JPH01230276A - Solid laser beam oscillating device - Google Patents
Solid laser beam oscillating deviceInfo
- Publication number
- JPH01230276A JPH01230276A JP5487488A JP5487488A JPH01230276A JP H01230276 A JPH01230276 A JP H01230276A JP 5487488 A JP5487488 A JP 5487488A JP 5487488 A JP5487488 A JP 5487488A JP H01230276 A JPH01230276 A JP H01230276A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- solid
- holder
- state laser
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
- H01S3/042—Arrangements for thermal management for solid state lasers
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
[発明の目的〕
(産業上の利用分野)
本発明はYAG等の固体レーザ媒質を備えた固体レーザ
発振装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a solid-state laser oscillation device equipped with a solid-state laser medium such as YAG.
(従来の技術)
一般に固体レーザ発振装置では、励起時の熱影響を防ぐ
ために、発振中はレーザ媒質であるYAG等のレーザロ
ッドを常時水冷するようにしている。レーザロッドはそ
の両端部を円筒状のホルダーで保持されているが、冷却
水がレーザロッドの両端面に回らないように、レーザロ
ッドとホルダーとの間にOリングを介在させて水密構造
にし、冷却水による端面への汚れを防ぎ、発振出力の低
下がないようにしている。しかしながら、上記のように
水冷しても熱影響を全くなくすことは困難であり、レー
ザ発振が長時間続くと、レーザロッドが光学的に変化し
、レーザビームの発振光軸がずれてくる。また、特に複
数のレーザロッドを直列的に配したいわゆる多段式のレ
ーザ発振器においては共振モードが複雑になり、一方の
ロッド端面から放出したレーザ光が他方のレーザロッド
端面に入射されない確立が高くなる。このため、ホルダ
ーの両端側に設けられた共振ミラーから反射し上記光軸
のずれたレーザ光がレーザロッドの端面から外れ、0リ
ングを照射して劣化させてしまう問題があった。この問
題を解消するために、例えば、実開昭50−54976
号において次のような技術が開示されている。すなわち
、第3図に示すように、冷却水(1)で満たされた本体
(2)内にレーザロッド(3)と励起ランプ(4)とが
組込まれている。レーザロッド(3)を固定するために
、その両端部は本体(2)に固定されているホルダー(
5)にて嵌挿され、保持されている。この保持ではシー
ル材としての0リング(6)、座金(7)を介し、押し
ねじ(8)が螺合されている。さらに、レーザロッド(
3)の端面(3a)には、この端面(3a)の外周部を
環状に被覆するように板(9)が設けられ、押しねじ(
10)により、ホルダー(5)内に固定されている。(Prior Art) In general, in a solid-state laser oscillation device, a laser rod such as YAG, which is a laser medium, is always water-cooled during oscillation in order to prevent thermal effects during excitation. The laser rod is held at both ends by cylindrical holders, but an O-ring is interposed between the laser rod and the holder to create a watertight structure so that cooling water does not flow around the end surfaces of the laser rod. This prevents the end face from being contaminated by cooling water and prevents a drop in oscillation output. However, even with water cooling as described above, it is difficult to completely eliminate thermal effects, and if laser oscillation continues for a long time, the laser rod will optically change and the oscillation optical axis of the laser beam will shift. In addition, especially in so-called multi-stage laser oscillators in which multiple laser rods are arranged in series, the resonance mode becomes complex, and there is a high probability that the laser beam emitted from one rod end face will not enter the other laser rod end face. . For this reason, there is a problem in that the laser beam, which is reflected from the resonant mirrors provided at both ends of the holder and whose optical axis is shifted, deviates from the end face of the laser rod, irradiates the O-ring, and deteriorates it. In order to solve this problem, for example,
The following technology is disclosed in the issue. That is, as shown in FIG. 3, a laser rod (3) and an excitation lamp (4) are incorporated in a main body (2) filled with cooling water (1). In order to fix the laser rod (3), both ends of it are attached to a holder (2) fixed to the main body (2).
5) is inserted and held. In this holding, a set screw (8) is screwed through an O-ring (6) as a sealing material and a washer (7). In addition, the laser rod (
A plate (9) is provided on the end surface (3a) of 3) so as to annularly cover the outer periphery of this end surface (3a), and a plate (9) is provided on the end surface (3a) of the end surface (3).
10) is fixed within the holder (5).
