JPH06819Y2 - Quartz boat operation part structure - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a quartz boat operating portion structure including a quartz boat on which a semiconductor substrate is mounted and an operating rod for operating the quartz boat in and out of a diffusion furnace. .

<Prior Art> Conventionally, diffusion processing of a semiconductor substrate is performed by mounting a large number of semiconductor substrates to be processed on a quartz boat and then inserting the quartz boat into a diffusion furnace and heating. The quartz boat is designed to be operated in and out of the diffusion furnace by a quartz operating rod, and the operating portion structure of this quartz boat is such that the tip of the operating rod is at the rear end of the quartz boat. It is connected and fixed.

Therefore, this operating rod is attached to the quartz boat inserted into the diffusion furnace, and only the outer end of the operating rod is exposed to the outside of the diffusion furnace. It has been common for substrates to be diffused.

<Problems to be Solved by the Invention> By the way, in the operation part structure of the quartz boat, the tip of the operation rod attached to the quartz boat is, for example,
Since it is heated for a long time while being placed in a diffusion furnace that has a high temperature of 1500 ° C., this operating rod causes thermal deformation and its usable period, that is,
There was a problem that the life was shortened.

The present invention was created in view of the current situation,
It is an object of the present invention to provide a quartz boat operation part structure capable of preventing the thermal deformation of the operation rod in advance so that the entire operation rod can be pulled out to the outside of the diffusion furnace during the diffusion processing of the semiconductor substrate.

<Means for Solving the Problems> The present invention provides a quartz boat operation part structure comprising a quartz boat on which a semiconductor substrate is mounted and an operation rod for operating the quartz boat in and out of a diffusion furnace. An engaging portion capable of pressing the rear end of the quartz boat is provided at the tip of the rod, while the rear end of the quartz boat engages with the engaging portion of the operating rod when the quartz boat is pulled out. And disposing an engagement receiving member capable of interlocking with each other, retracting the engagement receiving member during a pushing operation of the quartz boat to prevent engagement between the engagement receiving member and the engaging portion, and The present invention is characterized in that an engagement prevention member for advancing the engagement receiving member is provided by pulling out the operation rod.

<Operation> According to the above configuration, the pushing operation of the quartz boat into the diffusion furnace is performed by pressing the rear end of the quartz boat with the engaging portion of the operating rod, and when the pushing operation is completed, the operating rod is pushed. Is drawn to the outside of the diffusion furnace. Then, the retracting state of the engagement receiving member by the engagement preventing member is released by the operation of pulling out the operation rod, and the engagement receiving member is withdrawn.

Further, when pulling out the quartz boat, the operating rod is inserted into the diffusion furnace so that the engaging portion of the operating rod is engaged and connected with the engaged receiving member. The boat is pulled out to the outside of the diffusion furnace in conjunction with the pulling operation of the operating rod.

<Example> Hereinafter, the present invention will be described in detail based on an example shown in the drawings.

FIG. 1 is a partially omitted perspective view showing a structure of an operating portion of a quartz boat according to the present invention, and FIGS. 2 (a) to 2 (d) are explanatory views showing a state at the time of loading / unloading operation of the quartz boat. In the drawings, reference numeral 1 is a quartz boat in which a large number of semiconductor substrates W are mounted in parallel in an upright posture, 2 is a diffusion furnace into which the quartz boat 1 is inserted, and 3 is an operation of taking the quartz boat 1 in and out of the diffusion furnace 2. The operating rod 3 is provided with a round rod-shaped engaging portion 4 projecting in a substantially "T" shape with respect to the axial direction of the operating rod 3.

On the other hand, a protrusion 5 is formed at a predetermined position on the upper surface of the rear end of the quartz boat 1 so that the engaging portion 4 of the operating rod 3 abuts and is pressed. Support pins 6, 6 are provided on both sides of the rear end portion.
A pair of rocking levers 7, 7 are provided as engagement receiving members that are rockably supported via the rocking levers 7.
A substantially triangular engagement receiving piece 8 protruding upward is formed on the rear end side, and a weight portion 9 having a heavier weight than the rear end side portion is formed on the front end side thereof. Therefore, the swing lever 7 is stable with the weight portion 9 arranged on the lower side with the support pin 6 as the center unless the engagement receiving piece 8 is pressed by the load from the upper side. The engagement receiving piece 8 advances to the rear end side of the projecting portion 5 and above the upper surface of the quartz boat 1.

