JPH03279882A - Semiconductor integrated circuit - Google Patents

Semiconductor integrated circuit

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Publication number
JPH03279882A
JPH03279882A JP2082304A JP8230490A JPH03279882A JP H03279882 A JPH03279882 A JP H03279882A JP 2082304 A JP2082304 A JP 2082304A JP 8230490 A JP8230490 A JP 8230490A JP H03279882 A JPH03279882 A JP H03279882A
Authority
JP
Japan
Prior art keywords
circuit
pull
input
circuits
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2082304A
Other languages
Japanese (ja)
Other versions
JP2863593B2 (en
Inventor
Hiroaki Saito
斉藤 博明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2082304A priority Critical patent/JP2863593B2/en
Publication of JPH03279882A publication Critical patent/JPH03279882A/en
Application granted granted Critical
Publication of JP2863593B2 publication Critical patent/JP2863593B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To reduce input signals at the time of a burn-in test by connecting pull-up circuits and a pull-down circuit to an input circuit, an output circuit, and an input/output circuit symmetrically, and properly performing ON-OFF control over circuit elements. CONSTITUTION:The pull-up circuits 24... and pull-down circuits 24-2 are connected to the input circuit 24, output circuit 25, and input/output circuit 26 symmetrically and the control signal of a control signal source 27 which is applied to those circuits 24-1... and circuit 24-2 contains a waveform other than a direct current. The circuits 24-1... and 24-2 are turned on and off with the signal from the signal source 27 normally at the same time. Consequently, the signal line potential is controlled optionally through the operation of the pull-up circuits and pull-down circuit which are connected symmetrically to the signal lines to an internal circuit 20. When the circuit 20 is put in normal operation, the pull-up circuits and pull-down circuit are turned off at the same time, but when the burn-in test is conducted, they are turned on and off individually.

Description

【発明の詳細な説明】 〔概要〕 能率的なバーンイン試験が可能な半導体集積回路に関し
、 半導体集積回路を製造する過程において、プルアップ・
プルダウン回路を増設し、外部からの印加信号を増大さ
せずに、バーンイン試験を容易に短時間で可能とする半
導体集積回路を提供することを目的とし、 半導体素子で形成される内部回路を入力回路・出力回路
・入出力回路を介して外部端子と接続し、内部回路から
の信号により前記入力回路・出力回路・入出力回路の動
作を制御する半導体集積回路において、前記入力回路・
出力回路・入出力回路にそれぞれプルアップ回路と、プ
ルダウン回路とを対称的に接続し、該プルアップ回路・
プルダウン回路に印加する制御信号源の制御信号として
直流以外の波形も含むことで構成する。
[Detailed Description of the Invention] [Summary] Regarding semiconductor integrated circuits that can be efficiently burn-in tested, pull-up and
The purpose of this technology is to provide a semiconductor integrated circuit that can easily perform burn-in tests in a short time without adding a pull-down circuit and increasing externally applied signals. - In a semiconductor integrated circuit that is connected to an external terminal via an output circuit/input/output circuit and controls the operation of the input circuit/output circuit/input/output circuit by a signal from an internal circuit, the input circuit/input/output circuit is connected to an external terminal.
A pull-up circuit and a pull-down circuit are connected symmetrically to each output circuit and input/output circuit, and the pull-up circuit and pull-down circuit are connected symmetrically.
It is constructed by including a waveform other than direct current as a control signal of a control signal source applied to the pull-down circuit.

〔産業上の利用分野〕[Industrial application field]

本発明は能率的なバーンイン試験か可能な半導体集積回
路に関する。
The present invention relates to a semiconductor integrated circuit capable of efficient burn-in testing.

半導体集積回路のバーンイン試験の時に、入出力端子に
印加される信号を多様とするため、端子の信号レベルを
変える回路として多種類を必要とした。能率向上のため
、そのような回路を簡易化し、且つ多様な試験を可能と
することが要望された。
During burn-in testing of semiconductor integrated circuits, in order to vary the signals applied to input/output terminals, many types of circuits are required to change the signal level of the terminals. In order to improve efficiency, it has been desired to simplify such circuits and enable a variety of tests.

