JPH0631164B2 - Joining method for sintered silicon nitride - Google Patents

Joining method for sintered silicon nitride

Info

Publication number
JPH0631164B2
JPH0631164B2 JP11086786A JP11086786A JPH0631164B2 JP H0631164 B2 JPH0631164 B2 JP H0631164B2 JP 11086786 A JP11086786 A JP 11086786A JP 11086786 A JP11086786 A JP 11086786A JP H0631164 B2 JPH0631164 B2 JP H0631164B2
Authority
JP
Japan
Prior art keywords
silicon nitride
joining
sintered body
nitride sintered
joining method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11086786A
Other languages
Japanese (ja)
Other versions
JPS62270471A (en
Inventor
哲夫 吉尾
輝夫 橘
敦彦 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ube Corp
Original Assignee
Ube Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ube Industries Ltd filed Critical Ube Industries Ltd
Priority to JP11086786A priority Critical patent/JPH0631164B2/en
Publication of JPS62270471A publication Critical patent/JPS62270471A/en
Publication of JPH0631164B2 publication Critical patent/JPH0631164B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は窒化珪素焼結体を接合する方法に関する。The present invention relates to a method for joining silicon nitride sintered bodies.

(従来の技術) 窒化物系あるいは炭化物系セラミックスは、その強度、
耐熱性、耐摩耗性などの優れた特性により、近年高温構
造用材料としての応用が各方面で試みられており、一部
では実用化の段階に入っている。
(Prior Art) Nitride-based or carbide-based ceramics have
Due to its excellent properties such as heat resistance and wear resistance, application as a high temperature structural material has been attempted in various fields in recent years, and some have entered the stage of practical application.

これらのセラミックスは硬度が高く、脆弱であるという
セラミックスの本質的な欠点を有している。このため、
上記セラミックスを機械加工して複雑で大型形状の製品
を直接に製造することは一般に困難であり、しかもこの
加工に要する経費も大きくなる。そこで、製品をいくつ
かの部材に分けて製造した後、部材を接合により一体化
して製品にする方法が検討されている。
These ceramics have the essential drawback of ceramics that they have high hardness and are brittle. For this reason,
It is generally difficult to directly machine a complex and large-sized product by machining the above-mentioned ceramics, and the cost required for this machining also increases. Therefore, a method of manufacturing a product by dividing the product into several members and then integrating the members into a product has been studied.

セラミックス部材の接合方法としては、従来、部材間に
接着剤を介在させてホットプレスする方法、あるいは無
機系接着剤を接合面に塗布して焼成する方法が一般に採
用されている。
As a method for joining ceramic members, conventionally, a method of hot pressing with an adhesive agent interposed between the members or a method of applying an inorganic adhesive agent to the joint surfaces and baking it is generally adopted.

前者のホットプレスによる接合方法は、複雑形状部材の
接合にはモールドの構造上適用が困難であり、接合処理
費用も高くなるため、量産には適していない。
The former method of joining by hot pressing is not suitable for mass production because it is difficult to apply the joining of complicated shaped members due to the structure of the mold and the joining processing cost becomes high.

後者の方法で使用される無機系接着剤として、リン酸塩
系、ハロゲン化物系、シリカゲル系、さらには珪酸アル
カリ系のものが市販されている。これらの接着剤はいず
れも接合部材表面に塗布されるが、均一な厚さの接着層
が得られにくく、結果として接合後のセラミックス製品
の寸法精度が不充分となる。さらに、現状ではセラミッ
クス部材の強度に比較して接合部の強度が低いといった
解決すべき問題が残されている。
As the inorganic adhesive used in the latter method, phosphate-based adhesives, halide-based adhesives, silica gel-based adhesives, and alkali silicate-based adhesives are commercially available. All of these adhesives are applied to the surface of the joining member, but it is difficult to obtain an adhesive layer having a uniform thickness, and as a result, the dimensional accuracy of the ceramic product after joining becomes insufficient. Furthermore, at present, there remains a problem to be solved that the strength of the joint is lower than the strength of the ceramic member.

