JPH0638008B2 - Cryogenic cooling device - Google Patents
Cryogenic cooling deviceInfo
- Publication number
- JPH0638008B2 JPH0638008B2 JP61265280A JP26528086A JPH0638008B2 JP H0638008 B2 JPH0638008 B2 JP H0638008B2 JP 61265280 A JP61265280 A JP 61265280A JP 26528086 A JP26528086 A JP 26528086A JP H0638008 B2 JPH0638008 B2 JP H0638008B2
- Authority
- JP
- Japan
- Prior art keywords
- heat transfer
- expander
- heat
- transfer terminal
- inner cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- Devices That Are Associated With Refrigeration Equipment (AREA)
- Separation By Low-Temperature Treatments (AREA)
- Containers, Films, And Cooling For Superconductive Devices (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この考案は、例えば液体ヘリウム内に浸漬された超電導
マグネットを被冷却体としてこの被冷却体を該被冷却体
を包囲する熱遮蔽体とともに真空容器内に一括収容し、
かつ冷凍機により前記熱遮蔽体を冷却して真空容器の外
部より侵入する輻射熱を除熱することにより、真空容器
内の中心部に置かれた被冷却体を極低温冷却状態に維持
させるようにした冷凍機付きクライオスタットを対象と
する極低温冷却装置の構成に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention is directed to, for example, a superconducting magnet immersed in liquid helium as an object to be cooled, and this object to be cooled is vacuumed together with a heat shield surrounding the object to be cooled. Collected in a container all at once,
And by cooling the heat shield by a refrigerator to remove the radiant heat entering from the outside of the vacuum container, the cooled object placed in the center of the vacuum container is maintained in a cryogenic cooling state. Of the cryogenic cooling device for the cryostat with a refrigerator described above.
まず頭記した極低温冷却装置の従来構成を第3図に示
す。図において1は極低温で作動する例えば磁気共鳴を
利用する医療機器の超電導マグネットである被冷却体、
2は前記被冷却体を液体ヘリウム3に浸漬して収容した
内部容器、4は前記内部容器2を中央に置いて収容した
真空容器であり、該真空容器4の内方には前記内部容器
3の外周を包囲してさらに内外複数段の熱遮蔽体5,6
が配備されている。なお7は真空容器内の高真空空間を
示し、また前記内部容器2および熱遮蔽体5,6は図示
されてない断熱支持体を介して真空容器4に支持されて
いる。First, the conventional structure of the cryogenic cooling device described above is shown in FIG. In the figure, reference numeral 1 denotes a cooled object which is a superconducting magnet of a medical device which operates at a very low temperature and which utilizes magnetic resonance,
Reference numeral 2 denotes an internal container in which the object to be cooled is immersed in liquid helium 3 and accommodated therein, 4 is a vacuum container in which the internal container 2 is placed in the center, and the interior container 3 is provided inside the vacuum container 4. Surrounding the outer periphery of the heat shields 5, 6
Has been deployed. Reference numeral 7 denotes a high vacuum space in the vacuum container, and the inner container 2 and the heat shields 5 and 6 are supported by the vacuum container 4 via a heat insulating support (not shown).
一方、真空容器4の頂部中央には冷凍機据付用窓が開口
されており、この部分にギフォード・マクマホンサイク
ル,ソルベイサイクル,スターリング逆サイクル等の熱
サイクルに基づく閉サイクル冷凍機の膨張機8が取付け
フランジ8aにより前記開口窓を気密封止するように固定
ボルト8bを介して着脱可能にボルト締めして据付けられ
ており、かつ膨張機本体から真空容器内に突き出す上下
2段構造のシリンダの寒冷発生部9A,9Bの先端周面部に
は良熱伝導金属製で作られたフランジ形の伝熱端子10
A,10Bが固着されている。On the other hand, a refrigerator installation window is opened at the center of the top of the vacuum container 4, and an expander 8 of a closed-cycle refrigerator based on a heat cycle such as Gifford-McMahon cycle, Solvay cycle, Stirling reverse cycle, etc. is opened in this portion. Cylinder of the upper and lower two-stage structure which is detachably bolted and installed through the fixing bolt 8b so as to hermetically seal the opening window by the mounting flange 8a, and which projects from the expander body into the vacuum container. A flange-shaped heat transfer terminal 10 made of a good heat-conducting metal on the peripheral surface of the tips of the generators 9A and 9B.
