JPH0429741B2 - - Google Patents

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Publication number
JPH0429741B2
JPH0429741B2 JP59162536A JP16253684A JPH0429741B2 JP H0429741 B2 JPH0429741 B2 JP H0429741B2 JP 59162536 A JP59162536 A JP 59162536A JP 16253684 A JP16253684 A JP 16253684A JP H0429741 B2 JPH0429741 B2 JP H0429741B2
Authority
JP
Japan
Prior art keywords
copper
treatment
zirconium
bismuth
aqueous solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59162536A
Other languages
Japanese (ja)
Other versions
JPS6141775A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16253684A priority Critical patent/JPS6141775A/en
Publication of JPS6141775A publication Critical patent/JPS6141775A/en
Publication of JPH0429741B2 publication Critical patent/JPH0429741B2/ja
Granted legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/38Coating with copper
    • C23C18/40Coating with copper using reducing agents
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • H05K3/384Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

(産業上の利用分野) 本発明は、樹脂と接着する銅表面の接着性を改
善する処理方法、特に、内層パターンを有する内
層印刷回路板の銅表面の接着性をよくするのに適
した処理法に関する。 (従来の技術) あらかじめ必要な内層パターンを形成した印刷
回路板をプリプレグを介して埋め込んだ多層印刷
回路板に用いられる銅箔には従来より両面粗化
箔、片面粗化箔(電解箔)が用いられている。し
かしながら両面粗化箔では回路加工中の取扱い
によつて傷つきやすい。粗面の安定性に欠け錆
が発生しやすい。粗面に回路加工するため微細
なフアインパターンの作成がむずかしい、という
欠点がある。片面粗化箔では光沢面に回路加工す
るためフアインパターンの作成が可能である。し
かし光沢面のままでは多層化接着時に十分な接着
力が得られない為、通常は酸化皮膜形成処理を施
して接着力の向上をはかつているが、酸化皮膜
が変質しやすく可使用期間が短いという欠点があ
る。 (発明の目的) 本発明の目的は、プリプレグ等の樹脂層との接
着性に優れた銅の表面処理法を提供するものであ
る。 (発明の構成) 本発明は、樹脂と接着される銅を、銅イオン、
銅イオンの錯化剤、還元剤、水酸イオン、並び
に、ジルコニウム、ビスマス及びこれらの化合物
の中から選ばれる少なくとも一種を含む水溶液と
接触させることを特徴とする銅の表面処理法であ
る。 すなわち本発明はジルコニウム、ビスマス、そ
れぞれの化合物たとえば酸化ジルコニウム、ケイ
酸ジルコニウム、四塩化ジルコニウム、水素化ジ
ルコニウム、二酸化ジルコニウム、オキシ塩化ジ
ルコニウム、硝酸ジルコニウム、硫酸ビスマス、
オキシ塩化ビスマス、酸化ビスマス、硝酸ビスマ
ス、塩化ビスマス、塩基性炭酸ビスマスなどの中
より選ばれる少くとも1種類以上を必須成分とす
る銅イオン、銅イオンの錯化剤、水酸イオン、還
元剤を含む水溶液と樹脂と接着する銅の表面とを
接触させることを特徴とする銅の処理方法であ
る。前記水溶液と銅とを接触させるには、銅を水
溶液中に浸漬する方法、水溶液をスプレーする方
法などがある。本発明において銅イオンとして硫
酸銅、硝酸銅、塩化第二銅などの通常の銅塩を銅
イオン源に使用するとよい。錯化剤としてはエチ
レンジアミン−四酢酸、N,N,N′,N′テトラ
キス(2−ヒドロキシプロピル)エチレンジアミ
ン、酒石酸などの銅イオンと錯体を形成し、なお
かつアルカリ水溶液に可溶なものがよい。水酸イ
オンは処理液のPHを調整する目的をもち、水酸化
ナトリウム、水酸化カリウムなどを使用するとよ
い。還元剤としてはホルマリン、次亜リン酸塩な
どが使用できる。これらの成分をもつ処理液の基
本組成としては硫酸銅2g/〜20g/、錯化
剤としてエチレンジアミン四酢酸を硫酸銅濃度の
1〜5倍モル濃度、処理液PHは11.0〜13.5、還元
剤として37%ホルマリンを2ml/〜20ml/を
用いることが好ましい。ジルコニウム、ビスマ
ス、それぞれの化合物の添加量は0.05g/以上
でよいが取扱いやコストを考えると、0.5g/
〜50g/の範囲で使用することがよい。 本発明の組成に添加剤としてさらに窒素を有す
る複素環式化合物を加えた場合さらに効果は良好
なものになる。これらの主な化合物としては1,
10−フエナンスロリン、4,7−ジメチル1,10
−フエナンスロリン、αα′−ジピリジル、
αα′α″−トリピリジル、塩素化銅フタロシアニリ
ン、2,4−ジメチルイミダゾールなどがある。
これらは0.1mg/以上、好ましくは1mg/〜
500mg/用いる。 本発明の処理液組成はいわゆる無電解めつき液
に属するものである為本処理によつて時には異常
な銅の析出や不純物の付着の発生することがあ
る。この銅析出はパターン間において異常な導通
(シヨート)をおこす可能性もあるので後処理と
して塩酸、硫酸、酢酸、塩化第二銅、塩化第二
鉄、過硫酸アンモニウム、アルカリ金属塩化物、
錯化剤と還元剤のアルカリ溶液、それぞれのうち
の2種類以上の組合せなどをもちいた処理液で処
理を行ない、処理表面を整面することが出来る。
又、処理される銅は通常の回路板に用いられる電
解箔、無電解めつき、電気めつきによつて形成さ
れた銅、圧延銅などのいづれであつてもかまわな
い。 本発明による処理は、多層印刷回路板の内層銅
箔の接着前処理のみならず銅張積層板のエツチン
グやめつきや半田付けのためのレジスト形成にお
ける銅とレジストの接着、フレキシブルプリント
配線板の銅とフレキシブルフイルムの接着力向上
のためにも使用できる。 実施例 1 あらかじめ回路加工した銅張積層板を脱脂処理
→整面処理(過硫酸アンモニウム100g/水溶
液に浸漬)→水洗→乾燥の前処理を行つた。硫酸
銅10g/、エチレンジアミン四酢酸40g/、
PH(室温)12.0、37%ホルマリン5ml/、液温
度70℃の純水水溶液より成る基本処理液に酸化ビ
スマス1g/添加した浴に前記回路加工した銅
張積層板を30分間浸漬処理した後10%塩酸で室温
1分間の後処理を行つた。 実施例 2 基本処理液に酸化ジルコニウム2g/、1,
10−フエナンスロリン10mg/を添加した浴で実
施例1の回路加工した銅張積層板を20分間浸漬処
理した後、後処理した過硫酸アンモニウムの50
g/水溶液に室温で3分間浸漬処理した。 比較例 1 実施例1の前処理のみを行つた銅張り積層板 比較例 2 実施例1の回路加工した銅張積層板を基本処理
液のままで30分間浸漬処理を行つた。 比較例 3 両面粗化箔を用いた銅張り積層板。 比較例 4 銅箔表面に黒色酸化銅皮膜形成処理を施したも
の。 以上の実施例、比較例の基板の特性を別表に示
す。
