JPH1179102A - Viscous liquid supply method and viscous liquid supply nozzle - Google Patents
Viscous liquid supply method and viscous liquid supply nozzleInfo
- Publication number
- JPH1179102A JPH1179102A JP9245173A JP24517397A JPH1179102A JP H1179102 A JPH1179102 A JP H1179102A JP 9245173 A JP9245173 A JP 9245173A JP 24517397 A JP24517397 A JP 24517397A JP H1179102 A JPH1179102 A JP H1179102A
- Authority
- JP
- Japan
- Prior art keywords
- viscous liquid
- nozzle
- flat
- liquid supply
- shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Supply Of Fluid Materials To The Packaging Location (AREA)
- Basic Packing Technique (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、例えば、半導体デ
バイスの製造時に使用されるフォトレジスト等の粘性液
体を供給する方法及び該粘性液体を供給するノズルに関
するものである。[0001] 1. Field of the Invention [0002] The present invention relates to a method for supplying a viscous liquid such as a photoresist used in the manufacture of a semiconductor device and a nozzle for supplying the viscous liquid.
【０００２】[0002]
【従来の技術】従来の粘性液体を容器に供給充填するた
めの充填ノズルとしては、特開平4-18204 号公報に開示
されたようにピストン及びノズル内に配置されたシャッ
ト軸を軸方向に移動させることによりピストン方式で一
定量の粘性液体を押し出し、且つ、瞬時にこれを止める
ことが出来るシャットノズルが提案されている。2. Description of the Related Art As a conventional filling nozzle for supplying and filling a viscous liquid into a container, a piston and a shut shaft disposed in the nozzle are moved in the axial direction as disclosed in Japanese Patent Laid-Open No. 4-18204. There has been proposed a shut nozzle capable of extruding a certain amount of viscous liquid by a piston method and stopping the same instantaneously.
【０００３】また、特開昭61-13076号公報に開示された
ように、ノズル胴体内で上下に作動する弁子を電磁コイ
ルで作動させることにより、内部液体の漏洩をなくする
と共に摩耗部分を低減する技術が提案されている。Further, as disclosed in Japanese Patent Application Laid-Open No. 61-13076, a valve that operates vertically in a nozzle body is operated by an electromagnetic coil, thereby preventing leakage of internal liquid and reducing abrasion. Techniques for reducing this have been proposed.
【０００４】また、特開平6-244092号公報に開示された
ように、細管状のノズルの内面に液体に濡れる内面コー
ティングを施し、該ノズルの外面に液体に濡れない外面
コーティングを施して液垂れを防止した技術が提案され
ている。As disclosed in Japanese Patent Application Laid-Open No. 6-244092, the inner surface of a thin tubular nozzle is coated with a liquid-wet inner surface, and the outer surface of the nozzle is coated with an outer surface that is not wetted by a liquid. Techniques that prevent such problems have been proposed.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、前述の
各従来例において、特開平4-18204 号公報及び特開昭61
-13076号公報に開示された技術では、摺動部分がノズル
内にあるため、摺動による摩耗によりサブミクロン（１
０-7）オーダのパーティクル（ゴミや不純物等）が発生
して製品となる粘性液体中に混入し、粘性液体の品質を
低下させるという問題がある。However, in each of the above-mentioned conventional examples, Japanese Patent Application Laid-Open Nos.
In the technology disclosed in JP-A-13076, since the sliding portion is inside the nozzle, the submicron (1
0-7 ) There is a problem in that particles (dust, impurities, etc.) of the order are generated and mixed into the viscous liquid to be a product, thereby deteriorating the quality of the viscous liquid.
【０００６】また、フォトレジスト等の粘性液体に適用
する場合には、該粘性液体が光や温度によってゲル化し
て硬化するため、比較的頻繁にノズルを分解して清掃す
る必要があるが、両者とも構造が複雑であるため、分解
清掃作業に手間がかかるという問題がある。Further, when applied to a viscous liquid such as a photoresist, the viscous liquid gels and hardens due to light or temperature, so that it is necessary to disassemble and clean the nozzle relatively frequently. Both have a problem that the disassembly and cleaning work is troublesome due to the complicated structure.
