JPH0289839U - - Google Patents
Info
- Publication number
- JPH0289839U JPH0289839U JP17052888U JP17052888U JPH0289839U JP H0289839 U JPH0289839 U JP H0289839U JP 17052888 U JP17052888 U JP 17052888U JP 17052888 U JP17052888 U JP 17052888U JP H0289839 U JPH0289839 U JP H0289839U
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- semiconductor
- adsorption means
- semiconductor pellet
- sensor section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000001179 sorption measurement Methods 0.000 claims description 3
Landscapes
- Die Bonding (AREA)
Description
第１図は本考案に係る半導体製造装置の一実施
例を示す要部縦断面図、第２図は第１図装置にお
いてコレツトと半導体ペレツトとの水平位置ずれ
状態を示す要部縦断面図、第３図と第４図は従来
の半導体製造装置の一具体例を示す斜視図とその
要部であるアーム部とコレツトの縦断面図、第５
図は本考案の課題を示すコレツトと半導体ペレツ
トの縦断面図である。
３……半導体ペレツト、１２……ペレツト吸着
手段、１３……センサー部。
FIG. 1 is a vertical cross-sectional view of a main part showing an embodiment of a semiconductor manufacturing apparatus according to the present invention, FIG. 3 and 4 are a perspective view showing a specific example of a conventional semiconductor manufacturing apparatus, a vertical cross-sectional view of the main parts of the arm part and the collet, and FIG.
The figure is a longitudinal cross-sectional view of a collet and a semiconductor pellet illustrating the problem of the present invention. 3... Semiconductor pellet, 12... Pellet adsorption means, 13... Sensor section.
Claims (1)
着手段と、上記ペレツト吸着手段と半導体ペレツ
トとの間の浮遊電気容量を検知して両者の水平位
置ずれを検出するセンサー部とを具備したことを
特徴とする半導体製造装置。 The semiconductor pellet is characterized by comprising a pellet adsorption means disposed above the semiconductor pellet, and a sensor section that detects stray electric capacitance between the pellet adsorption means and the semiconductor pellet to detect a horizontal positional shift between the two. Semiconductor manufacturing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17052888U JPH0289839U (en) | 1988-12-27 | 1988-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17052888U JPH0289839U (en) | 1988-12-27 | 1988-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0289839U true JPH0289839U (en) | 1990-07-17 |
Family
ID=31461557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17052888U Pending JPH0289839U (en) | 1988-12-27 | 1988-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0289839U (en) |
-
1988
- 1988-12-27 JP JP17052888U patent/JPH0289839U/ja active Pending