(Industrial Application Field) The present invention relates to a treatment method for improving the adhesion of a copper surface to be bonded to a resin, particularly a treatment suitable for improving the adhesion of a copper surface of an inner layer printed circuit board having an inner layer pattern. Regarding the law. (Prior art) Copper foils used for multilayer printed circuit boards in which printed circuit boards with necessary inner layer patterns formed in advance are embedded via prepreg have traditionally been double-sided roughened foils and single-sided roughened foils (electrolytic foils). It is used. However, double-sided roughened foil is easily damaged by handling during circuit processing. The rough surface lacks stability and is prone to rust. The disadvantage is that it is difficult to create fine fine patterns because the circuit is processed on a rough surface. With single-sided roughened foil, it is possible to create fine patterns because the circuit is processed on the glossy side. However, if the glossy surface remains as it is, sufficient adhesion strength cannot be obtained during multilayer bonding, so oxide film formation treatment is usually applied to improve adhesive strength, but the oxide film tends to deteriorate and has a short shelf life. There is a drawback. (Object of the Invention) An object of the present invention is to provide a method for surface treatment of copper that has excellent adhesion to resin layers such as prepreg. (Structure of the Invention) The present invention provides copper ions, copper ions,
This is a method for surface treatment of copper, which is characterized by bringing it into contact with an aqueous solution containing a complexing agent for copper ions, a reducing agent, hydroxide ions, and at least one selected from zirconium, bismuth, and compounds thereof. That is, the present invention deals with zirconium, bismuth, and their respective compounds such as zirconium oxide, zirconium silicate, zirconium tetrachloride, zirconium hydride, zirconium dioxide, zirconium oxychloride, zirconium nitrate, bismuth sulfate,
Copper ions, complexing agents for copper ions, hydroxide ions, and reducing agents containing at least one type selected from bismuth oxychloride, bismuth oxide, bismuth nitrate, bismuth chloride, basic bismuth carbonate, etc. This is a copper processing method characterized by bringing an aqueous solution containing the resin into contact with the surface of the copper to be bonded. To bring the aqueous solution into contact with the copper, there are a method of immersing the copper in the aqueous solution, a method of spraying the aqueous solution, and the like. In the present invention, common copper salts such as copper sulfate, copper nitrate, and cupric chloride are preferably used as the copper ion source. The complexing agent is preferably one that forms a complex with copper ions and is soluble in an aqueous alkaline solution, such as ethylenediamine-tetraacetic acid, N,N,N',N'tetrakis(2-hydroxypropyl)ethylenediamine, and tartaric acid. The purpose of the hydroxide ion is to adjust the pH of the treatment solution, and sodium hydroxide, potassium hydroxide, etc. are preferably used. Formalin, hypophosphite, etc. can be used as the reducing agent. The basic composition of the treatment solution containing these components is copper sulfate 2g/~20g/, ethylenediaminetetraacetic acid as a complexing agent at a molar concentration of 1 to 5 times the copper sulfate concentration, treatment solution pH 11.0 to 13.5, and as a reducing agent. It is preferable to use 2 ml/~20 ml/of 37% formalin. The amount of zirconium, bismuth, and each compound added may be 0.05g/or more, but considering handling and cost, it is recommended to add 0.5g/or more.
