JPH0650126Y2 - Medium surface plate for surface plate correction in lapping machine - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a medium surface plate for surface plate correction in a lapping machine.

[Prior Art] In the lapping work by the lapping machine, the accuracy of the work is largely influenced by the accuracy of the lapping machine itself. Therefore, it is not possible to manage the accuracy of the lapping machine and correct it if necessary. That is extremely important.

Conventionally, such a lapping plate is corrected by various methods. For example, in Japanese Utility Model Publication No. 56-49720, a lapping plate having a correcting medium plate having two eccentric gears is attached to the lapping plate. , An internal gear and a sun gear are used to drive the eccentric gear to rotate the middle platen by reciprocating, thereby simultaneously correcting the upper and lower lapping platens.

In such a method, not only the entire surface of the lapping plate can be corrected at the same time, but also the middle platen can be turned upside down to perform the correction by the three-side mutual sliding, so that a high correction accuracy can be always maintained. However, since the intermediate surface plate has two eccentric gears, it is necessary to attach it to the lapping machine, that is, to engage the two eccentric gears with the internal gear and the sun gear at the correct positions. There was a problem that it was difficult.

[Problems to be Solved by the Invention] An object of the present invention is to make it easier to mount the eccentric gear on the lapping machine by configuring the correction medium surface plate as having one eccentric gear. The purpose is to prevent the rocking motion from becoming unstable when it is one, and to make it possible to operate it stably.

[Means for Solving Problems] In order to solve the above-mentioned problems, the medium surface plate of the present invention has a smaller diameter than the internal gear of the lapping machine, and the upper and lower surfaces of the medium surface plate body are correction surfaces. , With a single eccentric drive gear that meshes with the internal gear and sun gear like a planetary gear,
It is characterized in that a supporting member is attached which rotates together with the main body of the intermediate platen while keeping the sun gear concentric with the main body and swingably supports the main body of the intermediate plate.

[Operation] When the upper and lower lap surface plates are driven with the correction intermediate surface plate attached to the lap plate and the sun gear and the internal gear are driven, the eccentric drive gear revolves around the sun gear while rotating. Therefore, the lap platen is corrected by rotating the middle platen body while performing the reciprocating motion in the radial direction, and the upper and lower correction surfaces of the main body slap against the upper and lower lap platens.

At this time, since the main body of the intermediate platen is supported by the supporting member that rotates together with the main body of the intermediate plate while maintaining the concentric condition with the sun gear, it is possible to perform the reciprocating motion in a state where unnecessary movement is restricted. And its movement is very stable.

It is possible to perform correction by mutual sliding on the three surfaces by reversing the intermediate surface plate after performing sliding for a certain period of time and performing similar sliding.

Moreover, since the correction intermediate surface plate has a single eccentric drive gear, compared to the conventional one having two eccentric drive gears, it is not necessary to set the meshing position accurately, and the correction lap plate is Very easy to install.

[Embodiment] An embodiment of the present invention will be described below in detail with reference to the drawings.

FIGS. 1 and 2 show a state in which the lapping machine 10 is equipped with the lapping machine 10 according to the present invention.

The lapping machine 10 has an upper lapping plate 12 and a lower lapping plate 13 facing each other, a sun gear 14 and an internal gear 15, and when performing a lapping operation, these sun gear 14 and the internal gear The carrier is meshed with the toothed gear 15 like a planetary gear, and the work held by the carrier is lapped by the upper and lower lapping plates 12 and 13.

In addition, a medium surface plate for correcting the surface plate attached to the lapping machine 10
11 is a lapping plate having a smaller diameter than the internal gear 15 and upper and lower lapping plates
It is provided with a donut-shaped disk-shaped intermediate platen body 16 having a size similar to those of 12, 13. The intermediate platen body 16 has a pair of upper plate members 16 having a correction surface 17 finished with high precision.
It is formed by overlapping a and the lower board member 16b, and an annular space portion 18 is formed on the mating surface of both members by a groove cut in the lower board member 16b.

In the space 18, a donut-shaped disc-shaped support member 20 is disposed so as to be rotatable while maintaining a concentric position with the sun gear 14, and the support member 20 supports the intermediate platen body 16 so as to be swingable. Has been done. That is, on the inner edge of the support member 20, a pair of arms 2 extending in the center direction from the holes 16c provided in the intermediate platen body 16 are provided.
0a, 20a is formed, the ring 21 that fits the sun gear 14 with a small gap is attached to the tips of these arms 20a, 20a, the support member 20 by this ring 21, with the sun gear 14 as an axis. A support shaft 22 is rotatably attached to one end of the support member 20 by a bearing 22b, and a slider 22a formed at the upper end of the support shaft 22 is arranged above the support member 20. The lower surface of the board member 16a is slidably fitted in a guide groove 23 formed in the center of the lower surface of the board member 16a, and the lower end of the support shaft 22 is in a circular recess 24 formed on the upper surface of the lower board member 16b. Is loosely fitted so that the intermediate platen body 16 is swingably supported by the support member 20 in a state where unnecessary movement is restricted. The inner edges of the upper and lower ends of the ring 21 are chamfered in order to facilitate fitting to the sun gear 14.