【０００７】また、特開平6-244092号公報に開示された
技術では、ノズルの内面及び外面に各種のコーティング
材をコーティングする必要があるので製造コストがかか
ると共に、細管状のノズルにより構成されるため粘性液
体の流量が低下し、供給に時間がかかるという問題があ
る。Further, in the technique disclosed in Japanese Patent Application Laid-Open No. 6-244092, it is necessary to coat various coating materials on the inner surface and the outer surface of the nozzle. Therefore, there is a problem that the flow rate of the viscous liquid decreases and it takes time to supply.
【０００８】本発明は前記課題を解決するものであり、
その目的とするところは、粘性液体を吐出して供給する
ノズルを扁平ノズルにより構成することで、粘性液体の
液切れを良くして液垂れを防止すると共に供給流量を大
きくすることが出来、更に粘性液体中にパーティクル
（ゴミや不純物等）が混入することがなく、粘性液体の
品質を維持出来、更に分解清掃作業が容易に出来る粘性
液体供給方法及び粘性液体供給ノズルを提供せんとする
ものである。[0008] The present invention is to solve the above problems,
The purpose is to configure the nozzle that discharges and supplies the viscous liquid by a flat nozzle, so that the viscous liquid can be more efficiently drained to prevent dripping and increase the supply flow rate. It is intended to provide a viscous liquid supply method and a viscous liquid supply nozzle which can maintain the quality of the viscous liquid without mixing particles (dust, impurities, etc.) into the viscous liquid, and further facilitate the disassembling and cleaning work. is there.
【０００９】[0009]
【課題を解決するための手段】前記目的を達成するため
の本発明に係る粘性液体供給方法は、ノズルから粘性液
体を吐出して供給する粘性液体供給方法において、扁平
口型からなる扁平ノズルにより粘性液体を吐出して供給
することを特徴とする。According to the present invention, there is provided a method for supplying a viscous liquid according to the present invention, wherein the viscous liquid is supplied from a nozzle by a flat nozzle having a flat mouth. It is characterized by discharging and supplying a viscous liquid.
【００１０】上記方法によれば、扁平口型からなる扁平
ノズルにより粘性液体を吐出して供給することで、該扁
平ノズルの扁平口から吐出される粘性液体が該扁平口型
形状に沿って扁平した流動体として扁平口から吐出さ
れ、該扁平口での粘性液体の表面張力と摩擦による粘性
抵抗により扁平口での粘性液体の液切れが良く液垂れを
防止すると共に供給流量を大きくすることが出来る。According to the above method, the viscous liquid discharged from the flat mouth of the flat nozzle is discharged and supplied by the flat nozzle having the flat mouth shape, so that the viscous liquid discharged from the flat mouth of the flat nozzle is flattened along the flat mouth shape. It is discharged from the flat mouth as a fluid that has been blown, and the viscous liquid at the flat mouth is prevented from dripping well by the viscous resistance due to surface tension and friction at the flat mouth, and it is possible to increase the supply flow rate. I can do it.
【００１１】また、本発明に係る粘性液体供給ノズル
は、粘性液体を吐出して供給する粘性液体供給ノズルに
おいて、扁平口型からなる扁平ノズルにより構成される
ことを特徴とする。Further, the viscous liquid supply nozzle according to the present invention is characterized in that the viscous liquid supply nozzle for discharging and supplying the viscous liquid is constituted by a flat nozzle having a flat mouth type.
【００１２】上記構成の粘性液体供給ノズルによれば扁
平ノズルの扁平口から吐出される粘性液体を該扁平口型
形状に沿って扁平した流動体として該扁平口から吐出す
ることが出来るため該扁平口での粘性液体の表面張力と
摩擦による粘性抵抗により粘性液体の液切れが良く液垂
れを防止すると共に供給流量を大きくすることが出来
る。According to the viscous liquid supply nozzle having the above configuration, the viscous liquid discharged from the flat mouth of the flat nozzle can be discharged from the flat mouth as a fluid flattened along the shape of the flat mouth. Due to the surface tension of the viscous liquid at the mouth and the viscous resistance due to friction, the viscous liquid runs out well, preventing dripping and increasing the supply flow rate.