無機系接着剤を使用する接合方法よりも接合部強度の高
い接合方法としてメタライズ法がある。この方法は、モ
リブデンあるいはタングステンの粉末にマンガン等の金
属粉末を添加したペーストをセラミックス表面に焼付け
る方法、セラミックス表面に硫化銅を焼付ける方法、又
は炭酸銀をセラミックス表面に散布しこれを熱分解する
方法によって形成されるメタライズ層を介してセラミッ
クス部材を接合する方法である。このメタライズ法にお
いては、接合部の耐熱性はメタライズ材の耐熱温度以上
では極端に低下してしまう。
There is a metallizing method as a joining method having a higher joining strength than a joining method using an inorganic adhesive. This method includes baking a paste of molybdenum or tungsten powder added with metal powder such as manganese on the ceramic surface, baking copper sulfide on the ceramic surface, or spraying silver carbonate on the ceramic surface and thermally decomposing it. It is a method of joining ceramic members through a metallized layer formed by the above method. In this metallizing method, the heat resistance of the joint portion is extremely lowered above the heat resistant temperature of the metallized material.

(問題点を解決するための技術的手段) 本発明は、接合部の強度の高い窒化珪素焼結体の接合方
法を提供する。
(Technical Means for Solving the Problems) The present invention provides a method for joining a silicon nitride sintered body having a high joint strength.

本発明によれば、酸化物系焼結助剤を含有する窒化珪素
焼結体を水熱処理し、得られる焼結体の表面浸食層をつ
き合わせて加熱することを特徴とする窒化珪素焼結体の
接合法が提供される。
According to the present invention, a silicon nitride sintered body containing an oxide-based sintering aid is hydrothermally treated, and a surface erosion layer of the obtained sintered body is butted and heated. A method of joining the body is provided.

本発明における酸化物系焼結助剤の具体例としては、M
g、Al、Zr、Be、Ti、Sc、Y等の金属の酸化
物、さらにはLa、Ce、Pr、Sm、Dy等の稀土類
元素の酸化物が挙げられる。これらの酸化物系焼結助剤
の中でもY及びAlの酸化物が好適に使用される。酸化
物系焼結助剤の含有量は通常1〜15重量%である。窒
化珪素焼結体は上記の酸化物系焼結助剤に加えて、非酸
化物系焼結助剤、例えばYN、AlNを含有することが
できる。非酸化物系焼結助剤の含有量は通常5重量%以
下である。
Specific examples of the oxide-based sintering aid in the present invention include M
Examples thereof include oxides of metals such as g, Al, Zr, Be, Ti, Sc and Y, and oxides of rare earth elements such as La, Ce, Pr, Sm and Dy. Among these oxide-based sintering aids, oxides of Y and Al are preferably used. The content of the oxide-based sintering aid is usually 1 to 15% by weight. The silicon nitride sintered body may contain a non-oxide type sintering aid such as YN or AlN in addition to the above oxide type sintering aid. The content of the non-oxide type sintering aid is usually 5% by weight or less.

本発明においては、所定形状に加工した窒化珪素焼結体
を水中で加熱する水熱処理を行い、窒化珪素焼結体の表
面に浸食層を形成させる。加熱温度は通常100〜50
0℃、好ましくは200〜400℃である。加熱時間は
通常2〜100時間、好ましくは10〜50時間であ
る。水熱処理はオートクレーブ中で行うことが好まし
い。この処理により窒化珪素焼結体の表面に形成される
浸食層は、例えば、酸化物系焼結助剤としてアルミナを
含有する場合はアルミニウムシリケートの水和物からな
り、酸化物系焼結助剤としてマグネシアを含有する場合
はマグネシウムシリケートの水和物からなる。
In the present invention, the silicon nitride sintered body processed into a predetermined shape is subjected to hydrothermal treatment by heating in water to form an erosion layer on the surface of the silicon nitride sintered body. Heating temperature is usually 100-50
The temperature is 0 ° C, preferably 200 to 400 ° C. The heating time is usually 2 to 100 hours, preferably 10 to 50 hours. The hydrothermal treatment is preferably performed in an autoclave. The erosion layer formed on the surface of the silicon nitride sintered body by this treatment is made of, for example, a hydrate of aluminum silicate when containing alumina as an oxide-based sintering aid, When it contains magnesia, it consists of a hydrate of magnesium silicate.

上記浸食層の厚さは水熱処理条件を変更することによっ
て任意に制御することができる。即ち、浸食層の厚さは
処理温度を高くするほど、また処理時間を長くするほど
大きくなる。
The thickness of the erosion layer can be arbitrarily controlled by changing the hydrothermal treatment conditions. That is, the thickness of the erosion layer increases as the treatment temperature is increased and the treatment time is increased.

