JPH0170112U - - Google Patents
Info
- Publication number
- JPH0170112U JPH0170112U JP1987164774U JP16477487U JPH0170112U JP H0170112 U JPH0170112 U JP H0170112U JP 1987164774 U JP1987164774 U JP 1987164774U JP 16477487 U JP16477487 U JP 16477487U JP H0170112 U JPH0170112 U JP H0170112U
- Authority
- JP
- Japan
- Prior art keywords
- base
- semiconductor product
- air blowing
- flat nozzle
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Arrangements Characterized By The Use Of Fluids (AREA)
Description
第１図ａは本考案の第１の実施例を示す縦断面
図、第１図ｂは動作状態を示す縦断面図、第２図
は本考案の第２の実施例を示す断面図である。
１……半球面状テーブル、２……ベース、３…
…平面ノズル、４……エアー圧力計、５……エア
ーシリンダ、６……モジユール。
FIG. 1a is a longitudinal sectional view showing the first embodiment of the invention, FIG. 1b is a longitudinal sectional view showing the operating state, and FIG. 2 is a sectional view showing the second embodiment of the invention. . 1... Hemispherical table, 2... Base, 3...
...Flat nozzle, 4...Air pressure gauge, 5...Air cylinder, 6...Module.
Claims (1)
、逆台形状の凹部に前記テーブルを支持し、該凹
部に高圧エアーブロー用の吹出口を開口したベー
スと、前記テーブル上の半導体製品に当接させる
基準面にエアーブロー用の吹出口を開口した平面
ノズルと、平面ノズルに接続されたエアー圧力計
とを有することを特徴とする平行出し機構。 A hemispherical table on which a semiconductor product is set; a base that supports the table in an inverted trapezoidal recess and has an outlet for high-pressure air blowing in the recess; and a base that is brought into contact with the semiconductor product on the table. A parallel alignment mechanism characterized by having a flat nozzle with an air blowing outlet opened on a reference surface, and an air pressure gauge connected to the flat nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987164774U JPH0170112U (en) | 1987-10-28 | 1987-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987164774U JPH0170112U (en) | 1987-10-28 | 1987-10-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0170112U true JPH0170112U (en) | 1989-05-10 |
Family
ID=31450666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987164774U Pending JPH0170112U (en) | 1987-10-28 | 1987-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0170112U (en) |
-
1987
- 1987-10-28 JP JP1987164774U patent/JPH0170112U/ja active Pending