JPH08122052A - Profile measuring device - Google Patents

Profile measuring device

Info

Publication number
JPH08122052A
JPH08122052A JP26415794A JP26415794A JPH08122052A JP H08122052 A JPH08122052 A JP H08122052A JP 26415794 A JP26415794 A JP 26415794A JP 26415794 A JP26415794 A JP 26415794A JP H08122052 A JPH08122052 A JP H08122052A
Authority
JP
Japan
Prior art keywords
thickness
measured
thickness gauge
measuring
profile
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26415794A
Other languages
Japanese (ja)
Inventor
Shigeyuki Okuma
熊 茂 幸 大
Tatsu Hiraga
賀 龍 平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP26415794A priority Critical patent/JPH08122052A/en
Publication of JPH08122052A publication Critical patent/JPH08122052A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】 【目的】 プロフィルデータを正確にかつ効率的に測定
しうるプロフィル測定装置を提供すること。 【構成】 各厚み計(1,2)が一定時間の間、被測定
物(20)の同一箇所の厚みを測定した測定データを入
力し、その測定データから各厚み計(1,2)相互間の
測定機差を求める測定機差演算部(51)と、一定時間
経過後、各厚み計(1,2)が被測定物(20)の所定
の位置の厚みを測定した測定データを入力し、その測定
データから測定機差を補正してクラウン量を演算する演
算補正部(52)とを備えている。
(57) [Summary] [Purpose] To provide a profile measuring device capable of accurately and efficiently measuring profile data. [Structure] Each thickness gauge (1, 2) inputs measurement data obtained by measuring the thickness of the object (20) at the same location for a certain period of time, and the thickness measurement (1, 2) A measuring instrument difference calculating unit (51) for obtaining the measuring instrument difference between the two and input measurement data in which each thickness gauge (1, 2) measures the thickness of the object to be measured (20) at a predetermined position after a certain time has elapsed Then, a calculation correction unit (52) that calculates the crown amount by correcting the measurement device difference from the measurement data is provided.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、例えば圧延工程におい
て、鋼板等の被圧延物の断面形状(プロフィル)を測定
するプロフィル測定装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a profile measuring device for measuring a cross-sectional shape (profile) of an object to be rolled such as a steel plate in a rolling process.

【0002】[0002]

【従来の技術】例えば鋼板等の圧延材を圧延する工程に
おいて、圧延材の断面形状(プロフィル)が測定されて
いる。図5はこのような測定に用いられる従来のプロフ
ィル測定装置のブロック図である。
2. Description of the Related Art In the process of rolling a rolled material such as a steel plate, the cross-sectional shape (profile) of the rolled material is measured. FIG. 5 is a block diagram of a conventional profile measuring apparatus used for such measurement.

【0003】図示するように、従来のプロフィル測定装
置は、高速で走行する圧延材すなわち被測定物20の中
央部21の厚みを測定する固定形厚み計1と、被測定物
20の幅方向に走査して被測定物20の幅方向の厚みを
測定する走査形厚み計2と、固定形厚み計1及び走査形
厚み計2をそれぞれ制御する固定形厚み計制御部3及び
走査形厚み計制御部4と、固定形厚み計制御部3及び走
査形厚み計制御部4を介して入力した中央部21及び幅
方向の厚みの測定データを演算し被測定物20のプロフ
ィルデータを求めるプロフィル演算部5と、そのプロフ
ィルデータを表示する表示部6とから構成される。
As shown in the figure, the conventional profile measuring apparatus comprises a fixed thickness gauge 1 for measuring the thickness of a rolled material running at a high speed, that is, a central portion 21 of the object to be measured 20, and a width direction of the object to be measured 20. Scanning thickness gauge 2 for scanning and measuring the thickness of the object 20 in the width direction, fixed thickness gauge control unit 3 for controlling fixed thickness gauge 1 and scanning thickness gauge 2, and scanning thickness gauge control A profile calculation unit for calculating profile data of the object 20 by calculating measurement data of the thickness in the central portion 21 and the width direction input via the unit 4, the fixed type thickness gauge control unit 3 and the scanning type thickness gauge control unit 4. 5 and a display unit 6 for displaying the profile data.

【0004】まず、被測定物20の全幅を走査しその断
面全体の形状を求める動作(全幅測定モード)について
説明する。
First, the operation of scanning the entire width of the object 20 to be measured and obtaining the shape of the entire cross section (full width measurement mode) will be described.

【0005】まず、固定形厚み計1は被測定物20の中
央部21の厚みを測定し、その測定データを固定形厚み
計制御部3に出力する。他方、走査形厚み計2は、被測
定物20の幅方向に(図の矢印方向)走査することによ
って、各走査地点毎の厚みを測定し、その測定データを
走査形厚み計制御部4に出力する。プロフィル演算部5
は、固定形厚み計制御部3及び走査形厚み計制御部4を
介して中央部の測定データ及び幅方向の測定データを入
力し、それら両者のデータの差を求め、この差を例えば
幅1mm毎のプロフィルデータに変換し、この変換した
プロフィルデータを線形補間し、表示部6に送る。この
ように、走査形厚み計2が被測定物20の全幅を走査す
る毎に例えば1分間に1回の割合で、新しく走査された
被測定物20の断面(プロフィル)が表示される。
First, the fixed thickness gauge 1 measures the thickness of the central portion 21 of the object to be measured 20, and outputs the measurement data to the fixed thickness gauge control unit 3. On the other hand, the scanning thickness gauge 2 scans the width of the DUT 20 (in the direction of the arrow in the drawing) to measure the thickness at each scanning point, and the measurement data is sent to the scanning thickness gauge control unit 4. Output. Profile calculation unit 5
Inputs the measurement data in the central portion and the measurement data in the width direction via the fixed type thickness gauge control unit 3 and the scanning type thickness gauge control unit 4 and obtains the difference between the two data, and the difference is, for example, 1 mm in width. It is converted into profile data for each, and the converted profile data is linearly interpolated and sent to the display unit 6. In this way, every time the scanning thickness gauge 2 scans the entire width of the measured object 20, the section (profile) of the newly scanned measured object 20 is displayed, for example, once a minute.

【0006】次に、被測定物の全幅でなくエッジ部を連
続的に測定し(定点測定モード)、クラウン量を求める
動作について図5及び図6を基に説明する。図6は、被
測定物20が矢印方向に運ばれていく時の固定形厚み計
1及び走査形厚み計2の走査位置を説明するためのもの
である。
Next, the operation of continuously measuring the edge portion, not the entire width of the object to be measured (fixed point measurement mode) and obtaining the crown amount will be described with reference to FIGS. 5 and 6. FIG. 6 is for explaining the scanning positions of the fixed thickness gauge 1 and the scanning thickness gauge 2 when the DUT 20 is conveyed in the direction of the arrow.

