JPH08262140A - Beam tilt mechanism for laser radar and laser device using the tilt mechanism - Google Patents

Beam tilt mechanism for laser radar and laser device using the tilt mechanism

Info

Publication number
JPH08262140A
JPH08262140A JP7060192A JP6019295A JPH08262140A JP H08262140 A JPH08262140 A JP H08262140A JP 7060192 A JP7060192 A JP 7060192A JP 6019295 A JP6019295 A JP 6019295A JP H08262140 A JPH08262140 A JP H08262140A
Authority
JP
Japan
Prior art keywords
mirror support
spherical
box
cavity
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP7060192A
Other languages
Japanese (ja)
Inventor
Ryoichi Chokai
良一 鳥海
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Gas Co Ltd
Original Assignee
Tokyo Gas Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Gas Co Ltd filed Critical Tokyo Gas Co Ltd
Priority to JP7060192A priority Critical patent/JPH08262140A/en
Publication of JPH08262140A publication Critical patent/JPH08262140A/en
Withdrawn legal-status Critical Current

Links

Landscapes

  • Optical Radar Systems And Details Thereof (AREA)

Abstract

(57)【要約】 (修正有) 【目的】広範囲の測定対象気体に放射され、そこから戻
ってくる散乱光を望遠鏡により効果的に集光できるレー
ザ光線あおり機構を提供する。 【構成】上部を開放したほぼ正方形の空洞部13の底部
中央には球状へこみ11があり、空洞内壁の上方部分に
雌ねじ12が切られた凹状円弧部を形成する函体10が
あり、この中にレーザ光線あおり用ミラー25を取り付
けるミラー支持部21とこれに接続する球状部23とを
備えて、底部球状へこみ11に滑り嵌合し、球状部23
を支点にしてミラー支持部が首振り揺動するように構成
されたミラー支持体20がある。さらに、外周側面に函
体の雌ねじ12と嵌合する雄ねじを有し、中央にミラー
支持体20用の孔32を有するリング状締付け部材30
と、同様にミラー支持体20用の孔41を有し、函体1
0の空洞部13に微小な間隙を隔てて嵌合できる形状を
有する四角形の押圧板40とを包含する。
(57) [Summary] (Modified) [Purpose] To provide a laser beam tilting mechanism that can effectively collect scattered light emitted from a wide range of measurement target gas and returning from it with a telescope. [Structure] There is a spherical indentation 11 at the center of the bottom of an approximately square cavity 13 having an open top, and a box body 10 forming a concave arc portion with an internal thread 12 at the upper part of the inner wall of the cavity. Is provided with a mirror support portion 21 to which the laser beam tilting mirror 25 is attached and a spherical portion 23 connected to the mirror support portion 21. The spherical portion 23 is slidably fitted into the bottom spherical recess 11.
There is a mirror support body 20 configured such that the mirror support part swings and swings about the fulcrum. Further, a ring-shaped tightening member 30 having a male screw for fitting with the female screw 12 of the box on the outer peripheral side surface and having a hole 32 for the mirror support 20 in the center.
Similarly, it has a hole 41 for the mirror support body 20, and
It includes a rectangular pressing plate 40 having a shape capable of being fitted in the hollow portion 13 of 0 with a minute gap.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はレーザレーダ用光線あお
り機構および該あおり機構を使用したレーザ装置に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a beam tilting mechanism for a laser radar and a laser device using the tilting mechanism.

【0002】[0002]

【従来の技術】近年、環境汚染の問題が大きく取り上げ
られているが、中でも大気汚染は大きなテーマとなって
いる。窒素酸化物や硫黄酸化物は汚染気体の中でも特に
重要なものであり、従来これらの汚染気体や特定の重要
な注目気体の濃度を測定するためにレーザレーダが用い
られている。
2. Description of the Related Art Recently, the problem of environmental pollution has been widely taken up, but air pollution has become a major theme. Nitrogen oxides and sulfur oxides are particularly important among pollutant gases, and laser radars have conventionally been used to measure the concentrations of these pollutant gases and particular important gases of interest.

【0003】図6はレーザレーダによる気体の濃度測定
方法を説明する図である。
FIG. 6 is a diagram for explaining a gas concentration measuring method using a laser radar.

