JPH07294487A - Residual gas analyzer - Google Patents
Residual gas analyzerInfo
- Publication number
- JPH07294487A JPH07294487A JP6083522A JP8352294A JPH07294487A JP H07294487 A JPH07294487 A JP H07294487A JP 6083522 A JP6083522 A JP 6083522A JP 8352294 A JP8352294 A JP 8352294A JP H07294487 A JPH07294487 A JP H07294487A
- Authority
- JP
- Japan
- Prior art keywords
- hot cathode
- electrode
- residual gas
- gas analyzer
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims abstract description 14
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 9
- 150000002500 ions Chemical class 0.000 claims description 63
- 238000004458 analytical method Methods 0.000 claims description 18
- 238000001514 detection method Methods 0.000 claims description 17
- 238000000605 extraction Methods 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 8
- 229910052737 gold Inorganic materials 0.000 claims description 8
- 239000010931 gold Substances 0.000 claims description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- 230000005855 radiation Effects 0.000 abstract description 15
- 230000003116 impacting effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 63
- 229910002091 carbon monoxide Inorganic materials 0.000 description 8
- 235000012489 doughnuts Nutrition 0.000 description 8
- 238000004868 gas analysis Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000012212 insulator Substances 0.000 description 6
- 238000009530 blood pressure measurement Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は真空装置内の気体分子
の残留ガス分析を行う熱陰極型イオン源を搭載する残留
ガス分析計に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a residual gas analyzer equipped with a hot cathode ion source for analyzing a residual gas of gas molecules in a vacuum device.
【０００２】[0002]
【従来の技術】超高真空の残留ガス分析計（分圧計）と
して質量分析計が使用されるが、高感度で動作安定なこ
とから熱陰極と陽極の少なくとも２電極を備えているイ
オン源には一般に熱陰極型イオン源が使用される。2. Description of the Related Art A mass spectrometer is used as an ultrahigh vacuum residual gas analyzer (partial pressure gauge). However, since it is highly sensitive and stable in operation, it can be used as an ion source equipped with at least two electrodes, a hot cathode and an anode. In general, a hot cathode ion source is used.
【０００３】図９は、現在市販されている最も一般的な
熱陰極型イオン源搭載の四重極質量分析型残留ガス分析
計を示すものである。図９において、金属製の真空容器
ＡのフランジＢ内にイオン源を組立たイオン源部は、円
筒グリッド状陽極２とその周辺に巻くように配置される
リング状熱陰極フィラメント１（以下、単に熱陰極とい
う。）を基本に、イオン引き出し電極（フォーカス電
極）３とアパーチャー電極（全圧測定電極）４、さらに
シールド電極５の５電極で構成されている。各電極電位
は、陽極２は約200V，熱陰極１は約100V、イオン引き出
し電極３は160〜180V，アパーチャー電極４とシールド
電極５は0V（グランド電位）に置かれる。この状態で熱
陰極１から陽極２に向かって2mAの陽極電子流が流され
ると、陽極２の内部に飛び交う電子は残留ガスを電子衝
撃して陽極内部にイオンを生成する。このイオンはイオ
ン引き出し電極３によって加速され、アパーチャー電極
の小孔を通過して、四重極質量分析部７に送られ、高周
波によって質量分析され、検出部８に送られ真空端子９
を通して電流信号として真空外に取り出される。FIG. 9 shows a quadrupole mass spectrometric residual gas analyzer equipped with the most common hot cathode ion source currently on the market. In FIG. 9, an ion source part in which an ion source is assembled in a flange B of a metal vacuum container A is a cylindrical grid-shaped anode 2 and a ring-shaped hot cathode filament 1 (hereinafter, simply referred to as a coil wound around the anode 2). Based on a hot cathode, it is composed of an ion extraction electrode (focus electrode) 3, an aperture electrode (total pressure measurement electrode) 4, and a shield electrode 5. Regarding the electrode potentials, the anode 2 is set to about 200V, the hot cathode 1 is set to about 100V, the ion extraction electrode 3 is set to 160 to 180V, and the aperture electrode 4 and the shield electrode 5 are set to 0V (ground potential). When an anode electron flow of 2 mA is made to flow from the hot cathode 1 to the anode 2 in this state, the electrons flying inside the anode 2 bombard the residual gas with electrons to generate ions inside the anode. The ions are accelerated by the ion extraction electrode 3, pass through the small holes of the aperture electrode, are sent to the quadrupole mass spectrometric section 7, are subjected to mass spectrometric analysis by high frequency, are sent to the detection section 8, and are sent to the vacuum terminal 9
Is taken out of the vacuum as a current signal through.
【０００４】尚、円筒グリッド状陽極２は、そのグリッ
ドが支持ドーナツ板２ａと一体に構成されており、そし
てこの支持ドーナツ板２ａはフランジ電極の裏側に配置
されている。また、イオン源を構成する電極は、絶縁物
を介して四重極分析部及び検出部の外筒管１０の先端に
マウントされている。フランジＢ，Ｂは、ガスケット１
９を挟んで固着されている。The cylindrical grid-shaped anode 2 has its grid integrally formed with the supporting donut plate 2a, and the supporting donut plate 2a is arranged on the back side of the flange electrode. Further, the electrode constituting the ion source is mounted on the tip of the outer tube 10 of the quadrupole analysis section and the detection section via an insulator. Flange B, B is gasket 1
It is fixed with 9 in between.
【０００５】このような従来の残留ガス分析計におい
て、熱陰極型イオン源を搭載した残留ガス分析計を１０
-6Pa以下の超高真空領域の残留ガス分析に使用してみる
と、熱陰極からの輻射熱及び伝導熱によって、陽極以外
のイオン引き出し電極、フォーカス電極、アパーチャ電
極、イオン源を取り囲む真空壁や分析部、検出部まで
の、真空側に配置されている総ての部分に温度上昇が起
こり、多量のガスが放出される。このため、真空槽の残
留ガス分析を行っているよりは、分析計が放出する自分
自身のガス分析を行っているのが現状である。このよう
な事態を軽減するために、分析に先立って予め電極の脱
ガスを行っておく操作がなされる。その方法は、熱陰極
からの電子により、熱陰極の周辺に配置される電極を電
子衝撃して、温度上昇させて脱ガスするもので、電子ボ
ンバード法と称されている。しかし、この方法でも、イ
オン源近傍に存在する総ての電極に電子をボンバードす
ることはできないし、また分析部、検出部等には構造上
全くこの電子ボンバード法を適用することはできない。In such a conventional residual gas analyzer, a residual gas analyzer equipped with a hot cathode ion source is used.