〔従来の技術〕[Conventional technology]

高集積化・高機能化された半導体集積回路をバーンイン
試験するため、特開昭63−61972号公報、特開昭
63−260145号公報に記載された構成か公知にな
っている。即ち、半導体集積回路を製造する過程におい
て、初期不良を除去するため150°Cに達する周囲温
度の中で、電源用と信号用との各端子にバイアス電圧を
印加して、半導体素子に対し悪い環境を与え、劣化する
ものは早く状態変化を起こさせて検出できるような検査
を行うことが知られている。第5図はそのような試験を
効率的に行うための回路を有する半導体集積回路の構成
を示す一例である。第5図において、1は内部論理回路
、2は入力回路用信号端子、3は出力回路用信号端子、
4は入出力回路用信号端子、5,6゜7はPMO3)ラ
ンジスタで形成したプルアップ回路、8はプルアップ回
路用制御信号端子、9はプルアップ回路用直流電源端子
、10.II、+2はインバータ、+3はトライステー
ト素子、14はアンド回路、Sl、S2は入出力回路制
御用信号を示す。今、内部論理回路lから入出力回路制
御用信号S1として“H”を発し、プルアップ回路用制
御信号端子8からの“H”信号とアンド回路14により
、論理演算を行えば、入出力回路制御用信号S2が得ら
れる。信号S2はトライステート素子13を制御してオ
ンとするから、内部論理回路lの状態信号は端子4に出
力される。若し、前記制御用信号Slか“L”のときは
、トライステート素子13か「高インピーダンスノとな
り、端子4は入力端子として外部信号か内部論理回路1
に印加され処理される。
In order to perform burn-in tests on highly integrated and highly functional semiconductor integrated circuits, the configurations described in Japanese Patent Application Laid-open No. 63-61972 and Japanese Patent Application Laid-open No. 63-260145 are known. In other words, in the process of manufacturing semiconductor integrated circuits, bias voltages are applied to power supply and signal terminals at ambient temperatures reaching 150°C in order to eliminate initial defects. It is known to conduct tests that allow the environment to be applied to quickly detect changes in the state of things that deteriorate. FIG. 5 shows an example of the configuration of a semiconductor integrated circuit having a circuit for efficiently conducting such a test. In FIG. 5, 1 is an internal logic circuit, 2 is a signal terminal for the input circuit, 3 is a signal terminal for the output circuit,
4 is a signal terminal for the input/output circuit, 5, 6° 7 is a pull-up circuit formed by a PMO3) transistor, 8 is a control signal terminal for the pull-up circuit, 9 is a DC power supply terminal for the pull-up circuit, 10. II and +2 are inverters, +3 is a tri-state element, 14 is an AND circuit, and Sl and S2 are input/output circuit control signals. Now, if "H" is generated as the input/output circuit control signal S1 from the internal logic circuit 1, and a logical operation is performed using the "H" signal from the pull-up circuit control signal terminal 8 and the AND circuit 14, the input/output circuit A control signal S2 is obtained. Since the signal S2 controls the tristate element 13 to turn it on, the state signal of the internal logic circuit 1 is output to the terminal 4. If the control signal Sl is "L", the tri-state element 13 becomes a "high impedance node", and the terminal 4 serves as an input terminal for receiving an external signal or the internal logic circuit 1.
is applied and processed.