【0004】レーザレーダによる気体の濃度測定は、レ
ーザ光線を用いて測定対象気体が顕著に吸収する波長の
レーザ光線を発生せしめ、気体によるレーザ光線の吸収
度合いを光検出器などにより検出して気体の濃度を測定
するものであり、このために測定対象気体7に吸収され
る固有の波長のレーザ光線6を発生するレーザ装置9が
用いられる。レーザレーダでは、レーザ光線6を測定対
象気体7に向けて放射し、戻ってくる微弱な光を大口径
の望遠鏡5で集光し、気体による吸収度合いを検出して
ガス濃度を求めている。この際、レーザ光線6の放射方
向Yを望遠鏡5の視野8と重ねなければならない。この
望遠鏡5の視野8にレーザ光線6が入らないと測定対象
気体7の散乱光は検出できない。そこで、レーザ光線6
の放射方向を望遠鏡5の視野8の方向と一致させるよう
レーザ光線6の方向をミラーであおって調整する。これ
をレーザ光線のあおり機構と称している。このあおりは
望遠鏡5の視野8にレーザ光線6が入るよう調整する
が、その際は肉眼によるか、またはオシロコープを使用
している。
When measuring the concentration of a gas by a laser radar, a laser beam is used to generate a laser beam having a wavelength that is significantly absorbed by the gas to be measured, and the degree of absorption of the laser beam by the gas is detected by a photodetector or the like. Is measured, and for this purpose, a laser device 9 for generating a laser beam 6 having a unique wavelength that is absorbed by the measurement target gas 7 is used. In the laser radar, the laser beam 6 is radiated toward the measurement target gas 7, the returning weak light is condensed by the large-diameter telescope 5, and the degree of absorption by the gas is detected to obtain the gas concentration. At this time, the emission direction Y of the laser beam 6 must overlap the field of view 8 of the telescope 5. The scattered light of the measurement target gas 7 cannot be detected unless the laser beam 6 enters the field of view 8 of the telescope 5. Therefore, the laser beam 6
The direction of the laser beam 6 is adjusted by a mirror so that the emission direction of the laser beam coincides with the direction of the field of view 8 of the telescope 5. This is called a laser beam tilt mechanism. This tilt is adjusted so that the laser beam 6 enters the field of view 8 of the telescope 5, in which case it is visible to the eye or using an oscilloscope.

【0005】[0005]

【発明が解決しようとする課題】従来、この方式による
ガス濃度の測定において、望遠鏡とレーザ光線との位置
関係は固定していた。そのため1方向のみの測定につい
てはある程度の濃度測定効果を得ることができるが、二
次元や三次元の拡がりを測定したい場合には正確な濃度
測定はできなかった。そこで、鏡筒の回転軸にレーザ光
線6の光軸を一致させ、望遠鏡5とレーザ光線6の両方
を同期移動させるクーデ方式のレーザレーダが使用され
るようになった。しかしながら、このクーデ方式のレー
ザレーダを使用する際に望遠鏡5とレーザ光線6を正確
に追随移動させるよう両者の配置を任意に調整する実用
的手段がこれまで存在しなかった。
Conventionally, in the measurement of gas concentration by this method, the positional relationship between the telescope and the laser beam has been fixed. Therefore, although the concentration measurement effect can be obtained to some extent in the measurement in only one direction, accurate concentration measurement cannot be performed when it is desired to measure the two-dimensional or three-dimensional spread. Therefore, a coude laser radar has been used in which the optical axis of the laser beam 6 is aligned with the rotation axis of the lens barrel and both the telescope 5 and the laser beam 6 are synchronously moved. However, there has not been a practical means for arbitrarily adjusting the positions of the telescope 5 and the laser beam 6 so that the telescope 5 and the laser beam 6 can be accurately moved when using the laser radar of the coude system.

【0006】従来使用されていたレーザ光線のあおり機
構は2枚の板の間に1個の球を介在して常に1個所だけ
は両板の間隔を一定に保ち、片方の板の外側にミラーを
固定し、2枚の板の間隔を2本のビスとスプリングによ
り調節してレーザ光線をあおるように構成していた。こ
の従来の方式はあおりの範囲が狭く、且つ2本のビスで
調節するため時間がかかる欠点があった。
The laser beam tilting mechanism that has been used in the past has one sphere between two plates and always keeps the distance between both plates constant at only one place, and fixes the mirror to the outside of one plate. However, the distance between the two plates is adjusted by two screws and springs so as to irradiate the laser beam. This conventional method has a drawback that the tilt range is narrow and it takes time to adjust with two screws.

【0007】本発明は上述の点に鑑みてなされたもの
で、クーデ方式のレーザレーダにおいて、望遠鏡とレー
ザ光線を正確に追随移動させるよう両者の配置を迅速に
且つ正確に調整することができ、もって二次元や三次元
の拡がりを有する広範囲の測定対象気体に向かって放射
され、そこから戻ってくる微弱な散乱光を望遠鏡により
効果的に集光することができるようにするためのレーザ
光線あおり機構およびこれを使用したレーザ装置を提供
することを目的とする。
The present invention has been made in view of the above points, and in a coup type laser radar, the positions of the telescope and the laser beam can be swiftly and accurately adjusted so that the telescope and the laser beam are moved accurately. The laser beam tilts so that the weak scattered light that is emitted toward a wide range of measurement target gas having a two-dimensional or three-dimensional spread, and that returns from it can be effectively collected by a telescope. An object of the present invention is to provide a mechanism and a laser device using the same.

【0008】[0008]