A and 10B are fixed.
また後述する冷凍機のメインテナンス作業に際して真空
容器4内の高真空空間7の真空を破らずに膨張機8を真
空容器4から取り外すことができるようにするために、
真空容器4の内方には前記膨張機8の寒冷発生部9A,9B
を包囲して真空容器4の真空空間7と膨張機8との間を
隔離するように有底形の気密内筒11が設置されている。
この気密内筒11はその内方が前記した真空容器4の膨張
機据付け面に開放しており、その構造は良熱伝導金属製
の底板フランジ12,リング状の中間フランジ13,前記フ
ランジ12と13との間を気密結合した伝熱抵抗の大きな材
料で作られたベローズ14,および一端をフランジ13に他
端を真空容器4の開口端に気密結合したベローズ15との
組合せ体として成る。また前記フランジ12,13の外周端
はそれぞれ可撓性の伝熱部材16を介して先記した熱遮蔽
体5,6に伝熱的に接続されており、さらに気密内筒11
の内方側にて前記フランジ12,13の上面には先記した膨
張機8側の伝熱端子10A,10Bの面と密着して伝熱的に接
触し合う可動式の伝熱端子板18A,18Bが可撓性伝熱部材
19,圧縮付勢ばね20を介して取付け支持されている。な
お21はベローズ14,15の伸縮を許容して前記フランジ1
2,13を遊嵌支持した断熱支持脚である。Further, in order to enable the expander 8 to be removed from the vacuum container 4 without breaking the vacuum of the high vacuum space 7 in the vacuum container 4 during maintenance work of the refrigerator described later,
Inside the vacuum container 4, the cold generating parts 9A and 9B of the expander 8 are provided.
A bottomed airtight inner cylinder 11 is installed so as to surround the space and isolate the vacuum space 7 of the vacuum container 4 from the expander 8.
The inside of this airtight inner cylinder 11 is open to the expansion machine installation surface of the vacuum container 4 described above, and the structure is such that the bottom plate flange 12 made of a good heat conductive metal, the ring-shaped intermediate flange 13, and the flange 12 are formed. A bellows 14 made of a material having a large heat transfer resistance, which is airtightly coupled with the bellows 13, and a bellows 15 which is airtightly coupled with the flange 13 at one end and the open end of the vacuum container 4 at the other end. Further, the outer peripheral ends of the flanges 12 and 13 are thermally connected to the above-mentioned heat shields 5 and 6 through flexible heat transfer members 16, respectively, and the airtight inner cylinder 11
A movable heat transfer terminal plate 18A which is in intimate contact with the surfaces of the heat transfer terminals 10A and 10B on the expander 8 side described above on the upper surfaces of the flanges 12 and 13 on the inner side of the heat transfer terminals. , 18B is a flexible heat transfer member
19, is attached and supported via a compression biasing spring 20. Reference numeral 21 allows the bellows 14 and 15 to expand and contract, and the flange 1
These are heat-insulating support legs that loosely support 2 and 13.
さらに前記気密内筒11の内方空間に向け、真空容器4の
頂部フランジ部を貫通して外部よりガス導管21が引き込
み配管されており、かつ該ガス導管21は弁21は弁22,23
を介して真空ポンプ24,およびヘリウムガス等の不活性
ガス源に接続されている。ここで真空ポンプ24は冷凍機
の運転に際して気密内筒11の内方空間を真空引きして空
気を排除し、寒冷発生部,およびその周辺部材等に着氷
が発生するのを抑えるためのものであり、また後述のよ
うにメインテナンスに際して冷凍機の膨張機8を真空容
器4から取り出す場合には、ガス導管21を通じて気密内
筒11の内部への外気侵入を抑えるように不活性ガスを送
り込んでガス置換を行う。Further, a gas conduit 21 is drawn from the outside through the top flange portion of the vacuum container 4 toward the inner space of the airtight inner cylinder 11, and the gas conduit 21 has a valve 21 and valves 22, 23.