(発明が解決しようとする課題)
上記従来の構成では、レーザ発振中、光軸ずれを起こし
たレーザ光は板(9)によって遮光されるが、板(9)
の環状部でスパッタリングが発生し、ガス化したものが
端面(3a)に付着して汚染し、発振効率が低下したり
、付着物により端面が熱をもち、レーザロッドが破損す
る要因になっていた。(Problem to be Solved by the Invention) In the conventional configuration described above, the laser beam whose optical axis has shifted during laser oscillation is blocked by the plate (9), but the plate (9)
Sputtering occurs in the annular part of the laser rod, and the gasified material adheres to and contaminates the end face (3a), reducing oscillation efficiency and causing the end face to heat up and damage the laser rod. Ta.
また、このスパッタリングが長時間続くと板(9)の一
部に穴が発生し、その穴から光軸ずれのレーザ光が漏れ
てしまい、0リング(6)を劣化させてしまう問題があ
った。本発明はこのような事情に鑑みてなされたもので
、水密保持用のシール材の劣化を防止し、もって固体レ
ーザ媒質の端面が汚染されないようにして、レーザ発振
を安定にする固体レーザ発振装置を提供することを目的
とする。In addition, if this sputtering continues for a long time, a hole will appear in a part of the plate (9), and the laser beam with the optical axis will leak through the hole, causing the O-ring (6) to deteriorate. . The present invention has been made in view of these circumstances, and provides a solid-state laser oscillation device that prevents the deterioration of the watertight sealing material, thereby preventing the end face of the solid-state laser medium from being contaminated, and stabilizing laser oscillation. The purpose is to provide
[発明の構成コ
(課題を解決するための手段と作用)
励起ランプと、この励起ランプで励起される固体レーザ
媒質と、この固体レーザ媒質の両端部を水密に保持し内
部が上記固体レーザ媒質の端面と相似形の断面でかつ断
面積が小になる筒状部に形成された一対のホルダーと、
上記ホルダーの両端側に設けられ光共振器を構成する一
対の反射鏡とを備えた構成とし、レーザ発振中、スパッ
タリングが発生しにくくなり、固体レーザ媒質の端面も
汚染しにくくなる。[Configuration of the Invention (Means and Effects for Solving the Problems) An excitation lamp, a solid-state laser medium excited by the excitation lamp, and both ends of this solid-state laser medium held watertight so that the inside is the above-mentioned solid-state laser medium. a pair of holders formed in a cylindrical part having a cross section similar to that of the end face and having a small cross-sectional area;
The holder is configured to include a pair of reflecting mirrors that are provided on both ends of the holder and constitute an optical resonator, so that sputtering is less likely to occur during laser oscillation, and the end face of the solid-state laser medium is also less likely to be contaminated.
(実施例) 以下、実施例を示す図面に基づいて本発明を説明する。(Example) EMBODIMENT OF THE INVENTION Hereinafter, this invention will be explained based on drawing which shows an Example.
なお、第3図と共通する部分には同一符号を付しすとと
もに、固体レーザ媒質軸中心を中心にして左右対象の構
成であるので、左側の構成について説明する。すなわち
、上記左側を示す第1図において、レーザロッド(3)
の端部は本体(2)に固定されているホルダー(15)
で水密に保持されている。ホルダー(15)の内部はレ
ーザロッド(3)の保持部(15a)と、レーザロッド
(3)よりも小径でかつ保持部(15a)よりも長寸の
筒状部(15b)に形成されている。保持部(15a)
と筒状部(15b)との境界部はレーザロッド(3)の
端面(3a)側に向くテーバ面(15c)に形成されて
いる。上記保持部(15a)において、その外周部には
雄ねじが形成され、また、端面は内側に張出し、かつ挿
通部分がレーザロッド(3)より任かに径大の環状面(
16)に形成されている。この保持部(15a)にレー
ザロッド(3)の端部が挿入され、環状面(16)の外
面に予め挿入されていたOリング(6)が介在され、さ
らに、0リング(6)と同様、予め挿入されかつ内側が
雌ねじになっている締結体(17)が螺合している。こ
の螺合で0リング(6)が変形してレーザロッド(3)
に密接し、レーザロッド(3)は水密に保持されている
。一方、ホルダー(15)の筒状部(15b)の外側部
は第2図に示すように、複数の溝(18)が放射状に刻
設されている。これら溝(18)はホルダー(15)の
他端部近傍にそれぞれ延在している。Note that parts common to those in FIG. 3 are given the same reference numerals, and since the structure is symmetrical about the axis of the solid-state laser medium, the structure on the left side will be described. That is, in FIG. 1 showing the left side above, the laser rod (3)
The end of the holder (15) is fixed to the main body (2).