【課題を解決するための手段】上記課題を解決するた
め、本発明は上部を開放したほぼ正方形の空洞部を有
し、該空洞部の底部中央に球状へこみを備え、該空洞部
の内壁の上方部分に一連の雌ねじを有する凹状円弧部が
形成されている函体と、レーザ光線あおり用ミラーを取
り付けるミラー支持部と該ミラー支持部に接続する球状
部とを備え、前記球状部が前記函体空洞部の底部球状へ
こみに滑り嵌合する球面を有し、該球状部を支点にして
前記ミラー支持部が首振り揺動するようになったミラー
支持体と、前記函体の空洞部の一辺より長い直径を有
し、外周側面に前記函体の凹状円弧部の雌ねじと嵌合す
る雄ねじを有し、中央に前記ミラー支持体の上部を突出
させる孔を有するリング状締付け部材と、中央に前記ミ
ラー支持体の上部を突出させる孔を有し、前記函体の空
洞部に微小な間隙を隔てて嵌合して上下動できるできる
形状を有し、前記函体の空洞部内において前記締付け部
材と前記ミラー支持体の球状部との間に介在される四角
形の押圧板と、を包含することを特徴とする。
In order to solve the above-mentioned problems, the present invention has a cavity having a substantially square shape with an open top, and a spherical recess is provided at the center of the bottom of the cavity, and an inner wall of the cavity is formed. A box body in which a concave arc portion having a series of internal threads is formed in an upper portion, a mirror support portion for mounting a laser beam tilting mirror, and a spherical portion connected to the mirror support portion, the spherical portion being the box. A mirror support having a spherical surface that is slidably fitted in a spherical recess on the bottom of the body cavity, and the mirror support is configured to swing and swing about the spherical part; and a cavity of the box. A ring-shaped tightening member having a diameter longer than one side, an external thread on the outer peripheral side that fits with the internal thread of the concave arc portion of the box, and a hole in the center that projects the upper part of the mirror support, Projecting the top of the mirror support Has a hole that allows it to be fitted into the cavity of the box with a minute gap and can move up and down, and the tightening member and the spherical portion of the mirror support in the cavity of the box. And a quadrangle pressing plate interposed between and.

【0009】[0009]

【作用】本発明の光線あおり機構により、望遠鏡の横方
向および縦方向の回転軸とレーザ光線の光軸を正確に且
つ簡便に一致させることができ、さらに測定対象の36
0度中の好きな方向にレーザ光線方向を合わせることが
できるので、望遠鏡の視野とレーザ光線の出射方向がぴ
ったりと重なり、ガス濃度測定に必要な散乱光強度の収
集が可能となり、また、望遠鏡がレーザ光線に同期して
追随移動する。
With the beam tilting mechanism of the present invention, the horizontal and vertical rotation axes of the telescope and the optical axis of the laser beam can be accurately and easily aligned with each other.
Since the laser beam direction can be adjusted to any direction in 0 degree, the field of view of the telescope and the emitting direction of the laser beam are exactly overlapped, and it becomes possible to collect the scattered light intensity necessary for gas concentration measurement. Moves in synchronism with the laser beam.

【0010】[0010]

【実施例】本発明を図面に基づいて説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described with reference to the drawings.

【0011】図1は本発明にかかるレーザレーダ用光線
あおり機構の平面図、図2は図1のII−II線上断面矢視
図、図3は図2のIII−III線上断面矢視図である。
FIG. 1 is a plan view of a beam tilting mechanism for a laser radar according to the present invention, FIG. 2 is a sectional view taken along the line II--II of FIG. 1, and FIG. 3 is a sectional view taken along the line III--III of FIG. is there.

【0012】本発明にかかるレーザレーダ用光線あおり
機構の主要な構成部材は函体10、ミラー支持体20、
締付け部材30および押圧板40である。函体10は内
部に上部を開放したほぼ正方形の空洞部13を有し、こ
の空洞部13の底部中央に球状へこみ11を備え、空洞
部13の四つの内周壁の上方部分に4個の凹状円弧部A
が形成されている。これら4個の凹状円弧部Aに一連の
雌ねじ12が刻まれている。
The main components of the beam tilting mechanism for laser radar according to the present invention are a box 10, a mirror support 20,
The tightening member 30 and the pressing plate 40. The box body 10 has a substantially square hollow portion 13 with an open top, a spherical recess 11 at the center of the bottom of the hollow portion 13, and four concave portions at the upper portions of the four inner peripheral walls of the hollow portion 13. Arc part A
Are formed. A series of internal threads 12 are engraved on these four concave arc portions A.

【0013】ミラー支持体20は最上部のミラー支持部
21、このミラー支持部21の下に接続する細い柄部2
2および柄部22の下に接続する球状部23から構成さ
れている。ミラー支持部21の頂面24はミラー支持体
20の長手方向中心軸線に対し45度の角度に形成され
ており、この頂面24にミラー25が接着剤により取り
付けられる。球状部23は函体10の空洞部13に収容
できる直径を有し、かつ空洞部13の底部中央に設けた
球状へこみ11に滑り嵌合する球面を有している。球状
部23を球状へこみ11に嵌合させたミラー支持体20
は図1に矢印Bで示すように球状へこみ11を支点にし
て首振り揺動することができる。ミラー支持体20の揺
動角度は後述する締付け部材30の孔32、押圧板40
の孔41等の製作寸法を変えることにより調節すること
ができる。
The mirror support 20 comprises an uppermost mirror support 21 and a thin handle 2 connected below the mirror support 21.
2 and a spherical portion 23 connected below the handle 22. The top surface 24 of the mirror support portion 21 is formed at an angle of 45 degrees with respect to the central axis of the mirror support body 20 in the longitudinal direction, and the mirror 25 is attached to the top surface 24 with an adhesive. The spherical portion 23 has a diameter that can be accommodated in the hollow portion 13 of the box body 10 and has a spherical surface that is slidably fitted into the spherical recess 11 provided at the center of the bottom portion of the hollow portion 13. Mirror support 20 in which spherical portion 23 is fitted into spherical recess 11
Can swing and swing around the spherical recess 11 as a fulcrum as shown by an arrow B in FIG. The swing angle of the mirror support 20 is determined by the holes 32 of the tightening member 30 and the pressing plate 40, which will be described later.
It can be adjusted by changing the manufacturing dimensions of the holes 41 and the like.