【0007】まず、図示してしない上位計算機から定点
測定モードでクラウン量を求めるように指令を受けたプ
ロフィル演算部5は、走査形厚み計制御部4に走査形厚
み計2が被測定物20のエッジ23から一定距離だけ外
側の地点201に移動するように指令を発する。指令を
受けた走査形厚み計制御部4は走査形厚み計2を地点2
01に移動させる。次に、予め被測定物20の中央部2
1の延長線上に位置している固定形厚み計1が被測定物
20の存在を検出し、このことを固定形厚み計制御部3
を介してプロフィル演算部5に通知する。プロフィル演
算部5は被測定物20を検出した後、一定時間経過する
と走査形厚み計制御部4を起動し、走査形厚み計2を地
点201から被測定物20のエッジ部22に移動させる
(地点202)。エッジ部22の位置は、予め被測定物
20のエッジ23から内側へ所定の距離だけずれた地点
として、プロフィル演算部5に記憶されている。
First, in the profile computing unit 5 which receives a command from a host computer (not shown) to determine the crown amount in the fixed point measurement mode, the scanning thickness gauge control unit 4 causes the scanning thickness gauge 2 to measure the object 20 to be measured. A command is issued to move to a point 201 outside by a certain distance from the edge 23 of the. Upon receiving the command, the scanning thickness gauge control unit 4 sets the scanning thickness gauge 2 to the point 2
Move to 01. Next, the central portion 2 of the DUT 20 is previously measured.
The fixed thickness gauge 1 located on the extension line of 1 detects the presence of the object 20 to be measured, and this is determined by the fixed thickness gauge control unit 3
The profile calculation unit 5 is notified via. After detecting the object 20 to be measured, the profile calculation unit 5 activates the scanning thickness gauge control unit 4 after a lapse of a certain time, and moves the scanning thickness meter 2 from the point 201 to the edge portion 22 of the object 20 ( Point 202). The position of the edge portion 22 is stored in the profile calculation unit 5 in advance as a point that is displaced inward from the edge 23 of the measured object 20 by a predetermined distance.

【0008】走査形厚み計2はエッジ部22に移動した
後、その地点の厚みを測定しその測定データを走査形厚
み計制御部4を介してプロフィル演算部5に送る。他
方、固定形厚み計1は引き続き被測定物20の中央部2
1の厚みを測定し、その測定データを固定形厚み計制御
部3を介してプロフィル演算部5に送る。プロフィル演
算部5は、入力した両者の測定データから以下の式
(1)に示すように演算し、クラウン量Cを求める。
After the scanning type thickness gauge 2 moves to the edge portion 22, the thickness at that point is measured and the measurement data is sent to the profile calculation section 5 via the scanning type thickness gauge control section 4. On the other hand, the fixed thickness gauge 1 continues to have the central portion 2
The thickness of No. 1 is measured, and the measurement data is sent to the profile calculation unit 5 via the fixed thickness gauge control unit 3. The profile calculator 5 calculates the crown amount C from the input measurement data as shown in the following equation (1).

【0009】 C = Xc − Xe (1) ここで、Xcは固定形厚み計1の測定データを示し、X
eは走査形厚み計2の測定データを示す。
C = Xc−Xe (1) Here, Xc represents the measurement data of the fixed-type thickness gauge 1, and X =
e indicates the measurement data of the scanning thickness gauge 2.

【0010】次に、被測定物の全幅でなくエッジ部を連
続的に測定し(定点測定モード)、ウエッジ量を求める
動作について図7及び図8を基に説明する。図7は、ウ
エッジ量を求めるための従来のプロフィル測定装置のブ
ロック図であり、図8は被測定物20が矢印方向に運ば
れていく時の固定形厚み計1、第1の走査形厚み計2
a、及び第2の走査形厚み計2bの走査位置を説明する
ためのものである。
Next, the operation of continuously measuring the edge portion, not the entire width of the object to be measured (fixed point measurement mode) and obtaining the wedge amount will be described with reference to FIGS. 7 and 8. FIG. 7 is a block diagram of a conventional profile measuring device for obtaining the amount of wedge, and FIG. 8 is a fixed type thickness gauge 1 and a first scanning type thickness when the object 20 to be measured is conveyed in the arrow direction. Total 2
a and the scanning position of the second scanning type thickness gauge 2b.

【0011】ウエッジ量を求めるために被測定物20の
幅方向の両端部(エッジ部22a,22b)で厚みを測
定する必要があるため、第1の走査形厚み計2a及び第
2の走査形厚み計2bが設けられ、更にそれらを制御す
るために第1の走査形厚み計制御部4a及び第2の走査
形厚み計制御部4bが設けられ、第1及び第2の走査形
厚み計制御部4a,4bはそれぞれプロフィル演算部5
に接続されている。
Since it is necessary to measure the thickness at both ends (edge portions 22a, 22b) in the width direction of the object to be measured 20 in order to obtain the wedge amount, the first scanning type thickness gauge 2a and the second scanning type thickness gauge 2a are used. A thickness gauge 2b is provided, and a first scanning type thickness gauge control section 4a and a second scanning type thickness gauge control section 4b are provided to control them, and first and second scanning type thickness gauge controls are provided. The sections 4a and 4b are respectively profile calculation section 5
It is connected to the.

【0012】図7に示すように、第1の走査形厚み計2
aは被測定物20のドライブサイドのエッジ部22aの
厚みを測定し、第2の走査形厚み計2bは被測定物20
のオペレータサイドのエッジ部22bの厚みを測定す
る。
As shown in FIG. 7, a first scanning type thickness gauge 2
a is the thickness of the drive-side edge portion 22a of the object to be measured 20, and the second scanning thickness gauge 2b is the object to be measured 20.
The thickness of the edge portion 22b on the operator side is measured.

【0013】以下ウエッジ量を求めるための動作を具体
的に説明する。
The operation for obtaining the wedge amount will be specifically described below.