It is connected to the vacuum pump 24 and a source of inert gas such as helium gas via. Here, the vacuum pump 24 is for vacuuming the inner space of the airtight inner cylinder 11 during operation of the refrigerator to eliminate air, and to prevent icing from occurring in the cold generating part and its peripheral members. Further, as will be described later, when the expander 8 of the refrigerator is taken out from the vacuum container 4 during maintenance, an inert gas is sent through the gas conduit 21 so as to suppress the outside air from entering the inside of the airtight inner cylinder 11. Perform gas replacement.
かかる構造により膨張機8の寒冷発生部9A,9Bと熱遮蔽
体5,6との間に伝熱端子10A,10B→伝熱端子板18A,1
8B→可撓性伝熱部材19→フランジ12,13→可撓性伝熱部
材16→熱遮蔽体5,6に至る伝熱路が構成される。ここ
で気密内筒11の内方空間を真空引きした状態で冷凍機を
運転して熱遮蔽体5,6を極低温に冷却することによ
り、真空容器4を通じて外部より侵入した輻射熱が被冷
却体である超電導マグネット1および液体ヘリウム2を
収容した内部容器3に到達する以前の段階で熱遮蔽体
5,6より除熱され、超電導マグネット1を極低温冷却
状態に安定維持させることができるようになる。With this structure, the heat transfer terminals 10A and 10B are provided between the cold generating portions 9A and 9B of the expander 8 and the heat shields 5 and 6 → the heat transfer terminal plates 18A and 1B.
8B-> flexible heat transfer member 19-> flange 12,13-> flexible heat transfer member 16-> heat shield 5 and 6 is formed. Here, by operating the refrigerator to cool the heat shields 5 and 6 to an extremely low temperature in a state where the inner space of the airtight inner cylinder 11 is evacuated, the radiant heat that has entered from the outside through the vacuum container 4 is cooled. The heat is removed from the heat shields 5 and 6 before reaching the inner container 3 accommodating the superconducting magnet 1 and the liquid helium 2, and the superconducting magnet 1 can be stably maintained in a cryogenic cooling state. Become.
一方、前記した冷凍機の膨張機8は規定の運転時間が経
過した時点で、そのシールリング交換等のメインテナン
スを行う必要があり、このためにには膨張機8を真空容
器4から一旦取り外し、メインテナンス後に再び真空容
器4に据付ける作業が必要となる。この場合には、前記
したガス導管21を通じて気密内筒11の内方空間へ外部よ
り寒冷発生部の冷却温度で凝縮しないヘリウム等の不活
性ガスをブローして外気の侵入を抑えるようにガス置換
しつつ膨張機8を真空容器4から引出し、その後に真空
容器4の頂部開口面を盲蓋で仮封止する。これより膨張
機8の取り外し過程で外気の侵入を抑えて寒冷発生部お
よびその周辺に着氷が発生するのが防止しつつ、さらに
冷凍機を取り外した期間中に外部からの熱侵入を抑えて
超電導マグネット1の極低温維持を図る。またメインテ
ナンス作業の終了後に再び冷凍機の膨張機8を組込む場
合には、気密内筒11内に不活性ガスをブローして外気の
侵入を防止しつつ、前記盲蓋を外して膨張機8を据付け
てその寒冷発生部9A,9B側の伝熱端子10A,10Bを相手側
の伝熱端子板18A,18Bに伝熱接合させ、この状態で再び
気密内筒11の内方を真空引きした上で冷凍機を運転再開
する。On the other hand, the expander 8 of the refrigerating machine needs to perform maintenance such as replacement of the seal ring at the time when the specified operation time has elapsed. For this purpose, the expander 8 is once removed from the vacuum container 4, After the maintenance, it is necessary to install the vacuum container 4 again. In this case, an inert gas such as helium that does not condense from the outside at the cooling temperature of the cold generation portion is blown from the outside into the inner space of the airtight inner cylinder 11 through the gas conduit 21 described above so as to suppress the invasion of the outside air. At the same time, the expander 8 is pulled out from the vacuum container 4, and then the top opening surface of the vacuum container 4 is temporarily sealed with a blind lid. As a result, the invasion of outside air is suppressed during the removal process of the expander 8 to prevent the formation of ice on the cold generation part and its surroundings, and the heat intrusion from the outside is further suppressed during the period when the refrigerator is removed. To maintain the cryogenic temperature of the superconducting magnet 1. When the expander 8 of the refrigerator is installed again after the maintenance work is completed, the blind lid is removed and the expander 8 is installed while the inert gas is blown into the airtight inner cylinder 11 to prevent outside air from entering. After installation, heat transfer terminals 10A, 10B on the side of the cold generating parts 9A, 9B are heat-transfer-bonded to the heat transfer terminal plates 18A, 18B on the other side, and in this state, the inside of the airtight inner cylinder 11 is evacuated again. Then restart the refrigerator.