バーンイン試験のとき端子9に+VDoを、端子8に“
L”信号を与える。そのときプルアップ回路5.7はオ
ンとなる。前記制御用信号S2は“L”となり、トライ
ステート素子13は[高インピーダンスJとなる。その
ため端子2,4に外部信号の印加が無くても、端子8か
らの′L“信号かインバータ10.12により”H”信
号とされて、内部論理回路lに印加される。したかって
印加された信号は内部論理回路lにおいて処理されて、
端子3に出力される。次に端子8に“L”を印加すれば
、プルアップ回H5,6,7かオンとなる。バーンイン
試験時に、プルアップ回路5゜6.7はインバータ10
〜12の負荷抵抗として動作する。
During the burn-in test, apply +VDo to terminal 9 and “
At that time, the pull-up circuit 5.7 is turned on. The control signal S2 becomes "L", and the tristate element 13 becomes a high impedance J. Therefore, the external signal is applied to the terminals 2 and 4. Even if no voltage is applied, the 'L' signal from the terminal 8 is converted into an 'H' signal by the inverter 10.12 and applied to the internal logic circuit l. Therefore, the applied signal is processed in the internal logic circuit l, and
Output to terminal 3. Next, when "L" is applied to the terminal 8, the pull-up circuits H5, 6, and 7 are turned on. During the burn-in test, the pull-up circuit 5°6.7 is connected to the inverter 10.
~12 acts as a load resistor.

〔発明か解決しようとする課題〕[Invention or problem to be solved]

バーンイン試験時において、内部論理回路に印加される
信号として、外部から波形を印加することか、従来の方
法であるが、その外部からの波形用信号源と、そのため
の接続手段か必要である。
During a burn-in test, a waveform is applied from the outside as a signal to be applied to the internal logic circuit, which is a conventional method, but it requires a signal source for the external waveform and connection means for that purpose.

半導体集積回路を形成するチップのみにおいて処理が出
来ず、バーンインボードと称する基板上に多数の装置を
増設することを必要とした。そのためバーンイン試験に
要する費用が高くついた。
Processing cannot be performed only on chips forming semiconductor integrated circuits, and it is necessary to add a large number of devices to a substrate called a burn-in board. Therefore, the cost required for the burn-in test was high.

本発明の目的は前述の欠点を改善し、半導体集積回路を
製造する過程において、プルアップ・プルダウン回路を
増設し、外部からの印加信号を増大させずに、バーンイ
ン試験を容易に短時間で可能とする半導体集積回路を提
供することにある。
The purpose of the present invention is to improve the above-mentioned drawbacks, and in the process of manufacturing semiconductor integrated circuits, by adding pull-up/pull-down circuits, burn-in tests can be easily and quickly performed without increasing externally applied signals. An object of the present invention is to provide a semiconductor integrated circuit that has the following characteristics.

〔課題を解決するための手段〕[Means to solve the problem]

第1図は本発明の原理構成を示す図である。第1図にお
いて、20は半導体素子で形成される内部回路、21,
22.23はチップの外部端子、24は入力回路、25
は出力回路、26は入出力回路、24−1.25−1.
26−1はプルアップ回路、2/l−2,25−2,2
6−2はプルダウン回路、27は制御信号の信号源を示
す。
FIG. 1 is a diagram showing the basic configuration of the present invention. In FIG. 1, 20 is an internal circuit formed of semiconductor elements, 21,
22.23 is the external terminal of the chip, 24 is the input circuit, 25
is an output circuit, 26 is an input/output circuit, 24-1.25-1.
26-1 is a pull-up circuit, 2/l-2, 25-2, 2
6-2 is a pull-down circuit, and 27 is a control signal source.

半導体素子て形成される内部回路20を入力回路24・
出力回路25・入出力回路26を介して外部端子21〜
23と接続し、内部回路からの信号により前記入力回路
・出力回路・入出力回路の動作を制御する半導体集積回
路において、本発明は下記の構成とする。即ち、 前記入力回路24・出力回路25・入出力回路26にそ
れぞれプルアップ回路24−1  と、プルダウン回路
24−2とを対称的に接続し、該プルアップ回路・プル
ダウン回路に印加する制御信号源27の制御信号を直流
以外の波形も含むことで構成する。
The internal circuit 20 formed by the semiconductor element is connected to the input circuit 24.
External terminals 21 through output circuit 25 and input/output circuit 26
In a semiconductor integrated circuit connected to 23 and controlling the operation of the input circuit, output circuit, and input/output circuit by signals from an internal circuit, the present invention has the following configuration. That is, a pull-up circuit 24-1 and a pull-down circuit 24-2 are symmetrically connected to the input circuit 24, output circuit 25, and input/output circuit 26, respectively, and a control signal is applied to the pull-up circuit and pull-down circuit. The control signal for the source 27 is configured to include waveforms other than direct current.

