JPH03114570A - Film forming apparatus - Google Patents
Film forming apparatusInfo
- Publication number
- JPH03114570A JPH03114570A JP25302389A JP25302389A JPH03114570A JP H03114570 A JPH03114570 A JP H03114570A JP 25302389 A JP25302389 A JP 25302389A JP 25302389 A JP25302389 A JP 25302389A JP H03114570 A JPH03114570 A JP H03114570A
- Authority
- JP
- Japan
- Prior art keywords
- holding member
- coating liquid
- coating
- liquid
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
- Photoreceptors In Electrophotography (AREA)
Abstract
Description
【発明の詳細な説明】
（ａ）産業上の利用分野
この発明は例えば静電複写機における有機感光体成膜装
置等のように、基体を塗布液中に浸漬することによって
基体表面に膜形成を行う成膜装置に関する。DETAILED DESCRIPTION OF THE INVENTION (a) Industrial Application Field This invention is for forming a film on the surface of a substrate by immersing the substrate in a coating liquid, such as in an organic photoreceptor film forming apparatus for an electrostatic copying machine. The present invention relates to a film forming apparatus that performs.
（ｂ）従来の技術
第１図は有機怒光体の成膜装置の構成を示した図であり
、以下、この装置の構成および成膜方法を簡単に説明す
る。(b) Prior art FIG. 1 is a diagram showing the configuration of an apparatus for forming a film for an organic photoreceptor, and the structure of this apparatus and the method for forming a film will be briefly described below.
塗布液１が収納された塗工槽２の底面中央部には、基体
４の外径大の侵入孔３が形成されている。なおこの侵入
孔３には周面に弾性ゴムからなるブレードが設けられ、
後述する基体や保持部材が侵入孔３に位置しているとき
にそれらに密着して、内部の塗布液が漏れないようにな
っている。基体４は例えばアルミニウム等からなる円筒
形状のもので、この基体４を侵入孔３から塗工槽中に侵
入させ、さらに上方に引き上げる。すなわち塗工液１中
を通過させるわけであり、これによって基体４の表面に
は塗布液ｌが塗布される。An entry hole 3 having a large outer diameter is formed in the center of the bottom surface of the coating tank 2 in which the coating liquid 1 is stored. Note that this penetration hole 3 is provided with a blade made of elastic rubber on its circumferential surface.
When a base body and a holding member, which will be described later, are located in the penetration hole 3, they are in close contact with the base body and the holding member to prevent the internal coating liquid from leaking. The base body 4 is made of, for example, aluminum and has a cylindrical shape, and is introduced into the coating tank through the penetration hole 3 and then pulled upward. That is, it passes through the coating liquid 1, and thereby the coating liquid 1 is applied to the surface of the substrate 4.
基体４の押し上げは押上機構によって行われる。押上機
構は、モータにより上下移動する押上治具６と、保持部
材５ａ、５ｂ、係止部７を存している。基体４の上下端
には保持部材５ａ、５ｂが挿入され、その状態で押上治
具６に支持されて上方に押し上げられる。そして、下側
の保持部材５ｂが侵入孔３に位置したときに押上治具６
の移動が停止し、基体４は図示しない引き上げ機構によ
り保持部材５ａごと上方に引き上げられる。このとき下
側の保持部材５ｂは係止部７により係止され、侵入孔３
を塞いで塗布液が漏れないようにしている。この状態で
押上治具６が引き下げられ、保持部材５ｂと押上治具６
との間に新たな基体および保持部材が挿入される。そし
て前回の処理時に下側だった保持部材５ｂが今度は上側
の保持部材として成膜処理が行われる。The base body 4 is pushed up by a push-up mechanism. The push-up mechanism includes a push-up jig 6 that is moved up and down by a motor, holding members 5a and 5b, and a locking portion 7. Holding members 5a and 5b are inserted into the upper and lower ends of the base body 4, and in this state, it is supported by a push-up jig 6 and pushed upward. Then, when the lower holding member 5b is located in the penetration hole 3, the push-up jig 6
The movement of the base body 4 is stopped, and the base body 4 is pulled upward together with the holding member 5a by a lifting mechanism (not shown). At this time, the lower holding member 5b is locked by the locking part 7, and the penetration hole 3
to prevent the coating liquid from leaking. In this state, the push-up jig 6 is pulled down, and the holding member 5b and push-up jig 6
A new base body and a holding member are inserted between the two. Then, the film forming process is performed on the holding member 5b, which was on the lower side during the previous process, as the upper holding member this time.