ところで上記した従来構成では、膨張機8の据付け状態
で膨張機8の寒冷発生部に固着した伝熱端子10A,10Bと
これに接触する相手側の伝熱端子板18A,18Bとは圧縮ば
ね20のばね力により加圧接触し合っている。しかしてこ
の場合にはばね荷重がそのまま膨張機8の寒冷発生部9
A,9Bに加わることから、付勢ばね20のばね力,したが
って膨張機側の伝熱端子10A,10Bと熱遮蔽体側の伝熱端
子板18A,18Bとの間の接触圧力は寒冷発生部9A,9Bの機
械的強度から規制された許容荷重以下に制限されること
になり、この結果として伝熱端子相互間の伝熱抵抗を充
分に低めることが困難となる。しかも伝熱端子接触部の
伝熱抵抗が高いと、冷却運転時にはこの部分に温度降下
が生じて高い熱伝導性が得られず、熱遮蔽体5,6を効
率よく極低温まで冷却することが困難となる。By the way, in the above-described conventional configuration, the heat transfer terminals 10A and 10B fixed to the cold generating portion of the expander 8 in the installed state of the expander 8 and the heat transfer terminal plates 18A and 18B on the other side in contact therewith are the compression spring 20. They are pressed against each other by the spring force of. However, in this case, the spring load remains as it is and the cold generating part 9 of the expander 8
Since it is applied to the A and 9B, the spring force of the biasing spring 20, and therefore the contact pressure between the heat transfer terminals 10A and 10B on the expander side and the heat transfer terminal plates 18A and 18B on the heat shield side, is the cold generating portion 9A. However, due to the mechanical strength of the 9B, the load is limited to the allowable load or less, and as a result, it becomes difficult to sufficiently reduce the heat transfer resistance between the heat transfer terminals. Moreover, if the heat transfer resistance of the heat transfer terminal contact part is high, a temperature drop occurs in this part during the cooling operation, and high heat conductivity cannot be obtained, so that the heat shields 5 and 6 can be efficiently cooled to an extremely low temperature. It will be difficult.
この発明の目的は、膨張機側の伝熱端子と熱遮蔽体に連
なる固定側の伝熱端子板との間を膨張機の機械的強度に
制約されることなく強固に接合して該接触部の伝熱抵抗
を低く抑えることにより、膨張機と熱遮蔽体との間に伝
熱性の高い伝熱経路を確保して効率よく冷却運転できる
ようにした極低温冷却装置の構成を提供することにあ
る。An object of the present invention is to firmly join the heat transfer terminal on the expander side and the heat transfer terminal plate on the fixed side connected to the heat shield without being restricted by the mechanical strength of the expander, and to provide the contact portion. By providing a low-temperature cooling device having a low heat transfer resistance, a heat transfer path having a high heat transfer property is secured between the expander and the heat shield to enable efficient cooling operation. is there.
