JPH09164524A - Running condition judging device of wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize the ready and easy judgement of the running conditions of a whole wire saw by a method wherein the running conditions are displayed on a displaying means by means of graphic images, which typify respective actuating parts, on the basis of the conditions of the respective actuating parts detected with detecting parts. SOLUTION: A controlling part 100 detects the roll diameters of wire reels 50A and 50B by means of the turning angle signals sent from motors 102A and 102B. In addition, the present positions of touch rollers 52A and 52B, guide rollers 54A and 54B are detected on the basis of the amounts of displacements of the displacement detectors 104A and 104B provided on wire guide devices 98A and 98B. Further, the present positions of dancer rollers 58A and 58B and the disconnection of a wire are detected on the basis of the displacement signals sent from the displacement detectors 106A and 106B of the dancer rollers 58A and 58B. Furthermore, by inputting the turning angle signals sent from guide rollers 60, 60... in the controlling part, the amounts of wear of the guide rollers are detected on the basis of their amounts of rotation. On the basis of the detection results as mentioned above, graphic images in response to the conditions of the respective actuating parts of a wire saw are displayed on a displaying monitor 30.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw operating condition discriminating apparatus, and more particularly to a wire saw operating condition discriminating apparatus for displaying the state of each operating part of the wire saw on a graphic image.

[0002]

2. Description of the Related Art Conventionally, a wire saw for cutting a workpiece such as a semiconductor ingot into wafers is covered with a protective cover in order to ensure the safety of workers. Therefore, a monitoring window desired by each operating part of the wire saw is provided on the protective cover, and the state of each operating part is monitored from this monitoring window when the automatic operation is started.

[0003]

However, since the slurry or the like is scattered during the operation of the wire saw, there is a problem that the monitoring window becomes dirty and the internal abnormal state cannot be easily confirmed. In addition, in order to grasp the operating status of the wire saw, the worker must check the operating status of each operating part from the monitoring windows provided at various places, which poses a problem that the burden on the operator is large and There was a problem that the entire driving situation could not be grasped immediately.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a wire saw operating condition determining apparatus which can easily determine the operating condition of a wire saw.

[0005]

In order to achieve the above object, the present invention provides a display means for displaying a graphic image in a wire saw for cutting a work piece into a wafer by pressing the work piece against a wire. , A detection unit that detects the state of each operation unit that configures the wire saw, and the operation of the wire saw by a graphic image that schematically illustrates each operation unit based on the state of each operation unit that is detected by the detection unit And a control unit for displaying the situation on the display means.

According to the present invention, the operating condition of the wire saw is displayed on the display means by a graphic image that schematically shows each operating part of the wire saw. For example, the operation of each operation unit of the wire saw is schematically displayed by the movement of the graphic image on the display screen. This makes it possible to easily determine the state of each operation unit that constitutes the wire saw, and also to easily determine the operating status of the wire saw.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION A preferred embodiment of a wire saw operating condition determining apparatus according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is an overall configuration diagram showing an embodiment of a wire saw in which a wire saw operation status determination device according to the present invention is installed.

In the figure, a protective cover 10 for covering the periphery of the wire saw, and a wire reel 12, a wire guide device 14, a dancer roller 16, a guide roller 18, a grooved roller, a work, a work feed table 22, and a slurry supply are provided inside the protection cover 10. The tank 24, the wire cleaning unit 26, the work 28, and the like are shown. By the way, the protective cover 10 is provided with monitoring windows (not shown) for confirming the states of the respective operating parts at various places, but during operation, these monitoring windows are contaminated with slurry liquid and the internal state cannot be confirmed. Therefore, the display monitor 30 is installed on the outer surface of the protective cover, and the internal state can be confirmed by the graphic image showing the state of each operation part of the wire saw displayed on the display monitor 30.

FIG. 2 is a block diagram showing an embodiment of a wire saw operation status determining device for displaying a graphic image on the display monitor 30. The wire saw shown in the figure
Wire reels 50A and 50B for feeding out or winding the wire, and a wire guiding device 98A for following the wire when the wire reels 50A and 50B are feeding out and guiding the wire to the pitch during the winding of the wire.
98B, touch rollers 52A and 52B and guide rollers 54A installed on the wire guiding devices 98A and 98B,
54B and grooved rollers 56, 56 for forming a wire row,
56, dancer rollers 58A and 58B that apply tension to the wire and absorb rotation speed error between the grooved roller and the wire reel, a guide roller 60 that guides the wire to travel, and a wire 62 that travels in the wire path. When,
Work feed table 64 for moving the work up and down
And a work 66.

