JPH0319491U - - Google Patents
Info
- Publication number
- JPH0319491U JPH0319491U JP7973389U JP7973389U JPH0319491U JP H0319491 U JPH0319491 U JP H0319491U JP 7973389 U JP7973389 U JP 7973389U JP 7973389 U JP7973389 U JP 7973389U JP H0319491 U JPH0319491 U JP H0319491U
- Authority
- JP
- Japan
- Prior art keywords
- pump
- blades
- pump element
- stationary
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案真空ポンプの一実施例を示す縦
断面図、第２図はジグバーン形ポンプ要素の要部
平面図、第３図は渦流形ポンプ要素の平面図、第
４図は他の実施例を示す縦断面図、第５図及び第
６図は従来例の縦断面図である。
１……ネジ溝形ポンプ要素、２……ジグバーン
形ポンプ要素、３……渦流形ポンプ要素、４……
ポンプハウジング、５……吸気口、６……排気口
、８……駆動源（モータ）、１１……静止外筒、
１２……回転内筒、１３……ネジ溝、２１……静
止円板、２２……回転円板、２４……ら旋溝、３
１……羽根、３２……ロータ、３３……環状排気
通路。
Fig. 1 is a longitudinal cross-sectional view showing one embodiment of the vacuum pump of the present invention, Fig. 2 is a plan view of the main part of a jigburn type pump element, Fig. 3 is a plan view of a vortex type pump element, and Fig. 4 is a plan view of other parts. A vertical cross-sectional view showing the embodiment, and FIGS. 5 and 6 are vertical cross-sectional views of a conventional example. 1... Thread groove type pump element, 2... Jig burn type pump element, 3... Eddy current pump element, 4...
Pump housing, 5... Intake port, 6... Exhaust port, 8... Drive source (motor), 11... Stationary outer cylinder,
12... Rotating inner cylinder, 13... Thread groove, 21... Stationary disk, 22... Rotating disk, 24... Spiral groove, 3
1... Vane, 32... Rotor, 33... Annular exhaust passage.
Claims (1)
筒１２とを備え、これら筒の対向壁面にネジ溝１
３を形成したネジ溝形ポンプ要素１と、軸方向に
近接配置される静止円板２１と回転円板２２とを
備え、これら円板の対向平面にら旋溝２４を形成
したジグバーン形ポンプ要素２と、外周部に羽根
３１をもつロータ３２と前記羽根３１を配設する
環状排気通路３３とを備えた渦流形ポンプ要素３
とを、この順序で、一つのポンプハウジング４に
設ける吸気口５から排気口６にかけて直列に配設
すると共に、これら各ポンプ要素１，２，３を同
一の駆動源８に連結していることを特徴とする複
合形真空ポンプ。 It is equipped with a stationary outer cylinder 11 and a rotating inner cylinder 12 that are arranged close to each other in the radial direction, and a thread groove 1 is formed on the opposing wall surfaces of these cylinders.
3, a stationary disk 21 and a rotating disk 22 disposed close to each other in the axial direction, and a jigburn type pump element having a spiral groove 24 formed on the opposing planes of these disks. 2, a vortex pump element 3 comprising a rotor 32 having blades 31 on the outer periphery, and an annular exhaust passage 33 in which the blades 31 are disposed.
are arranged in series in this order from the intake port 5 to the exhaust port 6 provided in one pump housing 4, and each of these pump elements 1, 2, and 3 is connected to the same drive source 8. A compound vacuum pump featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989079733U JPH0734234Y2 (en) | 1989-07-06 | 1989-07-06 | Combined vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989079733U JPH0734234Y2 (en) | 1989-07-06 | 1989-07-06 | Combined vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0319491U true JPH0319491U (en) | 1991-02-26 |
| JPH0734234Y2 JPH0734234Y2 (en) | 1995-08-02 |
Family
ID=31624159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989079733U Expired - Lifetime JPH0734234Y2 (en) | 1989-07-06 | 1989-07-06 | Combined vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0734234Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020534478A (en) * | 2017-09-20 | 2020-11-26 | エドワーズ リミテッド | A set of vacuum pumps including drag pumps and drag pumps |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60125795A (en) * | 1983-12-09 | 1985-07-05 | Osaka Shinku Kiki Seisakusho:Kk | Composite vacuum pump |
| JPS6385288A (en) * | 1986-09-29 | 1988-04-15 | Hitachi Ltd | Vacuum pump |
| JPS63147989A (en) * | 1986-12-09 | 1988-06-20 | Daikin Ind Ltd | compound vacuum pump |
| JPH01170795A (en) * | 1987-12-25 | 1989-07-05 | Daikin Ind Ltd | Eddy current turbomachinery |
-
1989
- 1989-07-06 JP JP1989079733U patent/JPH0734234Y2/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60125795A (en) * | 1983-12-09 | 1985-07-05 | Osaka Shinku Kiki Seisakusho:Kk | Composite vacuum pump |
| JPS6385288A (en) * | 1986-09-29 | 1988-04-15 | Hitachi Ltd | Vacuum pump |
| JPS63147989A (en) * | 1986-12-09 | 1988-06-20 | Daikin Ind Ltd | compound vacuum pump |
| JPH01170795A (en) * | 1987-12-25 | 1989-07-05 | Daikin Ind Ltd | Eddy current turbomachinery |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020534478A (en) * | 2017-09-20 | 2020-11-26 | エドワーズ リミテッド | A set of vacuum pumps including drag pumps and drag pumps |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0734234Y2 (en) | 1995-08-02 |