FR3149378B1 - Capteur de pression et son procédé de fabrication - Google Patents

Capteur de pression et son procédé de fabrication

Info

Publication number
FR3149378B1
FR3149378B1 FR2305457A FR2305457A FR3149378B1 FR 3149378 B1 FR3149378 B1 FR 3149378B1 FR 2305457 A FR2305457 A FR 2305457A FR 2305457 A FR2305457 A FR 2305457A FR 3149378 B1 FR3149378 B1 FR 3149378B1
Authority
FR
France
Prior art keywords
printed circuit
pressure sensor
zone
manufacturing process
resistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2305457A
Other languages
English (en)
Other versions
FR3149378A1 (fr
Inventor
Sergent Albin Le
Fabien Lemoigne
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SC2N, FR
Original Assignee
Valeo Embrayages SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valeo Embrayages SAS filed Critical Valeo Embrayages SAS
Priority to FR2305457A priority Critical patent/FR3149378B1/fr
Priority to CN202480036277.1A priority patent/CN121263668A/zh
Priority to EP24727340.2A priority patent/EP4720620A1/fr
Priority to PCT/EP2024/063630 priority patent/WO2024245777A1/fr
Publication of FR3149378A1 publication Critical patent/FR3149378A1/fr
Application granted granted Critical
Publication of FR3149378B1 publication Critical patent/FR3149378B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044—Constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0069—Electrical connection means from the sensor to its support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/069—Protection against electromagnetic or electrostatic interferences
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L’invention concerne un capteur de pression comprenant un connecteur, un circuit imprimé (3), un corps métallique et un élément sensible à la pression (5) comportant un substrat (6) comprenant une face interne reliée au corps métallique (4) et une face externe (7) recouverte par une couche diélectrique (8) sur laquelle sont positionnées quatre résistances (9, 10, 11, 12) agencées pour former quatre pôles électriques (13, 14, 15, 16), chaque pôle électrique étant formé entre deux résistances et étant connecté à une zone conductrice (17, 18, 19, 20) s’étendant sur la couche diélectrique, chaque zone conductrice étant reliée électriquement à une zone de connexion (21, 22, 23, 24) formée sur le circuit imprimé par un élément de liaison (25, 26, 27, 28). La face externe du substrat comprend au moins une zone de mise à la masse (30, 31) reliée électriquement au circuit imprimé par un moyen de liaison (32, 33). Figure de l’abrégé : Fig. 2
FR2305457A 2023-05-31 2023-05-31 Capteur de pression et son procédé de fabrication Active FR3149378B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR2305457A FR3149378B1 (fr) 2023-05-31 2023-05-31 Capteur de pression et son procédé de fabrication
CN202480036277.1A CN121263668A (zh) 2023-05-31 2024-05-16 压力传感器及其制造方法
EP24727340.2A EP4720620A1 (fr) 2023-05-31 2024-05-16 Capteur de pression et son procédé de fabrication
PCT/EP2024/063630 WO2024245777A1 (fr) 2023-05-31 2024-05-16 Capteur de pression et son procédé de fabrication

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2305457A FR3149378B1 (fr) 2023-05-31 2023-05-31 Capteur de pression et son procédé de fabrication
FR2305457 2023-05-31

Publications (2)

Publication Number Publication Date
FR3149378A1 FR3149378A1 (fr) 2024-12-06
FR3149378B1 true FR3149378B1 (fr) 2025-07-18

Family

ID=87801430

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2305457A Active FR3149378B1 (fr) 2023-05-31 2023-05-31 Capteur de pression et son procédé de fabrication

Country Status (4)

Country Link
EP (1) EP4720620A1 (fr)
CN (1) CN121263668A (fr)
FR (1) FR3149378B1 (fr)
WO (1) WO2024245777A1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4356238B2 (ja) * 2000-12-25 2009-11-04 株式会社デンソー 圧力センサ
TWI633289B (zh) * 2013-03-13 2018-08-21 不二工機股份有限公司 壓力感測器
WO2020218570A1 (fr) * 2019-04-26 2020-10-29 長野計器株式会社 Capteur de pression

Also Published As

Publication number Publication date
EP4720620A1 (fr) 2026-04-08
WO2024245777A1 (fr) 2024-12-05
FR3149378A1 (fr) 2024-12-06
CN121263668A (zh) 2026-01-02

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Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20241206

PLFP Fee payment

Year of fee payment: 3

TP Transmission of property

Owner name: SC2N, FR

Effective date: 20250918