As shown in the figure, the control unit 100 includes motors 102A, 1 for rotating the wire reels 50A, 50B.
A rotation angle signal indicating the amount of rotation of the motor from 02B (for example, a pulse signal output at every predetermined rotation angle), a displacement detector 104 installed in the wire guide devices 98A and 98B.
A, 104B to a displacement signal indicating the amount of vertical displacement of the wire guide devices 98A, 98B, dancer rollers 58A, 5B.
8B, the displacement detectors 106A and 106B provide displacement signals indicating the vertical displacements of the dancer rollers 58A and 58B, and the motor 108 that moves the work feed table 64 in the vertical direction indicates a rotation angle signal (representing the amount of rotation of the motors). For example, the same as the above rotation angle signal) and each guide roller 60, 60, ...
Signal lines from 0, 60, ... To the control unit 100 are omitted. ), A rotation angle signal indicating the rotation amount (for example, the same as the rotation angle signal) is input.

Then, the control section 100 carries out the following detection based on the various inputted signals. Control unit 100
Detects the winding diameter of the wire wound around the wire reels 50A and 50B from the rotation angle signals input from the motors 102A and 102B. That is, the winding diameter of the wire at the start of the operation (the means for detecting the winding diameter of the wire at the start of the operation will be described later) is increased or decreased by the winding diameter according to the number of rotations of the wire reels 50A and 50B. By adding the minutes, the winding diameter of the wire during the operation of the wire saw can be detected.

The winding diameter of the wire at the start of operation is such that the wire reels 50A and 50B are rotated by 90 ° in the wire winding direction while the rotation of the grooved roller 56 is stopped. 106A, 10
It can be detected from the displacement amount of the dancer rollers 58A and 58B detected from 6B. The wire guide device 98
Displacement detectors 104A and 104B installed on A and 98B
The displacement signal output from the control unit 10 indicates the amount of displacement of the wire guide devices 98A and 98B from the lower limit.
Based on this displacement amount, 0 is the touch rollers 52A and 52B installed on the wire guide devices 98A and 98B, and the guide roller 5
The current positions of 4A and 54B are detected.

The displacement signals output from the displacement detectors 106A and 106B installed on the dancer rollers 58A and 58B indicate the displacement amount from the lower limit of the dancer rollers 58A and 58B. , 58B are detected. Further, the dancer rollers 58A and 58B do not move to the lower limit when the wire saw is operating, and when the wire breaks, the displacement signal shows a value when the lower limit is reached (that is, 0). Detects disconnection.

The work feed table 64 is the motor 10
The control unit 100 detects the amount of rotation of the motor 108 by a rotation angle signal input from the motor 108, and the workpiece 8 based on this rotation amount. The displacement amount from the rising limit of the feed table 64 is detected. The guide roller 6
The rotation angle signal input from 0, 60, ... Shows the rotation amount of each guide roller 60, and the control unit 100 detects the wear amount from this rotation amount. That is, the rotation amount of the guide roller 60 when the wire is conveyed by a predetermined length during the operation of the wire saw is detected, and this rotation amount and when the wire is conveyed by the predetermined length in a non-wearing state are detected. The wear amount of each guide roller 60 can be detected by comparing the rotation amount of each guide roller 60.

The control unit 100 displays a graphic image according to the state of each operation unit of the wire saw on the display monitor 30 based on these detection results. FIG. 3 shows a display monitor 30.
It is a figure showing the screen composition displayed on. As shown in the figure, information about the wire, work, management, slurry temperature, and end schedule is displayed on the upper part of the screen, and a graphic image showing the state of each operation part inside the wire saw is displayed on the lower part of the screen.

The wire information (wire information display portion 30A) displayed on the upper part of the screen of the display monitor 30 includes the wire length required for cutting the set work, the wire on the feed side and the wire on the winding side. The remaining amount of the wire currently wound on the reel, the tension of the wire, and the like are displayed, and the information on the work (work information display unit 30B) includes a horizontal angle indicating the inclination of the work in the horizontal plane and a work in the vertical plane. The vertical angle indicating the inclination of the workpiece, the diameter of the workpiece, the current position of the workpiece, and the cut amount are displayed.

