JPH0227109U - - Google Patents
Info
- Publication number
- JPH0227109U JPH0227109U JP10448988U JP10448988U JPH0227109U JP H0227109 U JPH0227109 U JP H0227109U JP 10448988 U JP10448988 U JP 10448988U JP 10448988 U JP10448988 U JP 10448988U JP H0227109 U JPH0227109 U JP H0227109U
- Authority
- JP
- Japan
- Prior art keywords
- objective lens
- optical path
- specimen
- luminous flux
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 10
- 230000004907 flux Effects 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Lenses (AREA)
Description
第１図は、本考案の実施例に係る干渉用対物レ
ンズ装置の断面図である。第２図は、第１図の右
側面図である。第３図は、本考案の原理を説明す
るための光学系の要部を示す図である。
主要部分の符号の説明、１…対物レンズ、２…
標本、３…半透過用プリズム、４…参照ミラー、
５…鏡筒、６…外筒、６ａ…カム溝、７…大径の
円筒、７ａ…開口部、８…小径の円筒、９ａ，９
ｂ…調整用つまみ、１０，１１…固定ピン、１２
…ウエーブワツシヤー。
FIG. 1 is a sectional view of an interference objective lens device according to an embodiment of the present invention. FIG. 2 is a right side view of FIG. 1. FIG. 3 is a diagram showing essential parts of an optical system for explaining the principle of the present invention. Explanation of symbols of main parts, 1...Objective lens, 2...
Specimen, 3... Semi-transparent prism, 4... Reference mirror,
5... Lens barrel, 6... Outer cylinder, 6a... Cam groove, 7... Large diameter cylinder, 7a... Opening, 8... Small diameter cylinder, 9a, 9
b...Adjustment knob, 10, 11...Fixing pin, 12
...Wavewasher.
Claims (1)
割部材材と； 該光路分割部材により分割された一方の光束を
前記光路分割部材に向けて反射する反射光学部材
と； 前記光路分割部材により分割された他方の光束
を前記標本に投射し、該標本により再び光路分割
部材の方に反射された光束と、前記反射光学部材
からの反射光束とにより生ずる干渉縞の間隔また
は方向を調整するために、前記反射光学部材の傾
きを調整する調整装置と； を備えた干渉用対物レンズ装置に於いて、 前記光路分割部材を前記反射光学部材および前
記調整部材と共に一体化して、これらの部材を前
記対物レンズの光軸方向に沿つて、該対物レンズ
に対し移動させる移動装置を備えたことを特徴と
する干渉用対物レンズ装置。[Claims for Utility Model Registration] An objective lens; An optical path dividing member disposed between the objective lens and the specimen; Directing one of the light beams divided by the optical path dividing member toward the optical path dividing member. a reflective optical member that reflects; a luminous flux that projects the other luminous flux split by the optical path splitting member onto the specimen and is reflected back toward the optical path splitting member by the specimen; and a luminous flux that is reflected from the reflective optical member; an adjustment device that adjusts the inclination of the reflective optical member in order to adjust the interval or direction of interference fringes generated by the interference objective lens device; An interference objective lens device comprising a moving device that is integrated with an adjustment member and moves these members relative to the objective lens along the optical axis direction of the objective lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10448988U JPH0227109U (en) | 1988-08-06 | 1988-08-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10448988U JPH0227109U (en) | 1988-08-06 | 1988-08-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0227109U true JPH0227109U (en) | 1990-02-22 |
Family
ID=31336252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10448988U Pending JPH0227109U (en) | 1988-08-06 | 1988-08-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0227109U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010223807A (en) * | 2009-03-24 | 2010-10-07 | Topcon Corp | Reference barrel unit |
-
1988
- 1988-08-06 JP JP10448988U patent/JPH0227109U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010223807A (en) * | 2009-03-24 | 2010-10-07 | Topcon Corp | Reference barrel unit |
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