JPH0413572A - Resetting device of grinding wheel in polishing device - Google Patents

Abstract

PURPOSE:To uniformize a work polishing quantity, by arranging a resetting member which performs the resetting of the polishing face of a grinding wheel at the side position of the same grinding wheel in a standby state and providing a driving mean which motions the resetting member in the radial direction with its movement forwards and backwards at the resetting time. CONSTITUTION:The resetting of grinding wheels 8, 9 is performed by driving the grinding wheels 8, 9 with their rotation and also motioning a resetting member 7 forwards and backwards in the radial direction in the state of the resetting member 7 being brought into contact with the polishing faces of the grinding wheels 8, 9. Consequently, the polishing faces of the grinding wheels 8, 9 through which the resetting member 7 is passed are set in the faces of high flatness in the diameter direction and in the peripheral direction as well.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a grindstone sharpening device in a polishing apparatus equipped with a grindstone for polishing a workpiece such as an aluminum substrate for a magnetic disk.

2. Description of the Related Art Conventionally, as a polishing apparatus for polishing, for example, an aluminum substrate for a magnetic disk, an apparatus (5) as shown in FIG.
1) is used. The polishing device (51) in the figure is rotatably held and has a donut-shaped grindstone (
52) is attached to the lower surface plate (53), and the lower surface plate (52) is attached to the lower surface plate (53).
53) An upper surface plate which is disposed coaxially with the surface plate (53) at an upper position and is rotatably driven and movable up and down, and has a donut-shaped grindstone (54) attached to its lower surface. (55), a sun gear (57) arranged between the grinding wheels (52) and (54) at the axis of the grinding wheel, and a sun gear (57) arranged concentrically at a position radially outward of the sun gear (57). An internal gear (59) and both gears (57) meshed with both the internal gear (59) and the sun gear (57) and placed on the grindstone (52) of the lower surface plate (53). ) (
59) External gear-shaped work carrier (
56). In addition, this work carrier = (56
) has a circular holding hole (60) in an eccentric state along the outer circumferential shape of the magnetic disk substrate (A), and the holding hole (60)
The thickness of the substrate (A) is adjusted so that when the magnetic disk substrate (A) is placed inside, both the upper and lower surfaces of the substrate protrude outward from the holding hole (60) of the carrier (5B).
It is formed thinner than the

In this polishing device (51), with the upper surface plate (55) positioned at one upper standby position, the magnetic disk substrate (A) is
is placed in the holding hole (60) of the work carrier (56), and the upper surface plate (55) is lowered so that both sides of the magnetic disk substrate (A) are placed in the upper and lower grindstones (52) (
54). In the pressurized state, the sun gear (57) is rotated to move the work carrier (
5B) is rotated and revolved around the sun gear (57), and the upper and lower surface plates (53) and (55) are also rotated to polish both sides of the magnetic disk substrate (A).

By the way, in the polishing device (51), as the workpiece (A) is repeatedly polished, the grindstones (52) (54) become clogged and damaged.
It is necessary to perform the sharpening described in 4).

Conventionally, this dressing has been performed using a dresser board (58) as shown in FIG.

This dresser board (58) is connected to the work carrier (
56) and an external gear-shaped dresser body (
A large number of cylindrical pellets (58b) are planted on both upper and lower surfaces of 58a) with protruding tips. To sharpen the grindstones (52) and (54) using this dresser board (58), remove the carrier (56) from the polishing device (51), and replace it with the dresser board (58) on the sun gear (54).
7) and the internal gear (59) in a meshing state, and the grinding wheel (52) of both the upper and lower surface plates (53) (55)
This was done by rotating the sun gear (57) and the like while the (54) was in pressure contact with the dresser board (58).

Problem to be Solved by the Invention However, when the grinding wheels (52) (54) are sharpened using the dresser board (58) as described above, the grinding wheels (52) (54) suffer from a decrease in flatness, especially in the radial direction. This has the disadvantage of causing a decrease in flatness. This means that the grinding wheel (5
2) The distribution of the pressure applied from (54) was made non-uniform, which was one of the major factors leading to non-uniformity in the amount of polishing of the workpiece and thus to deterioration of the surface quality of the workpiece.

In particular, when the workpiece requires precision polishing, such as the above-mentioned aluminum substrate for magnetic disks, sharpening the grindstone using a dresser machine as described above is a contributing factor to lowering the production yield of the substrate. .