【0014】締付け部材30は函体10の空洞部13の
一辺より長い直径を有し、中央に孔32を有し、外周面
に雄ねじを有するリングであり、この締付け部材30は
函体10の凹状円弧部Aに設けた一連の雌ねじ12に嵌
合することができる。孔32からミラー支持体20の上
部を突出させることができる。この締付け部材30の上
面に適当数の小孔31があけられている。この小孔31
は締付け部材30を函体10に嵌めたり外したりするた
めの治具(図示せず)の挿入孔である。
The tightening member 30 is a ring having a diameter longer than one side of the cavity 13 of the box 10, a hole 32 in the center, and a male screw on the outer peripheral surface. It is possible to fit a series of internal threads 12 provided on the concave arc portion A. The upper part of the mirror support 20 can be projected from the hole 32. An appropriate number of small holes 31 are formed on the upper surface of the tightening member 30. This small hole 31
Is an insertion hole of a jig (not shown) for fitting and removing the fastening member 30 in the box 10.

【0015】押圧板40は函体10の空洞部13に微小
な間隙を隔てて嵌合してスムースに上下動できる四角形
の板であり、中央に孔41を有し、この孔41からミラ
ー支持体20の上部を突出させることができる。図2に
示すように、押圧板40は函体10の空洞部13の内部
において締付け部材30と、ミラー支持体20の球状部
23との間に介在される。したがって、締付け部材30
を函体10の凹状円弧部Aに設けた雌ねじ12に嵌合さ
せて回転させれば、押圧板40は下降してミラー支持体
20の球状部23を下方向に押しつけ、その結果ミラー
支持体20は位置が狂わないようになる。押圧板40が
矢印C方向に下降するとき、押圧板40の4隅の角部4
2は函体10の空洞部13の4隅の角部内を下降し、回
転できないようになっている。このため、押圧板40が
矢印C方向にミラー支持体20の球状部23を下方向に
押しつけるとき、ミラー支持体20はその固定位置をず
らすことがなく、その結果、ミラー支持体20の最上部
に取り付けられたミラーは振動せず、あおり調整が狂わ
ない効果がある。
The pressing plate 40 is a quadrangular plate that fits in the cavity 13 of the box 10 with a minute gap and can move up and down smoothly, and has a hole 41 in the center, and a mirror support is provided from this hole 41. The upper part of the body 20 can be projected. As shown in FIG. 2, the pressing plate 40 is interposed between the tightening member 30 and the spherical portion 23 of the mirror support 20 inside the cavity 13 of the box 10. Therefore, the tightening member 30
Is fitted to the female screw 12 provided on the concave arc portion A of the box 10 and rotated, the pressing plate 40 descends to press the spherical portion 23 of the mirror support 20 downward, and as a result, the mirror support 20 will not get out of position. When the pressing plate 40 descends in the direction of arrow C, the four corners 4 of the pressing plate 40 are
No. 2 descends inside the four corners of the cavity 13 of the box 10 and cannot rotate. Therefore, when the pressing plate 40 pushes the spherical portion 23 of the mirror support 20 downward in the direction of the arrow C, the mirror support 20 does not shift its fixed position, and as a result, the uppermost part of the mirror support 20. The mirror attached to the will not vibrate, and will have the effect of keeping the tilt adjustments correct.

【0016】図4は本発明の光線あおり機構を使用した
レーザレーダの概略構成を示す斜視図、図5は図4のレ
ーザレーダのクーデ方式望遠鏡の作動原理を説明する図
である。
FIG. 4 is a perspective view showing a schematic structure of a laser radar using the light beam tilting mechanism of the present invention, and FIG. 5 is a view for explaining the operating principle of the Coude system telescope of the laser radar of FIG.

【0017】図4および図5のレーザレーダはクーデ方
式のレーザレーダであり、三脚に支持された架台1の上
面に水平回転台2が垂直軸線V−Vを中心にして回転自
在に取り付けられ、水平回転台2の左右の上向き突起3
に左右の砲耳4が水平軸線H−Hを中心にして俯仰でき
るように取り付けられ、これらの砲耳4に大口径の望遠
鏡5が固定されている。望遠鏡5の光軸X−Xは水平回
転台2の垂直軸線V−Vおよび砲耳4の水平軸線H−H
を通る。
The laser radar of FIGS. 4 and 5 is a coup type laser radar, in which a horizontal rotary table 2 is rotatably mounted on a top surface of a pedestal 1 supported by a tripod about a vertical axis V--V. Left and right upward protrusions 3 of the horizontal turntable 2
The left and right gun ears 4 are attached so as to be able to raise and lower about a horizontal axis H-H, and a large-diameter telescope 5 is fixed to these gun ears 4. The optical axis X-X of the telescope 5 is the vertical axis V-V of the horizontal turntable 2 and the horizontal axis H-H of the gun ear 4.
Pass through.