kept watertight. The inside of the holder (15) is formed into a holding part (15a) for the laser rod (3) and a cylindrical part (15b) having a smaller diameter than the laser rod (3) and longer than the holding part (15a). There is. Holding part (15a)
The boundary between the laser rod (3) and the cylindrical portion (15b) is formed on a tapered surface (15c) facing toward the end surface (3a) of the laser rod (3). In the holding part (15a), a male thread is formed on the outer circumferential part, and the end face is protruded inward, and the insertion part is an annular face (
16). The end of the laser rod (3) is inserted into this holding part (15a), and the O-ring (6) that was previously inserted into the outer surface of the annular surface (16) is inserted, and the O-ring (6) is inserted in the same manner as the O-ring (6). A fastening body (17) inserted in advance and having a female thread on the inside is screwed together. This screwing deforms the O-ring (6) and attaches it to the laser rod (3).
The laser rod (3) is held in close contact with the laser rod (3) in a watertight manner. On the other hand, as shown in FIG. 2, a plurality of grooves (18) are radially carved on the outer side of the cylindrical portion (15b) of the holder (15). These grooves (18) each extend near the other end of the holder (15).
ホルダー(15)の上記他端部は、本体(2)の外端に
固定された保持体(19)に挿通され、0リング(20
)の介在で水密になっている。保持体(19)の内部に
は上記谷溝(18)に連通ずる環状の流路(21)が設
けられている。この流路(21)は保持体(19)に接
続された排水管(22)に流路(23)を通じて連通し
ている。The other end of the holder (15) is inserted into a holder (19) fixed to the outer end of the main body (2), and is fitted with an O-ring (20).
), making it watertight. An annular flow path (21) communicating with the valley groove (18) is provided inside the holder (19). This flow path (21) communicates with a drain pipe (22) connected to the holder (19) through a flow path (23).
ところで、レーザロッド(3)はガラス管(24)に同
軸的に囲われている。このガラス管(24)は締結体(
17)を挿通して設けられている側板(25)の一部に
その端部を嵌合して設けられている。ガラス管(24)
には冷却水が導入され、冷却水は側板(25)と締粘体
(17)との間、溝(18)および流路(21)、 (
23)を通り、排水管(22)に抜けるようになってい
る。なお、(26)は励起ランプ(図示せず)用の冷却
水路に続く連絡通路、(27)は光共振器を構成する一
方の共振ミラーである。By the way, the laser rod (3) is coaxially surrounded by a glass tube (24). This glass tube (24) is a fastener (
The end portion of the side plate (25) is fitted into a part of the side plate (25) which is inserted through the side plate (25). Glass tube (24)
Cooling water is introduced into the space between the side plate (25) and the tightening body (17), the groove (18) and the channel (21), (
23) and exits to the drain pipe (22). Note that (26) is a communication passage that continues to a cooling channel for an excitation lamp (not shown), and (27) is one of the resonant mirrors forming the optical resonator.
上記の構成では、光軸ずれを起こしたし〜ザ光は筒状部
(15a)で遮光されるとともに、テーバ面(15C)
でレーザロッド(3)の端面に反射され、0リング(6
)は光軸ずれのレーザ光では照射されない。また、この
筒状部(15a)がアパーチャの作用をなし、レーザ共
振器外に別にアパーチャを設けることは不要となった。In the above configuration, the optical axis is shifted and the light is blocked by the cylindrical part (15a), and the Taber surface (15C)
The laser is reflected on the end face of the laser rod (3), and the O ring (6
) cannot be irradiated with a laser beam whose optical axis is shifted. Furthermore, this cylindrical portion (15a) functions as an aperture, making it unnecessary to provide a separate aperture outside the laser resonator.
また、ホルダー(15)が全体的に常時冷却されている
ので、スパッタリングの発生も極めて少なくなった。Furthermore, since the holder (15) is constantly cooled as a whole, the occurrence of sputtering is extremely reduced.
なお、上記実施例ではホルダー(15)の外側部に溝(
18)を刻設して冷却水の流路としたが、これに限定さ
れることなく、本体(2)側に溝を放射状に刻設してこ
れらを流路としてもよい。また、保持部(15a)と筒
状部(15b)との軸方向における長さの比は筒錠部(
L5a)の方ができるだけ長い方がよい。In addition, in the above embodiment, a groove (
18) to form a cooling water flow path, however, the present invention is not limited to this, and grooves may be radially carved on the main body (2) side and these may be used as flow paths. Further, the length ratio in the axial direction of the holding part (15a) and the cylindrical part (15b) is the length ratio of the cylindrical lock part (
It is better for L5a) to be as long as possible.