Further, the information about the scheduled end (the scheduled end information display section 30C) displays the time required for cutting the work and the end time, and the information about the slurry temperature (slurry temperature information display section 30D) shows the slurry. Target temperature of
The supply temperature and return temperature are displayed. A machine number, an operator number, and the like are displayed in the management information (management information display unit 30E).

The graphic image displayed on the graphic image display section 30F below the display monitor 30 is a schematic representation of each operating section constituting the wire saw. In addition, the same symbols are given to the graphic images corresponding to the respective operation parts of the wire saw shown in FIG.
As shown in FIG. 3, this graphic image includes the wire reels 50A and 50B and the touch roller 5 of the wire guide device.
2A, 52B and guide rollers 54A, 54B, grooved roller 56, dancer rollers 58A, 58B, guide roller 60, wire 62, work feed table 64 and work 66 are displayed.

The wire saw is a wire reel 5
The wire reel 50A, in order to reciprocate the wire by switching the feeding / winding of the wire of 0A, 50B,
The feeding / winding state is displayed near the upper portion of 50B. Further, an arrow 70 indicating the traveling direction of the wire is displayed near the lower portion of the grooved roller 56, and the wire feed speed is displayed below the arrow 70.

Further, an arrow 72 indicating the work feeding direction is displayed near the side of the work feeding table 64, and the work feeding speed is displayed below the arrow 72. By the way, as described above, the wire saw operation status determination device detects the state of each operation unit of the wire saw, and changes the display of the graphic image according to the detected state of each operation unit.

Wire reel 50 for the graphic image
The wires wound around the wire reels 50A and 50B are displayed as horizontal lines 51 on A and 50B, and the display width of the horizontal lines 51 changes according to the actual winding diameter of the wire. . That is, the control unit 100 detects the winding diameter of the wire currently wound around the wire reels 50A and 50B as described above, and calculates the following expression from the detected value (current winding diameter value): The horizontal line of the wire wound around the wire reels 50A and 50B with the width of the number of dots given as a result is displayed on the display monitor 30.

(Maximum number of dots / Maximum winding diameter) × (Current value of winding diameter) However, the maximum number of dots indicates the number of dots when the winding diameter of the wire is maximum. Thereby, the wire reel 50
The remaining amount (presence or absence) of the wire wound around A and 50B can be confirmed on the display monitor 30. Touch rollers 52A and 52B and guide rollers 54A and 5A of the wire guide device (traverser) for the graphic image shown in FIG.
The display position of 4B moves up and down in accordance with the actual up and down movement of the wire guide device. At the same time, the wire feed-out position (display position) or the winding position (display position) of the wire reels 50A and 50B also moves in the vertical direction according to the position of the wire guide device.

That is, the control unit 100 detects the displacement amount of the wire guide device as described above, and based on the detected values, the positions of the touch rollers 52A and 52B and the guide rollers 54A and 54B of the wire guide device, the wire reel 50A, 50B
The feeding position or the winding position of is detected. For example,
When the origin of the coordinates indicating each of the above positions is set to the lowermost end 80 of the feeding position or winding position of the wire reels 50A and 50B as shown in FIG. 4, the feeding position or winding position of the wire reels 50A and 50B becomes the lowermost position. When the detection value detected by the displacement detectors 104A and 104B in FIG. 2 indicates X when the value is 80, the value obtained by subtracting X from the detection value is the position coordinate of an arbitrary predetermined point of the wire guide device. age,
The coordinates of each position are calculated from the relative positional relationship with respect to this predetermined point.

Then, the following equation is calculated from the calculated coordinates (current position) of each position. (Maximum number of dots / bobbin length) × current position However, the maximum number of dots is the lowermost end 80 to the uppermost end 82 of the feeding position or winding position of the wire 62 on the screen.
Indicates the number of dots up to the length (bobbin length).

Touch rollers 52A and 52B and a guide roller 54A of the wire guide device for the graphic image are moved upward from the coordinate origin by the number of dots obtained as a result of the calculation of the above equation.
54B, the wire 62 sent from the wire reel 50A or 50B, and the wire 62 wound on the wire reel 50A or 50B are displayed. The display positions of the dancer rollers 58A and 58B of the graphic image shown in FIG. 3 move in the vertical direction according to the actual movement of the dancer roller in the vertical direction.