【0014】図示してしない上位計算機から定点測定モ
ードでウェッジ量を求めるように指令を受けたプロフィ
ル演算部5は、第1の走査形厚み計制御部4aを起動
し、第1の走査形厚み計2aを被測定物20のドライブ
サイドのエッジ23aから一定距離だけ外側の地点20
1aに移動させ、また第2の走査形厚み計制御部4bを
起動し、第2の走査形厚み計2bを被測定物20のオペ
レータサイドのエッジ23bから一定距離外側の地点2
01bに移動させるように制御する。次に、予め被測定
物20の中央部21の延長線上に位置していた固定形厚
み計1が被測定物20の存在を検出し、このことを固定
形厚み計制御部3を介してプロフィル演算部5に通知す
る。プロフィル演算部5は被測定物20を検出した後一
定時間経過すると、第1の走査形厚み計制御部4aを起
動し,第1の走査形厚み計制御部4aは第1の走査形厚
み計2aを被測定物20のドライブサイドのエッジ部2
2aに移動させ(地点202a)、また第2の走査形厚
み計制御部4bを起動し,第2の走査形厚み計制御部4
bは第2の走査形厚み計2bを被測定物20のオペレー
タサイドのエッジ部22bに移動させる(地点202
b)。2つのエッジ部22a,22bの位置は、予め被
測定物20のエッジ23a,23bから内側へ所定の距
離だけずれた地点として、プロフィル演算部5に記憶さ
れている。
The profile calculation unit 5 which receives a command from the host computer (not shown) to obtain the wedge amount in the fixed point measurement mode activates the first scanning type thickness gauge control unit 4a to make the first scanning type thickness. The total point 2a is located at a point 20 outside the drive side edge 23a of the DUT 20 by a certain distance.
1a and activates the second scanning type thickness gauge control unit 4b to move the second scanning type thickness gauge 2b from the edge 23b on the operator side of the object to be measured 20 at a predetermined distance 2
Control to move to 01b. Next, the fixed-type thickness gauge 1 that was previously positioned on the extension line of the central portion 21 of the measured object 20 detects the presence of the measured object 20, and this is detected by the fixed-type thickness gauge control unit 3. The calculation unit 5 is notified. The profile calculation unit 5 activates the first scanning type thickness gauge control unit 4a when a certain period of time has elapsed after detecting the measured object 20, and the first scanning type thickness gauge control unit 4a causes the first scanning type thickness gauge control unit 4a to operate. 2a is the edge 2 on the drive side of the DUT 20
2a (point 202a), the second scanning type thickness gauge control unit 4b is activated, and the second scanning type thickness gauge control unit 4 is activated.
b moves the 2nd scanning type thickness gauge 2b to the edge part 22b by the side of the operator of the to-be-measured object 20 (point 202).
b). The positions of the two edge portions 22a and 22b are stored in advance in the profile calculation unit 5 as points that are displaced inward from the edges 23a and 23b of the device under test 20 by a predetermined distance.

【0015】第1及び第2の走査形厚み計2a,2bは
それぞれエッジ部22a,22bに到達後その地点の厚
みを測定し,それぞれの測定データを第1及び第2の走
査形厚み計制御部4a,4bを介してプロフィル演算部
5に送る。プロフィル演算部5は、入力した2つの測定
データから以下の式(2)に示すように演算し、ウェッ
ジ量Wを求める。
The first and second scanning type thickness gauges 2a and 2b measure the thicknesses of the points after reaching the edge portions 22a and 22b, respectively, and the respective measurement data are controlled by the first and second scanning type thickness gauges. It is sent to the profile calculation unit 5 via the units 4a and 4b. The profile calculator 5 calculates the wedge amount W from the two input measurement data as shown in the following equation (2).

【0016】 W = Xo − Xd (2) ここで、Xoは第1の走査形厚み計2aの測定データで
あり、Xdは第2の走査形厚み計2bの測定データであ
る。
W = Xo−Xd (2) Here, Xo is the measurement data of the first scanning thickness meter 2a, and Xd is the measurement data of the second scanning thickness meter 2b.

【0017】ところで、上述した固定形厚み計1、走査
形厚み計2、及び第1及び第2の走査形厚み計2a,2
bは、それぞれ固有の測定誤差を有している。そこで、
それぞれ固有の測定誤差を補正をするために、オフライ
ン時に被測定物と同一のサンプル材料を測定し予め各厚
み計に固有の測定誤差をそれぞれ測定しておき、オンラ
イン時にプロフィル演算部5でそれぞれの測定誤差を補
正している。
By the way, the above-mentioned fixed type thickness gauge 1, scanning type thickness gauge 2, and first and second scanning type thickness gauges 2a, 2 are provided.
b has its own measurement error. Therefore,
In order to correct the measurement error peculiar to each, the same sample material as the object to be measured is measured offline, and the measurement error peculiar to each thickness gauge is measured in advance. The measurement error is corrected.

【0018】しかし、測定誤差を測定した後で被測定物
の厚みをオンラインで測定しても、各厚み計は被測定物
の厚みの±0.1%以内の測定誤差を生じる。従って、
上式(1),(2)によって求められるクラウン量及び
ウェッジ量はそれぞれ±0.2%以内の誤差が含まれう
ることになる。このことは、例えば圧延材の厚みが10
mmであるとすれば、最大20μmの誤差が生じうるこ
とを示し、この大きさの誤差は無視しえない。
However, even if the thickness of the object to be measured is measured online after measuring the measurement error, each thickness gauge causes a measurement error within ± 0.1% of the thickness of the object to be measured. Therefore,
The crown amount and the wedge amount obtained by the above equations (1) and (2) may each include an error within ± 0.2%. This means, for example, that the thickness of rolled material is 10
If it is mm, it means that an error of up to 20 μm can occur, and an error of this magnitude cannot be ignored.

【0019】これに対処するために、従来は予めオフラ
インで各厚み計相互間の測定誤差(以下、測定機差とい
う)を求めておき、オフライン時にプロフィル演算部で
その測定機差を補正していた。
In order to deal with this, conventionally, a measurement error (hereinafter referred to as a measuring instrument difference) between the thickness gauges is obtained in advance in advance, and the profile computing section corrects the measuring instrument difference when offline. It was

【0020】[0020]

【発明が解決しようとする課題】しかし、この方式では
各厚み計相互間の測定機差が被測定物の厚さにより異な
るため、オンラインで被測定物の測定範囲が全域に渡る
場合、予めオフライン時でも全域に渡り測定機差を測定
する必要があり、時間がかかるという問題を有してい
た。さらに、各厚み計自体が、機械的な磨耗等により劣
化するため、プロフィル演算部に記憶させる測定機差を
定期的に更新する必要があり、効率的でない。
However, in this method, since the measuring instrument difference between the respective thickness gauges differs depending on the thickness of the object to be measured, when the measuring range of the object to be measured is online, the offline is beforehand performed. Even at that time, it is necessary to measure the difference between the measuring instruments over the entire area, which is a problem that it takes time. Furthermore, since each thickness gauge itself deteriorates due to mechanical wear or the like, it is necessary to periodically update the measurement machine difference stored in the profile calculation unit, which is not efficient.

【0021】そこで本発明の目的は、被測定物のプロフ
ィルデータを正確にかつ効率的に測定しうるプロフィル
測定装置を提供することにある。
Therefore, an object of the present invention is to provide a profile measuring apparatus capable of accurately and efficiently measuring the profile data of the object to be measured.