When used for residual gas analysis in the ultra-high vacuum region of -6 Pa or less, the radiant heat from the hot cathode and the conduction heat cause ion extraction electrodes other than the anode, focus electrodes, aperture electrodes, and vacuum walls surrounding the ion source. The temperature rises in all the parts arranged on the vacuum side up to the analysis part and the detection part, and a large amount of gas is released. For this reason, the present situation is that the gas emitted by the analyzer is analyzed rather than the residual gas in the vacuum chamber. In order to reduce such a situation, an operation is performed in which the electrodes are degassed in advance before the analysis. The method is to bombard an electrode arranged around the hot cathode with electrons by electrons from the hot cathode to raise the temperature and degas, which is called an electron bombardment method. However, even with this method, electrons cannot be bombarded to all the electrodes existing in the vicinity of the ion source, and the electron bombardment method cannot be applied to the analysis part, the detection part, etc. due to the structure.
【０００６】そこで残留ガス分析計の真空壁の外側全体
に電熱線を巻き、外側から加熱する方法が取られる。こ
の方法はベーキング法と称されるが、この方法も真空の
断熱効果のために各電極の十分な昇温脱ガスは難しい。
外側からの加熱では、最高温度がステンレス製の真空容
器で450℃、アルミニウム合金製の真空容器では150゜℃
止まりで、不十分である。また、分析部、検出部をあま
り高温にすることは、分析計としての精度の維持が難し
くなって好ましくない。更に外側からの加熱では、加熱
電力の多くは大気に逃げてしまうので、非常に大きな電
力を必要とするものである。Therefore, a method of winding a heating wire around the entire vacuum wall of the residual gas analyzer and heating from the outside is adopted. This method is called a baking method, but it is also difficult to degas the electrodes at a sufficient temperature due to the adiabatic effect of vacuum.
When heated from the outside, the maximum temperature is 450 ℃ in a vacuum container made of stainless steel, and 150 ℃ in a vacuum container made of aluminum alloy.
It's dead, it's insufficient. Further, it is not preferable to make the temperature of the analysis unit and the detection unit too high because the accuracy of the analyzer is difficult to maintain. Further, when heating from the outside, much of the heating power escapes to the atmosphere, so that a very large amount of power is required.
【０００７】上述の理由によって、従来の残留ガス分析
計を用いて10-10Torr以下の超高真空領域のガス分析を
行うためには、１年間以上に渡って使い込んで、イオン
源、分析部、検出部の総ての部分からの放出ガスを経時
的に枯らす必要があった。しかし、使い込んだ分析計で
あっても、使用時は残留ガス圧を一桁以上悪化させるほ
どのガス放出を伴うのが常で、分析計自体からのガス放
出が無視できず、正確なガス分析を行えない現状にあっ
た。このように、従来の残留ガス分析計の分析計自体か
らのガス放出が多いのは、熱源の熱陰極は勿論、熱陰極
からの輻射熱や伝導熱によって昇温される近傍の陽極、
イオン引き出し電極、フォーカス電極、アパーチャー電
極（全圧測定電極）のイオン源部が、真空槽の内側でイ
オン源部・質量分析部・イオン検出部・電流導入真空端
子の順で接続され、イオン源は大気で冷やされる真空端
子から最も遠い位置に真空断熱される形で配置されてい
るためである。即ち、イオン源部分からの熱は、十分な
脱ガスを行うことのできない分析部、検出部を伝導して
真空端子に達してから、大気に放出する形になるため、
イオン源部だけでなく、分析部、検出部の温度上昇をま
ねき、この部分からのガス放出が加わり、非常に大きな
ガス放出が起こってしまっていた。For the above-mentioned reason, in order to perform gas analysis in the ultrahigh vacuum region of 10 -10 Torr or less using the conventional residual gas analyzer, it is used for more than one year, and the ion source and the analysis unit are used. It was necessary to wither the gas released from all parts of the detection part over time. However, even if the analyzer has been used for a long time, it is always accompanied by the gas release that deteriorates the residual gas pressure by more than one digit when used, and the gas release from the analyzer itself cannot be ignored. There was a situation where I couldn't. In this way, the gas emission from the analyzer itself of the conventional residual gas analyzer is large, not to mention the hot cathode of the heat source, of course, the anode near the temperature which is raised by the radiant heat or conductive heat from the hot cathode,
The ion source part of the ion extraction electrode, focus electrode, and aperture electrode (total pressure measurement electrode) is connected inside the vacuum chamber in the order of the ion source part, the mass spectrometric part, the ion detection part, and the current introduction vacuum terminal. Is because it is arranged in the farthest position from the vacuum terminal cooled by the atmosphere so as to be vacuum-insulated. That is, the heat from the ion source part is released to the atmosphere after reaching the vacuum terminal after conducting the analysis part and the detection part which cannot perform sufficient degassing.
Not only the ion source part, but also the temperature rise in the analysis part and the detection part, gas release from this part was added, and very large gas release had occurred.
【０００８】[0008]
【発明が解決しようとする課題】この問題を解決するた
めの手段として、本発明者は、先に、熱陰極から発生し
た熱が分析部、検出部に輻射、伝導されないようにイオ
ン源部をフランジで切り離したイオン源分離型の残留ガ
ス分析計を提案した。As a means for solving this problem, the present inventor first set the ion source part so that the heat generated from the hot cathode is not radiated and conducted to the analysis part and the detection part. An ion source separation type residual gas analyzer separated by a flange was proposed.