That is, the control unit 100 detects the displacement amount from the lower limit (lower end) of the dancer rollers 106A and 106B as described above, and calculates the following equation based on the detected value (current position). (Total number of dots / 500 (mm)) × current position The total number of dots indicates the number of dots from the descending end to the ascending end of the dancer rollers 58A and 58B on the screen as shown in FIG. Further, the numerical value of the above expression 500 (mm) indicates the distance from the lower end to the upper end of the actual dancer rollers 58A and 58B.

Then, the dancer rollers 58A and 58B are displayed above the lower end by the number of dots obtained as a result (see FIG. 5). The display positions of the work feed table 64 and the work 66 of the graphic image shown in FIG. 3 move in the vertical direction according to the movement of the actual position in the vertical direction. Further, the diameter (work diameter) of the work 66 displayed on the screen also changes according to the actual work diameter.

That is, the control section 100 detects the displacement amount of the work feed table 64 from the rising limit as described above. Then, the position coordinate of the center of the work feed table 64 and the work 66 is calculated from the detected value and the actually measured value of the work diameter set in advance, and the display position on the screen is determined from the calculated position coordinates. . As shown in FIG. 6, the position of the work row 92 is set as the origin position, the work lower end 90 is brought into contact with the wire row 92, and the displacement amount from the rising limit of the work feed table 64 at this time is stored as the origin value. Then, the amount of displacement from this position to the upper side or the lower side of the work feed table is set as the work present position (work present position = | displacement amount of work feed table−origin value |).

At this time, the number of dots from the wire row 92 to the work lower end 90 on the screen is calculated by the following equation. If the lower end 90 of the work is above the wire row 92 before cutting the work, (total number of dots / origin value) x current position of work, where the total number of dots is the number of dots on the screen corresponding to the distance from the origin position to the rising limit Indicates.

When the lower end 90 of the work is below the wire row 92 after cutting the work, (total number of dots / work lower limit value) × work present position However, the work lower limit value is detected when the work feed table 64 is at the lower limit. Is the value obtained by subtracting the origin value from the amount of displacement. The total number of dots is the origin position (work feed table 6
4 shows the number of dots on the screen corresponding to the amount of displacement from the origin value detection position (4) to the descent limit. Further, the displacement amount of the work feed table 64 detected at the time of the work descent limit is equal to the origin value + the work diameter + the carbon cut amount.

Further, the wire 62 of the graphic image shown in FIG. 3 disappears when the control unit 100 detects a wire break, and the guide rollers 60, 60 of the graphic image shown in FIG. , May switch from blue when the amount of wear of the guide roller is equal to or more than a predetermined critical value to red when the display color is normal, or may have other display modes corresponding to these. .

[0032]

As described above, according to the operating condition determination device for a wire saw of the present invention, the operating condition of the wire saw is displayed by a graphic image that schematically shows each operating part of the wire saw. It is possible to easily check the state of the operating unit and to immediately and easily determine the operating status of the entire wire saw.

[Brief description of the drawings]

FIG. 1 is an overall configuration diagram showing an embodiment of a wire saw to which a wire saw operation status determination device according to the present invention is applied.

FIG. 2 is a configuration diagram showing an embodiment of a wire saw to which the device for determining the operating status of the wire saw according to the present invention is applied.

FIG. 3 is a view showing an example of the configuration of a screen displayed by the wire saw operation status determination device according to the present invention.

FIG. 4 is a diagram illustrating a graphic display of a wire reel.

FIG. 5 is a diagram illustrating a graphic display of a dancer roller.

FIG. 6 is a diagram illustrating a work feed table and a graphic display of a work.

[Explanation of symbols]

 30 ... Display monitor 30A ... Wire information display unit 30B ... Work information display unit 30C ... Scheduled end information display unit 30D ... Slurry temperature information display unit 30E ... Management information display unit 30F ... Graphic image display unit 50A, 50B ... Wire reel 52A, 52B ... Touch roller 54A, 54B ... Guide roller 56 ... Grooved roller 58A, 58B ... Dancer roller 60 ... Guide roller 62 ... Wire 64 ... Work feed table 66 ... Work

Claims (1)

[Claims] 1. A wire saw for cutting a work piece into a wafer by pressing the work piece against a wire, a display means for displaying a graphic image, and a detection for detecting a state of each operation unit constituting the wire saw. And a control unit for displaying the operating status of the wire saw on the display means by a graphic image that schematically shows each operation unit based on the state of each operation unit detected by the detection unit. A device for determining the operating status of a wire saw.