This invention solves the above-mentioned conventional problems, and makes it possible to sharpen the polished surface of the grindstone to a highly flat surface, thereby making the amount of polishing uniform on the workpiece, and ultimately improving the surface quality of the workpiece. An object of the present invention is to provide a sharpening device for a grindstone in a polishing device, which can improve quality.

Means for Solving the Problems In order to achieve the above object, the present invention provides a grindstone sharpening device for use in a polishing apparatus that is equipped with a disc-shaped grindstone and polishes a workpiece using one surface of the grindstone, wherein the grindstone is self-sharpening. A sharpening member that is rotatably supported around an axis and that sharpens the polished surface of the grindstone is arranged in a standby state at a side position of the grindstone, and during sharpening, the sharpening member is rotated along the radius of the grindstone. The gist of the present invention is a sharpening device for a grindstone in a polishing device, characterized in that it is equipped with a drive means that moves forward and backward in a linear direction.

In addition, as the above-mentioned polishing device, it is preferable to use a type of polishing device in which a workpiece carrier in the form of an external gear is rotated and revolved between upper and lower grinding wheels by the action of a sun gear and an internal gear to polish the workpiece. Adopted.

Further, in order to bring the grindstone into contact with the sharpening member, it is preferable that the grindstone is supported so as to be movable in the direction of its rotational axis.

Function: In the grindstone sharpening device of the above-mentioned polishing device, the sharpening of the whetstone is carried out by rotating the grindstone and moving the sharpening member forward and backward in the radial direction while the sharpening member is in contact with the polished surface of the whetstone. Therefore, the polished surface of the grindstone through which the sharpening member has passed is sharpened into a surface with high flatness in both the radial direction and the circumferential direction.

EXAMPLE Hereinafter, an example in which the present invention is applied to an apparatus for polishing a disc-shaped aluminum substrate for a magnetic disk will be described with reference to the drawings.

In Figures 1 and 2, (2) is the lower surface plate, (3)
is the upper surface plate, (4) is the sun gear, (5) is the internal gear, (
6) The work carrier (7) is a dressing member.

The lower surface plate (2) has a donut-shaped grindstone (8) of a predetermined thickness attached to its upper part, and is rotated around its own axis and moved in the vertical direction by a drive device (not shown). It is said to be useful.

The upper surface plate (3) is disposed above the lower surface plate (2) coaxially and oppositely, and a donut-shaped grindstone (9) is attached to the lower part thereof so as to face the grindstone (8). It is what was done. This upper surface plate (3) can also be rotated about its own axis and moved in the vertical direction by a drive device (not shown).

The sun gear (4) is placed between the upper and lower surface plates (2) and (3) at the axis of the grinding wheels (8) and (9), and is rotated around its own axis by a drive device (not shown). being done.

The internal gear (5) is arranged concentrically at a position radially outward of the sun gear (4) with a donut-shaped space between the internal gear (5) and the sun gear (4).

The work carrier (6) is a thin plate-shaped external gear, and one or more work carriers (6) are arranged in a donut-shaped space between the sun gear (4) and the internal gear (5). It meshes with both gears (4) and (5). In addition,
The work carrier (6) is provided with one or more circular holding holes (10) that follow the outer circumferential shape of the magnetic disk substrate (A,) at positions eccentric from its center position. Further, the thickness of this work carrier (6) is formed to be thinner than the thickness of the magnetic disk substrate (A), and when the magnetic disk substrate (A) is placed in the holding hole (10), The surface protrudes outward from the holding hole (10) and is shaped like an opening.

The sharpening member (7) consists of both upper and lower surface plates (2) and (3).
It is placed at a lateral position, and is horizontally moved forward and backward from the lateral position between the upper and lower surface plates (2) and (3), as well as between the upper and lower grindstones (8 and 9), by a drive device (not shown). It is considered that

As shown in FIG. 3, this sharpening member (7) is attached to the cylinder rod (
A cutting tool holding block (13) is attached to the tip of the rod (12) so as to be rotatable about the axis of the rod, and the blocks (13) are alternately arranged in a plane orthogonal to the axis of the rod (12). This consists of rough cutting tools (14) (14) and finishing tools (15) (15) for sharpening which are attached in a cross-shaped protruding state. In addition, both tool bits (14) for rough cutting and finish cutting (L5
), the diamond pellet provided at its tip is coarser in grain size than the latter.