【0022】[0022]

【課題を解決するための手段】本発明の請求項1記載の
プロフィル測定装置は、被測定物の中央部の厚みを測定
する第1の厚み計と、被測定物のエッジ部の厚みを測定
する第2の厚み計とを有し、この第1及び第2の厚み計
の測定データに基いて前記被測定物のプロフィルを測定
するものであって、第1の厚み計及び第2の厚み計に一
定時間の間被測定物の同一箇所の厚みを測定させ、一定
時間経過後は第1の厚み計に被測定物の中央部の厚みを
測定させ、第2の厚み計に被測定物のエッジ部の厚みを
測定させるように制御する制御手段と、一定時間の間に
第1の厚み計及び第2の厚み計によって測定された測定
データから、第1の厚み計及び第2の厚み計相互間の測
定機差を求める測定機差演算部と、一定時間経過後に第
1の厚み計及び第2の厚み計によって測定された測定デ
ータから測定機差を補正してクラウン量を演算する演算
補正部とを有するプロフィル演算手段とを備えたもので
ある。
A profile measuring apparatus according to claim 1 of the present invention is a profile measuring apparatus for measuring the thickness of a central portion of an object to be measured, and the thickness of an edge portion of the object to be measured. And a second thickness gauge for measuring the profile of the object to be measured based on the measurement data of the first and second thickness gauges. Meter to measure the thickness of the same portion of the object to be measured for a certain period of time, and after the elapse of a certain time, the first thickness meter measures the thickness of the central portion of the object to be measured and the second thickness meter to the object to be measured. The first thickness gauge and the second thickness are measured from the control means for controlling the thickness of the edge portion of the first thickness gauge and the measurement data measured by the first thickness gauge and the second thickness gauge for a certain period of time. The measuring machine difference calculation unit for obtaining the measuring machine difference between the gauges, and the first thickness gauge and the By correcting the measuring difference from the measurement data measured by the thickness meter is that a profile calculating means and a calculation correction unit for calculating the amount of the crown.

【0023】本発明の請求項2記載のプロフィル測定装
置は、被測定物の中央部の厚みを測定する第1の厚み計
と、被測定物の両サイドのエッジ部の厚みをそれぞれ測
定する第2及び第3の厚み計とを有し、この第1ないし
至第3の厚み計の測定データに基いて被測定物のプロフ
ィルを測定するプロフィル測定装置において、第1、第
2、及び第3の厚み計に被測定物の同一箇所の厚みを一
定時間測定させ、一定時間経過後は第1の厚み計に被測
定物の中央部を測定させ、第2及び第3の厚み計に被測
定物の両サイドのエッジ部をそれぞれ測定させるように
制御する制御手段と、第1、第2、及び第3の厚み計に
よって一定時間測定された測定データから、第1の厚み
計及び第2の厚み計相互間の第1の測定機差と第1の厚
み計及び第3の厚み計相互間の第2の測定機差とを求め
る測定機差演算部と、一定時間経過後に第1、第2、及
び第3の厚み計によって測定された測定データから第1
及び第2の測定機差を補正してクラウン量及びウェッジ
量を演算する演算補正部とを有するプロフィル演算手段
とを備えたものである。
The profile measuring apparatus according to claim 2 of the present invention comprises: a first thickness gauge for measuring the thickness of the central portion of the object to be measured; and a first thickness meter for measuring the thickness of the edge portions on both sides of the object to be measured. A profile measuring device having a second and a third thickness gauge and measuring a profile of an object to be measured based on measurement data of the first to third thickness gauges. The thickness gauge at the same location of the object to be measured for a certain period of time, and after a certain period of time, the first thickness meter measures the central portion of the object to be measured, and the second and third thickness meters measure the thickness. The first thickness gauge and the second thickness gauge are determined from the control means for controlling the edge portions on both sides of the object to be measured and the measurement data measured by the first, second, and third thickness gauges for a certain period of time. First measuring instrument difference between the thickness gauges and the first thickness gauge and the third thickness And measuring the difference calculation unit for obtaining a second measuring difference between total mutual, fixed time first after a lapse of a second, and a third from the measurement data measured by the thickness meter first
And a profile calculation unit having a calculation correction unit that calculates the crown amount and the wedge amount by correcting the second measuring machine difference.

【0024】[0024]

【作用】本発明の請求項1記載のプロフィル測定装置
は、まず第1の厚み計及び第2の厚み計が一定時間の間
被測定物の同一箇所の厚みを測定し、それぞれの測定デ
ータをプロフィル演算部の測定機差演算部に送る。測定
機差演算部は、この測定データから各厚み計相互間の測
定機差を求める。一定時間が経過すると、クラウン量を
求めるために第1の厚み計は被測定物の中央部に移動
し、第2の厚み計は被測定物のエッジ部に移動し、それ
ぞれ移動場所で被測定物の厚みを測定する。プロフィル
演算部の演算補正部はそれらの測定データを入力し、測
定機差演算部で求めた測定機差を補正してクラウン量を
演算する。
In the profile measuring apparatus according to the first aspect of the present invention, first, the first thickness meter and the second thickness meter measure the thickness of the same portion of the object to be measured for a fixed time, and the respective measurement data are obtained. It is sent to the measuring machine difference calculation section of the profile calculation section. The measuring instrument difference calculation unit obtains the measuring instrument difference between the respective thickness gauges from this measurement data. After a certain period of time, the first thickness meter moves to the center of the object to be measured and the second thickness meter moves to the edge of the object to measure the crown amount. Measure the thickness of the object. The calculation correction unit of the profile calculation unit inputs the measured data, corrects the measuring machine difference calculated by the measuring machine difference calculating unit, and calculates the crown amount.

【0025】これによって、クラウン量を正確にかつ効
率的に測定することができる。
Thus, the crown amount can be measured accurately and efficiently.

