JPH03109100U - - Google Patents
Info
- Publication number
- JPH03109100U JPH03109100U JP1459590U JP1459590U JPH03109100U JP H03109100 U JPH03109100 U JP H03109100U JP 1459590 U JP1459590 U JP 1459590U JP 1459590 U JP1459590 U JP 1459590U JP H03109100 U JPH03109100 U JP H03109100U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- irradiation
- generation section
- window portion
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 description 3
- 239000011888 foil Substances 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Description
第１図は本考案の一実施例である電子線照射装
置の概略部分拡大断面図、第２図は遮蔽板の断面
図、第３図は従来の電子線照射装置の概略断面図
である。
１……フイラメント、２……ガン構造体、３…
…グリツド、１０……電子線発生部、１１……タ
ーミナル、１２……加速管、２０……照射室、２
１……照射空間、２２……トレイ、３０……照射
窓部、３１……窓箔、３２……窓枠構造体、４０
……遮蔽装置、４１……遮蔽板、４２……ガイド
部、４３……通路。
FIG. 1 is a schematic partial enlarged cross-sectional view of an electron beam irradiation device according to an embodiment of the present invention, FIG. 2 is a cross-sectional view of a shielding plate, and FIG. 3 is a schematic cross-sectional view of a conventional electron beam irradiation device. 1... filament, 2... gun structure, 3...
... Grid, 10 ... Electron beam generation section, 11 ... Terminal, 12 ... Accelerator tube, 20 ... Irradiation chamber, 2
DESCRIPTION OF SYMBOLS 1... Irradiation space, 22... Tray, 30... Irradiation window section, 31... Window foil, 32... Window frame structure, 40
...shielding device, 41 ... shielding plate, 42 ... guide section, 43 ... passage.
Claims (1)
、被処理物に前記電子線を照射する照射室と、前
記電子線発生部内の真空雰囲気と前記照射室内の
不活性雰囲気とを仕切ると共に電子線を通過させ
る照射窓部とを有する電子線照射装置において、
前記照射室内に前記照射窓部を一時的に遮蔽する
遮蔽装置を設けたことを特徴とする電子線照射装
置。 An electron beam generation section that generates a curtain-shaped electron beam, an irradiation chamber that irradiates the object to be processed with the electron beam, and an electron beam that partitions a vacuum atmosphere in the electron beam generation section and an inert atmosphere in the irradiation chamber. In an electron beam irradiation device having an irradiation window portion through which
An electron beam irradiation device characterized in that a shielding device for temporarily shielding the irradiation window portion is provided in the irradiation chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1459590U JPH03109100U (en) | 1990-02-16 | 1990-02-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1459590U JPH03109100U (en) | 1990-02-16 | 1990-02-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03109100U true JPH03109100U (en) | 1991-11-08 |
Family
ID=31517947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1459590U Pending JPH03109100U (en) | 1990-02-16 | 1990-02-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03109100U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007125119A (en) * | 2005-11-01 | 2007-05-24 | Mitsubishi Heavy Ind Ltd | Electron beam sterilizer |
-
1990
- 1990-02-16 JP JP1459590U patent/JPH03109100U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007125119A (en) * | 2005-11-01 | 2007-05-24 | Mitsubishi Heavy Ind Ltd | Electron beam sterilizer |