It is preferable to use it in the range of ~50g/. If a nitrogen-containing heterocyclic compound is further added to the composition of the present invention as an additive, the effect will be even better. These main compounds are 1,
10-phenanthroline, 4,7-dimethyl 1,10
-phenanthroline, αα′-dipyridyl,
Examples include αα′α″-tripyridyl, chlorinated copper phthalocyanine, and 2,4-dimethylimidazole.
These are 0.1 mg/or more, preferably 1 mg/~
Use 500mg/. Since the treatment solution composition of the present invention belongs to a so-called electroless plating solution, this treatment may sometimes cause abnormal copper precipitation or adhesion of impurities. This copper precipitation may cause abnormal conduction (shoot) between patterns, so post-treatments such as hydrochloric acid, sulfuric acid, acetic acid, cupric chloride, ferric chloride, ammonium persulfate, alkali metal chloride,
The treated surface can be leveled by performing treatment with a treatment liquid using an alkaline solution of a complexing agent and a reducing agent, or a combination of two or more of each.
Further, the copper to be treated may be any of electrolytic foils used in ordinary circuit boards, copper formed by electroless plating, electroplating, rolled copper, etc. The treatment according to the present invention is applicable not only to the pre-adhesion treatment of the inner layer copper foil of multilayer printed circuit boards, but also to the adhesion of copper and resist in the formation of resist for etching and soldering of copper-clad laminates, and the adhesion of copper and resist in the formation of resists for etching and soldering of copper-clad laminates. It can also be used to improve the adhesive strength of flexible films. Example 1 A copper-clad laminate that had been circuit-processed in advance was subjected to pretreatment of degreasing → surface smoothing (immersion in 100 g of ammonium persulfate/aqueous solution) → washing → drying. Copper sulfate 10g/, ethylenediaminetetraacetic acid 40g/,
After the circuit-processed copper clad laminate was immersed for 30 minutes in a bath in which 1 g of bismuth oxide was added to a basic treatment solution consisting of 5 ml of 37% formalin at a pH (room temperature) of 70°C and a pure water solution at a temperature of 70°C. % hydrochloric acid for 1 minute at room temperature. Example 2 Zirconium oxide 2g/, 1,
After immersing the circuit-processed copper clad laminate of Example 1 in a bath containing 10 mg of 10-phenanthroline for 20 minutes, 50 mg of post-treated ammonium persulfate was added.
g/aqueous solution for 3 minutes at room temperature. Comparative Example 1 Copper-clad laminate subjected to only the pretreatment of Example 1 Comparative Example 2 The circuit-processed copper-clad laminate of Example 1 was immersed in the basic treatment solution for 30 minutes. Comparative Example 3 Copper-clad laminate using double-sided roughened foil. Comparative Example 4 Copper foil surface subjected to black copper oxide film formation treatment. The characteristics of the substrates of the above Examples and Comparative Examples are shown in the attached table.