（Ｃ）発明が解決しようとする課題
ところで上述の成膜装置では、−旦塗工層１中を通過し
て上方に引き上げられた保持部材５ａ５ｂ・・・は何巡
めかの成膜時に再使用される。(C) Problems to be Solved by the Invention In the above-mentioned film forming apparatus, the holding members 5a5b, which have passed through the coating layer 1 and been pulled upward, are reused during several rounds of film forming. be done.
ところが従来の装置ではこの保持部材５ａ、５ｂ・・・
の表面に塗布液が付着して膜形成がされてしまっており
、そのままの状態で再使用すると塗工槽２中において基
体表面から膜が剥がれ落ち、それが基体表面に付着して
成膜欠陥を生じさせてしまう不都合がある。この成膜欠
陥を防止するためには保持部材を使用ごとに洗浄するこ
とが必要であり、装置、工程が増加してコストアンプに
なる不都合があった。また、保持部材への塗布は塗布液
の無駄使いでもある。However, in the conventional device, these holding members 5a, 5b...
The coating liquid has adhered to the surface of the substrate and formed a film, and if it is reused in that state, the film will peel off from the substrate surface in coating tank 2, and it will adhere to the substrate surface and cause film formation defects. This has the disadvantage of causing In order to prevent this film formation defect, it is necessary to clean the holding member every time it is used, which has the disadvantage of increasing the number of devices and processes, which increases costs. Moreover, coating the holding member is a waste of the coating liquid.
そこでこの発明は保持部材に塗工液が付着しないように
して、塗布液の無駄使いや装置、工程の増加によるコス
トアップを防止する成膜装置を提供することを目的とす
る。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a film forming apparatus that prevents the coating liquid from adhering to the holding member and prevents wasteful use of the coating liquid and an increase in costs due to an increase in the number of apparatuses and processes.
（ｄ１課題を解決するための手段
この発明は、塗布液が収容された塗工槽の底面に侵入孔
を形成し、基体の上下端を保持部材を用いて保持した状
態で前記侵入孔から塗工槽中に侵入させ、塗工槽底面か
ら上部までを通過させるこ前記保持部材表面に、前記塗
布液に対する撥液層を形成したことを特徴とする。(Means for Solving Problem d1) This invention forms an inlet hole in the bottom of a coating tank in which a coating liquid is stored, and coats the substrate through the inlet hole while holding the upper and lower ends of the substrate using a holding member. A liquid-repellent layer for the coating liquid is formed on the surface of the holding member that is allowed to enter the coating tank and pass from the bottom to the top of the coating tank.
ｔｅ１作用
この発明においては成膜時に保持部材が塗布液中を通過
してもその保持部材表面に塗膜が形成されてしまうこと
がない。保持部材表面の撥液層が塗布液を撥くからであ
る。te1 effect In the present invention, even if the holding member passes through the coating liquid during film formation, a coating film will not be formed on the surface of the holding member. This is because the liquid-repellent layer on the surface of the holding member repels the coating liquid.
（ｆ）実施例
例えば第１図の成膜装置で使用している保持部材は円筒
または円柱状のものである。この保持部材５ａ、５ｂ・
・・ （以下、保持部材５として示す。）に表面に撥液
層を形成する。(f) Example For example, the holding member used in the film forming apparatus shown in FIG. 1 is cylindrical or cylindrical. These holding members 5a, 5b・
A liquid-repellent layer is formed on the surface of (hereinafter referred to as the holding member 5).
保持部材５０基体部には塗布液により腐食や反応を生じ
ず、かつ加工性の良いものが用いられる。例えばこの例
ではアルミ、；ラム合金を用いている。そしてその基体
部の表面に撥液性を有する層を設けられる。撥液性材と
しては表面自由エネルギーが塗布液の表面自由エネルギ
ーのほぼ７５％以下の材質を用いることが望ましい。例
えばこの実施例では表面自由エネルギーが１８ｄｙｎｅ
／ｃｍ以下のフッ素系樹脂を用いている。例えばＦＥＰ
（４フッ化エチレン−６フツ化プロピレンの共ｉ合体
）、ＰＦＡ（４フッ化エチレン−パーフロロアルコキシ
エチレンの共重合体）などである。なおこのときに用い
た塗布液は、ジブロムアンスアンスロン−２重量部、ブ
チラール樹脂−２重量部、シクロへキサノン２３０重量
部を調合し、８時間の間ボールミルで十分に撹拌処理し
たものである。保持部材基体の表面にこれらの層を形成
するには例えば以下のような方法が用いられる。The base portion of the holding member 50 is made of a material that does not corrode or react with the coating liquid and has good workability. For example, in this example, aluminum and ram alloy are used. A liquid-repellent layer is provided on the surface of the base portion. As the liquid-repellent material, it is desirable to use a material whose surface free energy is approximately 75% or less of the surface free energy of the coating liquid. For example, in this example, the surface free energy is 18 dyne.