【０００９】ところが、前記残留ガス分析計は、イオン
源を構成する熱陰極以外の熱陰極近傍に配置される陽極
（閉塞半球陽極電極）、ドーナツ板状シールド電極、半
球状メッシュ・シールド電極及び電極支持絶縁物や真空
端子等も熱輻射を受ける熱陰極配置空間に配置される構
造であったので、他の電極に対する輻射熱遮蔽効果が不
完全であり、得られるガス分析結果のスペクトルには、
ドーナツ板状シールド電極、半球状メッシュ・シールド
電極から発生すると推測され炭素に拘わるスペクトルの
メタン16（CH4）、一酸化炭素28（CO）、二酸化炭素44
(CO2）、が大きく存在した。即ち、この２つの電極は例
え電子ボンバードによって1000℃以上の加熱脱ガス処理
がなされたとしても、ドーナツ板状シールド電極、半球
状メッシュ・シールド電極の表面積はグリッド陽極（閉
塞半球陽極電極）の10倍以上もあるので、通常の動作状
態でも輻射熱による温度上昇は避けられず、また、絶縁
物や真空端子からガス放出も加わって、分析計自体から
のガス放出の無視できなかった。また、表面積の非常に
大きいドーナツ板状シールド電極、半球状メッシュ・シ
ールド電極を電子ボンバードによって1000℃以上に加熱
するためには、700V×100mA（70W）以上の電力を必要と
するので、熱陰極フィラメントに対する負担が大きく、
また700Vと電圧も高くなるので絶縁材料の絶縁破壊が起
こりやすく、信頼性を非常に低下させていた。However, the residual gas analyzer is composed of an anode (closed hemispherical anode electrode), a donut plate-shaped shield electrode, a hemispherical mesh shield electrode, and an electrode which are arranged in the vicinity of the hot cathode other than the hot cathode constituting the ion source. Since the supporting insulator and the vacuum terminal were also arranged in the hot cathode arrangement space for receiving heat radiation, the radiation heat shielding effect on other electrodes was incomplete, and the spectrum of the gas analysis results obtained was
Carbon-related spectra of methane 16 (CH 4 ), carbon monoxide 28 (CO), carbon dioxide 44, which are assumed to be generated from donut plate-shaped shield electrodes and hemispherical mesh shield electrodes
(CO 2 ), was present. That is, even if these two electrodes are heated and degassed at 1000 ° C. or higher by electron bombardment, the surface area of the donut plate-shaped shield electrode, hemispherical mesh shield electrode is 10 times that of the grid anode (closed hemisphere anode electrode). Since it is more than double, the temperature rise due to radiant heat is unavoidable even under normal operating conditions, and gas release from the analyzer itself cannot be ignored due to gas release from the insulator and vacuum terminal. Also, in order to heat the donut plate-shaped shield electrode and the hemispherical mesh shield electrode, which have a very large surface area, to 1000 ° C or higher by electronic bombardment, electric power of 700V x 100mA (70W) or more is required. The burden on the filament is large,
Moreover, since the voltage is as high as 700 V, dielectric breakdown of the insulating material is likely to occur, which greatly reduces reliability.
【００１０】そこで、本発明は、自己放出ガスの低減化
を図ることができ、しかも信頼性の高い残留ガス分析計
を提案するものである。Therefore, the present invention proposes a highly reliable residual gas analyzer capable of reducing self-emitted gas.
【００１１】[0011]
【課題を解決するための手段】本発明は、真空装置内に
おいて熱陰極から放出された電子を陽極に向かって加速
し、装置内に存在する気体分子を電子衝撃することによ
ってイオン化するイオン源と、このイオン源から得られ
るイオンビームを、イオンの電荷対質量比に応じて分離
する分析部と、分離したイオンビームを捕らえて電流信
号に変換する検出部と、を備え、得られる電流強度から
気体分子密度を測定する熱陰極型残留ガス分析計におい
て、イオン源を構成する熱陰極と、陽極の一部を除く他
の電極との間に、前記熱陰極を取り囲む壁材が設けられ
ると共に、前記壁材は真空外壁にも連続し、更に、前記
熱陰極と、前記他の電極との間に、前記熱陰極から放射
される輻射エネルギーを遮蔽する遮蔽体部を設けた残留
ガス分析計である。The present invention relates to an ion source for accelerating electrons emitted from a hot cathode toward an anode in a vacuum device and ionizing gas molecules existing in the device by electron bombardment. , An ion beam obtained from this ion source is separated according to the charge-to-mass ratio of the ions, and a detector for capturing the separated ion beam and converting it into a current signal. In a hot cathode residual gas analyzer for measuring gas molecule density, a hot cathode that constitutes an ion source and between other electrodes except a part of the anode, a wall material surrounding the hot cathode is provided, In the residual gas analyzer, the wall material is continuous with the outer wall of the vacuum, and further, between the hot cathode and the other electrode, a shield part for shielding radiant energy emitted from the hot cathode is provided. is there
【００１２】好ましくは、前記壁材を、真空容器のフラ
ンジ間に接続される中空状のフランジ電極で構成し、こ
のフランジ電極に前記遮蔽体部を一体に形成した残留ガ
ス分析計である。Preferably, the wall material comprises a hollow flange electrode connected between the flanges of the vacuum container, and the shield portion is integrally formed with the flange electrode.
【００１３】好ましくは、前記壁材を、真空容器のフラ
ンジの内部に設置される中空状の部材で構成し、この部
材に前記遮蔽体部を一体に形成した残留ガス分析計であ
る。Preferably, the wall material is a hollow member installed inside a flange of a vacuum container, and the shielding part is integrally formed with this member.
【００１４】好ましくは、前記陽極及び熱陰極以外の電
極が、イオン源の一部を構成するイオン引き出し電極、
イオンビームフォーカス電極、アパーチャー電極、及び
四重極電極である残留ガス分析計である。Preferably, the electrodes other than the anode and the hot cathode are ion extraction electrodes forming a part of an ion source,
The residual gas analyzer is an ion beam focus electrode, an aperture electrode, and a quadrupole electrode.
【００１５】好ましくは、前記遮蔽体部及び真空外壁に
連続している部材は、その一部が、金、銀、銅、アルミ
ニウムの純金属もしくはそれらを主体とする合金又は複
合物である残留ガス分析計である。Preferably, the member continuous with the shield part and the vacuum outer wall is a residual gas, a part of which is a pure metal of gold, silver, copper or aluminum, or an alloy or composite mainly containing them. It is an analyzer.