【表】【table】

【表】 (発明の効果) 本発明によれば、樹脂と接着する銅表面を、銅
イオン、銅イオンの錯化剤、還元剤並びにジルコ
ニウム、ビスマス及びこれらの化合物から選ばれ
た少なくとも一種を含む水溶液と接触させること
により、銅表面に微細な銅粒子が析出し、樹脂と
の接着性が改善される。本発明は、多層印刷回路
板の内層回路板の接着性改善のほか、銅箔と積層
板との接着性改善、その他銅と樹脂とを接着させ
る場合にも有効である。
[Table] (Effects of the Invention) According to the present invention, the copper surface to be bonded to the resin is coated with copper ions, a copper ion complexing agent, a reducing agent, and at least one selected from zirconium, bismuth, and compounds thereof. By contacting with an aqueous solution, fine copper particles are deposited on the copper surface, improving adhesion with the resin. The present invention is effective not only for improving the adhesiveness of inner layer circuit boards of multilayer printed circuit boards, but also for improving the adhesiveness between copper foil and laminates, and for bonding copper and resin.

Claims (1)

【特許請求の範囲】 1 樹脂と接着される銅表面を、銅イオン、銅イ
オンの錯化剤、還元剤並びにジルコニウム、ビス
マス及びこれらの化合物から選ばれた少なくとも
一種を含む水溶液と接触させることを特徴とする
銅の表面処理法。 2 水溶液に、窒素を含む複素環式化合物を添加
することを特徴とする特許請求の範囲第1項記載
の銅の表面処理法。
[Claims] 1. Contacting the copper surface to be bonded with the resin with an aqueous solution containing copper ions, a copper ion complexing agent, a reducing agent, and at least one selected from zirconium, bismuth, and compounds thereof. Characteristic copper surface treatment method. 2. The copper surface treatment method according to claim 1, which comprises adding a nitrogen-containing heterocyclic compound to the aqueous solution.
JP16253684A 1984-08-01 1984-08-01 Surface treatment of copper Granted JPS6141775A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16253684A JPS6141775A (en) 1984-08-01 1984-08-01 Surface treatment of copper

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16253684A JPS6141775A (en) 1984-08-01 1984-08-01 Surface treatment of copper

Publications (2)

Publication Number Publication Date
JPS6141775A JPS6141775A (en) 1986-02-28
JPH0429741B2 true JPH0429741B2 (en) 1992-05-19

Family

ID=15756474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16253684A Granted JPS6141775A (en) 1984-08-01 1984-08-01 Surface treatment of copper

Country Status (1)

Country Link
JP (1) JPS6141775A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04324242A (en) * 1991-04-24 1992-11-13 Yuasa Corp Manufacturing method for storage battery lids
US6153530A (en) * 1999-03-16 2000-11-28 Applied Materials, Inc. Post-etch treatment of plasma-etched feature surfaces to prevent corrosion

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5371272A (en) * 1976-12-07 1978-06-24 Tokyo Shibaura Electric Co Method of producing printed circuit board

Also Published As

Publication number Publication date
JPS6141775A (en) 1986-02-28

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