Next, the operation of the above-mentioned polishing apparatus and the grindstone sharpening device in the apparatus will be explained together with a method of controlling the apparatus.

As shown in Fig. 1, the lower surface plate (2) covers the lower surface of the work carrier (6) with the work carrier (6) meshing with the sun gear (4) and the internal gear (5). It is set at a height that can be supported by the upper surface of the lower grindstone (8),
It is held at that height during the polishing process. and,
The magnetic disk substrate (A) is mounted on the work carrier (6) with the upper surface plate (3) held at the upper standby position.
) is placed in the holding hole (10) of the.

After completing the placement of the substrate (A), the upper surface plate (3) is lowered and the upper and lower grinding wheels (8) and (9) are lowered as shown in FIG.
are brought into contact with both surfaces of the substrate (A), and are pressed into a pressurized state by a pressurizing device (not shown). In that state,
The sun gear (4) and upper and lower surface plates (2) and (3) are rotated,
As a result, the work carrier (6) revolves around the sun gear (4) while rotating, and the magnetic disk substrate (A)
The substrate (A) is polished by sliding on the surfaces of the grindstones (8) and (9).

When the substrate (A) has been polished by a predetermined amount, the rotation of the sun gear (4) etc. is stopped and the upper surface plate (3) is moved upward to remove the substrate from the work carrier (6). (A) is taken out.

After that, the new substrate (A) is placed on the work carrier (6) again.
), and the same operation as above is repeated to polish the substrate (A) one after another.

As this polishing process is repeated, the upper and lower whetstones (8) and (9) become clogged and clogged, and the whetstone (8)
When it becomes necessary to perform a sharpening process, the board (A) is taken out and the rough cutting tool (14) of the sharpening member (7) is used.
(14) is oriented in the vertical direction, as shown in Figure 6, the polished surfaces of the upper and lower surface plates (2) and (3) or those grindstones are placed on the upper and lower sides of the sharpening member (7). The cutting tool (14) is operated to be displaced in the vertical direction so as to be positioned inward from the tip of the cutting tool (14) by the rough cutting thickness.

Note that the sun gear (4) is previously stopped in such a state that the work carrier (6) is not located on the advancing/retreating path of the dressing member (7) in this state.

Then, the upper and lower surface plates (2) (3) and the grindstone (8) (
9) is rotated, and the dressing member (7) is placed on the surface plate (2) (3)
It is operated horizontally inward in the radial direction of the surface plate from a lateral position. As a result, the upper and lower grindstones (8) and (9) are sharpened by rough cutting from their outer peripheral ends toward the center of rotation.

Then, the cutting tool (14) (14) is the grindstone (8) (9
), the sharpening member (7)
The grinding wheels (8) and (9) are operated to retreat toward the outer peripheral end side,
Roughly cut the parts left uncut during the advance operation. After completing this withdrawal operation, the tool holding block (13) is rotated 900 times, and the finishing tool (15) is rotated 900 times.
(15) is oriented in the vertical direction. Then, the upper and lower surface plates (2) and (3) are moved vertically by the thickness of the finishing cut, and the sharpening member (7) is moved forward and backward in the same manner as above, and both grinding wheels (8) and (9) are moved. A sharpened finish is applied.

After that, as described above again, the magnetic disk substrate (A) is
The polishing process will be resumed.

It should be noted that sharpening by rough cutting is thicker in terms of cutting thickness (for example, 30JIm in rough cutting and 10.ca in finish cutting), faster in advancing and retracting speed of the actuating body (7), and faster and more constant than in the case of finishing by finishing. Board (2) (3
) at a low rotational speed.

In the above embodiment device, the cutting tool (14) of the sharpening member (7) is
) (15) is in contact with the grindstones (8) and (9), and the surface plates (2) and (3) are rotated, and the sharpening member (7
) is moved back and forth in the radial direction between the two grinding wheels to sharpen the grinding wheels (8) and (9). In addition to being able to make the skin stand out, it also has the following effects.

That is, in the apparatus of the above embodiment, the grindstones (8) and (9) can be sharpened while the work carrier (6) remains in mesh with both the sun and internal gears (4) and (5). As in the conventional method (see Fig. 8), a series of troublesome operations such as removing the work carrier (56), installing the dresser board (58), removing the dresser board (58), and installing the work carrier (56) are performed. This is not necessary, and it is possible to improve the work efficiency of the sharpening work and reduce the idle time of the polishing device.