【0018】架台1に取り付けられたブラケットB1、
水平回転台2に取り付けられたブラケットB2、片方の
上向き突起3に取り付けられたブラケットB3およびブ
ラケットB4、砲耳4に取り付けられたB5のそれぞれ
に、頂面にミラーM1、M2、M3、M4、M5をそれ
ぞれ貼付た本発明の光線あおり機構(図4、5にはミラ
ー以外は図示せず)が1個ずつ固定されている。
A bracket B1 attached to the mount 1,
Each of the bracket B2 attached to the horizontal rotary table 2, the bracket B3 and the bracket B4 attached to one of the upward protrusions 3, and the B5 attached to the gun ear 4 has mirrors M1, M2, M3, M4 on the top surface. The light beam tilting mechanism (not shown in FIGS. 4 and 5 except the mirror) of the present invention to which M5 is attached is fixed one by one.

【0019】本発明の光線あおり機構の操作にあたり、
各あおり機構の締付け部材30を治具により緩め、それ
ぞれのミラー支持体20を首振り揺動させ、それらの傾
きを加減してミラーをあおることにより、最終的に望遠
鏡5の視野8にレーザ光線6が入るように調整し(図6
参照)、その位置で締付け部材30を締め付けて、あお
り操作を終了する。このようなあおり操作は従来のあお
り機構の操作に比べ、短時間に正確に調整することがで
き、且つあおりの範囲も広いことが特徴である。
In operating the beam tilting mechanism of the present invention,
The tightening member 30 of each tilting mechanism is loosened by a jig, the respective mirror support bodies 20 are swung and swung, and the tilts thereof are adjusted to lift the mirrors, so that the laser beam finally reaches the field of view 8 of the telescope 5. 6 so that it fits in (Fig. 6
), The tightening member 30 is tightened at that position, and the tilting operation is completed. Such a tilting operation is characterized in that it can be adjusted accurately in a short time and has a wide range of tilting as compared with the operation of a conventional tilting mechanism.

【0020】光源から放射されたレーザ光線6が矢印D
方向に水平にM1に入射し且つ矢印E方向に垂直に反射
されてM2に入射する。M2にて反射されたレーザ光線
6が矢印F方向に水平にM3に入射し反射されて矢印G
方向に垂直にM4に入射する。さらにM4で反射されて
矢印H方向に水平にM5に入射し、ここで反射されて矢
印Y方向に測定対象気体7に向かって放射され、そこか
ら戻ってくる微弱な散乱光が望遠鏡5のミラーにより集
光される(図6参照)。
The laser beam 6 emitted from the light source is indicated by an arrow D.
The light is incident on M1 in the horizontal direction, and is reflected perpendicularly in the direction of arrow E to enter M2. The laser beam 6 reflected by M2 is horizontally incident on M3 in the direction of arrow F and reflected by arrow G
It is incident on M4 perpendicular to the direction. Further, it is reflected by M4 and is incident horizontally on the M5 in the direction of the arrow H, is reflected here and is emitted toward the measurement target gas 7 in the direction of the arrow Y, and the weak scattered light returning therefrom is the mirror of the telescope 5. The light is collected by (see FIG. 6).

【0021】望遠鏡5の中のミラーにより集光されたレ
ーザ光線は光電子増倍管により検出され、電圧に変換
し、必要に応じアンプにより信号を増幅してAD変換器
に入れ、デジタル信号に直して、パソコンに転送して波
形を得る。
The laser beam focused by the mirror in the telescope 5 is detected by the photomultiplier tube, converted into a voltage, amplified by an amplifier if necessary and put into an AD converter to be converted into a digital signal. And transfer it to a computer to get the waveform.

【0022】[0022]

【発明の効果】以上説明したように本発明のレーザレー
ダ用光線あおり機構は、底部中央に球状へこみを備え空
洞部の内壁の上方部分に一連の雌ねじを形成した函体
と、レーザ光線あおり用ミラーを取り付けるミラー支持
部と函体空洞部の底部球状へこみに滑り嵌合する球状部
とを備えたミラー支持体と、外周側面に前記函体の凹状
円弧部の雌ねじと嵌合する雄ねじを有するリング状締付
け部材と、前記函体の空洞部に微小な間隙を隔てて嵌合
して上下動でき前記締付け部材と前記ミラー支持体の球
状部との間で固定される押圧板とを具備しているので、
従来のビスを使った光線あおり機構に比べ、短時間に調
整することができ、またあおりの範囲も広いので望遠鏡
の横方向および縦方向の回転軸とレーザ光線の光軸を正
確に且つ簡便に一致させることができ、さらに測定対象
の360度中の好きな方向のレーザ光線方向を合わせる
ことができるので、望遠鏡の視野とレーザ光線の出る方
向がぴったりと重なり、ガス濃度に必要な散乱光強度の
収集が可能である。また、望遠鏡をレーザ光線に同期し
て追随移動させることができる。
As described above, the beam tilting mechanism for a laser radar according to the present invention includes a box body having a spherical recess at the center of the bottom and a series of internal threads formed on the upper part of the inner wall of the cavity, and a beam tilting device for laser beam. A mirror support having a mirror support for mounting a mirror and a spherical part that slides into a spherical recess on the bottom of the box cavity, and an external thread on the outer peripheral surface that fits with the internal thread of the concave arc of the box. A ring-shaped tightening member; and a pressing plate that fits in the cavity of the box with a minute gap and can move up and down and is fixed between the tightening member and the spherical portion of the mirror support. Because
Compared to the conventional beam tilt mechanism that uses screws, it can be adjusted in a shorter time and the tilt range is wider, so the horizontal and vertical rotation axes of the telescope and the optical axis of the laser beam can be accurately and easily Since it can be matched and the laser beam direction of 360 degrees of the measurement target can be matched, the field of view of the telescope and the exit direction of the laser beam exactly overlap, and the scattered light intensity required for gas concentration Can be collected. In addition, the telescope can be moved in synchronization with the laser beam.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明にかかるレーザレーダ用光線あおり機構
の平面図である。
FIG. 1 is a plan view of a beam tilting mechanism for a laser radar according to the present invention.