【００１３】また、前記扁平ノズルの扁平口型を長径と
短径を有する長円形または楕円形または長多角形で構成
すれば好ましく、更に前記長径を２．０〜１００．０mm
の範囲で、且つ、短径を１．０〜５．０mmの範囲で設定
すれば好ましい。It is preferable that the flat nozzle of the flat nozzle is formed in an elliptical shape, an elliptical shape or a long polygonal shape having a major axis and a minor axis.
And the minor axis is set in the range of 1.0 to 5.0 mm.
【００１４】また、前記扁平ノズルの扁平口型を湾曲し
た長円形または折曲した長円形で構成すれば好ましく、
更に前記長円形の長径の全長を２．０〜１００．０mmの
範囲で、且つ、前記長円形の短径を１．０〜５．０mmの
範囲で設定すれば好ましい。It is preferable that the flat nozzle of the flat nozzle is constituted by a curved oval or a bent oval.
Further, it is preferable that the entire length of the major axis of the oval is set in the range of 2.0 to 100.0 mm and the minor axis of the oval is set in the range of 1.0 to 5.0 mm.
【００１５】また、前記粘性液体供給ノズルを着脱手段
により着脱可能に構成した場合には、ノズル自体の構成
が簡単であると共に着脱手段により容易に着脱できるの
で粘性液体として、例えば、光や温度によってゲル化し
て硬化するフォトレジスト等に適用する場合でも、必要
に応じてノズルを容易に脱離して簡単に短時間で清掃作
業を実施することが出来る。When the viscous liquid supply nozzle is configured to be detachable by attaching / detaching means, the nozzle itself is simple in construction and can be easily attached / detached by the attaching / detaching means. Even in the case of applying to a photoresist that gels and hardens, the nozzle can be easily detached as necessary, and the cleaning operation can be easily performed in a short time.
【００１６】[0016]
【発明の実施の形態】図により本発明に係る粘性液体供
給方法及び粘性液体供給ノズルの一実施形態を具体的に
説明する。図１（ａ）は本発明に係る粘性液体供給ノズ
ルの第１実施形態の構成を示す平面説明図、図１（ｂ）
は第１実施形態の粘性液体供給ノズルを扁平口側から見
た図、図１（ｃ）は第１実施形態の粘性液体供給ノズル
の扁平口型の形状を示す図、図２（ａ）は本発明に係る
粘性液体供給ノズルの第２実施形態の構成を示す平面説
明図、図２（ｂ）は第２実施形態の粘性液体供給ノズル
を扁平口側から見た図、図２（ｃ）は第２実施形態の粘
性液体供給ノズルの扁平口型の形状を示す図、図３
（ａ）は本発明に係る粘性液体供給ノズルの第３実施形
態の構成を示す平面説明図、図３（ｂ）は第３実施形態
の粘性液体供給ノズルを扁平口側から見た図、図３
（ｃ）は第３実施形態の粘性液体供給ノズルの扁平口型
の形状を示す図、図４（ａ）は本発明に係る粘性液体供
給ノズルの第４実施形態の構成を示す平面説明図、図４
（ｂ）は第４実施形態の粘性液体供給ノズルを扁平口側
から見た図、図４（ｃ）は第４実施形態の粘性液体供給
ノズルの扁平口型の形状を示す図、図５（ａ）は本発明
に係る粘性液体供給ノズルの第５実施形態の構成を示す
平面説明図、図５（ｂ）は第５実施形態の粘性液体供給
ノズルを扁平口側から見た図、図５（ｃ）は第５実施形
態の粘性液体供給ノズルの扁平口型の形状を示す図、図
６（ａ）は着脱手段の構成を示す斜視図、図６（ｂ）は
着脱手段によりノズルを装着した様子を示す断面図、図
６（ｃ）は着脱手段によりノズルを装着した様子を示す
平面図、図７（ａ）は着脱手段の他の構成を示す斜視
図、図７（ｂ）は着脱手段の他の構成を示す断面説明
図、図８は本発明に係る粘性液体供給ノズルを装備した
粘性液体供給装置の一例を示す模式図である。尚、以下
に示す粘性液体供給ノズルの寸法構成は、該粘性液体供
給ノズルの具体的構成の一例を示すものであり、本発明
がこれ等の数値に限定されるものではない。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of a viscous liquid supply method and a viscous liquid supply nozzle according to the present invention will be specifically described with reference to the drawings. FIG. 1A is an explanatory plan view showing a configuration of a first embodiment of a viscous liquid supply nozzle according to the present invention, and FIG.