Further, in the above embodiment, the cutting tool (1) of the sharpening member (7) is
4) In order to bring (15) into contact with the grinding wheels (8) and (9), the upper and lower surface plates (2) and (3) are configured to be able to move up and down together, so the simple structure allows the grinding wheels (8) and (9) to be brought into contact with each other. 8)(9
) and the cutting tools (14) and (15) can be brought into contact.

Furthermore, since the dressing is carried out in two steps, a rough cutting process and a finishing process, the time required for the dressing can be significantly shortened. Moreover, these two steps,
A rotatable holding block (1) is attached to the tip of the rod (12).
3) Rough cutting tool (14) and finishing tool (15)
) is carried out using the sharpening members (7) arranged in a criss-cross pattern, so the sharpening process by rough cutting can immediately be transferred to the sharpening process by finishing sharpening, further shortening the sharpening time. can be achieved.

In the above embodiment, a rotatable holding block (13) is attached to the tip of the rod (12) as the sharpening member (7), and a rough cutting tool (14) is attached to the block (13). A cross-shaped finishing tool (15) is used, and as shown in Fig. 4, a holding block (13) is fixedly attached to the tip of the rod (12). , the block (13) is equipped with a cutting tool (14) that serves both rough cutting and finishing cutting and is held vertically, and the thickness of cutting, the advancing and retreating speed of the operating body (7), and the surface plate (2) are used. (3) Rough cutting and finishing cutting may be performed by setting a difference in the number of revolutions, etc.

Further, as in the above embodiment, the device of the present invention rotates and revolves the carrier (6) while moving the workpiece to the grindstone (8) (9).
) In addition to polishing equipment that performs polishing with
The present invention can also be applied to a polishing device that polishes a workpiece by rotating the grindstone.

Effects of the Invention As described above, the grindstone sharpening device in a polishing apparatus of the present invention is a grindstone sharpening device in a polishing device that is provided with a disc-shaped grindstone and polishes a workpiece with one surface of the grindstone. , the grindstone is supported so as to be rotatable around its own axis, and a sharpening member for sharpening the polished surface of the grindstone is arranged in a standby state at a side position of the grindstone, and during sharpening, the sharpening member The grinding wheel is provided with a driving means for moving the grinding wheel forward and backward in the radial direction of the grindstone, so that the sharpening of the grindstone is carried out by rotationally driving the grindstone and sharpening while keeping the sharpening member in contact with the polished surface of the grindstone. This is done by moving the member forward and backward in the radial direction. Therefore, the grinding wheel can be used to sharpen surfaces with high flatness both in the radial direction and in the circumferential direction, making the amount of polishing of the workpiece uniform and ultimately improving the surface of the workpiece. It is possible to improve the quality of properties.

In particular, when the workpiece requires highly accurate surface texture, such as an aluminum substrate for a magnetic disk, the production yield can be greatly improved by using this sharpening device.

[Brief explanation of drawings]

1 to 6 show an embodiment of the present invention, in which FIG. 1 is a sectional view of the device, FIG. 2 is a view taken along the line ■-■ in FIG. 1, and FIG. 3 is a dressing member. FIG. 4 is a perspective view showing another example of the sharpening member, FIG. 5 is a sectional view showing the operating state of the polishing device during polishing, and FIG. 6 shows the state in which the grindstone is being sharpened. FIG. Figures 7 and 8 show conventional polishing equipment.
The figure is a perspective view showing the state when polishing is performed, and FIG. 8 is a perspective view showing the state when sharpening is performed. (7)...Sharpening member, (8)(9)...Whetstone. Above is Figure 3. Funeral figure 4.

Claims (1)

[Claims] A grindstone sharpening device in a polishing device that is equipped with a disc-shaped grindstone and polishes a workpiece with one surface of the grindstone,
The grindstone is supported so as to be rotatable about its own axis, and a sharpening member for sharpening the polished surface of the grindstone is arranged in a standby state at a side position of the grindstone, and the sharpening member is not operated during sharpening. A sharpening device for a grindstone in a polishing apparatus, characterized in that the grindstone is provided with a driving means for advancing and retracting the grindstone in a radial direction.