上記問題点を解決するために、この発明によれば、被冷
却体および該被冷却体を包囲する熱遮蔽体を一括収容し
た真空容器の内部に高真空空間と隔離して有底形の気密
内筒を設け、かつここへ真空容器の開口部に着脱可能に
据付けた冷凍機の膨張機の寒冷発生部を収容するととも
に、前記熱遮蔽体より引出して気密内筒内に露呈配備し
た固定側伝熱端子板の板面上に膨張機の寒冷発生部に固
着した相手側の伝熱端子を接触させて膨張機の寒冷発生
部と熱遮蔽体との間に伝熱経路を形成し、冷凍機の運転
により熱遮蔽体を冷却するようにした極低温冷却装置に
おいて、前記膨張機側の伝熱端子と固定側の伝熱端子板
とを当接させた状態で両者間をボルト締結して伝熱結合
するとともに、膨張機が取付けフランジを介して真空容
器に据付けられており、かつ前記フランジには伝熱端子
側の締結ボルトを器外よりボルト操作するための工具挿
入穴,およびこの穴を封止する封栓を設けるものとす
る。In order to solve the above-mentioned problems, according to the present invention, a bottomed air-tightness is provided by being isolated from a high-vacuum space inside a vacuum container accommodating a body to be cooled and a heat shield surrounding the body to be cooled. A fixed side provided with an inner cylinder and accommodating the cold-generating part of the expander of the refrigerator, which is detachably installed in the opening of the vacuum container, and which is pulled out from the heat shield and exposed and arranged in the airtight inner cylinder. A heat transfer path is formed between the cold-generating part of the expander and the heat shield by contacting the heat-transfer terminal of the other side, which is fixed to the cold-generating part of the expander, on the plate surface of the heat-transfer terminal plate, and freezing In a cryogenic cooling device that cools the heat shield by operating the machine, tighten the bolts between the heat transfer terminal on the expander side and the heat transfer terminal plate on the fixed side in contact with each other. With the heat transfer coupling, the expander is installed in the vacuum vessel through the mounting flange. Ri, and the flange is assumed to provide a sealing plug for sealing the tool insertion hole for bolt operation from Utsuwagai the fastening bolt of the heat transfer terminal side, and this hole.
上記の構成により、膨張機の据付け状態で膨張機側の伝
熱端子とこれに当接する固定側の伝熱端子板との間を強
固にボルト締結することにより、両者間の接触伝熱抵抗
が低値に抑えられ、これにより膨張機と熱遮蔽体との間
には従来のばね加圧による接触方式と比べてより伝熱性
の高い伝熱経路を確保することができるようになる。With the above configuration, when the expander is installed, the heat transfer terminal on the expander side and the heat transfer terminal plate on the fixed side that abuts against the heat transfer terminal are firmly bolted together, so that the contact heat transfer resistance between them is increased. The value is suppressed to a low value, which makes it possible to secure a heat transfer path having a higher heat transfer property between the expander and the heat shield as compared with the conventional contact method using spring pressure.
第1図,第2図はこの発明の実施例による要部構成を示
すものであり、第3図に対応する同一部材には同じ符号
が付してある。すなわち図示実施例では第3図に示した
可動式伝熱端子板18A,18Bおよびこれに付属する可撓性
伝熱部材19,付勢ばね20が省略され、膨張機8の据付状
態では膨張機8の寒冷発生部9A,9Bの周面に固着された
伝熱端子10A,10Bがそれぞれ気密内筒11のフランジを兼
用する固定側の伝熱端子板12,13の板面上に直接当接さ
れ、ここで両者の間が締結ボルト25,26で強固に締結結
合されている。なお伝熱端子板12,13は第3図と同様に
可撓性伝熱部材16を介して熱遮蔽体5,6に伝熱結合さ
れている。FIGS. 1 and 2 show the structure of the main parts according to the embodiment of the present invention, and the same members corresponding to those in FIG. 3 are designated by the same reference numerals. That is, in the illustrated embodiment, the movable heat transfer terminal plates 18A and 18B shown in FIG. 3 and the flexible heat transfer member 19 and the biasing spring 20 attached thereto are omitted, and the expander 8 is installed in the installed state. The heat transfer terminals 10A and 10B fixed to the peripheral surfaces of the cold generating portions 9A and 9B of 8 directly contact the plate surfaces of the heat transfer terminal plates 12 and 13 on the fixed side which also serve as the flanges of the airtight inner cylinder 11, respectively. Here, the both are firmly fastened and coupled by fastening bolts 25 and 26. The heat transfer terminal plates 12 and 13 are heat transfer coupled to the heat shields 5 and 6 via the flexible heat transfer member 16 as in FIG.