【００１６】[0016]
【作用】上記のように構成した場合は、熱陰極から発生
する輻射及び伝導熱が、熱陰極以外の、例えば陽極、イ
オン引き出し電極、フォーカス電極、アパーチャ電極、
更にセラミック、真空端子及び分析部、検出部へ伝達さ
れるのを最小限にすることが可能となる。そして、最小
限伝達された熱は速やかに真空外壁に放出するため、熱
陰極と他の電極との間に、熱陰極を取り囲む壁材が連続
して介在することとなり、且つ真空外壁にも連続し、熱
陰極から放射される輻射エネルギーの一部が該介在物の
遮蔽によって、他の全ての電極へ入射することを減じる
ように配置することにより問題の解決が図られるもので
ある。更に、熱陰極と他の電極の間に介在し、且つ真空
外壁に連続している介在物が、輻射率が0.03以下で、且
つ熱伝導率良好性の金、銀、銅、アルミニウムの純金属
又はそれらを主体とする合金又は複合物の低輻射率金属
で遮蔽すると、前記作用効果が一層促進されることとな
る。In the case of the above structure, the radiation and conduction heat generated from the hot cathode are different from those other than the hot cathode, such as the anode, the ion extraction electrode, the focus electrode, the aperture electrode,
Further, it is possible to minimize the transmission to the ceramic, the vacuum terminal, the analysis unit, and the detection unit. Since the minimum transferred heat is rapidly released to the vacuum outer wall, the wall material surrounding the hot cathode is continuously interposed between the hot cathode and other electrodes, and the vacuum outer wall is also continuous. However, the problem can be solved by arranging the radiant energy emitted from the hot cathode so that a part of the radiant energy emitted from the hot cathode is prevented from entering the other electrodes by shielding the inclusions. Furthermore, the inclusions that are present between the hot cathode and the other electrodes and that are continuous to the outer wall of the vacuum are pure metals of gold, silver, copper, and aluminum that have an emissivity of 0.03 or less and good thermal conductivity. Alternatively, shielding with a low-emissivity metal of an alloy or composite containing them as a main component further promotes the above-described action and effect.
【００１７】[0017]
【実施例】以下本発明を図面に示した一実施例を用いて
説明する。尚、図９に示す従来のものと共通の構成要素
には、同一の符号を付している。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to an embodiment shown in the drawings. The same components as those of the conventional one shown in FIG. 9 are designated by the same reference numerals.
【００１８】図１及び図２において、本発明の残留ガス
分析計は、図９のものと同様に、熱陰極型イオン源搭載
の四重極質量分析型残留ガス分析計である。即ち、金属
製の真空容器ＡのフランジＢ内にイオン源を組立たイオ
ン源部は、円筒グリッド状陽極２とその周辺に巻くよう
に配置されるリング状の熱陰極１を基本に、イオン引き
出し電極（フォーカス電極）３とアパーチャー電極（全
圧測定電極）４を設けており、そして、本発明では従来
のシールド電極５に換えて、フランジと一体構造の真空
外壁と連続しているフランジ電極６を提供することによ
って、イオン部のガス放出を低減化を図るものである。
この状態で熱陰極１から陽極２に向かって2mAの陽極電
子流が流されると、陽極２の内部に飛び交う電子は残留
ガスを電子衝撃して陽極内部にイオンを生成する。この
イオンはイオン引き出し電極３によって加速され、アパ
ーチャー電極の小孔を通過して、四重極質量分析部７に
送られ、高周波によって質量分析され、検出部８に送ら
れ真空端子９を通して電流信号として真空外に取り出さ
れる。1 and 2, the residual gas analyzer of the present invention is a quadrupole mass spectrometric residual gas analyzer equipped with a hot cathode ion source, similar to that of FIG. That is, the ion source part in which the ion source is assembled in the flange B of the metal vacuum container A is based on the cylindrical grid-shaped anode 2 and the ring-shaped hot cathode 1 arranged so as to be wound around the anode 2 and the ion extraction is performed. An electrode (focus electrode) 3 and an aperture electrode (total pressure measuring electrode) 4 are provided, and in the present invention, instead of the conventional shield electrode 5, a flange electrode 6 which is continuous with the vacuum outer wall integrally formed with the flange. Is provided, the gas emission of the ion portion is reduced.
When an anode electron flow of 2 mA is made to flow from the hot cathode 1 to the anode 2 in this state, the electrons flying inside the anode 2 bombard the residual gas with electrons to generate ions inside the anode. The ions are accelerated by the ion extracting electrode 3, pass through the small hole of the aperture electrode, are sent to the quadrupole mass spectrometric section 7, are mass-analyzed by high frequency, are sent to the detecting section 8, and are sent to the vacuum terminal 9 as a current signal. Is taken out of the vacuum as.
【００１９】また、図９の従来のイオン源を構成する電
極は、絶縁物を介して四重極分析部及び検出部の外筒管
１０の先端にマウントされているのに対し、本発明の第
２図及び第３図では、イオン源を構成する各電極は全
て、絶縁物１１を介してフランジ電極６にマウントされ
ている。即ち、フランジ電極６は、熱陰極フィラメン１
と、グリッド陽極２の支持部２ａ（ドーナツ板）、イオ
ン引き出し電極、イオンビームフォーカス電極、アパー
チャー電極（全圧測定電極）、更には分析部（四重極電
極）、検出部（イオン収集電極又は２次電子増倍管）等
の他の電極との間に、該熱陰極を取り囲む壁材１２（フ
ランジ電極６の一部）が連続している遮蔽体部６ａが介
在し、且つ真空外壁にも連続し、熱陰極から放射される
輻射エネルギーの一部が該遮蔽体部によって、他の全て
の電極へ入射することを減じるように配置されている。
さらに、熱陰極と他の電極の間に介在し、且つ真空外壁
に連続している遮蔽体部６ａは、金が真空蒸着された銅
合金（フランジ電極６）で製作されている。Further, the electrodes constituting the conventional ion source of FIG. 9 are mounted on the ends of the outer cylindrical tube 10 of the quadrupole analysis section and the detection section through an insulator, whereas the electrodes of the present invention are mounted. In FIG. 2 and FIG. 3, all the electrodes constituting the ion source are mounted on the flange electrode 6 via the insulator 11. That is, the flange electrode 6 is the hot cathode filament 1
And a support part 2a (donut plate) of the grid anode 2, an ion extraction electrode, an ion beam focus electrode, an aperture electrode (total pressure measurement electrode), an analysis part (quadrupole electrode), and a detection part (ion collection electrode or A shield member 6a in which a wall material 12 (a part of the flange electrode 6) surrounding the hot cathode is continuous is provided between the shield electrode 6a and another electrode such as a secondary electron multiplier tube, and the vacuum outer wall is provided. Are arranged so that a part of the radiant energy emitted from the hot cathode is prevented from being incident on all the other electrodes by the shield portion.
