FR2963192B1 - Générateur d'impulsions de pression de type mems - Google Patents

Générateur d'impulsions de pression de type mems

Info

Publication number
FR2963192B1
FR2963192B1 FR1056001A FR1056001A FR2963192B1 FR 2963192 B1 FR2963192 B1 FR 2963192B1 FR 1056001 A FR1056001 A FR 1056001A FR 1056001 A FR1056001 A FR 1056001A FR 2963192 B1 FR2963192 B1 FR 2963192B1
Authority
FR
France
Prior art keywords
cavity
pressure pulse
pulse generator
type pressure
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1056001A
Other languages
English (en)
Other versions
FR2963192A1 (fr
Inventor
Philippe Robert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1056001A priority Critical patent/FR2963192B1/fr
Priority to US13/184,858 priority patent/US8818007B2/en
Priority to EP11174599.8A priority patent/EP2410768B1/fr
Priority to JP2011159765A priority patent/JP2012029290A/ja
Publication of FR2963192A1 publication Critical patent/FR2963192A1/fr
Application granted granted Critical
Publication of FR2963192B1 publication Critical patent/FR2963192B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/002—Transducers other than those covered by groups H04R9/00 - H04R21/00 using electrothermic-effect transducer
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/005—Details of transducers, loudspeakers or microphones using digitally weighted transducing elements
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2400/00—Loudspeakers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Micromachines (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
FR1056001A 2010-07-22 2010-07-22 Générateur d'impulsions de pression de type mems Expired - Fee Related FR2963192B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR1056001A FR2963192B1 (fr) 2010-07-22 2010-07-22 Générateur d'impulsions de pression de type mems
US13/184,858 US8818007B2 (en) 2010-07-22 2011-07-18 MEMS-type pressure pulse generator
EP11174599.8A EP2410768B1 (fr) 2010-07-22 2011-07-20 Générateur d'impulsions de pression acoustique de type MEMS
JP2011159765A JP2012029290A (ja) 2010-07-22 2011-07-21 Ｍｅｍｓタイプの圧力パルス発生器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1056001A FR2963192B1 (fr) 2010-07-22 2010-07-22 Générateur d'impulsions de pression de type mems

Publications (2)

Publication Number Publication Date
FR2963192A1 FR2963192A1 (fr) 2012-01-27
FR2963192B1 true FR2963192B1 (fr) 2013-07-19

Family

ID=43537422

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1056001A Expired - Fee Related FR2963192B1 (fr) 2010-07-22 2010-07-22 Générateur d'impulsions de pression de type mems

Country Status (4)

Country Link
US (1) US8818007B2 (fr)
EP (1) EP2410768B1 (fr)
JP (1) JP2012029290A (fr)
FR (1) FR2963192B1 (fr)

