JPH0223951U - - Google Patents
Info
- Publication number
- JPH0223951U JPH0223951U JP10100388U JP10100388U JPH0223951U JP H0223951 U JPH0223951 U JP H0223951U JP 10100388 U JP10100388 U JP 10100388U JP 10100388 U JP10100388 U JP 10100388U JP H0223951 U JPH0223951 U JP H0223951U
- Authority
- JP
- Japan
- Prior art keywords
- elevating
- elevating base
- spatulas
- surface plate
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 2
- 230000003028 elevating effect Effects 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 2
Description
第1図〜第4図は本考案装置の具体例を示す図
であり、第1図は第2図の―視部分断面図、
第2図は本考案装置を研磨装置に設置した状態を
示す図、第3図は第1図の―視断面図、第4
図は第1図のドレツシング装置Dを下から見た図
である。
1 to 4 are diagrams showing specific examples of the device of the present invention, and FIG. 1 is a partial cross-sectional view of FIG.
Figure 2 is a diagram showing the device of the present invention installed in a polishing machine, Figure 3 is a cross-sectional view of Figure 1, and Figure 4 is a cross-sectional view of Figure 1.
The figure shows the dressing device D of FIG. 1 viewed from below.
Claims (1)
の目詰まりを取るドレツシング装置であつて、定
盤1の半径方向に複数個配置されたヘラ3と、ヘ
ラ3の上方に配置された昇降ベース4と、昇降ベ
ース4に保持された加圧チユーブ5と、加圧チユ
ーブ5とヘラ3の接続機構6と、昇降ベース4を
昇降させる昇降駆動装置7とを有することを特徴
とする研磨用パツドのドレツシング装置。 A polishing pad 2 stretched over a rotating surface plate 1
A dressing device for removing clogging, which includes a plurality of spatulas 3 arranged in the radial direction of a surface plate 1, an elevating base 4 disposed above the spatulas 3, and a pressure tube held on the elevating base 4. 5, a connection mechanism 6 for connecting the pressurizing tube 5 and the spatula 3, and an elevating drive device 7 for elevating the elevating base 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10100388U JPH0223951U (en) | 1988-07-29 | 1988-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10100388U JPH0223951U (en) | 1988-07-29 | 1988-07-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0223951U true JPH0223951U (en) | 1990-02-16 |
Family
ID=31329599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10100388U Pending JPH0223951U (en) | 1988-07-29 | 1988-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0223951U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04115219U (en) * | 1991-03-13 | 1992-10-13 | 株式会社成田製陶所 | low input gas burner |
-
1988
- 1988-07-29 JP JP10100388U patent/JPH0223951U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04115219U (en) * | 1991-03-13 | 1992-10-13 | 株式会社成田製陶所 | low input gas burner |
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