JPH0450916U - - Google Patents
Info
- Publication number
- JPH0450916U JPH0450916U JP9221490U JP9221490U JPH0450916U JP H0450916 U JPH0450916 U JP H0450916U JP 9221490 U JP9221490 U JP 9221490U JP 9221490 U JP9221490 U JP 9221490U JP H0450916 U JPH0450916 U JP H0450916U
- Authority
- JP
- Japan
- Prior art keywords
- attachment
- gear provided
- frame
- crystal
- spindle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 4
- 238000005498 polishing Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Description
第１図は本考案の一実施例を示す斜視図、第２
図は水晶ウエハーを示す斜視図、第３図は従来の
ベバル加工の治具を示す側面図、第４図は従来の
ベバル加工を示す斜視図、第５図は従来のベバル
加工によつて得られた水晶ウエハーの斜視図であ
る。
１１……枠体、１２……貼り付けブロツク、１
３……水晶ウエハー、１４……ギア、１５……ウ
オームギア。
Fig. 1 is a perspective view showing one embodiment of the present invention;
The figure is a perspective view showing a crystal wafer, Figure 3 is a side view showing a jig for conventional beval processing, Figure 4 is a perspective view showing conventional beval processing, and Figure 5 is a perspective view showing a conventional beval processing. FIG. 11... Frame body, 12... Pasting block, 1
3...Crystal wafer, 14...Gear, 15...Worm gear.
Claims (1)
軸支した水晶ウエハーの貼り付け面を有する複数
の貼り付けブロツクと、 各貼り付けブロツクの支軸の一端に設けたギア
と、 上記枠体に上記支軸の各ギアに歯合して連動し
て回転操作可能に設けたウオームギアと、 を具備したことを特徴とする水晶片の研磨装置。[Scope of Claim for Utility Model Registration] A plurality of attachment blocks having attachment surfaces of crystal wafers rotatably supported between frame bodies that face each other at regular intervals, and a spindle of each attachment block. A crystal blank polishing device comprising: a gear provided at one end; and a worm gear provided on the frame so that it can be rotated in conjunction with gears of the support shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9221490U JPH0450916U (en) | 1990-08-31 | 1990-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9221490U JPH0450916U (en) | 1990-08-31 | 1990-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0450916U true JPH0450916U (en) | 1992-04-28 |
Family
ID=31828501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9221490U Pending JPH0450916U (en) | 1990-08-31 | 1990-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0450916U (en) |
-
1990
- 1990-08-31 JP JP9221490U patent/JPH0450916U/ja active Pending
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