Further, the shield portion 6a, which is interposed between the hot cathode and the other electrode and is continuous with the vacuum outer wall, is made of a copper alloy (flange electrode 6) in which gold is vacuum deposited.
【００２０】上記のように構成される本発明において、
グッリド陽極は計測に先立って20mA×350V（7W）の電子
ボンバードによって予め脱ガス処理がなされる。電子ボ
ンバード電力は従来の1／10であるが、熱陰極１の配置
空間に配置される電極は、陽極のグリッド部２だけなの
で、十分であり、従来のような絶縁不良の問題は発生し
ない。電子ボンバード後、各電極には図９の場合と全く
同じ電気的条件が与えられる。2mAの電子を引き出すた
めに熱陰極には3V×1.3Aの加熱電流が与えられる。この
消費電力の一部は熱陰極フィラメントの支持電極を伝導
して失われるが、ほとんどは輻射エネルギーとして放射
される。ところが熱陰極１からの輻射の約72%近くを受
ける壁１２及び遮蔽体部６ａは、輻射エネルギーを最も
吸収しにくい金が蒸着されているので、壁の吸収する熱
量は非常に小さい。更に、吸収したわずかな熱も、熱伝
導率の非常に大きい銅合金でできており、真空外壁に連
続しているので、熱は直ちに拡散し、フランジ電極６の
温度上昇はほとんど無い。２番目に熱輻射の大きいのが
陽極２のグリッド部であるが、グリッド部は格子であ
り、受け取る熱量も小さいが、予め電子ボンバードによ
り脱ガスが行われるのでこの部分からのガス放出量は無
視できるほど小さい。また、陽極で最も大きな面積を占
めるグリッドと一体になっている支持ドーナツ板２ａ
は、フランジ電極の裏側に配置されており、受ける輻射
量は非常に小さい。また、イオン引き出し電極及びアパ
ーチャー電極もグリッドの通過穴１４を通して熱輻射を
受けるが、この穴を通しての輻射量は熱陰極から放射さ
れる全輻射量は、フィラメントから見る立体角から計算
して5%以下である（残り23%は非測定系に放射され
る）。また、受けた5%の輻射熱は絶縁物を介してフラン
ジ電極に放熱されるので、各電極の温度上昇によるガス
放出は無視できるほど小さい。また、アパーチャー電極
のイオンビーム通過穴を通しての輻射量は0.01%以下で
あり、外筒管を含む四重極分析部、検出部には輻射及び
伝導による熱は全く伝わらないので、温度上昇によるガ
ス放出の増大は全く起こらない。In the present invention configured as described above,
The grid anode is degassed in advance by a 20mA x 350V (7W) electronic bombardment prior to measurement. Although the electron bombardment power is 1/10 of that of the conventional one, the electrode arranged in the arrangement space of the hot cathode 1 is only the grid portion 2 of the anode, which is sufficient, and the conventional problem of insulation failure does not occur. After electron bombardment, each electrode is given the same electrical conditions as in FIG. A heating current of 3V x 1.3A is applied to the hot cathode to extract 2mA of electrons. Part of this power consumption is lost by conducting through the supporting electrode of the hot cathode filament, but most of it is radiated as radiant energy. However, since the wall 12 and the shield portion 6a, which receive about 72% of the radiation from the hot cathode 1, are deposited with gold, which is the most difficult to absorb the radiation energy, the amount of heat absorbed by the wall is very small. Further, even a small amount of absorbed heat is made of a copper alloy having a very high thermal conductivity and is continuous with the vacuum outer wall, so that the heat immediately diffuses and the temperature of the flange electrode 6 hardly rises. The second largest heat radiation is the grid part of the anode 2. The grid part is the grid, and the amount of heat received is small, but the amount of gas released from this part is neglected because degassing is performed by the electron bombardment in advance. As small as possible. Also, the support donut plate 2a integrated with the grid occupying the largest area of the anode.
Are arranged on the back side of the flange electrode and receive a very small amount of radiation. The ion extraction electrode and the aperture electrode also receive thermal radiation through the passage holes 14 of the grid. The total amount of radiation emitted from the hot cathode is 5% calculated from the solid angle seen from the filament. Below (the remaining 23% is radiated to the non-measuring system). Further, since the received radiant heat of 5% is radiated to the flange electrode through the insulator, the gas release due to the temperature rise of each electrode is negligibly small. In addition, the amount of radiation through the ion beam passage hole of the aperture electrode is 0.01% or less, and heat due to radiation and conduction is not transmitted to the quadrupole analysis unit including the outer tube and the detection unit. No increase in release occurs.