【図2】図1のII−II線上断面矢視図である。FIG. 2 is a sectional view taken along the line II-II of FIG.

【図3】図2のIII−III線上断面矢視図である。3 is a cross-sectional view taken along the line III-III of FIG.

【図4】本発明の光線あおり機構を使用したレーザレー
ダの概略構成を示す斜視図である。
FIG. 4 is a perspective view showing a schematic configuration of a laser radar using the light beam tilting mechanism of the present invention.

【図5】図4のレーザレーダのクーデ方式望遠鏡の作動
原理を説明する図である。
5A and 5B are diagrams for explaining the operating principle of the coupé-type telescope of the laser radar of FIG.

【図6】レーザレーダによる気体の濃度測定方法を説明
する図である。
FIG. 6 is a diagram illustrating a gas concentration measuring method using a laser radar.

【符号の説明】[Explanation of symbols]

1 架台 2 水平回転台 3 上向き突起 4 砲耳 5 望遠鏡 6 レーザ光線 7 測定対象気体 8 望遠鏡の視野 9 レーザ装置 10 函体 11 球状へこみ 12 雌ねじ 13 空洞部 20 ミラー支持体 21 ミラー支持部 22 柄部 23 球状部 24 頂面 25 ミラー 30 締付け部材 31 治工具嵌合孔 32 孔 40 押圧板 41 孔 42 角部 A 凹状円弧部 DESCRIPTION OF SYMBOLS 1 Frame 2 Horizontal rotary table 3 Upward protrusion 4 Gun ear 5 Telescope 6 Laser beam 7 Gas to be measured 8 Field of view of telescope 9 Laser device 10 Box body 11 Spherical dent 12 Female screw 13 Cavity 20 Mirror support 21 Mirror support 22 Handle 23 spherical portion 24 top surface 25 mirror 30 tightening member 31 jig fitting hole 32 hole 40 pressing plate 41 hole 42 corner portion A concave arc portion

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 レーザレーダにより気体の濃度を測定す
る際に該気体中に放射するレーザ光線をあおる機構にお
いて、 上部を開放したほぼ正方形の空洞部を有し、該空洞部の
底部中央に球状へこみを備え、該空洞部の内壁の上方部
分に一連の雌ねじを有する凹状円弧部が形成されている
函体と、 レーザ光線あおり用ミラーを取り付けるミラー支持部と
該ミラー支持部に接続する球状部とを備え、前記球状部
が前記函体空洞部の底部球状へこみに滑り嵌合する球面
を有し、該球面に嵌合した球状部を支点にして前記ミラ
ー支持部が首振り揺動できるようになったミラー支持体
と、 前記函体の空洞部の一辺より長い直径を有し、外周側面
に前記函体の凹状円弧部Aの雌ねじと嵌合する雄ねじを
有し、中央に前記ミラー支持体の上部を突出させる孔を
有するリング状締付け部材と、 中央に前記ミラー支持体の上部を突出させる孔を有し、
前記函体の空洞部に微小な間隙を隔てて嵌合して上下動
できる形状を有し、前記函体の空洞部内において前記締
付け部材と前記ミラー支持体の球状部との間に介在され
る四角形の押圧板と、 を包含することを特徴とするレーザレーダ用光線あおり
機構。
1. A mechanism for irradiating a laser beam radiated into a gas when measuring a gas concentration by a laser radar, which has a substantially square hollow portion with an open upper portion, and a spherical shape at the center of the bottom portion of the hollow portion. A box body having a recess and a concave arc portion having a series of internal threads formed in an upper portion of an inner wall of the cavity portion; a mirror support portion for mounting a laser beam tilting mirror; and a spherical portion connected to the mirror support portion. And the spherical portion has a spherical surface that is slidably fitted in the spherical concave portion at the bottom of the box cavity, and the spherical portion fitted to the spherical surface serves as a fulcrum so that the mirror support portion can swing and swing. Has a longer diameter than one side of the cavity of the box, has an external thread on the outer peripheral side that fits into the internal thread of the concave arc portion A of the box, and has the mirror support in the center. A hole that projects the upper part of the body A ring-shaped tightening member having, and a hole for projecting the upper part of the mirror support in the center,
It has such a shape that it can fit in the cavity of the box with a minute gap and can move up and down, and is interposed between the tightening member and the spherical portion of the mirror support in the cavity of the box. A light beam tilting mechanism for a laser radar, which includes a rectangular pressing plate.
【請求項2】 請求項1に記載のレーザレーダ用光線あ
おり機構を使用したことを特徴とするレーザ装置。
2. A laser device using the beam tilting mechanism for a laser radar according to claim 1.
JP7060192A 1995-03-20 1995-03-20 Beam tilt mechanism for laser radar and laser device using the tilt mechanism Withdrawn JPH08262140A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7060192A JPH08262140A (en) 1995-03-20 1995-03-20 Beam tilt mechanism for laser radar and laser device using the tilt mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7060192A JPH08262140A (en) 1995-03-20 1995-03-20 Beam tilt mechanism for laser radar and laser device using the tilt mechanism

