JP5222450B2 - レーザー照射装置及び半導体装置の作製方法 - Google Patents

レーザー照射装置及び半導体装置の作製方法 Download PDF

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Publication number: JP5222450B2
Authority: JP; Japan
Prior art keywords: laser; laser beam; film; laser beams; cylindrical lens
Prior art date: 2000-09-01
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

JP2001262877A

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English (en)

Japanese (ja)

Other versions

JP2002190454A5 (2

JP2002190454A (ja

Inventor

幸一郎田中

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Semiconductor Energy Laboratory Co Ltd

Original Assignee

Semiconductor Energy Laboratory Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2000-09-01

Filing date

2001-08-31

Publication date

2013-06-26

2001-08-31 Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd

2001-08-31 Priority to JP2001262877A priority Critical patent/JP5222450B2/ja

2002-07-05 Publication of JP2002190454A publication Critical patent/JP2002190454A/ja

2008-08-07 Publication of JP2002190454A5 publication Critical patent/JP2002190454A5/ja

2013-06-26 Application granted granted Critical

2013-06-26 Publication of JP5222450B2 publication Critical patent/JP5222450B2/ja

2021-08-31 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

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Electrodes Of Semiconductors (AREA)
Thin Film Transistor (AREA)
Recrystallisation Techniques (AREA)
Lasers (AREA)
Laser Beam Processing (AREA)

JP2001262877A 2000-09-01 2001-08-31 レーザー照射装置及び半導体装置の作製方法 Expired - Fee Related JP5222450B2 (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP2001262877A JP5222450B2 (ja)	2000-09-01	2001-08-31	レーザー照射装置及び半導体装置の作製方法

Applications Claiming Priority (4)

Application Number	Priority Date	Filing Date	Title
JP2000-265451		2000-09-01
JP2000265451		2000-09-01
JP2000265451		2000-09-01
JP2001262877A JP5222450B2 (ja)	2000-09-01	2001-08-31	レーザー照射装置及び半導体装置の作製方法

Publications (3)

Publication Number	Publication Date
JP2002190454A JP2002190454A (ja)	2002-07-05
JP2002190454A5 JP2002190454A5 (2)	2008-08-07
JP5222450B2 true JP5222450B2 (ja)	2013-06-26

Family

ID=26599078

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2001262877A Expired - Fee Related JP5222450B2 (ja)	2000-09-01	2001-08-31	レーザー照射装置及び半導体装置の作製方法

Country Status (1)

Country	Link
JP (1)	JP5222450B2 (2)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TWI289896B (en) *	2001-11-09	2007-11-11	Semiconductor Energy Lab	Laser irradiation apparatus, laser irradiation method, and method of manufacturing a semiconductor device
US7405114B2 (en) *	2002-10-16	2008-07-29	Semiconductor Energy Laboratory Co., Ltd.	Laser irradiation apparatus and method of manufacturing semiconductor device
JP4602023B2 (ja) *	2003-07-31	2010-12-22	株式会社半導体エネルギー研究所	半導体装置の作製方法
JP4442537B2 (ja) *	2005-09-16	2010-03-31	三菱電機株式会社	レーザプロセス装置
DE112007003437B4 (de)	2007-01-24	2019-11-28	Osram Gmbh	Optoelektronische Vorrichtung

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH04125609A (ja) *	1990-09-18	1992-04-27	Satoshi Kawada	光学顕微鏡
JPH06291038A (ja) *	1993-03-31	1994-10-18	Ricoh Co Ltd	半導体材料製造装置
JP3469337B2 (ja) *	1994-12-16	2003-11-25	株式会社半導体エネルギー研究所	半導体装置の作製方法
JPH11170079A (ja) *	1997-12-03	1999-06-29	Toshiba Corp	レ−ザ光学装置およびレ−ザ加工装置
JP4182580B2 (ja) *	1999-01-18	2008-11-19	ソニー株式会社	照明装置及び画像表示装置

2001
- 2001-08-31 JP JP2001262877A patent/JP5222450B2/ja not_active Expired - Fee Related

Also Published As

Publication number	Publication date
JP2002190454A (ja)	2002-07-05

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