JPH0223951U - - Google Patents

Info

Publication number
JPH0223951U
JPH0223951U JP10100388U JP10100388U JPH0223951U JP H0223951 U JPH0223951 U JP H0223951U JP 10100388 U JP10100388 U JP 10100388U JP 10100388 U JP10100388 U JP 10100388U JP H0223951 U JPH0223951 U JP H0223951U
Authority
JP
Japan
Prior art keywords
elevating
elevating base
spatulas
surface plate
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10100388U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10100388U priority Critical patent/JPH0223951U/ja
Publication of JPH0223951U publication Critical patent/JPH0223951U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図〜第4図は本考案装置の具体例を示す図
であり、第1図は第2図の―視部分断面図、
第2図は本考案装置を研磨装置に設置した状態を
示す図、第3図は第1図の―視断面図、第4
図は第1図のドレツシング装置Dを下から見た図
である。
1 to 4 are diagrams showing specific examples of the device of the present invention, and FIG. 1 is a partial cross-sectional view of FIG.
Figure 2 is a diagram showing the device of the present invention installed in a polishing machine, Figure 3 is a cross-sectional view of Figure 1, and Figure 4 is a cross-sectional view of Figure 1.
The figure shows the dressing device D of FIG. 1 viewed from below.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 回転する定盤1の上に張られた研磨用パツド2
の目詰まりを取るドレツシング装置であつて、定
盤1の半径方向に複数個配置されたヘラ3と、ヘ
ラ3の上方に配置された昇降ベース4と、昇降ベ
ース4に保持された加圧チユーブ5と、加圧チユ
ーブ5とヘラ3の接続機構6と、昇降ベース4を
昇降させる昇降駆動装置7とを有することを特徴
とする研磨用パツドのドレツシング装置。
A polishing pad 2 stretched over a rotating surface plate 1
A dressing device for removing clogging, which includes a plurality of spatulas 3 arranged in the radial direction of a surface plate 1, an elevating base 4 disposed above the spatulas 3, and a pressure tube held on the elevating base 4. 5, a connection mechanism 6 for connecting the pressurizing tube 5 and the spatula 3, and an elevating drive device 7 for elevating the elevating base 4.
JP10100388U 1988-07-29 1988-07-29 Pending JPH0223951U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10100388U JPH0223951U (en) 1988-07-29 1988-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10100388U JPH0223951U (en) 1988-07-29 1988-07-29

Publications (1)

Publication Number Publication Date
JPH0223951U true JPH0223951U (en) 1990-02-16

Family

ID=31329599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10100388U Pending JPH0223951U (en) 1988-07-29 1988-07-29

Country Status (1)

Country Link
JP (1) JPH0223951U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04115219U (en) * 1991-03-13 1992-10-13 株式会社成田製陶所 low input gas burner

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04115219U (en) * 1991-03-13 1992-10-13 株式会社成田製陶所 low input gas burner

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