A circular gear accommodating portion 25 is formed by notching the plate members 16a, 16b and the support member 20 between the upper and lower plate members 16a, 16b at a centrally symmetric position with respect to the support shaft 22 in the intermediate platen body 16.
And an eccentric drive gear 26 that meshes with the sun gear 14 and the internal gear 15 in a planetary gear shape is disposed in the gear accommodating portion 25, and the eccentric drive gear 26 has an eccentric shaft 27. Are rotatably attached to the upper and lower board members 16a, 16b by bearings 28, 29, and can be relatively displaced with respect to the support member 20 within a large-diameter hole 20b provided therein.
Here, a ring 21 is fitted around the sun gear 14, but the ring 21 has an eccentric drive gear 26
It is notched at the position where it meshes with 14, so that the eccentric drive gear 26 meshes with the sun gear 14 in the region of the height (width) of the ring 21.

As shown in FIG. 3, the correction surface 17 of the intermediate platen 11 is formed by arranging a large number of fan-shaped amendment pieces 17a on the intermediate platen body 16 in the radial direction and fixing them in a replaceable manner. You may form. This correction piece 17a is provided in order to repair the wear of the correction surface 17 by exchanging it and to enhance the lapping correction effect.
It is possible to use FCD, meehanite, or the like, whose surface hardness is increased by heat treatment, or a diamond repair piece. Further, when the lapping platens 12 and 13 are formed of a grindstone, it is desirable that the intermediate platen 11 is also formed of a grindstone.

The lapping plate 12, 13 by the correction medium plate 11 as described above.
To correct the above, when the middle lapping plate 11 is attached to the lapping plate 10 and the upper and lower lapping plates 12, 13 and the sun gear 14 and the internal gear 15 are driven at a predetermined speed, the eccentric drive gear 26 becomes Since it revolves around the sun gear 14 while rotating, the main surface plate body
16 rotates at the same time as the eccentric drive gear 26 revolves, and at the same time, follows the eccentric rotation of the eccentric shaft 27 due to the rotation of the eccentric drive gear 26 and also performs a reciprocal movement in the radial direction, while the support member 20 is The ring 21 rotates with the intermediate platen body 16 while always maintaining the concentric state with the sun gear 14.

At this time, the main body 16 of the intermediate platen is supported by the support shaft 22 on the side opposite to the side on which the eccentric drive gear 26 is attached.
The intermediate platen body 16 is not necessary because the slider 22a at the upper end of the support shaft 22 and the guide groove 23 are supported by the guide groove 23 and are relatively movable along the guide groove 23. In such a state that such a movement is restricted, the rotation is performed while performing the reciprocating motion within the range shown by the chain line a in FIG.

Thus, by the rotation and the reciprocating motion of the main body 16 of the intermediate surface plate, the upper and lower correction surfaces 17 and 17 of the upper and lower lapping surface plates 12 and 13 are evenly and evenly rubbed with each other, so that the lapping surface plates 12 and 13 can be corrected. It will be performed with high accuracy.

Then, after performing sliding for a certain period of time, the middle surface plate 11 is turned over, and the correction surface 17 that was in sliding contact with the upper lap surface plate 12 is made to slide in contact with the lower lap surface plate 13 as well as the lower lap surface plate 13. The correction surface 17 that was in sliding contact is brought into sliding contact with the upper lap surface plate 12,
Perform similar sliding. As a result, it is possible to prevent the flatness of the intermediate surface plate 11 from being irregular, and it is possible to obtain the finishing accuracy equivalent to that in the case of three-side mutual sliding.

Further, the work for mounting the correction intermediate surface plate 11 on the lap plate 10 can be performed in the following manner. That is, while keeping the internal gear 15 in a lowered state, while slightly fitting the ring 21 in the correction intermediate surface plate 11 to the sun gear 14, the positions of the teeth of the eccentric drive gear 26 and the sun gear 14 are set. After they are meshed with each other, the correction intermediate platen 11 is lowered to a position where it abuts on the lower lap platen 13, and then the internal gear 15 is raised to be meshed with the eccentric drive gear 26. .

[Effects of the Invention] As described above, according to the present invention, since the correction intermediate plate has a single eccentric drive gear, the meshing position is more accurate than the conventional one having two eccentric drive gears. There is no need to set to, and it is very easy to install on a lapping machine.

Further, since a supporting member that rotates together with the main body of the intermediate platen while maintaining the position concentric with the sun gear is provided, and the main body of the intermediate platen is swingably supported by this support member, the intermediate platen body is not necessary. It is possible to regulate the movement so that the reciprocating movement can be performed very stably.

[Brief description of drawings]

FIG. 1 is a sectional view showing an embodiment of an intermediate surface plate for correcting a surface plate according to the present invention in use, FIG. 2 is a plan view in which an upper lap surface plate and an upper plate member are omitted, and FIG. It is a partial perspective view which shows the Example of the grinding | polishing surface in a medium surface plate. 10 …… lap board, 11 …… correction medium surface plate, 14 …… sun gear, 15 …… internal gear, 16 …… intermediate surface plate body, 17 …… correction surface, 20 …… supporting member, 26… … Eccentric drive gear.

Claims (1)

[Scope of utility model registration request] 1. A single eccentric drive gear which has a planetary gear-like mesh with an internal gear and a sun gear, and which has a smaller diameter than an internal gear of a lapping machine and whose upper and lower surfaces have correction surfaces. A lapping machine characterized by mounting a support member for mounting the same, rotating together with the main body of the intermediate platen while maintaining the concentric state with the sun gear, and supporting the main body of the intermediate plate so as to be swingable. Medium surface plate for surface plate correction.