〔作用〕[Effect]

各プルアップ回路24−L・・・・プルダウン回路24
−2のオン・オフは制御信号源27からの信号により、
通常は同時に制御される。そのため内部回路20に対す
る信号線に対称的に接続されたプルアップ回路・プルダ
ウン回路の動作により、信号線電位は任意に制御されて
いる。内部回路20を通常に動作させるときはプルアッ
プ回路・プルダウン回路を同時にオフさせる。またバー
ンイン試験のときは各別にオンまたはオフとさせれば良
い。
Each pull-up circuit 24-L...Pull-down circuit 24
-2 is turned on and off by the signal from the control signal source 27.
Usually controlled at the same time. Therefore, the signal line potential is arbitrarily controlled by the operation of pull-up circuits and pull-down circuits symmetrically connected to the signal line for the internal circuit 20. When operating the internal circuit 20 normally, the pull-up circuit and pull-down circuit are turned off at the same time. Also, during a burn-in test, each can be turned on or off individually.

更にバーンイン試験時にプルアップ回路・プルダウン回
路のオン・オフを交互に行うことで直流以外の交流信号
を信号線に与えたことにすれば、内部回路20の動作を
変化させることが出来て、複雑なバーンイン試験も能率
的に出来る。
Furthermore, if an alternating current signal other than direct current is applied to the signal line by alternately turning on and off the pull-up circuit and pull-down circuit during the burn-in test, the operation of the internal circuit 20 can be changed and complicated. Burn-in tests can be performed efficiently.

〔実施例〕〔Example〕

本発明の実施例として、プルアップ回路をPチャネルF
ET、プルダウン回路をNチャネルFETで構成し、制
御信号源からパルス波形を各FETに印加する場合につ
いて説明する。第2図において、24−1.24−2は
第1図において25.26と示すプルアップ回路・プル
ダウン回路につき代表して示す。そのため制御信号Aと
B、及び論理積を演算してA−Bの信号をプルアップ回
路24−1、プルダウン回路24−2に印加したとき、
印加の方法により内部回路への信号線の電位が種々に変
化する。なお、制御信号AとBを共に“L“とすること
は制御信号源を短絡することとなるため禁止し、共に“
H”とすることはバーンイン試験中でなく内部回路を通
常に動作させている場合であるから、それも除く。その
ため制御信号AとBか“H”と“L“とになっている場
合か本発明の動作の条件となる。
As an embodiment of the present invention, the pull-up circuit is connected to a P-channel F
A case will be described in which the ET and pull-down circuit are configured with N-channel FETs, and a pulse waveform is applied to each FET from a control signal source. In FIG. 2, 24-1 and 24-2 are representative of the pull-up circuit and pull-down circuit shown as 25.26 in FIG. Therefore, when the control signals A and B and the logical product are calculated and the A-B signal is applied to the pull-up circuit 24-1 and the pull-down circuit 24-2,
The potential of the signal line to the internal circuit varies depending on the application method. Note that setting both control signals A and B to "L" is prohibited as it will short-circuit the control signal source;
"H" means that the internal circuit is operating normally, not during a burn-in test, so that is also excluded.Therefore, if the control signals A and B are "H" and "L", This is a condition for the operation of the present invention.

第2図において破線で囲む2Aの枠内では、出力として
内部回路20への信号線の電位は制御信号Aと同相で変
化する。2Bの枠内では同じく回路20への信号線の電
位は制御信号Aと逆相て変化する。2Cの枠内ではその
電位か“L”に固定され、2Dの枠内ではその電位か“
H”に固定される。
In the frame 2A surrounded by the broken line in FIG. 2, the potential of the signal line to the internal circuit 20 as an output changes in phase with the control signal A. Similarly, within the frame 2B, the potential of the signal line to the circuit 20 changes in opposite phase to the control signal A. Within the 2C frame, that potential is fixed to "L", and within the 2D frame, that potential is fixed to "L".
It is fixed at "H".

