JPH10209230A5 - - Google Patents
Info
- Publication number
- JPH10209230A5 JPH10209230A5 JP1997009967A JP996797A JPH10209230A5 JP H10209230 A5 JPH10209230 A5 JP H10209230A5 JP 1997009967 A JP1997009967 A JP 1997009967A JP 996797 A JP996797 A JP 996797A JP H10209230 A5 JPH10209230 A5 JP H10209230A5
- Authority
- JP
- Japan
- Prior art keywords
- past case
- failure analysis
- analysis device
- feature
- information
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9009967A JPH10209230A (ja) | 1997-01-23 | 1997-01-23 | 不良解析装置およびその方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9009967A JPH10209230A (ja) | 1997-01-23 | 1997-01-23 | 不良解析装置およびその方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10209230A JPH10209230A (ja) | 1998-08-07 |
| JPH10209230A5 true JPH10209230A5 (2) | 2005-01-06 |
Family
ID=11734708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9009967A Pending JPH10209230A (ja) | 1997-01-23 | 1997-01-23 | 不良解析装置およびその方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10209230A (2) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6466895B1 (en) * | 1999-07-16 | 2002-10-15 | Applied Materials, Inc. | Defect reference system automatic pattern classification |
| DE19946787A1 (de) * | 1999-09-29 | 2001-04-05 | Focke & Co | Verfahren und Vorrichtung zur Diagnose von Maschinen |
| JP4274649B2 (ja) | 1999-10-07 | 2009-06-10 | 株式会社日立製作所 | 微細パターン検査方法及び装置 |
| US7225107B2 (en) * | 2001-05-24 | 2007-05-29 | Test Advantage, Inc. | Methods and apparatus for data analysis |
| JP2003100826A (ja) | 2001-09-26 | 2003-04-04 | Hitachi Ltd | 検査データ解析プログラムと検査装置と検査システム |
| JP2003242482A (ja) * | 2002-02-14 | 2003-08-29 | Hitachi High-Technologies Corp | 回路パターンの検査方法および検査装置 |
| JP4038161B2 (ja) * | 2003-08-29 | 2008-01-23 | 株式会社神戸製鋼所 | 金属板材の表面欠陥の原因推定装置および原因推定プログラムならびに原因推定方法 |
| JP4758619B2 (ja) * | 2003-12-10 | 2011-08-31 | 株式会社日立ハイテクノロジーズ | 問題工程特定方法および装置 |
| US7019835B2 (en) * | 2004-02-19 | 2006-03-28 | Molecular Imprints, Inc. | Method and system to measure characteristics of a film disposed on a substrate |
| JP2006018630A (ja) * | 2004-07-02 | 2006-01-19 | Canon Inc | データ検索方法及び装置、プログラム、コンピュータ可読メモリ |
| US7340359B2 (en) * | 2005-05-02 | 2008-03-04 | Optimaltest Ltd | Augmenting semiconductor's devices quality and reliability |
| JP4711077B2 (ja) | 2006-06-09 | 2011-06-29 | 富士ゼロックス株式会社 | 故障診断システム、画像形成装置および故障診断プログラム |
| US7916275B2 (en) * | 2007-09-19 | 2011-03-29 | Asml Netherlands B.V. | Methods of characterizing similarity or consistency in a set of entities |
| JP5448598B2 (ja) * | 2009-06-24 | 2014-03-19 | 東京エレクトロン株式会社 | パーティクル発生要因判定システム、課金方法、及び記憶媒体 |
| JP7247774B2 (ja) * | 2019-06-14 | 2023-03-29 | 株式会社プロテリアル | 情報処理システムおよび情報処理方法 |
| KR102798763B1 (ko) * | 2019-08-09 | 2025-04-22 | 주식회사 엘지에너지솔루션 | 제조 설비 품질에 대한 정량화 진단법 |
| CN112669307A (zh) * | 2021-01-06 | 2021-04-16 | 大冶特殊钢有限公司 | 基于机器视觉的低倍酸蚀缺陷自动识别与评级的方法及系统 |
| JP7401514B2 (ja) * | 2021-12-24 | 2023-12-19 | 三菱重工パワーインダストリー株式会社 | 伝熱管損傷原因推論装置及び伝熱管損傷原因推論方法 |
| CN114815741B (zh) * | 2022-06-27 | 2022-09-09 | 南通端高科技有限公司 | 一种基于信息采集的模式控制系统 |
| KR102887949B1 (ko) * | 2024-11-29 | 2025-11-19 | 미르테크 주식회사 | 공정 전후 웨이퍼 결함 분석 장치 및 방법 |
-
1997
- 1997-01-23 JP JP9009967A patent/JPH10209230A/ja active Pending
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