JPH06201581A - Simultaneous measurement device for reflected and transmitted light - Google Patents

Abstract

(57) [Summary] [Purpose] I would like to obtain an apparatus that can measure the total reflected light amount and the total transmitted light amount at the same time. [Configuration] Integrated sphere for reflected light measurement 10 and integrated sphere for transmitted light measurement
11 is arranged on the same center line and a sample 12 is placed between the integrating spheres 10 and 11, and the total reflected light amount is measured by the detector 13 mounted in the integrating sphere 10, and the detector mounted in the integrating sphere 11.
The amount of transmitted light is simultaneously measured with 14.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a reflection / reflection method used for observing a sample by irradiating the sample with various kinds of light and measuring its reflection or transmission characteristics, and for analyzing the sample. The present invention relates to a device for simultaneous measurement of transmitted light.

[0002]

2. Description of the Related Art As a device for irradiating a sample with various kinds of light (ultraviolet rays, visible rays, infrared rays, etc.), and measuring and observing or analyzing its reflection or transmission characteristics, FIG.
As shown in FIG. 2, a device that reflects the light emitted from the light source 1 by the sample 4 and detects it by the reflected light detector 2, and detects the transmitted light by the transmitted light detector 3, and detects the reflected light in the integrating sphere 5. There is known a device in which the reflection detector 2 detects the total reflection light reflected by the sample 4 by attaching the device 2.

[0003]

However, the above-mentioned known examples have the following drawbacks.

When the sample is irradiated with various light sources, the reflected light and the transmitted light are diffused at all angles as shown in FIG. As a result, when the reflected light or the transmitted light is measured using the device shown in FIG. 4, the measurement is limited to the light reflected or transmitted at the angle at which the detector exists. That is,
It is impossible to measure total reflection and total transmission, and most of the light is lost. As a result, the amount of detection (energy) decreases and the detection sensitivity deteriorates. On the other hand, the system using the integrating sphere as shown in FIG. 5 can measure the total reflected light efficiently and with high sensitivity, but cannot measure the transmitted light.

An object of the present invention is to propose an apparatus capable of simultaneously measuring total reflected light and total transmitted light.

[0006]

The constitution of the simultaneous measuring apparatus for reflected / transmitted light according to the present invention is as follows.

A sample is placed between two integrating spheres having the same central axis, and detectors are respectively mounted in the two integrating spheres. The detector of the integrating sphere on the incident side detects totally reflected light, and The detector of the integrating sphere on the side is a simultaneous measurement device for reflected and transmitted light that is configured to detect all transmitted light.

[0008]

When light is emitted from the light source to the sample, a part of this light is reflected by the sample, and the reflected light is all measured by the detector in the integrating sphere on the incident side. On the other hand, all the light transmitted through the sample is simultaneously measured by the detector in the transmission side integrating sphere. In this way, it is possible to measure the total reflected light and the total transmitted light from the sample at the same time.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In FIG. 1, 10 is an integrating sphere for measuring reflected light located on the incident side, 11 is an integrating sphere for measuring transmitted light having a central axis X in common with the integrating sphere 10 for measuring reflected light, and 12 is reflective. A sample placed between the light measuring integrating sphere 10 and the transmitted light measuring integrating sphere 11,
Reference numeral 13 is a reflected light detector mounted in the reflected light measuring integrating sphere 10, and 14 is a transmitted light detector mounted in the transmitted light measuring integrating sphere 11. Although the number of detectors 13 and 14 in the embodiment is one, a plurality of detectors may be attached. The position is also arbitrary, but the optimum mounting position for the transmitted light measuring detector 14 is that of the embodiment in which the optical axis P intersects the integrating sphere 11.
Next, the radiation angle from the light source 15 is the central axis X as shown in FIG.
It is preferable to make a slight angle α with respect to, and if the optical axis P is the same as the central axis X, as shown in FIG.
The light passing therethrough may be specularly reflected on the wall surface of the transmitted light measuring integrating sphere 11 and may pass through the sample 12 in the opposite direction, and reach the reflected light measuring integrating sphere 10.

[0010]

As described above, the present invention uses two integrating spheres, one for measuring reflected light and the other for measuring transmitted light. Total reflected light and total transmitted light can be measured. Therefore,
The amount of light to be measured becomes large, and there is an effect that the reflection and transmission characteristics can be simultaneously measured while improving the measurement accuracy.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of a measuring device according to the present invention.

FIG. 2 is an explanatory diagram when an incident angle is set.

FIG. 3 is an explanatory view when the incident angle is the same as the optical axis.

FIG. 4 is an explanatory view of a conventional measuring device.

FIG. 5 is an explanatory diagram of a conventional measuring device.

FIG. 6 is an explanatory diagram of omnidirectional reflection.

[Explanation of symbols]

 10 Integrated sphere for reflected light measurement 11 Integrated sphere for transmitted light measurement 12 Sample 13 Detector for reflected light measurement 14 Detector for transmitted light measurement P Optical axis X Central axis

Claims (2)

[Claims] 1. A sample is placed between two integrating spheres having the same central axis, and detectors are respectively mounted in the two integrating spheres, and the detector of the integrating sphere on the incident side detects the total reflection light. Simultaneous measurement device for reflected and transmitted light, which is configured so that the detector on the opposite side of the integrating sphere detects all transmitted light. 2. The simultaneous measurement apparatus for reflected / transmitted light according to claim 1, wherein the angle of incident light is set to be slightly different from the central axis.