【0026】本発明の請求項2記載のプロフィル測定装
置は、まず第1の厚み計、第2の厚み計、及び第3の厚
み計が一定時間の間被測定物の同一箇所の厚みを測定
し、それぞれの測定データをプロフィル演算部の測定機
差演算部に送る。測定機差演算部は、この測定データか
ら第1の厚み計及び第2の厚み計相互間の第1の測定機
差と第1の厚み計及び第3の厚み計相互間の第2の測定
機差を求める。一定時間が経過すると、クラウン量及び
ウェッジ量を求めるために第1の厚み計は被測定物の中
央部に移動し、第2の厚み計及び第3の厚み計は被測定
物の両サイドのエッジ部にそれぞれ移動し、それぞれ移
動場所で被測定物の厚みを測定する。プロフィル演算部
の演算補正部はそれらの測定データを入力し、測定機差
演算部で求めた第1及び第2の測定機差を補正してクラ
ウン量及びウェッジ量を演算する。
In the profile measuring apparatus according to claim 2 of the present invention, first, the first thickness gauge, the second thickness gauge, and the third thickness gauge measure the thickness at the same location of the object to be measured for a predetermined time. Then, each measurement data is sent to the measuring machine difference calculation unit of the profile calculation unit. From the measurement data, the measuring instrument difference calculation unit determines the first measuring instrument difference between the first thickness gauge and the second thickness gauge and the second measurement between the first thickness gauge and the third thickness gauge. Find the machine difference. After a certain period of time, the first thickness gauge moves to the center of the object to be measured in order to obtain the crown amount and the wedge amount, and the second thickness meter and the third thickness meter are arranged on both sides of the object to be measured. Move to each edge and measure the thickness of the object to be measured at each moving location. The calculation correction unit of the profile calculation unit inputs the measured data, corrects the first and second measuring machine differences obtained by the measuring machine difference calculating unit, and calculates the crown amount and the wedge amount.

【0027】これによって、クラウン量及びウェッジ量
を正確にかつ効率的に測定することができる。
Thus, the amount of crown and the amount of wedge can be measured accurately and efficiently.

【0028】[0028]

【実施例】本発明のプロフィル測定装置による一実施例
を図1及び図2を基に説明する。図1は本実施例を示す
ブロック図であり、図2は被測定物20が矢印方向に運
ばれていく時の本実施例の固定形厚み計1及び走査形厚
み計2の走査位置を説明するためのものである。本実施
例は、クラウン量を求めるためのものであり、その構成
は従来のプロフィル測定装置(図5参照)に比較してプ
ロフィル演算部5の中に、測定機差演算部51と演算補
正部52とが新たに備えられている。
DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the profile measuring apparatus of the present invention will be described with reference to FIGS. FIG. 1 is a block diagram showing this embodiment, and FIG. 2 explains the scanning positions of the fixed type thickness gauge 1 and the scanning type thickness gauge 2 of this embodiment when the object 20 to be measured is conveyed in the direction of the arrow. It is for doing. The present embodiment is for obtaining the crown amount, and its configuration is different from that of the conventional profile measuring device (see FIG. 5) in that the profile calculating unit 5 includes a measuring machine difference calculating unit 51 and a calculation correcting unit. And 52 are newly provided.

【0029】図2において、固定形厚み計1は被測定物
20の中央部21を測定するため従来通り常時中央部2
1の延長線上にすなわち圧延ラインの中央に位置する。
他方、走査形厚み計2も測定前は固定形厚み計1と同じ
ように圧延ラインの中央に位置する(地点100)。
In FIG. 2, the fixed-type thickness gauge 1 always measures the central portion 21 of the object 20 to be measured, as in the conventional case.
It is located on the extension line of 1, that is, in the center of the rolling line.
On the other hand, before the measurement, the scanning type thickness gauge 2 is also located at the center of the rolling line like the fixed type thickness gauge 1 (point 100).

【0030】この状態で被測定物20が地点101に突
入すると、固定形厚み計1は被測定物20を検出し、こ
のことを固定形厚み計制御部3を介してプロフィル演算
部5に通知する。それと同時に固定形厚み計1は被測定
物20の中央部21の厚みを測定し、その測定データを
固定形厚み計制御部3を介してプロフィル演算部5の測
定機差演算部51に送信する。また走査形厚み計2も固
定形厚み計1と同様に被測定物20の中央部21の厚み
を測定し、その測定データを走査形厚み計制御部4を介
してプロフィル演算部5の測定機差演算部51に送信す
る。測定機差演算部51は、固定形厚み計1から被測定
物20を検出したとの通知を受けてから一定時間経過す
るまで、すなわち被測定物20が図2の区間dにある間
は、固定形厚み計1及び走査形厚み計2から測定データ
を受信し続ける。測定機差演算部51は、それらの測定
データを平均化して以下の式(3)に示すように固定形
厚み計1及び走査形厚み計2の測定機差dXを演算し記
憶しておく。
When the object 20 to be measured plunges into the point 101 in this state, the fixed thickness gauge 1 detects the object 20 to be measured and notifies the profile calculator 5 via the fixed thickness gauge controller 3. To do. At the same time, the fixed thickness gauge 1 measures the thickness of the central portion 21 of the DUT 20, and transmits the measurement data to the measuring machine difference calculation unit 51 of the profile calculation unit 5 via the fixed thickness gauge control unit 3. . Similarly to the fixed type thickness gauge 1, the scanning type thickness gauge 2 also measures the thickness of the central portion 21 of the object 20 to be measured, and the measured data is measured by the measuring device of the profile calculation section 5 via the scanning type thickness gauge control section 4. It is transmitted to the difference calculator 51. The measuring instrument difference calculator 51 receives a notification from the fixed thickness gauge 1 that the object 20 to be measured is detected until a predetermined time elapses, that is, while the object 20 to be measured is in the section d in FIG. The measurement data is continuously received from the fixed thickness gauge 1 and the scanning thickness gauge 2. The measuring instrument difference calculator 51 averages the measured data and calculates and stores the measuring instrument difference dX of the fixed type thickness meter 1 and the scanning type thickness meter 2 as shown in the following expression (3).

【0031】 dX = Xs − Xf (3) ここで、Xsは、走査形厚み計2の測定データを平均化
したもので、Xfの固定形厚み計1の測定データを平均
化したものである。
DX = Xs−Xf (3) Here, Xs is an average of the measurement data of the scanning thickness gauge 2, and is an average of the measurement data of the fixed thickness gauge 1 of Xf.

【0032】次にプロフィル演算部5はその一定時間が
経過した時点で(図2の地点103)、走査形厚み計制
御部4を起動し、走査形厚み計2を被測定物20のエッ
ジ部22に移動させる(地点104)。走査形厚み計2
は地点104から被測定物20のエッジ部22の厚みを
測定を開始する。固定形厚み計1は、そのまま被測定物
20の中央部21の厚みを測定し続ける。
Next, the profile calculation unit 5 activates the scanning type thickness gauge control unit 4 when the certain time has passed (point 103 in FIG. 2), and the scanning type thickness gauge 2 is moved to the edge portion of the object 20 to be measured. It is moved to 22 (point 104). Scanning thickness gauge 2
Starts measuring the thickness of the edge portion 22 of the DUT 20 from the point 104. The fixed thickness gauge 1 continues to measure the thickness of the central portion 21 of the DUT 20 as it is.

