IT1267202B1 - Dispositivo di irraggiamento per litografia rontgen di profondita' - Google Patents
Dispositivo di irraggiamento per litografia rontgen di profondita'Info
- Publication number
- IT1267202B1 IT1267202B1 IT94TO001014A ITTO941014A IT1267202B1 IT 1267202 B1 IT1267202 B1 IT 1267202B1 IT 94TO001014 A IT94TO001014 A IT 94TO001014A IT TO941014 A ITTO941014 A IT TO941014A IT 1267202 B1 IT1267202 B1 IT 1267202B1
- Authority
- IT
- Italy
- Prior art keywords
- rontgen
- depth lithography
- irradiance device
- irradiance
- lithography
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7049—Technique, e.g. interferometric
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Toxicology (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4418779A DE4418779C1 (de) | 1994-05-28 | 1994-05-28 | Bestrahlungseinrichtung für die Röntgentiefenlithografie |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| ITTO941014A0 ITTO941014A0 (it) | 1994-12-12 |
| ITTO941014A1 ITTO941014A1 (it) | 1996-06-12 |
| IT1267202B1 true IT1267202B1 (it) | 1997-01-28 |
Family
ID=6519288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT94TO001014A IT1267202B1 (it) | 1994-05-28 | 1994-12-12 | Dispositivo di irraggiamento per litografia rontgen di profondita' |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US5515410A (it) |
| JP (1) | JP2674960B2 (it) |
| DE (1) | DE4418779C1 (it) |
| FR (1) | FR2720526B1 (it) |
| GB (1) | GB2289832B (it) |
| IT (1) | IT1267202B1 (it) |
| SE (1) | SE512180C2 (it) |
| TW (1) | TW295779B (it) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19846958C2 (de) * | 1998-08-19 | 2001-06-13 | Fraunhofer Ges Forschung | Verfahren zur Herstellung einer Einrichtung zum Transport von kleinsten Flüssigkeitsmengen |
| USD441866S1 (en) | 1999-04-02 | 2001-05-08 | Fabio Paolo Marchesi | Light irradiation unit for the human body |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4993696A (en) * | 1986-12-01 | 1991-02-19 | Canon Kabushiki Kaisha | Movable stage mechanism |
| JPH01139237U (it) * | 1988-03-15 | 1989-09-22 | ||
| DE4117639A1 (de) * | 1990-05-31 | 1991-12-05 | Toshiba Kawasaki Kk | Synchrotronstrahlungsgeraet |
| DE4023403A1 (de) * | 1990-07-23 | 1992-01-30 | Seiko Seiki Kk | Beruehrungsfrei gefuehrter positioniertisch |
-
1994
- 1994-05-28 DE DE4418779A patent/DE4418779C1/de not_active Expired - Fee Related
- 1994-10-24 TW TW083109835A patent/TW295779B/zh not_active IP Right Cessation
- 1994-11-25 SE SE9404015A patent/SE512180C2/sv not_active IP Right Cessation
- 1994-12-12 IT IT94TO001014A patent/IT1267202B1/it active IP Right Grant
- 1994-12-12 FR FR9414903A patent/FR2720526B1/fr not_active Expired - Fee Related
- 1994-12-22 JP JP6320658A patent/JP2674960B2/ja not_active Expired - Fee Related
-
1995
- 1995-02-15 US US08/388,978 patent/US5515410A/en not_active Expired - Fee Related
- 1995-04-20 GB GB9508025A patent/GB2289832B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US5515410A (en) | 1996-05-07 |
| JPH07326572A (ja) | 1995-12-12 |
| FR2720526A1 (fr) | 1995-12-01 |
| GB2289832A (en) | 1995-11-29 |
| GB2289832B (en) | 1998-07-22 |
| ITTO941014A1 (it) | 1996-06-12 |
| JP2674960B2 (ja) | 1997-11-12 |
| ITTO941014A0 (it) | 1994-12-12 |
| SE9404015D0 (sv) | 1994-11-25 |
| SE9404015L (sv) | 1995-11-29 |
| GB9508025D0 (en) | 1995-06-07 |
| DE4418779C1 (de) | 1995-07-27 |
| FR2720526B1 (fr) | 1997-08-01 |
| SE512180C2 (sv) | 2000-02-07 |
| TW295779B (it) | 1997-01-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69302551D1 (de) | Kopfstütze Gerät | |
| FI951998A0 (fi) | Röntgendiagnostiikkalaite | |
| IT1289793B1 (it) | Apparecchio per l'alimentazione di componenti orientati | |
| DE69522422D1 (de) | Belichtungsvorrichtung | |
| KR960008429A (ko) | 노광 장치 | |
| DE69637732D1 (de) | Röntgen aufnahme vorrichtung | |
| FI945312A0 (fi) | Kerroskuvaus-röntgenlaite | |
| ITMI921108A1 (it) | Dispositivo regolabile di livello per veicoli | |
| NO305341B1 (no) | Anordning for elektro-fisking | |
| ITMI911465A0 (it) | Dispositivo per l'alimentazione di pezzi | |
| DE69630548D1 (de) | Belichtungsvorrichtung | |
| ITMI911466A0 (it) | Dispositivo per l'alimentazione di pezzi | |
| IT1267202B1 (it) | Dispositivo di irraggiamento per litografia rontgen di profondita' | |
| ITTO940664A0 (it) | Dispositivo decelatore per oggetti postali | |
| ITTV920042A0 (it) | Struttura di dispositivo per la taratura di macchine duplicatrici | |
| DE69413856D1 (de) | Röntgeneinrichtung | |
| IT1277494B1 (it) | Dispositivo per l'alimentazione di fogli per impiallacciatura | |
| BR9500170A (pt) | Aparelho para esterilizar superfície | |
| DE69507357D1 (de) | Belichtungsgerät | |
| ITVI920103A1 (it) | Dispositivo di distribuzione per caldaie | |
| KR970044909U (ko) | 라디에이터의 오염물 제거장치 | |
| IT243297Y1 (it) | Dispositivo per l'esposizione di oggetti piani | |
| KR960033176U (ko) | 경운기용 보조장치 | |
| ITMI940126A0 (it) | Dispositivo per il trattamento di rifiuti | |
| ITGE920050V0 (it) | Dispositivo di raccolta per colourostomizzati. |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 0001 | Granted | ||
| TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19981231 |