【００２１】次に本発明の残留ガス分析計と従来の残留
ガス分析計との比較実験結果を示す。図３に比較実験に
用いた実験装置を、図４には本発明の残留ガス分析計か
ら得られた残留ガス分析結果を、また図５に従来の残留
ガス分析計から得られた残留ガス分析結果を示す。即
ち、新旧２つの残留ガス分析計を小型のステンレス製真
空排気装置１５に取り付け比較した。始めに装置全体を
約200℃でベークし、放冷後20℃の室温で実験した。最
初に本発明の残留ガス分析計１６にコントローラ１８を
装着し、熱陰極フィラメントを点火後１時間した圧力平
衡状態でスペクトルを求めた。尚、１５ａは真空ポン
プ、１５ｂは真空計である。Next, the results of comparative experiments between the residual gas analyzer of the present invention and the conventional residual gas analyzer will be shown. FIG. 3 shows the experimental apparatus used for the comparative experiment, FIG. 4 shows the residual gas analysis result obtained from the residual gas analyzer of the present invention, and FIG. 5 shows the residual gas analysis obtained from the conventional residual gas analyzer. The results are shown. That is, two old and new residual gas analyzers were attached to a small stainless vacuum evacuation device 15 for comparison. First, the whole apparatus was baked at about 200 ° C, allowed to cool, and then tested at room temperature of 20 ° C. First, the controller 18 was attached to the residual gas analyzer 16 of the present invention, and the spectrum was obtained in a pressure equilibrium state in which the hot cathode filament was ignited for 1 hour. Incidentally, 15a is a vacuum pump, and 15b is a vacuum gauge.
【００２２】フィラメント点火前の圧力が6.5×10-9Pa
であったのに対して、点火後の圧力は6.7×10-9Paと非
常にわずかであった。このとき求めた残留ガスのスペク
トル第５図である。従来のイオン分離型残留ガス分析計
とに比較して、メタン16（CH4）、一酸化炭素28（CO）
の比率は非常に小さく、二酸化炭素44（CO2）は全く存
在しない。The pressure before filament ignition is 6.5 × 10 -9 Pa
However, the pressure after ignition was 6.7 × 10 -9 Pa, which was very small. It is FIG. 5 of the spectrum of the residual gas calculated | required at this time. Compared with the conventional ion separation type residual gas analyzer, methane 16 (CH 4 ) and carbon monoxide 28 (CO)
Is very small and there is no carbon dioxide 44 (CO 2 ).
【００２３】次に、本発明の残留ガス分析計１６のフィ
ラメンを消火した後、旧型の残留ガス分析計１７にコン
トローラを接続し、フィラメンを点火した。点火後圧力
は徐々に上昇し、安定するまでに約８時間を要し、圧力
は23倍の1.5×10-7Paまで上昇した。この圧力で求めた
スペクトルが図５である。この圧力では２番の水素2（H
2）が最も多く、新型の260倍もあり、水18（H2O）や一
酸化炭素28（CO）のピークのそれぞれ100倍、20倍に増
大している。従って、本発明の分析計自体からのガス放
出は、従来の分析計の1／260以下に低減化されているこ
とは明らかである。このように熱陰極型残留ガス分析計
の分析計自体からのガス放出の多大な低減化が実現でき
たのは、イオン源を構成する熱陰極と他の電極、即ち、
イオン源の一部を構成するイオン引き出し電極、フォー
カス電極、アパーチャー電極（全圧測定電極）、更には
分析部（四重極電極）、検出部（イオン収集電極又は２
次電子増倍管）等の全ての電極との間に、該熱陰極を取
り囲む壁材が連続して介在し、且つ真空外壁にも連続
し、該介在物が、熱陰極から放射される輻射エネルギー
が、他の全ての電極へ入射することを減じるため、さら
に、熱陰極と他の電極の間に介在する真空外壁に連続し
ている介在物は、金、銀、銅、アルミニウムの純金属又
はそれらを主体とする低輻射率で熱良伝導性の合金又は
複合物であるため、吸収する熱量が小さく、また吸収し
た熱も速やかに真空壁に拡散することを特徴とする本残
留ガス分析計が発明されたからに外ならない。Next, after extinguishing the filament of the residual gas analyzer 16 of the present invention, a controller was connected to the old type residual gas analyzer 17 to ignite the filament. After ignition, the pressure gradually increased, it took about 8 hours to stabilize, and the pressure rose to 23 times 1.5 × 10 -7 Pa. The spectrum obtained at this pressure is shown in FIG. At this pressure, the second hydrogen 2 (H
2 ) is the most common, 260 times that of the new model, which is 100 times and 20 times the peaks of water 18 (H 2 O) and carbon monoxide 28 (CO), respectively. Therefore, it is clear that the gas emission from the analyzer of the present invention itself is reduced to 1/260 or less of that of the conventional analyzer. In this way, it was possible to achieve a great reduction in gas emission from the analyzer itself of the hot cathode type residual gas analyzer, that is, the hot cathode and other electrodes constituting the ion source, that is,
An ion extraction electrode, a focus electrode, an aperture electrode (total pressure measurement electrode), which constitutes a part of the ion source, an analysis unit (quadrupole electrode), and a detection unit (ion collection electrode or 2
The wall material surrounding the hot cathode is continuously interposed between all electrodes such as the secondary electron multiplier tube) and the vacuum outer wall, and the inclusions are radiated from the hot cathode. In order to reduce the incidence of energy on all other electrodes, the inclusions connected to the vacuum outer wall between the hot cathode and the other electrodes are pure metals of gold, silver, copper and aluminum. Or, since it is an alloy or composite mainly composed of them and having a low emissivity and good thermal conductivity, the amount of heat absorbed is small, and the absorbed heat quickly diffuses into the vacuum wall. It is true that the meter was invented.