/cm or less is used. For example, FEP
(a copolymer of tetrafluoroethylene and hexafluoropropylene), PFA (a copolymer of tetrafluoroethylene and perfluoroalkoxyethylene), and the like. The coating liquid used at this time was a mixture of 2 parts by weight of dibrom anthurone, 2 parts by weight of butyral resin, and 230 parts by weight of cyclohexanone, and was sufficiently stirred in a ball mill for 8 hours. . For example, the following method is used to form these layers on the surface of the holding member base.
■表面を上記のようなフッ素樹脂、裏面を表面自由エネ
ルギーが４０ｄｙｎｅ／ｃｎ＋程度の接着が可能な層と
し、保持部材基体の表面に接着する。(2) The front surface is made of a fluororesin as described above, the back surface is made of a layer capable of adhesion with a surface free energy of about 40 dyne/cn+, and is adhered to the surface of the holding member base.
■樹脂フィルムを円筒状に形成し、保持部材５をこの樹
脂フィルム内に治めて加熱する。すると加熱により樹脂
フィルムが収縮して保持部材基体の表面に貼着される。(2) A resin film is formed into a cylindrical shape, and the holding member 5 is placed inside the resin film and heated. Then, the resin film shrinks due to heating and is adhered to the surface of the holding member base.
■保持部材基体の表面を凹凸状に形成し、樹脂フィルム
を圧着させる。(2) Form the surface of the holding member base into an uneven shape, and press the resin film onto it.
以上のようにして表面に撥液層が形成された保持部材５
を用いて塗工処理を行ったところ、保持部材５の表面に
は塗布液が付着してしまうことがなかった。Holding member 5 with a liquid-repellent layer formed on its surface as described above
When the coating process was carried out using the above, the coating liquid did not adhere to the surface of the holding member 5.
（ｇ１発明の効果
以上のようにこの発明によれば、保持部材の表面に膜形
成されることがなく塗布液の無駄使いや、保持部材表面
から剥がれた落ちた膜による基体表面の塗膜欠陥が生じ
ることがなく、さらに、保持部材洗浄装置およびその工
程を省略することができるのでコストアップの解消およ
び製造工程時間の短縮をすることができる。(G1 Effects of the Invention As described above, according to the present invention, a film is not formed on the surface of the holding member, resulting in wasteful use of the coating liquid, and defects in the coating film on the substrate surface due to a film peeled off from the surface of the holding member. Further, since the holding member cleaning device and its process can be omitted, cost increase can be eliminated and manufacturing process time can be shortened.
第１図は一般的な成膜装置の構成を示した図である。
１−塗布液、２−塗工槽、３−侵入孔、４−基体、５ａ
、５ｂ−保持部材、６−押上治具。FIG. 1 is a diagram showing the configuration of a general film forming apparatus. 1-Coating liquid, 2-Coating tank, 3-Intrusion hole, 4-Substrate, 5a
, 5b-holding member, 6-pushing jig.
Claims (1)
し、基体の上下端を保持部材を用いて保持した状態で前
記侵入孔から塗工槽中に侵入させ、塗工槽底面から上部
までを通過させることによって前記基体の表面に塗布液
を塗布して成膜を行う成膜装置において、 前記保持部材表面に、前記塗布液に対する撥液層を形成
したことを特徴とする塗膜形成装置。(1) An entry hole is formed in the bottom of the coating tank containing the coating liquid, and the upper and lower ends of the substrate are held using holding members, and the substrate is allowed to enter the coating tank through the entry hole. A film forming apparatus for forming a film by applying a coating liquid to the surface of the substrate by passing it from the bottom to the top, characterized in that a liquid repellent layer for the coating liquid is formed on the surface of the holding member. Paint film forming equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25302389A JPH03114570A (en) | 1989-09-28 | 1989-09-28 | Film forming apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25302389A JPH03114570A (en) | 1989-09-28 | 1989-09-28 | Film forming apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03114570A true JPH03114570A (en) | 1991-05-15 |
Family
ID=17245409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25302389A Pending JPH03114570A (en) | 1989-09-28 | 1989-09-28 | Film forming apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03114570A (en) |
-
1989
- 1989-09-28 JP JP25302389A patent/JPH03114570A/en active Pending
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