IL84017A - Semiconductor dopant source and its manufacture - Google Patents

Semiconductor dopant source and its manufacture

Info

Publication number
IL84017A
IL84017A IL8401787A IL8401787A IL84017A IL 84017 A IL84017 A IL 84017A IL 8401787 A IL8401787 A IL 8401787A IL 8401787 A IL8401787 A IL 8401787A IL 84017 A IL84017 A IL 84017A
Authority
IL
Israel
Prior art keywords
mixture
dopant
antimony
silicon
dopant source
Prior art date
Application number
IL8401787A
Other languages
English (en)
Other versions
IL84017A0 (en
Original Assignee
Stemcor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stemcor Corp filed Critical Stemcor Corp
Publication of IL84017A0 publication Critical patent/IL84017A0/xx
Publication of IL84017A publication Critical patent/IL84017A/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/19—Diffusion sources
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S252/00—Compositions
    • Y10S252/95—Doping agent source material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S252/00—Compositions
    • Y10S252/95—Doping agent source material
    • Y10S252/951—Doping agent source material for vapor transport
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249967—Inorganic matrix in void-containing component
    • Y10T428/249969—Of silicon-containing material [e.g., glass, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249967—Inorganic matrix in void-containing component
    • Y10T428/24997—Of metal-containing material

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
  • Catalysts (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
IL8401787A 1986-10-31 1987-09-29 Semiconductor dopant source and its manufacture IL84017A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/925,428 US4749615A (en) 1986-10-31 1986-10-31 Semiconductor dopant source

Publications (2)

Publication Number Publication Date
IL84017A0 IL84017A0 (en) 1988-02-29
IL84017A true IL84017A (en) 1994-07-31

Family

ID=25451717

Family Applications (1)

Application Number Title Priority Date Filing Date
IL8401787A IL84017A (en) 1986-10-31 1987-09-29 Semiconductor dopant source and its manufacture

Country Status (7)

Country Link
US (1) US4749615A (no)
EP (1) EP0266030A3 (no)
JP (1) JPS63122118A (no)
KR (1) KR880005667A (no)
BR (1) BR8705514A (no)
IL (1) IL84017A (no)
NO (1) NO874521L (no)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5550082A (en) * 1993-11-18 1996-08-27 The University Of Houston System Method and apparatus for doping silicon wafers using a solid dopant source and rapid thermal processing
JPH08119787A (ja) * 1994-10-14 1996-05-14 Komatsu Electron Metals Co Ltd 連続チャージ法におけるドーパント供給方法およびドーパント組成物
KR100358129B1 (ko) * 1995-02-27 2003-01-24 주식회사 하이닉스반도체 산화물이도핑된폴리실리콘막을사용한반도체소자제조방법
US6078035A (en) * 1995-12-22 2000-06-20 Lucent Technologies Inc. Integrated circuit processing utilizing microwave radiation
US6303517B1 (en) 1999-07-27 2001-10-16 Ball Semiconductor, Inc. Fast deposition on spherical-shaped integrated circuits in non-contact CVD process
US6365493B1 (en) 2000-01-24 2002-04-02 Ball Semiconductor, Inc. Method for antimony and boron doping of spherical semiconductors
US6426280B2 (en) 2000-01-26 2002-07-30 Ball Semiconductor, Inc. Method for doping spherical semiconductors
US6383287B1 (en) 2000-09-28 2002-05-07 Ball Semiconductor, Inc. System and method for performing diffusion on a three-dimensional substrate
JP4442892B2 (ja) * 2004-03-29 2010-03-31 コバレントマテリアル株式会社 シリコン単結晶引上げ用砒素ドーパントの製造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3658606A (en) * 1969-04-01 1972-04-25 Ibm Diffusion source and method of producing same
JPS5717383B2 (no) * 1971-10-08 1982-04-10
US3849344A (en) * 1972-03-31 1974-11-19 Carborundum Co Solid diffusion sources containing phosphorus and silicon
US3920882A (en) * 1973-04-16 1975-11-18 Owens Illinois Inc N-type dopant source
US3923563A (en) * 1973-04-16 1975-12-02 Owens Illinois Inc Process for doping silicon semiconductors using an impregnated refractory dopant source
US3998668A (en) * 1973-12-21 1976-12-21 Owens-Illinois, Inc. Aluminum metaphosphate dopant sources
US3962000A (en) * 1974-01-07 1976-06-08 Owens-Illinois, Inc. Barium aluminoborosilicate glass-ceramics for semiconductor doping
US3954525A (en) * 1974-08-26 1976-05-04 The Carborundum Company Hot-pressed solid diffusion sources for phosphorus
US4152286A (en) * 1977-09-13 1979-05-01 Texas Instruments Incorporated Composition and method for forming a doped oxide film
US4379006A (en) * 1981-08-07 1983-04-05 Owens-Illinois, Inc. B2 O3 Diffusion processes
US4571366A (en) * 1982-02-11 1986-02-18 Owens-Illinois, Inc. Process for forming a doped oxide film and doped semiconductor
US4490192A (en) * 1983-06-08 1984-12-25 Allied Corporation Stable suspensions of boron, phosphorus, antimony and arsenic dopants
US4526826A (en) * 1983-06-08 1985-07-02 Kennecott Corporation Foam semiconductor dopant carriers
US4525429A (en) * 1983-06-08 1985-06-25 Kennecott Corporation Porous semiconductor dopant carriers
US4596716A (en) * 1983-06-08 1986-06-24 Kennecott Corporation Porous silicon nitride semiconductor dopant carriers
US4588455A (en) * 1984-08-15 1986-05-13 Emulsitone Company Planar diffusion source
US4592793A (en) * 1985-03-15 1986-06-03 International Business Machines Corporation Process for diffusing impurities into a semiconductor body vapor phase diffusion of III-V semiconductor substrates

Also Published As

Publication number Publication date
EP0266030A3 (en) 1990-01-17
US4749615A (en) 1988-06-07
KR880005667A (ko) 1988-06-29
BR8705514A (pt) 1988-05-24
NO874521L (no) 1988-05-02
IL84017A0 (en) 1988-02-29
JPS63122118A (ja) 1988-05-26
EP0266030A2 (en) 1988-05-04
NO874521D0 (no) 1987-10-30

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