JPH0174265U - - Google Patents
Info
- Publication number
- JPH0174265U JPH0174265U JP1987170321U JP17032187U JPH0174265U JP H0174265 U JPH0174265 U JP H0174265U JP 1987170321 U JP1987170321 U JP 1987170321U JP 17032187 U JP17032187 U JP 17032187U JP H0174265 U JPH0174265 U JP H0174265U
- Authority
- JP
- Japan
- Prior art keywords
- glow discharge
- electrode plate
- film forming
- substrate
- discharge decomposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000354 decomposition reaction Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 1
- 239000012530 fluid Substances 0.000 description 1
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Chemical Vapour Deposition (AREA)
Description
添付図面は実施例に用いられたグロー放電分解
装置の断面図である。
１：反応室、３：筐体、４：電極板、５：円筒
状基板、８：ヒートパイプ、９：筒体、１０：作
動流体。
The accompanying drawing is a sectional view of the glow discharge decomposition device used in the example. 1: reaction chamber, 3: housing, 4: electrode plate, 5: cylindrical substrate, 8: heat pipe, 9: cylindrical body, 10: working fluid.
Claims (1)
膜用基体及び電極板が配置され、グロー放電によ
つて基体上に成膜されるグロー放電分解装置にお
いて、前記電極板にヒートパイプが付設されてい
ることを特徴とするグロー放電分解装置。 In a glow discharge decomposition apparatus in which a film forming substrate and an electrode plate are arranged inside a reaction chamber into which a thin film forming gas is introduced, and a film is formed on the substrate by glow discharge, a heat pipe is attached to the electrode plate. A glow discharge decomposition device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987170321U JPH0174265U (en) | 1987-11-06 | 1987-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987170321U JPH0174265U (en) | 1987-11-06 | 1987-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0174265U true JPH0174265U (en) | 1989-05-19 |
Family
ID=31461161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987170321U Pending JPH0174265U (en) | 1987-11-06 | 1987-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0174265U (en) |
-
1987
- 1987-11-06 JP JP1987170321U patent/JPH0174265U/ja active Pending