ここで前記伝熱端子10A,10Bを含めた膨張機8の外形を
第2図に示すと、まず下段側の寒冷発生部9Aに固着され
た伝熱端子10Aは寒冷発生部の両側に張り出した方形板
と成り、その板面上には締結ボルト25に対応するボルト
穴25Aが穿孔されている。一方、上段側の寒冷発生部9B
に固着された伝熱端子10Bは円板であり、その板面上に
は前記ボルト穴25Aと軸線を合わせてボルト25の締付用
工具を上方より挿入する工具挿入穴25Bと、該穴25Bと90
度ずらした位置に締結ボルト26に対応するボルト穴26A
が穿孔されている。さらに膨張機8の取付けフランジ8a
の周面上には膨張機8を真空容器4に据付け固定するた
めの固定ボルト8bに対応したボルト穴8cの他に、前記の
ボルト穴25A,26Aに軸線を合わせて工具挿入穴25C,26B
が穿孔されている。すなわち各締結ボルト25,26にそれ
ぞれ対応して伝熱端子10A,10Bおよび取付けフランジ8a
には同一軸線上にボルト穴25A,工具挿入穴25B,25C、
およびボルト穴26A,工具挿入穴26Aが並んで穿孔されて
いる。さらに膨張機8の取付フランジ8aに穿孔した工具
挿入穴25C,26Bには第1図に示した気密封止用の封栓27
が着脱可能に取付けられている。Here, the outer shape of the expander 8 including the heat transfer terminals 10A and 10B is shown in FIG. 2. First, the heat transfer terminals 10A fixed to the cold generation part 9A on the lower side are projected to both sides of the cold generation part. It becomes a square plate, and bolt holes 25A corresponding to the fastening bolts 25 are drilled on the plate surface. On the other hand, the cold generating part 9B on the upper side
The heat transfer terminal 10B fixed to is a disc, and a tool insertion hole 25B for inserting a tightening tool of the bolt 25 from above from the upper side by aligning the axis with the bolt hole 25A on the plate surface, and the hole 25B. And 90
Bolt holes 26A corresponding to the fastening bolts 26 at offset positions
Is perforated. Further, the mounting flange 8a for the expander 8
In addition to the bolt holes 8c corresponding to the fixing bolts 8b for fixing the expander 8 to the vacuum container 4 on the peripheral surface of the tool insertion holes 25C, 26B by aligning the axes with the bolt holes 25A, 26A.
Is perforated. That is, the heat transfer terminals 10A and 10B and the mounting flange 8a corresponding to the fastening bolts 25 and 26, respectively.
Bolt holes 25A, tool insertion holes 25B and 25C on the same axis,
A bolt hole 26A and a tool insertion hole 26A are drilled side by side. Further, in the tool insertion holes 25C and 26B drilled in the mounting flange 8a of the expander 8, the airtight sealing plug 27 shown in FIG.
Is detachably attached.
次に上記構造による膨張機8の据付方法に付いて述べる
と、まず膨張機の寒冷発生部に固着した上下各段の伝熱
端子10A,10Bのボルト穴25A,25Bにそれぞれ締結ボルト
25,26をセットした状態で、真空容器4の上方より気密
内筒11の中へ膨張機8寒冷発生部9A,9Bを吊り降ろし、
この途中で下段側の伝熱端子10Aを第1図に示した固定
側の伝熱端子板13の中央に切欠かれた方形状の貫通穴28
を透過させ、さらに膨張機全体の向きを90度変えて固定
側の伝熱端子板12の上に着地させる。この状態で次に膨
張機8の取付けフランジ8aに穿孔したボルト穴8aに固定
ボルト8cを通して真空容器4の上面に据付け固定する。
続いて取付けフランジ8aおよび上段の伝熱端子10Bに穿
孔した工具挿入穴25C,25Bを通して外方よりボルト締付
工具を挿入し、締結ボルト25を締付けて伝熱端子10Aと
相手側の伝熱端子板12とを強固に締結する。さらに別な
位置に穿孔されている工具挿入穴26Bに締結工具を挿入
して締結ボルト26を締付け、伝熱端子10Bと相手側の伝
熱端子板13との間を強固に締結する。そして最後に取付
けフランジ8aに開口している工具挿入穴25C,26Bに封栓
27を装着して気密封止する。なお前記した締結ボルトの
締付操作に伴う固定側端子板12,13の変位は気密内筒11
のベローズ14,15によって吸収されるので、膨張機8の
寒冷発生部には何等の機械的荷重を掛けることなく伝熱
端子間を強固に締結でき、かくして該接触部の伝熱抵抗
を低値に抑えることができるようになる。Next, the installation method of the expander 8 having the above structure will be described. First, the fastening bolts are respectively attached to the bolt holes 25A and 25B of the heat transfer terminals 10A and 10B at the upper and lower stages fixed to the cold generating portion of the expander.
