JPH0428431U - - Google Patents
Info
- Publication number
- JPH0428431U JPH0428431U JP7030290U JP7030290U JPH0428431U JP H0428431 U JPH0428431 U JP H0428431U JP 7030290 U JP7030290 U JP 7030290U JP 7030290 U JP7030290 U JP 7030290U JP H0428431 U JPH0428431 U JP H0428431U
- Authority
- JP
- Japan
- Prior art keywords
- steam drying
- waste liquid
- drying device
- tube
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 8
- 239000002699 waste material Substances 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims 3
- 238000007599 discharging Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Description
第１図は本考案の具体例を示す断面図である。
１……処理槽、２……冷却コイル、３……ヒー
ター、４……凝縮液受け皿、５……液体シール部
、Ｕ字管、６……廃液タンク、７，８，９……排
気ダクト、１０……被処理物、１１……界面、１
２……処理液、１３……廃液、１４……廃液管。
FIG. 1 is a sectional view showing a specific example of the present invention. 1... Processing tank, 2... Cooling coil, 3... Heater, 4... Condensate receiver, 5... Liquid seal section, U-shaped pipe, 6... Waste liquid tank, 7, 8, 9... Exhaust duct , 10... object to be processed, 11... interface, 1
2... Processing liquid, 13... Waste liquid, 14... Waste liquid pipe.
Claims (1)
等の被処理物を挿入して被処理物を乾燥処理する
蒸気乾燥装置において、凝縮廃液を排出するため
の廃液管にシール部をもうけたことを特徴とする
蒸気乾燥装置。 ２ シール部がＵ字管であることを特徴とする請
求項１記載の蒸気乾燥装置。[Scope of Claim for Utility Model Registration] 1. A waste liquid for discharging condensed waste liquid in a steam drying device that dries a processed object such as a semiconductor substrate by inserting it into a processing tank filled with the vapor of a processing liquid. A steam drying device characterized by having a seal section in the tube. 2. The steam drying apparatus according to claim 1, wherein the seal portion is a U-shaped tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7030290U JPH0428431U (en) | 1990-06-29 | 1990-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7030290U JPH0428431U (en) | 1990-06-29 | 1990-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0428431U true JPH0428431U (en) | 1992-03-06 |
Family
ID=31606347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7030290U Pending JPH0428431U (en) | 1990-06-29 | 1990-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0428431U (en) |
-
1990
- 1990-06-29 JP JP7030290U patent/JPH0428431U/ja active Pending
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