【００２４】尚、図の実施例ではイオン源部と分析部
を、ガスケット１９を挟んフランジ分離できる構造にな
っているが、二つの部分をガスケットで分離する必要は
なく、イオン源部、分析部を一体物としても良い。ま
た、イオン源を囲む材料は、金メッキを施した銅合金の
例を示したが、構成する材料はこれに限った物ではな
く、図６、図７に示したように、熱陰極フィラメントか
ら放射される熱輻射を、他の電極に伝えられる放射量を
減じる遮蔽体部６ａが、熱陰極フィラメントと他の電極
の間に存在し、遮蔽体部６ａは真空壁連続している構造
であれば真空壁のフランジと一体構造である必要はな
く、図６や図７に示したように、熱陰極壁１２と遮蔽体
部６ａの低輻射率熱良伝導性の部分がフランジ部２０、
２１と２２の部分で溶接される構造であっても構わな
い。また、陽極は円筒状グリッドに限ったものではな
く、図８に示したように半球状であっても構わない。質
量分析部は四重極型に限った物ではなく、磁界偏向型、
飛行時間型等いかなる形式であっても構わない。In the illustrated embodiment, the ion source section and the analysis section have a structure in which the gasket 19 can be separated by the flange, but it is not necessary to separate the two sections with a gasket, and the ion source section and the analysis section can be separated. May be integrated into one. Although the material surrounding the ion source is an example of a copper alloy plated with gold, the constituent material is not limited to this, and as shown in FIGS. 6 and 7, radiation from the hot cathode filament is performed. If the shield portion 6a that reduces the amount of heat radiation that is transmitted to other electrodes is present between the hot cathode filament and the other electrode, and the shield portion 6a has a structure in which the vacuum wall is continuous. It is not necessary to have a structure integral with the flange of the vacuum wall. As shown in FIG. 6 and FIG. 7, the portion of the hot cathode wall 12 and the shield portion 6a having the low emissivity and good thermal conductivity is the flange portion 20,
The structure may be such that the portions 21 and 22 are welded. Further, the anode is not limited to the cylindrical grid, and may have a hemispherical shape as shown in FIG. The mass spectrometer is not limited to the quadrupole type, but a magnetic field deflection type,
Any form such as a flight time type may be used.
【００２５】[0025]
【発明の効果】本発明は、以上説明したように構成され
るので、熱陰極から発生する輻射及び伝導熱が、熱陰極
以外の、例えば陽極、イオン引き出し電極、フォーカス
電極、アパーチャ電極、更にセラミック、真空端子及び
分析部、検出部へ伝達されるのを最小限にすることが可
能となる。更に、最小限伝達された熱は速やかに真空外
壁に放出するため、熱陰極と他の電極との間に、熱陰極
を取り囲む壁材が連続して介在することとなり、且つ真
空外壁にも連続し、熱陰極から放射される輻射エネルギ
ーの一部が該介在物の遮蔽によって、他の全ての電極へ
入射することを減じるように配置することにより、自己
放出ガスの低減化を図ることができるものである。更に
また、熱陰極と他の電極の間に介在し、且つ真空外壁に
連続している介在物が、輻射率が0.03以下で、且つ熱伝
導率良好性の金、銀、銅、アルミニウムの純金属又はそ
れらを主体とする合金又は複合物の低輻射率金属で遮蔽
する場合は、前記作用効果が一層促進されることとな
る。Since the present invention is configured as described above, the radiation and conduction heat generated from the hot cathode can be, for example, an anode, an ion extraction electrode, a focus electrode, an aperture electrode, and a ceramic other than the hot cathode. It is possible to minimize the transmission to the vacuum terminal, the analysis unit, and the detection unit. Further, since the minimum transferred heat is rapidly released to the vacuum outer wall, the wall material surrounding the hot cathode is continuously interposed between the hot cathode and other electrodes, and the vacuum outer wall is also continuously connected. However, by arranging so that a part of the radiant energy radiated from the hot cathode can be prevented from entering the other electrodes by shielding the inclusions, the self-emission gas can be reduced. It is a thing. Furthermore, the inclusions that are present between the hot cathode and the other electrodes and that are continuous to the outer wall of the vacuum have a emissivity of 0.03 or less and have good thermal conductivity and are pure gold, silver, copper, and aluminum. In the case of shielding with a low emissivity metal such as a metal or an alloy or a composite containing them as a main component, the above-mentioned effects are further promoted.
【００２６】このように、本発明によれば、自己放出ガ
スの低減化を図ることができ、しかも信頼性の高い残留
ガス分析計を得ることができるものである。As described above, according to the present invention, a self-emission gas can be reduced and a highly reliable residual gas analyzer can be obtained.
【図１】本発明の残留ガス分析計に係り、全体構成を示
す縦断面図。FIG. 1 is a vertical cross-sectional view showing the overall configuration of a residual gas analyzer according to the present invention.
【図２】本実施例の残留ガス分析計の要部拡大断面図。FIG. 2 is an enlarged cross-sectional view of a main part of the residual gas analyzer according to the present embodiment.
【図３】比較実験に用いた実験装置を説明する概略図。FIG. 3 is a schematic diagram illustrating an experimental device used in a comparative experiment.
【図４】本発明の残留ガス分析計から得られた残留ガス
分析結果を示すグラフ。FIG. 4 is a graph showing the residual gas analysis results obtained from the residual gas analyzer of the present invention.
【図５】従来の残留ガス分析計から得られた残留ガス分
析結果を示すグラフ。FIG. 5 is a graph showing a residual gas analysis result obtained from a conventional residual gas analyzer.
【図６】本発明の他の実施例の残留ガス分析計の要部拡
大断面図。FIG. 6 is an enlarged sectional view of a main part of a residual gas analyzer according to another embodiment of the present invention.
【図７】本発明の他の実施例の残留ガス分析計の要部拡
大断面図。FIG. 7 is an enlarged sectional view of a main part of a residual gas analyzer according to another embodiment of the present invention.
【図８】本発明の他の実施例の残留ガス分析計の要部拡
大断面図。FIG. 8 is an enlarged sectional view of a main part of a residual gas analyzer according to another embodiment of the present invention.
【図９】従来の残留ガス分析計に係り、全体構成を示す
縦断面図。FIG. 9 is a vertical cross-sectional view showing the overall configuration of a conventional residual gas analyzer.
