-17

Filing date

1969-04-17

Publication date

1970-02-27

1969-04-17 Application filed by International Business Machines Corp filed Critical International Business Machines Corp

1970-02-27 Publication of FR2011034A1 publication Critical patent/FR2011034A1/fr

Status Withdrawn legal-status Critical Current

Links

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING, OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
- B25B11/007—Vacuum work holders portable, e.g. handheld
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Manipulator (AREA)

FR6910808A 1968-06-17 1969-04-17 Withdrawn FR2011034A1 (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US73768068A	1968-06-17	1968-06-17

Publications (1)

Publication Number	Publication Date
FR2011034A1 true FR2011034A1 (fr)	1970-02-27

Family

ID=24964865

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FR6910808A Withdrawn FR2011034A1 (fr)	1968-06-17	1969-04-17

Country Status (5)

Country	Link
US (1)	US3517958A (fr)
CH (1)	CH481726A (fr)
DE (1)	DE1928203B2 (fr)
FR (1)	FR2011034A1 (fr)
GB (1)	GB1255410A (fr)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3841628A (en) *	1972-01-31	1974-10-15	A Goldfarb	Game apparatus and method
DE2429421C2 (de) *	1974-06-19	1981-12-10	Vits-Maschinenbau Gmbh, 4018 Langenfeld	Vorrichtung zum Anheben des oberen Bogens eines Stapels mit Blasluft
US4050729A (en) *	1976-04-20	1977-09-27	Hutson Clifford L	Apparatus for handling delicate articles such as silicon wafers
US4029351A (en) *	1976-06-02	1977-06-14	International Business Machines Corporation	Bernoulli pickup head with self-restoring anti-tilt improvement
DE3036829A1 (de) *	1980-09-30	1982-05-13	Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen	Verfahren zum aufnehmen von kristallscheiben
US4682928A (en) *	1982-05-24	1987-07-28	Proconics International, Inc.	Wafer transfer apparatus
DE3686781D1 (de) *	1985-05-04	1992-10-29	Seibu Giken Kk	Vorrichtung zum halten und/oder foerdern einer platte mittels eines fluids ohne koerperliche beruehrung.
JPS6387831U (fr) *	1986-11-26	1988-06-08
US4773687A (en) *	1987-05-22	1988-09-27	American Telephone And Telegraph Company, At&T Technologies, Inc.	Wafer handler
GB2256184A (en) *	1991-05-29	1992-12-02	Chen Ming Yang	A delicate operating tool assembly
EP0611273B1 (fr) *	1993-02-08	1998-09-16	SEZ Semiconductor-Equipment Zubehör für die Halbleiterfertigung AG	Support pour objets en forme de disque
US5636887A (en) *	1995-03-20	1997-06-10	Chrysler Corporation	Apparatus for lifting objects by suction and releasing them by gas pressure
WO1997045862A1 (fr) *	1996-05-31	1997-12-04	Ipec Precision, Inc.	Support sans contact pour des articles en forme de plaquette
US5928537A (en) *	1997-03-14	1999-07-27	Fortune; William S.	Pneumatic pickup tool for small parts
DE19806306A1 (de) *	1998-02-16	1999-09-09	Siemens Ag	Vorrichtung zum berührungslosen Greifen und Halten eines Gegenstandes und Anwendungen der Vorrichtung
DE19842797C1 (de)	1998-09-18	2000-01-27	Max Planck Gesellschaft	Probenhalterung für eine partikelförmige flüssigkeitshaltige Materialprobe
DE19929617A1 (de) *	1999-06-28	2001-01-25	Siemens Ag	Vorrichtung und Verfahren zum Haltern eines Werkstücks sowie Anwendung des Verfahrens
US6244641B1 (en) *	1999-12-02	2001-06-12	M.E.C. Technology, Inc.	Wafer transfer arm
US6517130B1 (en) *	2000-03-14	2003-02-11	Applied Materials, Inc.	Self positioning vacuum chuck
US20030062734A1 (en) *	2001-10-02	2003-04-03	Faris Sadeg M.	Device and method for handling fragile objects, and manufacturing method thereof
TWI274393B (en) *	2002-04-08	2007-02-21	Acm Res Inc	Electropolishing and/or electroplating apparatus and methods
US6893070B2 (en) *	2002-10-17	2005-05-17	Delaware Capital Formation, Inc.	Integrated end effector
EP1768921A1 (fr) *	2004-07-09	2007-04-04	OC Oerlikon Balzers AG	Mecanisme de chargement de substrats a elevation de gaz
KR100604098B1 (ko) *	2005-04-20	2006-07-24	한미반도체 주식회사	반도체 패키지 픽업장치
ITUD20090214A1 (it) *	2009-11-24	2011-05-25	Applied Materials Inc	Effettore d'estremita' per la manipolazione di substrati
CN112922952B (zh) *	2021-01-22	2021-12-14	宁波云德半导体材料有限公司	一种具有泄压功能的石英真空吸附装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2905768A (en) *	1954-09-24	1959-09-22	Ibm	Air head
US3220723A (en) *	1963-09-25	1965-11-30	Control Data Corp	Suction pick up with air bearing
US3223443A (en) *	1963-10-17	1965-12-14	Pittsburgh Plate Glass Co	Handling of sheet material
US3438668A (en) *	1965-08-26	1969-04-15	Gen Electric	Contactless lifter
US3425736A (en) *	1966-03-25	1969-02-04	Bell Telephone Labor Inc	Pneumatic probe for handling flat objects
US3431009A (en) *	1967-01-06	1969-03-04	Western Electric Co	Pickup device for supporting workpieces on a layer of fluid

1968
- 1968-06-17 US US737680A patent/US3517958A/en not_active Expired - Lifetime
1969
- 1969-04-17 FR FR6910808A patent/FR2011034A1/fr not_active Withdrawn
- 1969-05-27 GB GB26706/69A patent/GB1255410A/en not_active Expired
- 1969-05-30 CH CH821669A patent/CH481726A/de not_active IP Right Cessation
- 1969-06-03 DE DE19691928203 patent/DE1928203B2/de not_active Withdrawn

Also Published As

Publication number	Publication date
US3517958A (en)	1970-06-30
DE1928203B2 (de)	1972-04-06
GB1255410A (en)	1971-12-01
CH481726A (de)	1969-11-30
DE1928203A1 (de)	1971-02-25

Legal Events

Date	Code	Title	Description
1981-01-30	ST	Notification of lapse

Publication	Publication Date	Title
AU1946070A (fr)	1972-05-09
FR2011034A1 (fr)	1970-02-27
AU5506869A (fr)	1970-11-26
AU2374870A (fr)	1972-06-29
AU6168869A (fr)	1971-04-08
AU6171569A (fr)	1971-04-08
AU416157B2 (fr)	1971-08-23
AU2952567A (fr)	1970-05-14
AU2581067A (fr)	1970-02-19
AU421558B1 (fr)	1970-01-29
AU3224368A (fr)	1969-07-17
AU3789668A (fr)	1968-06-20
AU2580267A (fr)	1970-02-05
AR203075Q (fr)	1975-08-14
BE709484A (fr)	1968-05-30
BE709274A (fr)	1968-07-12
BE726514A (fr)	1969-07-07
BE725707A (fr)	1969-06-19
BE725504A (fr)	1969-05-29
BE724053A (fr)	1969-05-02
BE708933A (fr)	1968-05-16
BE713208A (fr)	1968-10-04
BE709496A (fr)	1968-07-17
BE642636A (fr)
BE709479A (fr)	1968-07-17