JPH0436458Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] This invention is a clean technology used to conduct heat resistance tests, cold resistance tests, etc. under clean conditions, or to perform heat treatment on magnetic disks, optical disks, and various semiconductor products. It concerns a thermostat.

[Conventional technology]

This type of thermostatic chamber is generally configured such that a blower for circulating air inside the chamber is driven by an external motor, and is usually installed in a clean room.

If dust generation from the external motor is detected, a cover body 102 is provided around the external motor 101 on the thermostat 100 as shown in FIG.
A connecting duct 104 is connected to an exhaust duct 103 passing through the ceiling of the motor, thereby preventing dust from the motor from scattering into the clean room 105.

[The problem that the idea aims to solve]

However, with such conventional dust removal methods, it is not only time consuming and costly to install an exhaust duct on the ceiling of the clean room, but also the incubator cannot be moved and installed at any location due to the restriction of the location of the exhaust duct. The problem is that it is not easy to do so.

Therefore, the present invention is a clean constant temperature chamber in which the blower for internal air circulation is driven by an external motor, which can remove dust generated from the external motor regardless of the installation location of the constant temperature chamber, and To provide a constant temperature chamber that can maintain a clean atmosphere inside the chamber by effectively using purified air obtained by removing dust to block outside air that attempts to enter the chamber when the chamber door is opened. The purpose is to

[Means to solve the problem]

In accordance with the above-mentioned object, the present invention provides a clean constant temperature chamber in which the blower for internal air circulation is driven by an external motor, in which the external motor is surrounded by a cover body, and the gas inside the cover is purified by passing through a filter, and then kept at constant temperature. To provide a clean constant temperature chamber characterized by being equipped with an air purifying blow-out device that blows air to the chamber door.

Note that the constant temperature chamber mentioned here also includes a clean constant temperature and humidity chamber.

[Effect]

According to the incubator of the present invention, dust generated from the external motor that drives the blower is trapped in the cover body, and the gas in the cover body is purified through the filter and then blown out to the door of the incubator. Blocks outside air from entering the thermostat when the door is opened.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a schematic cross section of one embodiment. The embodiment shown in FIG. 1 is a clean constant temperature and humidity chamber, in which a partition wall 71 is provided at the back of an internal test chamber 7, and behind the partition wall 71, a heating evaporation type humidifier 72, a cooling Double dehumidifier 73, heater 74
and a blower 75 for air circulation. When the blower 75 is driven by the external motor 2, the gas in the test tank enters from below behind the partition wall 71, and after being temperature- and humidity-controlled by the stove, it passes through the filter 76 at the top of the test tank 7. It enters the test tank 7 in a purified state.

The purification filter 76 is a highly dust-collecting filter commonly known as a HEPA filter.

Further, the opening 77 of the test chamber 7 is opened and closed by the door 6.

Air purification blowing device A for external motor 2
is provided.

The device A includes a cover body 1 that covers the external motor 2 and extends above the door 6. This cover body has an opening 5 facing the upper end surface of the door 6. Further, the cover body 1 is provided with a gas inlet 8 above the self-cooling fan (not shown) of the external motor 2. The device A further includes a blower 3 within the cover body 1 and a Hepa filter 4 in front of the blower 3.

According to this constant temperature and humidity chamber, the gas in the test chamber 7 is
The air is circulated by the rotation of the blower 75 driven by the motor 2, and maintained at a predetermined temperature and humidity by the humidifier 72, the cooling/dehumidifier 73, and the heater 74.

Further, dust generated from the motor 2 is removed by an air purifying blowing device A. That is, while the motor 2 is operating, the blower 3 in the device A is also operated, whereby the gas in the cover body 1 is directed to the Hepa filter 4, where it is purified, and then flows down through the opening 5 to the door section. Furthermore, air is introduced into the cover body 1 from the air inlet 8 as the blower 3 operates.

When the door 6 is closed, purified air flows down from the gap between the opening front wall 51 and the door 6. When the door 6 is opened, it flows down from the entire opening 5 and descends along the test tank opening 77, blocking the outside air that is about to enter the test tank 7 through the opening 77, and causing the tank 7 to flow down.
Keep the inside clean.

Next, another embodiment, whose schematic cross section is shown in FIG. 2, will be described.

The embodiment shown in FIG. 2 is a clean constant temperature and humidity chamber, and the structure of the main body of the constant temperature and humidity chamber is the same as that shown in FIG. In this embodiment, the air purifying blowing device A' is slightly different from the device A in the embodiment shown in FIG. That is, the cover body 10 surrounding the motor 2 extends further toward the front of the door than in the embodiment shown in FIG. An outside air blocking curtain 501 made of vinyl or the like is hung from the front end.
A work space 9 is formed between the curtain and the door 6.

In addition, a hepa filter 40 is provided in the air outlet 50.
is provided.

According to this device A', gas inside the cover body 10 contaminated by dust generated from the motor 2 is guided by the blower 3 above the Hepa filter 40, from here it is purified by the Hepa filter 40, and flows down in front of the door 6. When the door 6 is opened, the flowing purified air blocks outside air from entering the test chamber 7. In this embodiment, the curtain 501 prevents outside air from entering the test chamber 7 more reliably. In this device A′,
The gas discharged from the blower 3 enters the wide space S in front of the blower 3 and then passes through the filter 40, so compared to the case where the gas passes through the filter 40 immediately after leaving the blower 3, This reduces the burden on people and has a noise-muffling effect.

In any of the above embodiments, the external motor 2
The gas around the motor contaminated by dust from
The air is carried by the blower 3 to the filter 4 or 40, where it is purified and flows down to the door area. When the door 6 is opened, the purified air flowing down prevents outside air from entering the test tank 7, and the purified air after passing through the filters 4 and 40 is effectively used to maintain the cleanliness inside the test tank.

[Effect of idea]

According to the present invention, the blower for internal air circulation is a clean constant temperature chamber driven by an external motor, and regardless of the installation location of the constant temperature chamber, it is possible to remove dust generated from the external motor. To provide a clean thermostat that can maintain a clean atmosphere inside the thermostat by effectively using purified air obtained by removing dust to block outside air that tries to enter the thermostat when the thermostat door is opened. There is an effect that can be done.

[Brief explanation of the drawing]

Fig. 1 is a schematic sectional view of one embodiment of the present invention;
The figure is a schematic sectional view of another embodiment of the present invention, and FIG. 3 is an explanatory view of a conventional example. A, A'... Air purification blowing device, 1, 10...
...Cover body, 2...Blower 75 drive motor, 3
...Blower, 4,40...Filter, 5,50...
...Air blowout opening, 8...Air inlet, 6...
Door, 7...Test tank.

Claims (1)

[Scope of utility model registration request] In a clean incubator in which a blower for internal air circulation is driven by an external motor, the external motor is surrounded by a cover body, and after the gas inside the cover is purified by passing through a filter, the air purifying blowout is blown out toward the incubator door. A clean constant temperature chamber characterized by being equipped with a device.