次に第3図は本発明の実施例としてプルアップ回路・プ
ルダウン回路を交互にオン・オフさせることについて説
明する図である。第3図A、第3図Bは第2図に示す制
御信号A、  Bを示し、第3図■、■、■は第2図に
示す枠内回路に第3図A。
Next, FIG. 3 is a diagram illustrating alternately turning on and off a pull-up circuit and a pull-down circuit as an embodiment of the present invention. 3A and 3B show the control signals A and B shown in FIG. 2, and FIG.

Bを印加したとき、図中その右方に示す回路の出力線電
位を示す。そして第3図では左から内部回路を通常に動
作させるとき、バーンインの直流的試験のとき、バーン
インの交流的試験のときを示している。即ち、通常に動
作させるときΔか“)−(“、Bが“H”で、■、■、
■は適宜な電位となっている。バーンイン直流的試験の
ときは、八か“L”、Bが“トI”であるから、■の回
路は第2図2Bの枠と同じ回路であり、出力はAと逆相
て変化する。■の回路は2Dの回路の枠と同しであるか
ら、出力か“I]“に固定される。■の回路は2Aの枠
と同じであるから、出力かAと同相て変化する。
When B is applied, the output line potential of the circuit shown on the right side of the figure is shown. FIG. 3 shows, from the left, when the internal circuit is operated normally, when a burn-in DC test is performed, and when a burn-in AC test is performed. That is, when operating normally, Δ or ") - (", B is "H", ■, ■,
(2) has an appropriate potential. At the time of the burn-in DC test, 8 is "L" and B is "I", so the circuit shown in (2) is the same circuit as the frame in FIG. 2B, and the output changes in the opposite phase to A. Since the circuit (2) is the same as the 2D circuit frame, the output is fixed to "I". Since the circuit (2) is the same as the 2A frame, the output changes in phase with A.

したかって第3図■、■、■の回路は、第4図I〜■に
示すように応用てきる。第4図Iは入出力回路の入力側
プルアップ回路・プルダウン回路となり、Aと逆相に変
化した信号は図の左方へ行き内部回路に印加される。そ
の信号は制御信号Aと同相になる(インバータを介して
いるから)。
Therefore, the circuits shown in FIGS. 3, 3, and 3 can be applied as shown in FIGS. FIG. 4I shows the input side pull-up circuit/pull-down circuit of the input/output circuit, and the signal changed to the opposite phase to A goes to the left side of the figure and is applied to the internal circuit. This signal is in phase with control signal A (because it is passed through an inverter).

第4図■は入力回路になり、端子に印加される入力信号
が図の左方へ行く。
4 is an input circuit, and the input signal applied to the terminal goes to the left side of the figure.

第4図■は出力回路であり、内部回路からの出力信号に
対し制御信号へと同相で変化する信号か重畳される。
4 is an output circuit, in which a signal changing in phase with a control signal is superimposed on the output signal from the internal circuit.

このようにバーンイン試験時の入力信号を少なくてきる
ことから、チップ内で得た制御信号をそのまま使用する
こと、或いは外部より直接制御信号を入力することが出
来る。論理演算するような処理で得たものかプルアップ
回路・プルダウン回路に同時に与えられ、更に直流以外
の波形を与えることも出来る。
Since the number of input signals during the burn-in test can be reduced in this way, the control signals obtained within the chip can be used as they are, or the control signals can be input directly from the outside. Waveforms obtained through processing such as logical operations are simultaneously applied to pull-up and pull-down circuits, and waveforms other than direct current can also be applied.