【0033】プロフィル演算部5の演算補正部52は、
走査形厚み計2による中央部21の測定データ、固定形
厚み計1によるエッジ部22の測定データ、及び先に求
めておいた測定機差演算部51の測定機差から以下の式
(4)に示すようにしてクラウン量Cを求める。
The operation correction unit 52 of the profile operation unit 5 is
From the measurement data of the central portion 21 by the scanning thickness gauge 2, the measurement data of the edge portion 22 by the fixed thickness gauge 1, and the measurement machine difference of the measurement machine difference calculator 51 obtained previously, the following equation (4) is obtained. The crown amount C is obtained as shown in.

【0034】 C = Xc − Xe − dX (4) ここで、Xcは走査形厚み計2の中央部21の測定デー
タであり、Xeは固定形厚み計1のエッジ部22の測定
データであり、dXは測定機差演算部51で求めた測定
機差である。
C = Xc−Xe−dX (4) Here, Xc is the measurement data of the central portion 21 of the scanning thickness gauge 2, Xe is the measurement data of the edge portion 22 of the fixed thickness gauge 1, dX is the measurement instrument difference calculated by the measurement instrument difference calculation unit 51.

【0035】以上のようにして求めたクラウン量Cは、
固定形厚み計1及び走査形厚み計2相互間の測定機差が
補正されているため、精度の高い値となっている。
The crown amount C obtained as described above is
Since the measuring instrument difference between the fixed type thickness meter 1 and the scanning type thickness meter 2 is corrected, the value is highly accurate.

【0036】このように、まず移動中の被測定物の同一
箇所の厚みを各厚み計に測定させて各厚み計相互間の測
定機差を求めておき、それから各厚み計に所定の箇所の
厚みを測定させ、その測定データから先に求めておいた
測定機差を補正してクラウン量を演算することによっ
て、定期的にオフライン時に測定機差を測定したりその
機差を登録したりする手間が省けかつ精度の高いクラウ
ン量Cを求めることができる。
As described above, first, the thicknesses of the same position of the moving object to be measured are measured by the respective thickness gauges to obtain the measuring instrument difference between the respective thickness gauges, and then the respective thickness gauges of the predetermined locations are measured. By measuring the thickness and correcting the previously determined measurement machine difference from the measured data and calculating the crown amount, the measurement machine difference can be measured or registered periodically when offline. It is possible to obtain the crown amount C that saves labor and has high accuracy.

【0037】本発明による別の実施例を図3及び図4を
説明する。図3は本実施例を示すブロック図であり、図
4は被測定物20が矢印方向に運ばれていく時の本実施
例の固定形厚み計1と第1及び第2の走査形厚み計2
a,2bとの走査位置を説明するためのものである。
Another embodiment according to the present invention will be described with reference to FIGS. FIG. 3 is a block diagram showing this embodiment, and FIG. 4 is a fixed thickness gauge 1 of this embodiment and the first and second scanning thickness gauges when the object to be measured 20 is conveyed in the direction of the arrow. Two
This is for explaining the scanning positions of a and 2b.

【0038】本実施例は、クラウン量とウェッジ量とを
求めるためのものであり、その構成は従来のプロフィル
測定装置(図7参照)で説明したものに比較して、プロ
フィル演算器5Aの中に新たに測定機差演算部51Aと
演算補正部52Aが備えられている。
This embodiment is for obtaining the amount of crown and the amount of wedge, and the configuration thereof is the same as that described in the conventional profile measuring device (see FIG. 7). In addition, a measuring machine difference calculation unit 51A and a calculation correction unit 52A are newly provided.

【0039】本実施例の固定形厚み計制御部3と第1及
び第2の走査形厚み計2a,2bとは、測定前は被測定
物20の中央部21の延長線上にすなわち圧延ラインの
中央(地点105)に位置している。ここに移動中の被
測定物20が突入すると(地点106)、固定形厚み計
1が被測定物20の存在を検出し、このことを固定形厚
み計制御部3を介してプロフィル演算部5Aに通知す
る。それと同時に固定形厚み計制御部3は被測定物20
の中央部21の厚みを測定し、その測定データを固定形
厚み計制御部3を介してプロフィル演算部5Aの測定機
差演算部51Aに送信する。また第1及び第2の走査形
厚み計2a,2bも、被測定物20の中央部21の厚み
を測定し、その測定データをそれぞれ第1及び第2の走
査形厚み計制御部4a,4bを介してプロフィル演算部
5Aの測定機差演算部51Aに送信する。
Before the measurement, the fixed thickness gauge control unit 3 and the first and second scanning thickness gauges 2a and 2b of the present embodiment are on the extension line of the central portion 21 of the object 20, that is, on the rolling line. It is located in the center (point 105). When the moving object 20 to be measured plunges into this (point 106), the fixed-type thickness gauge 1 detects the existence of the measured object 20, and the profile calculator 5A detects this through the fixed-type thickness gauge controller 3. To notify. At the same time, the fixed thickness gauge control unit 3 controls the measured object 20.
The thickness of the central portion 21 is measured, and the measurement data is transmitted to the measuring machine difference calculation unit 51A of the profile calculation unit 5A via the fixed thickness gauge control unit 3. The first and second scanning type thickness gauges 2a and 2b also measure the thickness of the central portion 21 of the object to be measured 20 and use the measured data as the first and second scanning type thickness gauge control units 4a and 4b, respectively. Is transmitted to the measuring instrument difference calculation unit 51A of the profile calculation unit 5A via.

【0040】プロフィル演算部5Aの測定機差演算部5
1Aは、固定形厚み計1から被測定物20を検出したと
の通知を受けてから一定時間経過するまで、すなわち被
測定物20が図4の区間dにある間は、固定形厚み計1
と第1及び第2の走査形厚み計2a,2bとから測定デ
ータを受信し続ける。プロフィル演算部5Aの測定機差
演算部51Aはこれらのデータを平均化する処理を行
い、以下の式から固定形厚み計1及び第1の走査形厚み
計2aの測定機差dX1と、固定形厚み計1及び第2の
走査形厚み計2bの測定機差dX2とを求め、記憶して
おく。
Measuring instrument difference calculator 5 of profile calculator 5A
1A is a fixed type thickness gauge 1 until a certain time elapses after receiving a notification from the fixed type thickness gauge 1 that the object 20 to be measured is detected, that is, while the measurement target 20 is in the section d of FIG.
And continues to receive the measurement data from the first and second scanning thickness gauges 2a and 2b. The measuring instrument difference computing unit 51A of the profile computing unit 5A performs a process of averaging these data, and the measuring instrument difference dX1 of the fixed type thickness gauge 1 and the first scanning type thickness gauge 2a and the fixed type thickness gauge 1 are calculated from the following equations. The measuring instrument difference dX2 between the thickness meter 1 and the second scanning thickness meter 2b is calculated and stored.