With the 25 and 26 set, the expander 8 cold generators 9A and 9B are hung from above the vacuum container 4 into the airtight inner cylinder 11,
In the middle of this process, the lower heat transfer terminal 10A is cut out in the center of the fixed heat transfer terminal plate 13 shown in FIG.
And the direction of the entire expander is changed by 90 degrees to land on the heat transfer terminal plate 12 on the fixed side. In this state, next, the fixing bolt 8c is passed through the bolt hole 8a formed in the mounting flange 8a of the expander 8 and fixed on the upper surface of the vacuum container 4.
Next, insert a bolt tightening tool from the outside through the tool insertion holes 25C and 25B drilled in the mounting flange 8a and the upper heat transfer terminal 10B, and tighten the fastening bolt 25 to heat transfer terminal 10A and the heat transfer terminal on the other side. The plate 12 is firmly fastened. Further, a fastening tool is inserted into the tool insertion hole 26B drilled at another position and the fastening bolt 26 is tightened to firmly fasten the heat transfer terminal 10B and the mating heat transfer terminal plate 13. Finally, plug the tool insertion holes 25C and 26B opened in the mounting flange 8a.
27 is attached and hermetically sealed. Note that the displacement of the fixed side terminal plates 12 and 13 due to the tightening operation of the fastening bolts described above is
Since it is absorbed by the bellows 14 and 15 of the expander 8, the heat transfer terminals of the expander 8 can be firmly fastened between the heat transfer terminals without applying any mechanical load, and thus the heat transfer resistance of the contact parts is low. Will be able to be suppressed.
また膨張機のメインテナンスに際して膨張機8を真空容
器4より取り外す場合には、前記操作を逆の順序で行う
ことにより伝熱端子間の締結ボルト25,26および固定ボ
ルト8cを外して膨張機8を真空容器外に取り出すことが
できる。When the expander 8 is removed from the vacuum container 4 during maintenance of the expander, the fastening bolts 25 and 26 between the heat transfer terminals and the fixing bolt 8c are removed by performing the above operations in the reverse order to remove the expander 8. It can be taken out of the vacuum container.
以上述べたようにこの発明によれば、上記の構成を採用
した結果、冷凍機の膨張機を真空容器に据付けた状態
で、膨張機の寒冷発生部に何等機械的な荷重を加えるこ
となしに膨張機側の伝熱端子と熱遮蔽体に連なる固定側
の伝熱端子板との間の接触伝熱抵抗を低く抑えて結合す
ることができ、これにより冷凍機の膨張機と熱遮蔽体と
の間に熱伝導性の高い伝熱経路を確保して極低温冷却装
置の冷却性能の向上を図ることができる。As described above, according to the present invention, as a result of adopting the above configuration, the expander of the refrigerator is installed in the vacuum container, without adding any mechanical load to the cold generating part of the expander. The contact heat transfer resistance between the heat transfer terminal on the expander side and the heat transfer terminal plate on the fixed side connected to the heat shield can be suppressed to be low, and thus the expander of the refrigerator and the heat shield can be connected. It is possible to improve the cooling performance of the cryogenic cooling device by securing a heat transfer path having high heat conductivity between the two.
第1図は本発明の実施例を示す要部の構成断面図、第2
図は第1図における膨張機の外形斜視図、第3図は従来
における極低温冷却装置全体の構成断面図である。各図
において、 1:被冷却体、4:真空容器、5,6:熱遮蔽体、7:
高真空空間、8:冷凍機の膨張機、8a:膨張機の取付け
フランジ、8b:固定ボルト、9A,9B:寒冷発生部、10
A,10B:伝熱端子、11:気密内筒、12,13:気密内筒の
フランジを兼ねた固定側の伝熱端子板、14,15:ベロー
ズ、25,26:締結ボルト、25A,26A:ボルト穴、25B,25
C,26B:締付工具挿入穴、27:封栓。FIG. 1 is a sectional view showing the construction of an essential part of an embodiment of the present invention,
1 is an external perspective view of the expander in FIG. 1, and FIG. 3 is a cross-sectional view of the entire structure of a conventional cryogenic cooling device. In each drawing, 1: cooled object, 4: vacuum container, 5, 6: heat shield, 7:
High vacuum space, 8: expander of refrigerator, 8a: mounting flange of expander, 8b: fixing bolt, 9A, 9B: cold generating part, 10
A, 10B: Heat transfer terminals, 11: Airtight inner cylinder, 12, 13: Heat transfer terminal plate on the fixed side that also functions as a flange for the airtight inner cylinder, 14, 15: Bellows, 25, 26: Fastening bolts, 25A, 26A : Bolt hole, 25B, 25
C, 26B: tightening tool insertion hole, 27: plug.