１ 熱陰極 ２ 円筒グリッド状陽極 ３ イオン引き出し電極（フォーカス電極） ４ アパーチャー電極（全圧測定電極） ６ フランジ電極 ６ａ 遮蔽体部 ７ 四重極質量分析部 ８ 検出部 ９ 真空端子 Ａ 真空容器 Ｂ フランジ 1 Hot Cathode 2 Cylindrical Grid Anode 3 Ion Extraction Electrode (Focus Electrode) 4 Aperture Electrode (Total Pressure Measurement Electrode) 6 Flange Electrode 6a Shield 7 Quadrupole Mass Spectrometer 8 Detector 9 Vacuum Terminal A Vacuum Container B Flange
Claims (5)
電子を陽極に向かって加速し、装置内に存在する気体分
子を電子衝撃することによってイオン化するイオン源
と、 このイオン源から得られるイオンビームを、イオンの電
荷対質量比に応じて分離する分析部と、 分離したイオンビームを捕らえて電流信号に変換する検
出部と、を備え、得られる電流強度から気体分子密度を
測定する熱陰極型残留ガス分析計において、 イオン源を構成する熱陰極と、陽極の一部を除く他の電
極との間に、前記熱陰極を取り囲む壁材が設けられると
共に、前記壁材は真空外壁にも連続し、更に、前記熱陰
極と、前記他の電極との間に、前記熱陰極から放射され
る輻射エネルギーを遮蔽する遮蔽体部を設けたことを特
徴とする残留ガス分析計。1. An ion source for accelerating electrons emitted from a hot cathode toward an anode in a vacuum device to ionize gas molecules existing in the device by electron bombardment, and ions obtained from this ion source. A hot cathode that has an analysis unit that separates the beam according to the charge-to-mass ratio of the ions, and a detection unit that captures the separated ion beam and converts it into a current signal, and measures the gas molecule density from the obtained current intensity. In the residual gas analyzer of the type, a wall material surrounding the hot cathode is provided between the hot cathode that constitutes the ion source and the other electrodes except a part of the anode, and the wall material is also applied to the vacuum outer wall. A residual gas analyzer, which is continuous and further has a shield part for shielding radiant energy emitted from the hot cathode between the hot cathode and the other electrode.
される中空状のフランジ電極で構成し、このフランジ電
極に前記遮蔽体部を一体に形成したことを特徴とする請
求項１記載の残留ガス分析計。2. The wall member is formed of a hollow flange electrode connected between the flanges of the vacuum container, and the shield portion is integrally formed with the flange electrode. Residual gas analyzer.
に設置される中空状の部材で構成し、この部材に前記遮
蔽体部を一体に形成したことを特徴とする請求項１記載
の残留ガス分析計。3. The wall member is composed of a hollow member installed inside the flange of the vacuum container, and the shield portion is integrally formed with this member. Residual gas analyzer.
ン源の一部を構成するイオン引き出し電極、イオンビー
ムフォーカス電極、アパーチャー電極、及び四重極電極
であることを特徴とする請求項１記載の残留ガス分析
計。4. The electrodes other than the anode and the hot cathode are an ion extraction electrode, an ion beam focus electrode, an aperture electrode, and a quadrupole electrode that form a part of an ion source. The residual gas analyzer described.
る部材は、その一部が、金、銀、銅、アルミニウムの純
金属もしくはそれらを主体とする合金又は複合物である
ことを特徴とする請求項１記載の残留ガス分析計。5. The member continuous with the shield part and the vacuum outer wall is partly made of a pure metal of gold, silver, copper, or aluminum, or an alloy or composite mainly composed of them. The residual gas analyzer according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6083522A JPH07294487A (en) | 1994-04-21 | 1994-04-21 | Residual gas analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6083522A JPH07294487A (en) | 1994-04-21 | 1994-04-21 | Residual gas analyzer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07294487A true JPH07294487A (en) | 1995-11-10 |
Family
ID=13804821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6083522A Pending JPH07294487A (en) | 1994-04-21 | 1994-04-21 | Residual gas analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07294487A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007194094A (en) * | 2006-01-20 | 2007-08-02 | Shimadzu Corp | Mass spectrometer |
| WO2007102224A1 (en) * | 2006-03-09 | 2007-09-13 | Shimadzu Corporation | Mass analyzer |
| WO2007102225A1 (en) * | 2006-03-09 | 2007-09-13 | Shimadzu Corporation | Mass analyzer |
| JP2008170176A (en) * | 2007-01-09 | 2008-07-24 | Stanley Electric Co Ltd | Residual gas discrimination method |
| JP2010169482A (en) * | 2009-01-21 | 2010-08-05 | Shin Etsu Handotai Co Ltd | Sediment detection method and sediment detector |
| US8729465B2 (en) | 2009-09-29 | 2014-05-20 | Vaclab Inc. | Vacuum measurement device with ion source mounted |
| JP2019139956A (en) * | 2018-02-09 | 2019-08-22 | 株式会社アルバック | Ion source for mass spectrometer |
| KR102891966B1 (en) * | 2024-11-08 | 2025-11-27 | 충남대학교산학협력단 | Measurement system of residual gas in vacuum vessel using 0d global model and method thereof |
-
1994
- 1994-04-21 JP JP6083522A patent/JPH07294487A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007194094A (en) * | 2006-01-20 | 2007-08-02 | Shimadzu Corp | Mass spectrometer |
| WO2007102224A1 (en) * | 2006-03-09 | 2007-09-13 | Shimadzu Corporation | Mass analyzer |
| WO2007102225A1 (en) * | 2006-03-09 | 2007-09-13 | Shimadzu Corporation | Mass analyzer |
| JPWO2007102224A1 (en) * | 2006-03-09 | 2009-07-23 | 株式会社島津製作所 | Mass spectrometer |
| US7939810B2 (en) | 2006-03-09 | 2011-05-10 | Shimadzu Corporation | Mass spectrometer |
| JP4793440B2 (en) * | 2006-03-09 | 2011-10-12 | 株式会社島津製作所 | Mass spectrometer |
| USRE44147E1 (en) | 2006-03-09 | 2013-04-16 | Shimadzu Corporation | Mass spectrometer |
| JP2008170176A (en) * | 2007-01-09 | 2008-07-24 | Stanley Electric Co Ltd | Residual gas discrimination method |
| JP2010169482A (en) * | 2009-01-21 | 2010-08-05 | Shin Etsu Handotai Co Ltd | Sediment detection method and sediment detector |
| US8729465B2 (en) | 2009-09-29 | 2014-05-20 | Vaclab Inc. | Vacuum measurement device with ion source mounted |
| JP2019139956A (en) * | 2018-02-09 | 2019-08-22 | 株式会社アルバック | Ion source for mass spectrometer |
| KR102891966B1 (en) * | 2024-11-08 | 2025-11-27 | 충남대학교산학협력단 | Measurement system of residual gas in vacuum vessel using 0d global model and method thereof |
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