FR2904007B1 - Procede de depot de revetements ceramiques non oxydes. - Google Patents

Procede de depot de revetements ceramiques non oxydes.

Info

Publication number
FR2904007B1
FR2904007B1 FR0606660A FR0606660A FR2904007B1 FR 2904007 B1 FR2904007 B1 FR 2904007B1 FR 0606660 A FR0606660 A FR 0606660A FR 0606660 A FR0606660 A FR 0606660A FR 2904007 B1 FR2904007 B1 FR 2904007B1
Authority
FR
France
Prior art keywords
oxide ceramic
ceramic coatings
depositing non
depositing
coatings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0606660A
Other languages
English (en)
Other versions
FR2904007A1 (fr
Inventor
Francis Maury
Aurelia Douard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institut National Polytechnique de Toulouse INPT
Original Assignee
Institut National Polytechnique de Toulouse INPT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institut National Polytechnique de Toulouse INPT filed Critical Institut National Polytechnique de Toulouse INPT
Priority to FR0606660A priority Critical patent/FR2904007B1/fr
Priority to JP2009519984A priority patent/JP2009544837A/ja
Priority to PCT/EP2007/057463 priority patent/WO2008009715A1/fr
Priority to US12/374,555 priority patent/US8343582B2/en
Priority to EP07787721A priority patent/EP2049704A1/fr
Publication of FR2904007A1 publication Critical patent/FR2904007A1/fr
Application granted granted Critical
Publication of FR2904007B1 publication Critical patent/FR2904007B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4486—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by producing an aerosol and subsequent evaporation of the droplets or particles

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
FR0606660A 2006-07-21 2006-07-21 Procede de depot de revetements ceramiques non oxydes. Expired - Fee Related FR2904007B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0606660A FR2904007B1 (fr) 2006-07-21 2006-07-21 Procede de depot de revetements ceramiques non oxydes.
JP2009519984A JP2009544837A (ja) 2006-07-21 2007-07-19 非酸化物セラミック被覆の蒸着方法
PCT/EP2007/057463 WO2008009715A1 (fr) 2006-07-21 2007-07-19 Procede de depot de revetements ceramiques non oxydes
US12/374,555 US8343582B2 (en) 2006-07-21 2007-07-19 Process for deposition of non-oxide ceramic coatings
EP07787721A EP2049704A1 (fr) 2006-07-21 2007-07-19 Procede de depot de revetements ceramiques non oxydes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0606660A FR2904007B1 (fr) 2006-07-21 2006-07-21 Procede de depot de revetements ceramiques non oxydes.

Publications (2)

Publication Number Publication Date
FR2904007A1 FR2904007A1 (fr) 2008-01-25
FR2904007B1 true FR2904007B1 (fr) 2008-11-21

Family

ID=37806862

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0606660A Expired - Fee Related FR2904007B1 (fr) 2006-07-21 2006-07-21 Procede de depot de revetements ceramiques non oxydes.

Country Status (5)

Country Link
US (1) US8343582B2 (fr)
EP (1) EP2049704A1 (fr)
JP (1) JP2009544837A (fr)
FR (1) FR2904007B1 (fr)
WO (1) WO2008009715A1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110256724A1 (en) * 2010-04-15 2011-10-20 Novellus Systems, Inc. Gas and liquid injection methods and apparatus
FR3045673B1 (fr) * 2015-12-18 2020-02-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de depot d'un revetement par dli-mocvd avec recyclage du compose precurseur
EP3520118B1 (fr) 2016-09-28 2020-08-05 Commissariat à l'Énergie Atomique et aux Énergies Alternatives Composant nucléaire avec revetement de cr metastable, procédé de fabrication par dli-mocvd et utilisations contre l'oxydation/hydruration
EP3520119B1 (fr) 2016-09-28 2020-07-29 Commissariat à l'Énergie Atomique et aux Énergies Alternatives Composant nucléaire composite, procédé de fabrication par dli-mocvd et utilisations contre l'oxydation/hydruration
FR3056602B1 (fr) * 2016-09-28 2021-01-01 Commissariat Energie Atomique Procede de fabrication par dli-mocvd d'un composant nucleaire avec revetement de crc amorphe
WO2018060642A1 (fr) 2016-09-28 2018-04-05 Commissariat A L'energie Atomique Et Aux Energies Alternatives Composant nucléaire avec revetement de crc amorphe, procédé de fabrication par dli-mocvd et utilisations contre l'oxydation/hydruration
EP3519604B1 (fr) 2016-09-28 2020-07-29 Commissariat à l'Énergie Atomique et aux Énergies Alternatives Composant nucléaire a substrat metallique, procédé de fabrication par dli-mocvd et utilisations contre l'oxydation/hydruration
FR3056816B1 (fr) * 2016-09-28 2021-03-05 Commissariat Energie Atomique Composant nucleaire avec revetement de crc amorphe, utilisations contre l'oxydation/hydruration.
CN114040808B (zh) * 2019-03-13 2023-03-24 梅托克斯技术公司 用于薄膜沉积的固体前体进料系统
US20210092856A1 (en) * 2019-09-23 2021-03-25 Apple Inc. Surface nanograin for improved durability of metal bands
US12476090B2 (en) * 2021-12-09 2025-11-18 Ulvac, Inc. Method of depositing silicon nitride film, apparatus for depositing film, and silicon nitride film

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2643087B1 (fr) * 1989-02-16 1991-06-07 Unirec Procede de depot d'un revetement de type ceramique sur un substrat metallique et element comportant un revetement obtenu par ce procede
US5149596A (en) * 1990-10-05 1992-09-22 The United States Of America As Represented By The United States Department Of Energy Vapor deposition of thin films
SE9500123D0 (sv) * 1994-05-19 1995-01-16 George Wegler Systemlösning
US6244575B1 (en) * 1996-10-02 2001-06-12 Micron Technology, Inc. Method and apparatus for vaporizing liquid precursors and system for using same
US6517616B2 (en) * 1998-08-27 2003-02-11 Micron Technology, Inc. Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide
US6616972B1 (en) * 1999-02-24 2003-09-09 Air Products And Chemicals, Inc. Synthesis of metal oxide and oxynitride
US6238734B1 (en) * 1999-07-08 2001-05-29 Air Products And Chemicals, Inc. Liquid precursor mixtures for deposition of multicomponent metal containing materials
US6569249B1 (en) * 2000-04-18 2003-05-27 Clemson University Process for forming layers on substrates
US6905773B2 (en) * 2002-10-22 2005-06-14 Schlage Lock Company Corrosion-resistant coatings and methods of manufacturing the same
FR2904006B1 (fr) * 2006-07-21 2008-10-31 Toulouse Inst Nat Polytech Procede de depot de revetements metalliques durs

Also Published As

Publication number Publication date
JP2009544837A (ja) 2009-12-17
US20100047449A1 (en) 2010-02-25
FR2904007A1 (fr) 2008-01-25
EP2049704A1 (fr) 2009-04-22
WO2008009715A9 (fr) 2009-02-26
WO2008009715A1 (fr) 2008-01-24
US8343582B2 (en) 2013-01-01

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