Claims (2)
蔽体を一括収容した真空容器の内部に高真空空間と隔離
して有底形の気密内筒を設け、かつここへ真空容器の開
口部に着脱可能に据付けた冷凍機の膨張機の寒冷発生部
を収容するとともに、前記熱遮蔽体より引出して気密内
筒内に露呈配備した固定側伝熱端子板の板面上に膨張機
の寒冷発生部に固着した相手側の伝熱端子を接触させて
膨張機の寒冷発生部と熱遮蔽体との間に伝熱経路を形成
し、冷凍機の運転により熱遮蔽体を冷却するようにした
極低温冷却装置において、前記膨張機側の伝熱端子と固
定側の伝熱端子板とを当接させた状態で両者間をボルト
締結して伝熱結合するとともに、膨張機が取付けフラン
ジを介して真空容器に据付けられており、かつ前記フラ
ンジには伝熱端子側の締結ボルトを器外よりボルト操作
するための工具挿入穴、およびこの穴を封止する封栓を
設けたことを特徴とする極低温冷却装置。1. A vacuum container accommodating a cooled body and a heat shield surrounding the cooled body is provided with a bottomed airtight inner cylinder, which is isolated from a high vacuum space, and a vacuum vessel is installed therein. The cold generation part of the expander of the refrigerator, which is removably installed in the opening, is housed and expanded on the plate surface of the fixed-side heat transfer terminal plate that is drawn out from the heat shield and exposed in the airtight inner cylinder. A heat transfer terminal is fixed between the cold generator of the expander and the heat shield by contacting the heat transfer terminal on the other side that is fixed to the cold generator of the machine, and the heat shield is cooled by the operation of the refrigerator. In the cryogenic cooling device, the heat transfer terminal on the expander side and the heat transfer terminal plate on the fixed side are brought into contact with each other by bolting them together for heat transfer coupling, and also for mounting the expander. It is installed in the vacuum vessel via a flange, and the flange has heat transfer terminals. The tool insertion hole for bolt operation from Utsuwagai the fastening bolt, and cryogenic cooling apparatus characterized in that a sealing plug for sealing the hole.
置において、気密内筒が熱遮蔽体側に接続された伝熱端
子板とベローズとの組合せ体として成ることを特徴とす
る極低温冷却装置。2. The cryogenic cooling device according to claim 1, wherein the airtight inner cylinder is a combination of a heat transfer terminal plate connected to the heat shield side and a bellows. Cooling system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61265280A JPH0638008B2 (en) | 1986-11-07 | 1986-11-07 | Cryogenic cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61265280A JPH0638008B2 (en) | 1986-11-07 | 1986-11-07 | Cryogenic cooling device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63118568A JPS63118568A (en) | 1988-05-23 |
| JPH0638008B2 true JPH0638008B2 (en) | 1994-05-18 |
Family
ID=17415029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61265280A Expired - Lifetime JPH0638008B2 (en) | 1986-11-07 | 1986-11-07 | Cryogenic cooling device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0638008B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020525801A (en) | 2017-06-23 | 2020-08-27 | ボヤント ダイアグノスティックス インコーポレイテッドVoyant Diagnostics,Inc. | Medical diagnostic system and method |
| GB2592415A (en) * | 2020-02-27 | 2021-09-01 | Oxford Instruments Nanotechnology Tools Ltd | Insert for a cryogenic cooling system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0629635Y2 (en) * | 1986-09-09 | 1994-08-10 | 古河電気工業株式会社 | Cryostat |
-
1986
- 1986-11-07 JP JP61265280A patent/JPH0638008B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63118568A (en) | 1988-05-23 |
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