Publications (1)

Publication Number Publication Date
JPH08262140A true JPH08262140A (en) 1996-10-11

Family

ID=13135057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7060192A Withdrawn JPH08262140A (en) 1995-03-20 1995-03-20 Beam tilt mechanism for laser radar and laser device using the tilt mechanism

Country Status (1)

Country Link
JP (1) JPH08262140A (en)

Cited By (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013508695A (en) * 2009-11-20 2013-03-07 ファロ テクノロジーズ インコーポレーテッド Equipment for optically scanning and measuring the environment
US8625106B2 (en) 2009-07-22 2014-01-07 Faro Technologies, Inc. Method for optically scanning and measuring an object
US8699007B2 (en) 2010-07-26 2014-04-15 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US8705016B2 (en) 2009-11-20 2014-04-22 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US8705012B2 (en) 2010-07-26 2014-04-22 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US8719474B2 (en) 2009-02-13 2014-05-06 Faro Technologies, Inc. Interface for communication between internal and external devices
US8730477B2 (en) 2010-07-26 2014-05-20 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US8830485B2 (en) 2012-08-17 2014-09-09 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US8896819B2 (en) 2009-11-20 2014-11-25 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US8997362B2 (en) 2012-07-17 2015-04-07 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine with optical communications bus
US9009000B2 (en) 2010-01-20 2015-04-14 Faro Technologies, Inc. Method for evaluating mounting stability of articulated arm coordinate measurement machine using inclinometers
US9074883B2 (en) 2009-03-25 2015-07-07 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US9113023B2 (en) 2009-11-20 2015-08-18 Faro Technologies, Inc. Three-dimensional scanner with spectroscopic energy detector
US9163922B2 (en) 2010-01-20 2015-10-20 Faro Technologies, Inc. Coordinate measurement machine with distance meter and camera to determine dimensions within camera images
US9168654B2 (en) 2010-11-16 2015-10-27 Faro Technologies, Inc. Coordinate measuring machines with dual layer arm
US9210288B2 (en) 2009-11-20 2015-12-08 Faro Technologies, Inc. Three-dimensional scanner with dichroic beam splitters to capture a variety of signals
USRE45854E1 (en) 2006-07-03 2016-01-19 Faro Technologies, Inc. Method and an apparatus for capturing three-dimensional data of an area of space
US9329271B2 (en) 2010-05-10 2016-05-03 Faro Technologies, Inc. Method for optically scanning and measuring an environment
US9372265B2 (en) 2012-10-05 2016-06-21 Faro Technologies, Inc. Intermediate two-dimensional scanning with a three-dimensional scanner to speed registration
US9417056B2 (en) 2012-01-25 2016-08-16 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US9513107B2 (en) 2012-10-05 2016-12-06 Faro Technologies, Inc. Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner
US9529083B2 (en) 2009-11-20 2016-12-27 Faro Technologies, Inc. Three-dimensional scanner with enhanced spectroscopic energy detector
US9551575B2 (en) 2009-03-25 2017-01-24 Faro Technologies, Inc. Laser scanner having a multi-color light source and real-time color receiver
US9607239B2 (en) 2010-01-20 2017-03-28 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US9628775B2 (en) 2010-01-20 2017-04-18 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US10067231B2 (en) 2012-10-05 2018-09-04 Faro Technologies, Inc. Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner
US10175037B2 (en) 2015-12-27 2019-01-08 Faro Technologies, Inc. 3-D measuring device with battery pack
US10281259B2 (en) 2010-01-20 2019-05-07 Faro Technologies, Inc. Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features
CN115805364A (en) * 2022-12-12 2023-03-17 江苏开璇智能科技有限公司 Laser cutting double-swing head

