IE32171B1 - Improvements in or relating to vacuum deposition systems - Google Patents

Improvements in or relating to vacuum deposition systems

Info

Publication number
IE32171B1
IE32171B1 IE53168A IE53168A IE32171B1 IE 32171 B1 IE32171 B1 IE 32171B1 IE 53168 A IE53168 A IE 53168A IE 53168 A IE53168 A IE 53168A IE 32171 B1 IE32171 B1 IE 32171B1
Authority
IE
Ireland
Prior art keywords
relating
vacuum deposition
deposition systems
systems
vacuum
Prior art date
Application number
IE53168A
Other versions
IE32171L (en
Original Assignee
Libbey Owens Ford Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Libbey Owens Ford Glass Co filed Critical Libbey Owens Ford Glass Co
Publication of IE32171L publication Critical patent/IE32171L/en
Publication of IE32171B1 publication Critical patent/IE32171B1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Heat Treatment Of Strip Materials And Filament Materials (AREA)
IE53168A 1967-05-10 1968-05-06 Improvements in or relating to vacuum deposition systems IE32171B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US63738667A 1967-05-10 1967-05-10

Publications (2)

Publication Number Publication Date
IE32171L IE32171L (en) 1968-11-10
IE32171B1 true IE32171B1 (en) 1973-05-02

Family

ID=24555697

Family Applications (1)

Application Number Title Priority Date Filing Date
IE53168A IE32171B1 (en) 1967-05-10 1968-05-06 Improvements in or relating to vacuum deposition systems

Country Status (7)

Country Link
AT (1) AT279993B (en)
CH (1) CH514687A (en)
ES (1) ES353735A1 (en)
FR (1) FR1565828A (en)
IE (1) IE32171B1 (en)
NL (1) NL6806720A (en)
NO (1) NO118685B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5405378A (en) 1992-05-20 1995-04-11 Strecker; Ernst P. Device with a prosthesis implantable in the body of a patient
DE19923654A1 (en) * 1999-05-22 2000-11-23 Leybold Systems Gmbh Vaporizer arranged in a glass bulb of a vacuum deposition device has an inlet for wire material to be vaporized, a central heating region, and an inlet for the wire material

Also Published As

Publication number Publication date
CH514687A (en) 1971-10-31
NO118685B (en) 1970-01-26
NL6806720A (en) 1968-11-11
IE32171L (en) 1968-11-10
ES353735A1 (en) 1969-10-16
AT279993B (en) 1970-03-25
FR1565828A (en) 1969-05-02

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