Further, a pair of pressing levers 10 and 10 as engagement preventing members formed in a substantially “L” shape are provided at the rear end positions of the quartz boat 1 with respect to the swing levers 7 and 7, respectively. It is arranged so as to be swingable via 11 and 11. Then, when the pressing pieces 12 are set so as to press the engagement receiving pieces 8 from the upper side by swinging the holding levers 10, the swinging levers 7 cause the supporting pins 6 to move.
Is swung around, and the weight portion 9 is in a state of being lifted and arranged on the upper side. At this time, the hooking piece 13 of the pressing lever 10 formed orthogonal to the pressing piece 12 is arranged so as to project from the upper surface of the quartz boat 1.

Next, the operation of the operation portion structure of the quartz boat 1 having the above configuration will be described based on FIGS. 2 (a) to (d).

First, in the pushing-in operation of the quartz boat 1,
As shown in FIG. 1A, the engagement receiving piece 8 of the rocking lever 7 is moved to the quartz boat 1 by rocking the holding lever 10.
The quartz boat 1 is inserted into the diffusion furnace 2 by retracting it downward from the upper surface and pressing the protrusion 5 formed at the rear end of the quartz boat 1 with the engaging portion 4 of the operating rod 3. To do. Then, when this push-in operation is completed, as shown in FIG.
As shown in (b), only the operating rod 3 is pulled out to the outside of the diffusion furnace 2. At this time, the pulling-out operation of the operating rod 3 causes the hooking piece 13 of the pressing lever 10 to swing and the pressing piece 12 Since the retracted state of the engagement receiving piece 8 of the swing lever 7 due to is released, the engagement receiving piece 8 advances to a position above the upper surface of the quartz boat 1.
Then, in such a state, the diffusion processing of the semiconductor substrates W mounted on the quartz boat 1 is performed.

Next, when the diffusion process is completed, the quartz boat 1 is pulled out to the outside of the diffusion furnace 2. At the time of this pulling operation, first, the operation rod 3 is reinserted into the diffusion furnace 2. When the operating rod 3 is pushed in, its engaging portion 4
As shown in FIG. 2 (c), abuts on the engagement receiving piece 8 of the rocking lever 7 extending from the upper surface of the quartz boat 1 and pushes down or rides over the engagement receiving piece 8 to hit the protruding portion 5. It is stopped by contact. At this time, the engaging portion 4 arranged between the projecting portion 5 and the engaging receiving piece 8 by pulling out the operating rod 3 a little causes the engaging receiving piece 8 of each of the rocking levers 7 and 7.
Is engaged and connected. After that, as shown in FIG. 2 (d), by pulling out the operating rod 3 engaged with the rocking levers 7, 7 of the quartz boat 1, the quartz boat 1 is interlocked with the operating rod 3. It is drawn out of the diffusion furnace 2.

<Effect of the Invention> As described above, according to the present invention, an engaging portion capable of pressing the rear end of the quartz boat is provided at the tip of the operating rod, while the operating rod is attached to the rear end of the quartz boat. An engagement receiving member capable of engaging with the engagement portion and interlocking with each other, and an engagement blocking member for advancing and retracting the engagement receiving member are provided. Therefore, by removing only the operation rod from the quartz boat inserted in the diffusion furnace and pulling it out to the outside of the diffusion furnace, the operation rod is re-inserted into the diffusion furnace and engaged with the engagement receiving member of the quartz boat. The quartz boat can be pulled out to the outside of the diffusion furnace.

Therefore, it becomes possible to pull out the entire operation rod to the outside of the diffusion furnace during the diffusion processing of the semiconductor substrate.
There is an effect that the thermal deformation can be prevented and the life can be extended.

[Brief description of drawings]

FIG. 1 is a partially omitted perspective view showing a structure of an operating portion of a quartz boat according to the present invention, and FIGS. 2 (a) to (d) are explanatory views showing its operating state. In the figure, reference numeral 1 is a quartz boat, 2 is a diffusion furnace, 3 is an operating rod, 4 is an engaging portion of the operating rod, 7 is a swing lever (engagement receiving member), and 10 is a holding lever (engagement blocking member). , W is a semiconductor substrate.

Claims (1)

[Scope of utility model registration request] 1. A quartz boat operating part structure comprising a quartz boat on which a semiconductor substrate is mounted and an operating rod for operating the quartz boat in and out of a diffusion furnace, wherein the quartz bar is attached to the tip of the operating rod. An engaging portion that can press the rear end portion of the boat is provided, while an engaging portion that engages with the engaging portion of the operating rod and can be interlocked with the rear end portion of the quartz boat when the quartz boat is pulled out. A member is provided, and when the quartz boat is pushed in, the engagement receiving member is retracted to prevent the engagement between the engagement receiving member and the engaging portion, and the operation rod is pulled out. An operation part structure for a quartz boat, characterized in that an engagement preventing member for advancing the engagement receiving member is provided.