JPH03209203A - Color filter manufacturing method - Google Patents

Abstract

PURPOSE:To obtain a color filter with shield film having satisfactory smoothness at low cost by irradiating a transparent substrate with UV (ultraviolet) rays from the back side, executing the patterning of black negative resist and forming the shield film only at an interval between a colored part. CONSTITUTION:Colored parts 2 with prescribed patterns in R, G and B colors are formed on a transparent substrate 1 and next, black photoresist 3 is applied onto the glass substrate 1 and the colored parts 2. Then, predrying is executed. Continuously, UV rays (a) irradiates the back side of the glass substrate 1. Afterwards, the black photoresist 3 is developed by developer and removed from the upper surface of the colored part, where the colored part itself becomes mask when being irradiated with the UV rays, and a shield film 3' is formed at the interval between the colored part 2. Thus, the color filter with shield film, which surface is smooth, can be obtained.

Description

Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a method for manufacturing a color filter used for liquid crystal color displays, etc., and particularly a method for producing a color filter with a light-shielding film having a light transmitting film between the colored portions (color filter II). The present invention relates to a method for manufacturing a color filter.

[Conventional technology]

For example, one way to make a full-color liquid crystal display is to use color filters for three primary colors.

This type of color filter is manufactured by forming a desired pattern of R. It has a structure in which colored parts of G and B colors and a light shielding part for preventing light leakage from between each colored part are formed. When manufacturing it, there are cases in which a colored part and a light-shielding film are formed on a glass substrate in this order, and there are also cases in which a light-shielding film and a colored part are formed in that order on a glass substrate. An example of the former is shown in FIG. 6(A). Examples of the latter are shown in FIG. 6(B).

That is, in FIG. 6(A), R. G. Forming the appetizer color part 22 of B,
After this, a light-shielding lI 23 is formed between each colored portion 22 .

In this case, using a photomask for a light shielding film, patterning is performed so that the continuous light film 23 overlaps the edge of the colored portion 22 .

In FIG. 6(B), first, continuous light is applied onto the glass substrate 21! l2
3' is formed using a continuous light film photomask, and then patterned so that the colored portions 22' of each color overlap with the edge portions of the light shielding 19 23'. [Problem to be solved by the invention] However, when manufactured by such a method, the colored portion 22 (2
2') and the continuous light film 23 (23') overlap each other, so that the color filter surface becomes uneven and lacks smoothness. In addition, the colored part 22 (22') and the light shielding part 123 (
23') is misaligned, light leakage occurs. Furthermore, since a photomask for a light-shielding film is required and a process for aligning the colored portion and a fatmask for a light-shielding film is required, there is a problem that the cost increases.

An object of the present invention is to provide a method for manufacturing a color filter that can inexpensively manufacture a color filter with a light-shielding film having good smoothness.

[Means to solve the problem]

In the present invention, a colored portion of a predetermined color and a predetermined pattern is formed on a transparent substrate, a black negative resist is applied on the substrate and the colored portion, and then U light is irradiated from the back side of the transparent substrate to form a black negative resist. This method is characterized by patterning the resist and forming a light-shielding film only between the colored parts.

〔Example〕

Hereinafter, the present invention will be explained in detail based on the drawings.

The present invention has the following manufacturing steps.

(1) First, as shown in FIG. 1(A), a transparent substrate (for example, a glass substrate) 1 is coated with R. G. B
Colored portions 2 of predetermined patterns of each color are formed.

(2) Next, as shown in FIG. 1(B), a black photoresist 3 is applied onto the glass substrate 1 and the colored portion 2 by a spin coating method, a roll coating method, a stamping method, etc., and preliminary drying is performed.

(3) With Ilf, as shown in FIG. 1(C), UV light (ultraviolet light) a is emitted from the back side of the glass substrate 1.

The peak wavelength of this Uv light is selected so that it overlaps with the sensitive wavelength range of the black photoresist 3, or preferably, it is further in the ultraviolet range.

(4) After this, the black photoresist 3 is developed with a developer. Through this development, the black photoresist on the top surface of the colored part, which serves as a mask when irradiated with U light, is removed, and a light shielding area 3' is formed between the colored parts 2 as shown in FIG. 1(D). . As a result, a color filter with a light-transmitting film having a smooth surface can be obtained.

Note that R.O. obtained by printing method etc. G. If the colored portions 2 of each B color have a transmittance of about 5% in the photosensitive wavelength range of the black photoresist 3 as shown in FIG.
Using the filter 4, the glass substrate 1 is irradiated with U light a from the back side. The Uv filter 4 used has a spectral transmittance as shown in FIG. 5, for example.

In addition, if it is not desired to form a light-shielding film on the peripheral edge of the glass substrate 1, a photomask 5 with a simple structure is stacked on the back surface of the glass substrate 1 as shown in FIG. By irradiating with light a, a color filter with a light-shielding film as shown in FIG. 3 (8) can be obtained.

Next, a specific example will be given.

(1) A colored portion was formed using a color mosaic manufactured by Fuji Hunt Electronics Technology Co., Ltd.

The spectral transmittance at this time was as shown in FIG.

(2) Color Mosaic CK manufactured by the same company was applied on top of this using the Svinner method. Pre-drying was performed at 100°C for 5 minutes.
I went to sin.

(3) Subsequently, using an ultra-high pressure mercury lamp, UV light having a peak at 365 nm was irradiated from the back side of the glass substrate. The irradiation energy was 501 J/cd.

(4) Thereafter, development was performed using a developer manufactured by the same company, followed by washing with water and drying to obtain a finished product.

The finished product (color filter) thus obtained was smooth, with the colored portion (color filter H) and the light-shielding film not overlapping each other. Moreover, the light-shielding film had a sufficient light-shielding function.

〔Effect of the invention〕

As described above, according to the present invention, the colored portion itself of each color is
Since it is used as a mask against light, there is no need to use a dedicated light-transmitting film photomask when forming a light-shielding film or to perform alignment operations between the light-shielding film and the colored part, simplifying the process and reducing costs. . Moreover, since the colored areas are used as masks, the black photoresist on the top surface is removed during development, leaving the light-shielding film only visible in the areas between the colored areas, resulting in a smooth surface. You can obtain colored fino letters. Furthermore, by using an appropriate U-filter, even in the case of a colored portion that does not have sufficient spectral characteristics, it is possible to reliably prevent the light-shielding film from overlapping the colored portion.

Furthermore, since a black photoresist is used as a light-shielding film, the light-shielding film is formed at the same time as the end of the photolithography process. (requiring a dyeing process).

[Brief explanation of drawings]

FIGS. 1(A) to (D) are cross-sectional views of each manufacturing process showing an example of the method for manufacturing a color filter according to the present invention, and FIGS. 2 and 3 (A) and (B) are sectional views of the present invention. FIG. 4 is a sectional view showing another embodiment of the R. Figure 6 is a spectral characteristic diagram of the coloring material of G, 81 color part, and Figure 6 is a spectral characteristic diagram showing the relationship between the wavelength and transmittance of the coloring material of R, G, and B and the UV filter.
Figures (A) and (B) are cross-sectional views showing a conventional example. 1...Glass substrate 2...R, G, B colored parts 3...Black photoresist 3'...Light shielding film 4...
・Uv filter 5...Photomask a...
UV light

Claims (1)

[Claims] Forming a colored part of a predetermined color and a predetermined pattern on a transparent substrate,
After applying a black negative resist on the substrate and the colored parts, UV light is irradiated from the back side of the transparent substrate to pattern the black negative resist, and a light-shielding film is formed only between the colored parts. Method of manufacturing color filters.