【0041】 dX1 = Xs1 − Xf (5) dX2 = Xs2 − Xf (6) ここでXs1は、第1の走査形厚み計2aの測定データ
であり、Xs2は、第2の走査形厚み計2bの測定デー
タであり、Xfは固定形厚み計1の測定データである。
DX1 = Xs1−Xf (5) dX2 = Xs2−Xf (6) where Xs1 is the measurement data of the first scanning type thickness gauge 2a, and Xs2 is the measurement data of the second scanning type thickness gauge 2b. It is measurement data, and Xf is measurement data of the fixed thickness gauge 1.

【0042】プロフィル演算部5Aは、その一定時間が
経過した時点で(図4の地点107)、第1の走査形厚
み計制御部4aを起動し、第1の走査形厚み計2aを被
測定物20のドライブサイドのエッジ23aから一定距
離内側の地点108aに移動させ、また第2の走査形厚
み計制御部4bを起動し、第2の走査形厚み計2bを被
測定物20のオペレータサイドのエッジ23bから地点
108bに移動させる。第1及び第2の走査形厚み計2
a,2bはそれぞれ地点108a,108bに移動した
後、被測定物20のエッジ部22a,22bの厚みを測
定し,それぞれの測定データXd,Xoを、第1及び第
2の走査形厚み計制御部4a,4bを介してプロフィル
演算部5Aの演算補正部52Aに送る。固定形厚み計1
は、引き続き被測定物20の中央部21の厚みを測定
し、その測定データXcを固定形厚み計制御部3を介し
てプロフィル演算部5Aの演算補正部52Aに送る。
The profile calculation unit 5A activates the first scanning type thickness gauge control unit 4a at the time when the certain time has elapsed (point 107 in FIG. 4), and measures the first scanning type thickness gauge 2a. The edge 23a of the object 20 is moved to a point 108a which is inside a certain distance from the edge 23a on the drive side, and the second scanning type thickness gauge control unit 4b is activated to move the second scanning type thickness gauge 2b to the operator side of the object 20 to be measured. From the edge 23b to the point 108b. First and second scanning thickness gauge 2
a and 2b move to the points 108a and 108b, respectively, and then measure the thickness of the edge portions 22a and 22b of the object to be measured 20, and the respective measurement data Xd and Xo are controlled by the first and second scanning thickness gauge controls. It is sent to the operation correction unit 52A of the profile operation unit 5A via the units 4a and 4b. Fixed type thickness gauge 1
Continuously measures the thickness of the central portion 21 of the object to be measured 20, and sends the measurement data Xc to the calculation correction unit 52A of the profile calculation unit 5A via the fixed thickness gauge control unit 3.

【0043】プロフィル演算部5Aの演算補正部52A
は、これらの測定データと先に求めた測定機差演算51
Aの各測定機差dX1,dX2を基に以下の式(7),
(8)に示すようにクラウン量C及びウェッジ量Wを求
める。
Calculation correction section 52A of profile calculation section 5A
Shows these measurement data and the previously calculated measuring instrument difference calculation 51.
Based on the measurement instrumental differences dX1 and dX2 of A, the following equation (7),
As shown in (8), the crown amount C and the wedge amount W are obtained.

【0044】 C=Xc−{(Xd−dX1)+(Xo−dX2)}/2 (7) W=(Xo−dX2)−(Xd−dX1) (8) 以上のようにして求めたクラウン量C及びウェッジ量W
は、固定形厚み計1と第1及び第2の走査形厚み計2
a,2bとのそれぞれの測定機差も、第1の走査形厚み
計2aと第2の走査形厚み計2bとの測定機差も補正さ
れているため、それぞれ精度の高い値となっている。
C = Xc-{(Xd-dX1) + (Xo-dX2)} / 2 (7) W = (Xo-dX2)-(Xd-dX1) (8) Crown amount obtained as described above C and wedge amount W
Is a fixed type thickness gauge 1 and a first and second scanning type thickness gauge 2
Since the measurement instrumental difference between a and 2b and the measurement instrumental difference between the first scanning type thickness gauge 2a and the second scanning type thickness gauge 2b are also corrected, they are highly accurate values. .

【0045】このように、まず移動中の被測定物の同一
箇所の厚みを各厚み計に測定させて各厚み計の測定機差
を求めておき、それから各厚み計に所定の箇所の厚みを
測定させ、その測定データから先に求めておいた測定機
差を考慮してクラウン量及びウェッジ量を求めることに
よって、定期的にオフライン時に測定機差を測定し、そ
の測定機差を登録しておく手間が省けかつ精度の高いク
ラウン量及びウェッジ量を求めることができる。
As described above, first, each thickness gauge measures the thickness of the moving object to be measured at the same location to obtain the measuring instrument difference of each thickness gauge, and then each thickness gauge determines the thickness of the predetermined location. By measuring and measuring the crown amount and wedge amount in consideration of the previously determined measurement device difference from the measurement data, the measurement device difference is regularly measured when offline, and the measurement device difference is registered. It is possible to save the labor and to obtain the crown amount and the wedge amount with high accuracy.

【0046】[0046]

【発明の効果】本発明により、被測定物のプロフィルデ
ータを正確にかつ効率的に測定しうるプロフィル測定装
置を提供することができる。
According to the present invention, it is possible to provide a profile measuring apparatus capable of accurately and efficiently measuring profile data of an object to be measured.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明によるプロフィル測定装置による一実施
例を示すブロック図。
FIG. 1 is a block diagram showing an embodiment of a profile measuring device according to the present invention.

【図2】本発明による一実施例の固定形厚み計及び走査
形厚み計の走査位置を説明するための図。
FIG. 2 is a diagram for explaining scanning positions of a fixed thickness gauge and a scanning thickness gauge according to an embodiment of the present invention.

【図3】本発明による別の実施例を示すブロック図。FIG. 3 is a block diagram showing another embodiment according to the present invention.

【図4】本発明による別の実施例の固定形厚み計と第1
及び第2の走査形厚み計との走査位置を説明するための
図。
FIG. 4 is a diagram showing a fixed type thickness gauge according to another embodiment of the present invention and a first type;
6A and 6B are views for explaining a scanning position with respect to a second scanning type thickness gauge.

【図5】従来技術によるプロフィル測定装置を示すブロ
ック図。
FIG. 5 is a block diagram showing a profile measuring device according to a conventional technique.

【図6】従来技術による固定形厚み計及び走査形厚み計
の走査位置を説明するための図。
FIG. 6 is a diagram for explaining scanning positions of a fixed thickness gauge and a scanning thickness gauge according to a conventional technique.

【図7】従来技術による別のプロフィル測定装置を示す
ブロック図。
FIG. 7 is a block diagram showing another profile measuring device according to the prior art.