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US9067779B1 (en) 2014-07-14 2015-06-30 Butterfly Network, Inc. Microfabricated ultrasonic transducers and related apparatus and methods
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DE102015210919A1 (de) * 2015-06-15 2016-12-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben
US9611135B1 (en) 2015-10-30 2017-04-04 Infineon Technologies Ag System and method for a differential comb drive MEMS
US9651423B1 (en) * 2016-07-10 2017-05-16 Biao Zhang MEMS optical device comprising a MEMS magnetic sensing mechansim and MEMS light absorbing structure
DE102017206766A1 (de) 2017-04-21 2018-10-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mems-wandler zum interagieren mit einem volumenstrom eines fluids und verfahren zum herstellen desselben
US10609474B2 (en) 2017-10-18 2020-03-31 xMEMS Labs, Inc. Air pulse generating element and manufacturing method thereof
JP2019161472A (ja) * 2018-03-14 2019-09-19 オムロン株式会社 静電容量型の音波発生装置および静電容量型スピーカー
JP2019161560A (ja) * 2018-03-15 2019-09-19 オムロン株式会社 静電容量型の音波発生装置および静電容量型スピーカー
US10425732B1 (en) * 2018-04-05 2019-09-24 xMEMS Labs, Inc. Sound producing device
WO2019226958A1 (fr) 2018-05-24 2019-11-28 The Research Foundation For The State University Of New York Capteur capacitif
WO2020174524A1 (fr) 2019-02-25 2020-09-03 国立大学法人東北大学 Dispositif de génération d'ondes sonores électrostatiques et haut-parleur électrostatique
US11172310B2 (en) 2019-07-07 2021-11-09 xMEMS Labs, Inc. Sound producing device
US10783866B1 (en) * 2019-07-07 2020-09-22 xMEMS Labs, Inc. Sound producing device
EP3778469B1 (fr) * 2019-08-16 2023-02-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Composant mems, module doté du composant mems et procédé de fonctionnement du composant mems
US12091313B2 (en) 2019-08-26 2024-09-17 The Research Foundation For The State University Of New York Electrodynamically levitated actuator
US10805751B1 (en) * 2019-09-08 2020-10-13 xMEMS Labs, Inc. Sound producing device
US11805342B2 (en) 2019-09-22 2023-10-31 xMEMS Labs, Inc. Sound producing package structure and manufacturing method thereof
US20210144483A1 (en) * 2019-11-07 2021-05-13 Innovative Interface Laboratory Corp. Single-axis actuator, acoustic wave generator and its array
US20210139314A1 (en) * 2019-11-07 2021-05-13 Innovative Interface Laboratory Corp. Linear actuator
US11395073B2 (en) * 2020-04-18 2022-07-19 xMEMS Labs, Inc. Sound producing package structure and method for packaging sound producing package structure
US11252511B2 (en) * 2019-12-27 2022-02-15 xMEMS Labs, Inc. Package structure and methods of manufacturing sound producing chip, forming package structure and forming sound producing apparatus
CN215924386U (zh) * 2020-06-30 2022-03-01 意法半导体股份有限公司 微机电致动器、光学快门和电子系统
CN116802143A (zh) * 2020-12-03 2023-09-22 弗劳恩霍夫应用研究促进协会 具有覆盖驱动的mems及其操作方法
US11943585B2 (en) 2021-01-14 2024-03-26 xMEMS Labs, Inc. Air-pulse generating device with common mode and differential mode movement
US12309548B2 (en) 2021-01-14 2025-05-20 xMEMS Labs, Inc. Air-pulse generating device with efficient propagation
US11445279B2 (en) * 2021-01-14 2022-09-13 xMEMS Labs, Inc. Air-pulse generating device and sound producing method thereof
US12075213B2 (en) 2021-01-14 2024-08-27 xMEMS Labs, Inc. Air-pulse generating device
US12262177B2 (en) 2021-01-14 2025-03-25 xMEMS Labs, Inc. Air-pulse generating device producing asymmetric air pulses
US12356141B2 (en) 2021-01-14 2025-07-08 xMEMS Labs, Inc. Air-pulse generating device, wearable sound device, bladeless fan, and airflow producing method
US11758335B2 (en) 2021-01-14 2023-09-12 xMEMS Labs, Inc. Air-pulse generating device and sound producing method thereof
US12261567B2 (en) 2021-01-14 2025-03-25 xMEMS Labs, Inc. Demodulation signal generator for air pulse generator
IT202100014183A1 (it) 2021-05-31 2022-12-01 St Microelectronics Srl Attuatore mems per movimento in piano di una massa mobile e modulo ottico comprendente l'attuatore mems
DE102022209187A1 (de) * 2022-09-05 2024-03-07 Robert Bosch Gesellschaft mit beschränkter Haftung Mikrofluidisches Interaktionselement zur Erzeugung und/oder Erfassung eines Volumenstroms eines Fluids sowie eine akustische Vorrichtung mit einem solchen mikrofluidischen Interaktionselement
DE102023205989A1 (de) 2023-06-26 2025-01-02 Robert Bosch Gesellschaft mit beschränkter Haftung Mikroelektromechanische Vorrichtung und mikroelektromechanischer Lautsprecher
DE102023206519A1 (de) * 2023-07-10 2025-01-16 Robert Bosch Gesellschaft mit beschränkter Haftung Mikroelektromechanische Vorrichtung und mikroelektromechanischer Lautsprecher
DE102023206568A1 (de) 2023-07-11 2025-01-16 Robert Bosch Gesellschaft mit beschränkter Haftung Mikroelektromechanische Vorrichtung und mikroelektromechanischer Lautsprecher
DE102023209103A1 (de) 2023-09-19 2025-03-20 Robert Bosch Gesellschaft mit beschränkter Haftung Mikroelektromechanische Vorrichtung, mikroelektromechanischer Lautsprecher, mikroelektromechanisches Mikrofon und mikroelektromechanische Fluidfördereinrichtung
US12317034B2 (en) * 2023-09-21 2025-05-27 xMEMS Labs, Inc. Air-pulse generating device with tooth edge patterned slit
DE102023212932A1 (de) * 2023-12-19 2025-06-26 Robert Bosch Gesellschaft mit beschränkter Haftung MEMS-Bauelement
DE102024204001A1 (de) * 2024-04-29 2025-10-30 Robert Bosch Gesellschaft mit beschränkter Haftung Mikroelektromechanisches Bauelement und mikroelektromechanischer Lautsprecher
DE102024207852A1 (de) 2024-08-19 2026-02-19 Robert Bosch Gesellschaft mit beschränkter Haftung MEMS-Bauelement zur Fluidförderung mittels Ultraschall

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Also Published As

Publication number Publication date
US8818007B2 (en) 2014-08-26
US20120018244A1 (en) 2012-01-26
EP2410768B1 (fr) 2014-08-06
FR2963192A1 (fr) 2012-01-27
EP2410768A1 (fr) 2012-01-25
JP2012029290A (ja) 2012-02-09

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Legal Events

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Effective date: 20160331