なお、上記実施例では固体レーザ媒質を断面が円形のロ
ッドとしたが、断面が矩形のいわゆるスラブ形レーザ媒
質を用いたレーザ発振装置にも適用可能である。その場
合、筒状部の断面はレーザ媒質の端面と相似でかつ小面
積の横断形状に形成される。In the above embodiment, the solid laser medium is a rod with a circular cross section, but the present invention is also applicable to a laser oscillation device using a so-called slab type laser medium with a rectangular cross section. In this case, the cross section of the cylindrical portion is formed to have a cross-sectional shape that is similar to the end face of the laser medium and has a small area.
[発明の効果コ
光軸ずれのレーザ光のOリングへの入射が確実に阻止さ
れ、0リングによる水密保持が保たれ、また、スパッタ
リング発生も極めて少なくなったことから、固体レーザ
媒質の端面への汚染が無くなり、安定なレーザ発振が長
く維持できるようになった。さらに、ホルダーの内部に
アパーチャの作用部分を形成したので装置の小形化が計
れた。[Effects of the invention] The laser beam that is misaligned with the optical axis is reliably prevented from entering the O-ring, the O-ring maintains watertightness, and the occurrence of sputtering is extremely reduced, so that the laser beam that is misaligned with the optical axis is prevented from entering the O-ring. This eliminates contamination and allows stable laser oscillation to be maintained for a long time. Furthermore, since the aperture operating portion is formed inside the holder, the device can be made more compact.
第1図は本発明の一実施例を示す断面図、第2図は第1
図A−A線における断面図、第3図は従来例を示す断面
図である。
(3)・・・レーザロッド
(15)・・・ホルダー
(15a) ・・・保持部
(15b) ・・・筒状部
(讐)・・・冷却水(冷却手段)
(22)・・・排水管FIG. 1 is a sectional view showing one embodiment of the present invention, and FIG.
A cross-sectional view taken along line A--A in FIG. 3 is a cross-sectional view showing a conventional example. (3) Laser rod (15) Holder (15a) Holding part (15b) Cylindrical part Cooling water (cooling means) (22)... drain pipe
Claims (2)
レーザ媒質と、この固体レーザ媒質の両端部を水密に保
持し内部が上記固体レーザ媒質の端面と相似系の断面で
かつ断面積が小になる筒状部に形成された一対のホルダ
ーと、上記ホルダーの両端側に設けられ光共振器を構成
する一対の反射鏡とを備えたことを特徴とする固体レー
ザ発振装置。(1) An excitation lamp, a solid-state laser medium excited by this excitation lamp, and both ends of this solid-state laser medium are held watertight, and the interior has a cross section similar to the end face of the solid-state laser medium and has a small cross-sectional area. What is claimed is: 1. A solid-state laser oscillation device comprising: a pair of holders formed in a cylindrical portion; and a pair of reflecting mirrors provided at both ends of the holder and forming an optical resonator.
徴とする請求項1記載の固体レーザ発振装置。(2) The solid-state laser oscillation device according to claim 1, wherein the holder has a cooled outer side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5487488A JPH01230276A (en) | 1988-03-10 | 1988-03-10 | Solid laser beam oscillating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5487488A JPH01230276A (en) | 1988-03-10 | 1988-03-10 | Solid laser beam oscillating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01230276A true JPH01230276A (en) | 1989-09-13 |
Family
ID=12982739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5487488A Pending JPH01230276A (en) | 1988-03-10 | 1988-03-10 | Solid laser beam oscillating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01230276A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001024260A (en) * | 1999-07-13 | 2001-01-26 | Ishikawajima Harima Heavy Ind Co Ltd | Cavities for solid-state lasers |
| EP1341271A1 (en) * | 2002-03-01 | 2003-09-03 | GSI Lumonics Ltd. | Laser apparatus |
| EP3467971A4 (en) * | 2016-05-27 | 2019-06-05 | FUJIFILM Corporation | LASER DEVICE WITH SOLID |
-
1988
- 1988-03-10 JP JP5487488A patent/JPH01230276A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001024260A (en) * | 1999-07-13 | 2001-01-26 | Ishikawajima Harima Heavy Ind Co Ltd | Cavities for solid-state lasers |
| EP1341271A1 (en) * | 2002-03-01 | 2003-09-03 | GSI Lumonics Ltd. | Laser apparatus |
| EP3467971A4 (en) * | 2016-05-27 | 2019-06-05 | FUJIFILM Corporation | LASER DEVICE WITH SOLID |
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