Cited By (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE45854E1 (en) 2006-07-03 2016-01-19 Faro Technologies, Inc. Method and an apparatus for capturing three-dimensional data of an area of space
US8719474B2 (en) 2009-02-13 2014-05-06 Faro Technologies, Inc. Interface for communication between internal and external devices
US9551575B2 (en) 2009-03-25 2017-01-24 Faro Technologies, Inc. Laser scanner having a multi-color light source and real-time color receiver
US9074883B2 (en) 2009-03-25 2015-07-07 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US8625106B2 (en) 2009-07-22 2014-01-07 Faro Technologies, Inc. Method for optically scanning and measuring an object
US9113023B2 (en) 2009-11-20 2015-08-18 Faro Technologies, Inc. Three-dimensional scanner with spectroscopic energy detector
US8705016B2 (en) 2009-11-20 2014-04-22 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US9529083B2 (en) 2009-11-20 2016-12-27 Faro Technologies, Inc. Three-dimensional scanner with enhanced spectroscopic energy detector
US9417316B2 (en) 2009-11-20 2016-08-16 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US8896819B2 (en) 2009-11-20 2014-11-25 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US9210288B2 (en) 2009-11-20 2015-12-08 Faro Technologies, Inc. Three-dimensional scanner with dichroic beam splitters to capture a variety of signals
JP2013508695A (en) * 2009-11-20 2013-03-07 ファロ テクノロジーズ インコーポレーテッド Equipment for optically scanning and measuring the environment
US9009000B2 (en) 2010-01-20 2015-04-14 Faro Technologies, Inc. Method for evaluating mounting stability of articulated arm coordinate measurement machine using inclinometers
US9607239B2 (en) 2010-01-20 2017-03-28 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US9628775B2 (en) 2010-01-20 2017-04-18 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US9163922B2 (en) 2010-01-20 2015-10-20 Faro Technologies, Inc. Coordinate measurement machine with distance meter and camera to determine dimensions within camera images
US10281259B2 (en) 2010-01-20 2019-05-07 Faro Technologies, Inc. Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features
US10060722B2 (en) 2010-01-20 2018-08-28 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US9329271B2 (en) 2010-05-10 2016-05-03 Faro Technologies, Inc. Method for optically scanning and measuring an environment
US9684078B2 (en) 2010-05-10 2017-06-20 Faro Technologies, Inc. Method for optically scanning and measuring an environment
US8730477B2 (en) 2010-07-26 2014-05-20 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US8705012B2 (en) 2010-07-26 2014-04-22 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US8699007B2 (en) 2010-07-26 2014-04-15 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US9168654B2 (en) 2010-11-16 2015-10-27 Faro Technologies, Inc. Coordinate measuring machines with dual layer arm
US9417056B2 (en) 2012-01-25 2016-08-16 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US8997362B2 (en) 2012-07-17 2015-04-07 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine with optical communications bus
US8830485B2 (en) 2012-08-17 2014-09-09 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US9618620B2 (en) 2012-10-05 2017-04-11 Faro Technologies, Inc. Using depth-camera images to speed registration of three-dimensional scans
US9739886B2 (en) 2012-10-05 2017-08-22 Faro Technologies, Inc. Using a two-dimensional scanner to speed registration of three-dimensional scan data
US9746559B2 (en) 2012-10-05 2017-08-29 Faro Technologies, Inc. Using two-dimensional camera images to speed registration of three-dimensional scans
US9513107B2 (en) 2012-10-05 2016-12-06 Faro Technologies, Inc. Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner
US10067231B2 (en) 2012-10-05 2018-09-04 Faro Technologies, Inc. Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner
US10203413B2 (en) 2012-10-05 2019-02-12 Faro Technologies, Inc. Using a two-dimensional scanner to speed registration of three-dimensional scan data
US9372265B2 (en) 2012-10-05 2016-06-21 Faro Technologies, Inc. Intermediate two-dimensional scanning with a three-dimensional scanner to speed registration
US10739458B2 (en) 2012-10-05 2020-08-11 Faro Technologies, Inc. Using two-dimensional camera images to speed registration of three-dimensional scans
US11035955B2 (en) 2012-10-05 2021-06-15 Faro Technologies, Inc. Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner
US11112501B2 (en) 2012-10-05 2021-09-07 Faro Technologies, Inc. Using a two-dimensional scanner to speed registration of three-dimensional scan data
US11815600B2 (en) 2012-10-05 2023-11-14 Faro Technologies, Inc. Using a two-dimensional scanner to speed registration of three-dimensional scan data
US10175037B2 (en) 2015-12-27 2019-01-08 Faro Technologies, Inc. 3-D measuring device with battery pack
CN115805364A (en) * 2022-12-12 2023-03-17 江苏开璇智能科技有限公司 Laser cutting double-swing head

Similar Documents

Publication Publication Date Title
JPH08262140A (en) Beam tilt mechanism for laser radar and laser device using the tilt mechanism
US6539638B1 (en) Line projecting device
JPH02287236A (en) Method and instrument for measuring contact angle smaller than 45 degrees located on base
JPH11504770A (en) Lithographic apparatus for step and scan imaging of a mask pattern
JP2007041529A (en) Method for manufacturing projection optical system and projection optical system
CN104180969B (en) The detection means and its detection method of lamp house light cone
JPH02161332A (en) Device and method for measuring radius of curvature
JP4324953B2 (en) Laser marking device with position adjustment mechanism
JP4383047B2 (en) Light projection device for visual inspection and visual inspection device
CN111721503B (en) Vacuum ultraviolet band spectrum calibration device and method for satellite-borne hyperspectral remote sensing camera
CN218481055U (en) Measuring device for micropores with high depth-to-width ratio
JP4027605B2 (en) Optical surface shape measuring method and apparatus, and recording medium
JPH11211426A (en) Surface form measuring device
JP4135842B2 (en) Laser projector
JP3237317B2 (en) Hologram interferometer
JP2001174217A (en) Optical inspection apparatus alignment method and mechanism
JP3338567B2 (en) Image sensor for three-dimensional shape measuring device
CN222481381U (en) Optical machine calibration device
TWI869929B (en) Optical axis adjustment method of off-axis elliptical mirror
JP6670355B2 (en) Tilt detecting device and rotating laser device
JPH09189545A (en) Distance measuring device
JPS613006A (en) Planar shape measuring apparatus
JPH0738806Y2 (en) Interferometer
KR20000055585A (en) Vision device for adjusting focus minutely
JPS6118513Y2 (en)

Legal Events

Date Code Title Description
A300 Application deemed to be withdrawn because no request for examination was validly filed

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20020604