【図8】従来技術による固定形厚み計と第1及び第2の
走査形厚み計との走査位置を説明するための図。
FIG. 8 is a diagram for explaining scanning positions of a fixed-type thickness gauge and first and second scanning-type thickness gauges according to a conventional technique.

【符号の説明】[Explanation of symbols]

1 固定形厚み計 2,2a,2b 走査形厚み計 3 固定形厚み計制御部 4,4a,4b 走査形厚み計制御部 5,5A プロフィル演算部 6 表示部 20 被測定物 21 被測定物の中央部 22,22a,22b 被測定物のエッジ部 23,23a,23b 被測定物のエッジ 51,51A 測定機差演算部 52,52A 演算補正部 1 Fixed type thickness gauge 2, 2a, 2b Scanning type thickness gauge 3 Fixed type thickness gauge control section 4, 4a, 4b Scanning type thickness gauge control section 5, 5A Profile calculation section 6 Display section 20 Measured object 21 Measured object Central part 22, 22a, 22b Edge part of measured object 23, 23a, 23b Edge of measured object 51, 51A Measuring machine difference calculation part 52, 52A Calculation correction part

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】被測定物の中央部の厚みを測定する第1の
厚み計と、前記被測定物のエッジ部の厚みを測定する第
2の厚み計とを有し、この第1及び第2の厚み計の測定
データに基いて前記被測定物のプロフィルを測定するプ
ロフィル測定装置において、 前記第1の厚み計及び前記第2の厚み計に一定時間の間
前記被測定物の同一箇所の厚みを測定させ、前記一定時
間経過後は前記第1の厚み計に前記被測定物の中央部の
厚みを測定させ、前記第2の厚み計に前記被測定物のエ
ッジ部の厚みを測定させるように制御する制御手段と、 前記一定時間の間に前記第1の厚み計及び第2の厚み計
によって測定された測定データから、前記第1の厚み計
及び第2の厚み計相互間の測定機差を求める測定機差演
算部と、前記一定時間経過後に前記第1の厚み計及び第
2の厚み計によって測定された測定データから前記測定
機差を補正してクラウン量を演算する演算補正部とを有
するプロフィル演算手段とを具備することを特徴とする
プロフィル測定装置。
1. A first thickness gauge for measuring the thickness of the central portion of the object to be measured, and a second thickness gauge for measuring the thickness of the edge portion of the object to be measured. In the profile measuring device for measuring the profile of the object to be measured based on the measurement data of the second thickness meter, the first thickness meter and the second thickness meter are provided with the same position of the object to be measured for a predetermined time. The thickness is measured, and after the lapse of the predetermined time, the first thickness gauge is made to measure the thickness of the central portion of the measured object, and the second thickness gauge is made to measure the thickness of the edge portion of the measured object. And control means for controlling the first thickness gauge and the second thickness gauge from the measurement data measured by the first thickness gauge and the second thickness gauge during the fixed time. A measuring machine difference calculating unit for obtaining a machine difference, and the first machine after the predetermined time has elapsed See meter and profile measuring apparatus characterized by comprising a profile calculating means and a calculation correction unit for calculating a crown amount by correcting the measuring difference from the measured measurement data by the second thickness gauge.
【請求項2】被測定物の中央部の厚みを測定する第1の
厚み計と、前記被測定物の両サイドのエッジ部の厚みを
それぞれ測定する第2及び第3の厚み計とを有し、この
第1ないし至第3の厚み計の測定データに基いて前記被
測定物のプロフィルを測定するプロフィル測定装置にお
いて、 前記第1、第2、及び第3の厚み計に前記被測定物の同
一箇所の厚みを一定時間測定させ、前記一定時間経過後
は前記第1の厚み計に前記被測定物の中央部を測定さ
せ、前記第2及び第3の厚み計に前記被測定物の両サイ
ドのエッジ部をそれぞれ測定させるように制御する制御
手段と、 前記第1、第2、及び第3の厚み計によって一定時間測
定された測定データから、前記第1の厚み計及び前記第
2の厚み計相互間の第1の測定機差と前記第1の厚み計
及び第3の厚み計相互間の第2の測定機差とを求める測
定機差演算部と、前記一定時間経過後に前記第1、第
2、及び第3の厚み計によって測定された測定データか
ら前記第1及び第2の測定機差を補正してクラウン量及
びウェッジ量を演算する演算補正部とを有するプロフィ
ル演算手段とを具備することを特徴とするプロフィル測
定装置。
2. A first thickness gauge for measuring the thickness of the central portion of the object to be measured, and second and third thickness gauges for measuring the thickness of the edge portions on both sides of the object to be measured. In the profile measuring device for measuring the profile of the object to be measured based on the measurement data of the first to third thickness gauges, the object to be measured is added to the first, second, and third thickness gauges. The thickness of the same place is measured for a certain period of time, and after the lapse of the certain period of time, the first thickness meter is made to measure the central portion of the measured object, and the second and third thickness meters are measured of the measured object. Control means for controlling to measure the edge portions on both sides respectively, and the first thickness gauge and the second thickness gauge based on the measurement data measured for a certain time by the first, second and third thickness gauges. Measuring instrument difference between the thickness gauges and the first thickness gauge A measuring instrument difference calculation unit that obtains a second measuring instrument difference between the third thickness gauges, and the measurement data measured by the first, second, and third thickness gauges after the elapse of the certain time. A profile measuring device comprising: a profile calculating unit having a calculation correcting unit that calculates a crown amount and a wedge amount by correcting a difference between a first measuring instrument and a second measuring instrument.
JP26415794A 1994-10-27 1994-10-27 Profile measuring device Pending JPH08122052A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26415794A JPH08122052A (en) 1994-10-27 1994-10-27 Profile measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26415794A JPH08122052A (en) 1994-10-27 1994-10-27 Profile measuring device

Publications (1)

Publication Number Publication Date
JPH08122052A true JPH08122052A (en) 1996-05-17

Family

ID=17399260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26415794A Pending JPH08122052A (en) 1994-10-27 1994-10-27 Profile measuring device

Country Status (1)

Country Link
JP (1) JPH08122052A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006153837A (en) * 2004-10-29 2006-06-15 Hitachi High-Technologies Corp Scanning electron microscope, pattern measurement method using the same, and machine difference correction apparatus for scanning electron microscope
CN102589392A (en) * 2012-02-17 2012-07-18 哈尔滨建成集团有限公司 Device and method for detecting zero position of output shaft of electric steering engine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006153837A (en) * 2004-10-29 2006-06-15 Hitachi High-Technologies Corp Scanning electron microscope, pattern measurement method using the same, and machine difference correction apparatus for scanning electron microscope
CN102589392A (en) * 2012-02-17 2012-07-18 哈尔滨建成集团有限公司 Device and method for detecting zero position of output shaft of electric steering engine

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