本発明においては、水熱処理して表面に浸食層が形成さ
れた窒化珪素焼結体同士を、嵌合、締結、挿着等の方法
で一次的につき合わせた後、加熱して接合する。加熱温
度は通常600〜1600℃、好ましくは800〜14
00℃である。加熱温度が過度に低いと浸食層同士の充
分な焼結が起こらず接合強度が小さくなる。また加熱温
度が過度に高いと浸食層の溶融が起こり均一な接合層が
得られにくくなる。加熱時の雰囲気は酸素含有雰囲気で
あることが好ましい。通常は空気雰囲気中で水熱処理さ
れた窒化珪素焼結体を加熱するのが好ましい。
In the present invention, the silicon nitride sintered bodies having the erosion layer formed on their surfaces by hydrothermal treatment are temporarily joined together by a method such as fitting, fastening or inserting, and then heated and joined. The heating temperature is usually 600 to 1600 ° C, preferably 800 to 14
It is 00 ° C. If the heating temperature is excessively low, sufficient sintering of the erosion layers does not occur and the joint strength decreases. Further, if the heating temperature is excessively high, the erosion layer is melted and it becomes difficult to obtain a uniform bonding layer. The atmosphere during heating is preferably an oxygen-containing atmosphere. Usually, it is preferable to heat the hydrothermally treated silicon nitride sintered body in an air atmosphere.

(実施例) 以下に実施例を示す。(Example) An example is shown below.

実施例1 酸化物系焼結助剤としてY、Al及びAl
Nを含有する窒化珪素焼結体のテストピース(3×4×
20mm)をオートクレーブ中で、1300℃の温度、
8.6MPaの圧力下に5日間水熱処理した。
Example 1 Y 2 O 3 , Al 2 O 3 and Al as oxide-based sintering aids
Test piece of silicon nitride sintered body containing N (3 x 4 x
20 mm) in an autoclave at a temperature of 1300 ° C,
It was hydrothermally treated for 5 days under a pressure of 8.6 MPa.

処理したテストピースの3×4mmの面をつき合わせ、空
気雰囲気下1350℃で1時間加熱して、接合した。接
合したテストピースの接合部の平均曲げ強度(3点曲げ
試験)は19kg/mm2であった。
The 3 × 4 mm surfaces of the treated test pieces were brought into contact with each other and heated in an air atmosphere at 1350 ° C. for 1 hour to bond them. The average bending strength (three-point bending test) of the joined portion of the joined test pieces was 19 kg / mm 2 .

実施例2 水熱処理を300℃、8.6MPaの圧力下に1日間を行
った以外は実施例1と同様の方法を繰り返した。テスト
ピースの接合部の平均曲げ強度(3点曲げ試験)は23
kg/mm2であった。
Example 2 The same method as in Example 1 was repeated except that the hydrothermal treatment was carried out at 300 ° C. under a pressure of 8.6 MPa for 1 day. The average bending strength of the test piece joint (3-point bending test) is 23.
It was kg / mm 2 .

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】酸化物系焼結助剤を含有する窒化珪素焼結
体を水熱処理し、得られる焼結体の表面浸食層をつき合
わせて加熱することを特徴とする窒化珪素焼結体の接合
法。
1. A silicon nitride sintered body, characterized in that a silicon nitride sintered body containing an oxide-based sintering aid is hydrothermally treated, and a surface erosion layer of the obtained sintered body is butted against and heated. Joining method.
JP11086786A 1986-05-16 1986-05-16 Joining method for sintered silicon nitride Expired - Lifetime JPH0631164B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11086786A JPH0631164B2 (en) 1986-05-16 1986-05-16 Joining method for sintered silicon nitride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11086786A JPH0631164B2 (en) 1986-05-16 1986-05-16 Joining method for sintered silicon nitride

Publications (2)

Publication Number Publication Date
JPS62270471A JPS62270471A (en) 1987-11-24
JPH0631164B2 true JPH0631164B2 (en) 1994-04-27

Family

ID=14546694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11086786A Expired - Lifetime JPH0631164B2 (en) 1986-05-16 1986-05-16 Joining method for sintered silicon nitride

Country Status (1)

Country Link
JP (1) JPH0631164B2 (en)

Also Published As

Publication number Publication date
JPS62270471A (en) 1987-11-24

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