〔発明の効果〕〔Effect of the invention〕

このようにして本発明によると、プルアップ回路とプル
ダウン回路とを対称的に接続使用しているから、その回
路素子のオン・オフを適宜制御することにより、バーン
イン試験時の入力信号を少なく出来る。よって、半導体
集積回路の試験を容易に出来る。
In this way, according to the present invention, since the pull-up circuit and the pull-down circuit are connected and used symmetrically, the input signal during the burn-in test can be reduced by appropriately controlling the on/off of the circuit elements. . Therefore, testing of semiconductor integrated circuits can be easily performed.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の原理構成を示す図、 第2図は本発明の実施例の回路を示す図、第3図は本発
明の他の実施例の回路を示す図、第4図は第3図を応用
した回路の構成図、第5図はバーンイン試験を行うとき
の半導体集積回路を示す図である。 20・・・内部回路 21〜23・・・・・外部端子 24・・・入力回路 24−1・・・プルアップ回路 24−2・・プルダウン回路 25・・出力回路 26・・−入出力回路 27・−制御信号源
Fig. 1 is a diagram showing the principle configuration of the present invention, Fig. 2 is a diagram showing a circuit of an embodiment of the invention, Fig. 3 is a diagram showing a circuit of another embodiment of the invention, and Fig. 4 is a diagram showing a circuit of an embodiment of the invention. A configuration diagram of a circuit to which FIG. 3 is applied, and FIG. 5 is a diagram showing a semiconductor integrated circuit when performing a burn-in test. 20...Internal circuits 21-23...External terminal 24...Input circuit 24-1...Pull-up circuit 24-2...Pull-down circuit 25...Output circuit 26...-Input/output circuit 27.-Control signal source

Claims (1)

【特許請求の範囲】  半導体素子で形成される内部回路(20)を入力回路
(24)・出力回路(25)・入出力回路(26)を介
して外部端子(21)〜(23)と接続し、内部回路(
20)からの信号により前記入力回路・出力回路・入出
力回路の動作を制御する半導体集積回路において、前記
入力回路(24)・出力回路(25)・入出力回路(2
6)にそれぞれプルアップ回路(24−1)・・・・と
、プルダウン回路(24−2)・・・・とを対称的に接
続し、該プルアップ回路・プルダウン回路に印加する制
御信号源(27)の制御信号として直流以外の波形も含
むこと を特徴とする半導体集積回路。
[Claims] An internal circuit (20) formed of a semiconductor element is connected to external terminals (21) to (23) via an input circuit (24), an output circuit (25), and an input/output circuit (26). and the internal circuit (
In a semiconductor integrated circuit that controls the operation of the input circuit, output circuit, and input/output circuit by signals from the input circuit (24), the output circuit (25), and the input/output circuit (20),
6) with a pull-up circuit (24-1) and a pull-down circuit (24-2) symmetrically connected to each other, and a control signal source applied to the pull-up circuit and pull-down circuit. (27) A semiconductor integrated circuit characterized in that the control signal includes a waveform other than direct current.
JP2082304A 1990-03-29 1990-03-29 Semiconductor integrated circuit Expired - Fee Related JP2863593B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2082304A JP2863593B2 (en) 1990-03-29 1990-03-29 Semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2082304A JP2863593B2 (en) 1990-03-29 1990-03-29 Semiconductor integrated circuit

Publications (2)

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JPH03279882A true JPH03279882A (en) 1991-12-11
JP2863593B2 JP2863593B2 (en) 1999-03-03

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Family Applications (1)

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JP2082304A Expired - Fee Related JP2863593B2 (en) 1990-03-29 1990-03-29 Semiconductor integrated circuit

Country Status (1)

Country Link
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0846371A4 (en) * 1995-08-25 1999-02-03 Hal Computer Systems Inc CMOS BUFFER CIRCUIT WITH POWER OFF FUNCTION
JP2006337204A (en) * 2005-06-02 2006-12-14 Nec Electronics Corp Semiconductor integrated circuit, its test apparatus and method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3509001B2 (en) 1999-12-07 2004-03-22 松下電器産業株式会社 Semiconductor integrated circuit having self-diagnosis test circuit function and method of testing semiconductor integrated circuit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0846371A4 (en) * 1995-08-25 1999-02-03 Hal Computer Systems Inc CMOS BUFFER CIRCUIT WITH POWER OFF FUNCTION
JP2006337204A (en) * 2005-06-02 2006-12-14 Nec Electronics Corp Semiconductor integrated circuit, its test apparatus and method

Also Published As

Publication number Publication date
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