FR2872823B1 - Composition de polissage mecano chimique, procede de preparation, et utilisation - Google Patents

Composition de polissage mecano chimique, procede de preparation, et utilisation

Info

Publication number
FR2872823B1
FR2872823B1 FR0407653A FR0407653A FR2872823B1 FR 2872823 B1 FR2872823 B1 FR 2872823B1 FR 0407653 A FR0407653 A FR 0407653A FR 0407653 A FR0407653 A FR 0407653A FR 2872823 B1 FR2872823 B1 FR 2872823B1
Authority
FR
France
Prior art keywords
mecano
chemical
preparation
polishing composition
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0407653A
Other languages
English (en)
Other versions
FR2872823A1 (fr
Inventor
Georges Michel
Eric Dien
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KEMESYS
Original Assignee
KEMESYS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KEMESYS filed Critical KEMESYS
Priority to FR0407653A priority Critical patent/FR2872823B1/fr
Priority to PCT/FR2005/001641 priority patent/WO2006016030A1/fr
Publication of FR2872823A1 publication Critical patent/FR2872823A1/fr
Application granted granted Critical
Publication of FR2872823B1 publication Critical patent/FR2872823B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H10P52/40—Chemomechanical polishing [CMP]
    • H10P52/403—Chemomechanical polishing [CMP] of conductive or resistive materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
FR0407653A 2004-07-08 2004-07-08 Composition de polissage mecano chimique, procede de preparation, et utilisation Expired - Fee Related FR2872823B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0407653A FR2872823B1 (fr) 2004-07-08 2004-07-08 Composition de polissage mecano chimique, procede de preparation, et utilisation
PCT/FR2005/001641 WO2006016030A1 (fr) 2004-07-08 2005-06-28 Composition de polissage mecano chimique, procede de preparation et utilisation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0407653A FR2872823B1 (fr) 2004-07-08 2004-07-08 Composition de polissage mecano chimique, procede de preparation, et utilisation

Publications (2)

Publication Number Publication Date
FR2872823A1 FR2872823A1 (fr) 2006-01-13
FR2872823B1 true FR2872823B1 (fr) 2006-10-06

Family

ID=34946735

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0407653A Expired - Fee Related FR2872823B1 (fr) 2004-07-08 2004-07-08 Composition de polissage mecano chimique, procede de preparation, et utilisation

Country Status (2)

Country Link
FR (1) FR2872823B1 (fr)
WO (1) WO2006016030A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY142433A (en) * 2007-09-14 2010-11-30 Frazer Internat Sdn Bhd De Paper pallets

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5527423A (en) * 1994-10-06 1996-06-18 Cabot Corporation Chemical mechanical polishing slurry for metal layers
US6083419A (en) * 1997-07-28 2000-07-04 Cabot Corporation Polishing composition including an inhibitor of tungsten etching
US6294105B1 (en) * 1997-12-23 2001-09-25 International Business Machines Corporation Chemical mechanical polishing slurry and method for polishing metal/oxide layers
US6582623B1 (en) * 1999-07-07 2003-06-24 Cabot Microelectronics Corporation CMP composition containing silane modified abrasive particles

Also Published As

Publication number Publication date
FR2872823A1 (fr) 2006-01-13
WO2006016030A1 (fr) 2006-02-16

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20160331