JPH0249128U - - Google Patents
Info
- Publication number
- JPH0249128U JPH0249128U JP12774988U JP12774988U JPH0249128U JP H0249128 U JPH0249128 U JP H0249128U JP 12774988 U JP12774988 U JP 12774988U JP 12774988 U JP12774988 U JP 12774988U JP H0249128 U JPH0249128 U JP H0249128U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- piping
- cvd apparatus
- checked
- outer peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は、この考案の一実施例を示すＣＶＤ装
置の要部概略図である。第２図は、従来のＣＶＤ
装置を説明するための概念図である。
１ａ……ボツクス、１ｂ……小ボツクス（ＣＶ
Ｄ成長域）、２……回転棒、３ａ，３ｂ，３ｃ…
…保持棒、４ａ，４ｃ……ウエーハ保持ピンセツ
ト、５ａ，５ｂ，５ｃ……ウエーハ、６ａ，６ｂ
……ウエーハ出入口、７ａ，７ｂ……ガス配管、
８……ガス排出口、９ａ，９ｂ……ウエーハ置き
台。
FIG. 1 is a schematic diagram of the main parts of a CVD apparatus showing an embodiment of this invention. Figure 2 shows conventional CVD
FIG. 2 is a conceptual diagram for explaining the device. 1a...Box, 1b...Small box (CV
D growth area), 2...rotating rod, 3a, 3b, 3c...
...Holding rod, 4a, 4c...Wafer holding tweezers, 5a, 5b, 5c...Wafer, 6a, 6b
...Wafer entrance/exit, 7a, 7b...Gas piping,
8...Gas exhaust port, 9a, 9b...Wafer stand.
Claims (1)
回転棒に取付けられた保持棒にてチヤツクし、ウ
エーハ両面へ反応ガスを導く配管を設けたことを
特徴とするＣＶＤ装置。 A CVD apparatus characterized in that the outer peripheral edge of a semiconductor wafer is checked by a holding rod attached to a rotating rod provided at the center of rotation, and piping is provided for guiding reactive gas to both surfaces of the wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12774988U JPH0249128U (en) | 1988-09-29 | 1988-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12774988U JPH0249128U (en) | 1988-09-29 | 1988-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0249128U true JPH0249128U (en) | 1990-04-05 |
Family
ID=31380457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12774988U Pending JPH0249128U (en) | 1988-09-29 | 1988-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249128U (en) |
-
1988
- 1988-09-29 JP JP12774988U patent/JPH0249128U/ja active Pending