JPH0395548U - - Google Patents
Info
- Publication number
- JPH0395548U JPH0395548U JP500790U JP500790U JPH0395548U JP H0395548 U JPH0395548 U JP H0395548U JP 500790 U JP500790 U JP 500790U JP 500790 U JP500790 U JP 500790U JP H0395548 U JPH0395548 U JP H0395548U
- Authority
- JP
- Japan
- Prior art keywords
- electron microscope
- diameter
- hole provided
- aperture plate
- aperture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
Description
第１図は本発明の電子顕微鏡用絞り装置の実施
例、第２図及び第３図は従来例を示す。
１３……絞り板、１５，１８，１９……孔、１
６，１７……冷却フイン。
FIG. 1 shows an embodiment of the aperture device for an electron microscope according to the present invention, and FIGS. 2 and 3 show conventional examples. 13... Aperture plate, 15, 18, 19... Hole, 1
6,17...Cooling fin.
Claims (1)
を配置し、かつ冷却フインに設けた孔の径を絞り
板に設けた孔の径より大としたことを特徴とする
電子顕微鏡用絞り装置。 1. An aperture device for an electron microscope, characterized in that cooling fins are arranged above and below an aperture plate in an electron microscope, and the diameter of the hole provided in the cooling fin is larger than the diameter of the hole provided in the aperture plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP500790U JPH0395548U (en) | 1990-01-23 | 1990-01-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP500790U JPH0395548U (en) | 1990-01-23 | 1990-01-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0395548U true JPH0395548U (en) | 1991-09-30 |
Family
ID=31508731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP500790U Pending JPH0395548U (en) | 1990-01-23 | 1990-01-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0395548U (en) |
-
1990
- 1990-01-23 JP JP500790U patent/JPH0395548U/ja active Pending
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