FIG. 1C is a view of the viscous liquid supply nozzle of the first embodiment as viewed from the flat mouth side, FIG. 1C is a diagram showing a flat mouth shape of the viscous liquid supply nozzle of the first embodiment, and FIG. FIG. 2B is an explanatory plan view showing the configuration of a second embodiment of the viscous liquid supply nozzle according to the present invention, and FIG. 2B is a view of the second embodiment of the viscous liquid supply nozzle viewed from the flat mouth side, and FIG. FIG. 3 is a view showing a flat mouth shape of a viscous liquid supply nozzle according to a second embodiment;
(A) is an explanatory plan view showing a configuration of a third embodiment of a viscous liquid supply nozzle according to the present invention, and FIG. 3 (b) is a view of the viscous liquid supply nozzle of the third embodiment viewed from a flat mouth side. 3
(C) is a diagram showing a flat mouth shape of the viscous liquid supply nozzle of the third embodiment, FIG. 4 (a) is a plan explanatory view showing a configuration of a fourth embodiment of a viscous liquid supply nozzle according to the present invention, FIG.
(B) is a diagram of the viscous liquid supply nozzle of the fourth embodiment viewed from the flat mouth side, FIG. 4 (c) is a diagram showing a flat mouth shape of the viscous liquid supply nozzle of the fourth embodiment, and FIG. 5A is a plan view showing the configuration of a fifth embodiment of a viscous liquid supply nozzle according to the present invention, and FIG. 5B is a view of the fifth embodiment of the viscous liquid supply nozzle viewed from a flat mouth side. FIG. 6C is a diagram showing a flat mouth shape of the viscous liquid supply nozzle according to the fifth embodiment, FIG. 6A is a perspective view showing the structure of the attaching / detaching means, and FIG. FIG. 6C is a plan view showing a state where the nozzle is mounted by the attaching / detaching means, FIG. 7A is a perspective view showing another configuration of the attaching / detaching means, and FIG. FIG. 8 is a cross-sectional explanatory view showing another configuration of the means, and FIG. It is a schematic view showing a. The dimensional configuration of the viscous liquid supply nozzle shown below is an example of a specific configuration of the viscous liquid supply nozzle, and the present invention is not limited to these numerical values.
【００１７】図１〜図５において、本発明に係る粘性液
体供給ノズルとなる扁平ノズルＡ〜Ｅは、詳しくは後述
する所定形状の扁平口型を有して、その内面がなだらか
な曲面により夫々構成され、粘性液体が停滞することな
く円滑に供給し得るものであり、各扁平ノズルＡ〜Ｅで
は、粘度が０．１〜２００Ｐｓ（ポアズ）の粘性液体を
最大供給速度が２０kg/min程度で供給することが出来る
ように構成されている。扁平ノズルＡ〜Ｅから吐出して
供給される粘性液体としては、例えば、半導体デバイス
の製造時に使用されるフォトレジスト等の供給に好適に
用いることが出来る。1 to 5, flat nozzles A to E serving as viscous liquid supply nozzles according to the present invention each have a flat mouth shape having a predetermined shape, which will be described in detail later, and each inner surface has a gentle curved surface. The flat nozzles A to E each have a viscosity of 0.1 to 200 Ps (poise) at a maximum supply speed of about 20 kg / min. It is configured to be able to supply. As the viscous liquid discharged and supplied from the flat nozzles A to E, for example, it can be suitably used for supplying a photoresist or the like used at the time of manufacturing a semiconductor device.
【００１８】各扁平ノズルＡ〜Ｅは、そのノズル本体１
がステンレス（ＳＵＳ）等の材質で例えば、外径が１
７．３mm、肉圧が１．６mm程度の寸法を有するパイプで
構成され、該パイプの内外面はパフ掛け等により研磨加
工した後、更に内面を電解研磨加工して該パイプの内面
の表面は極めて滑らかに構成されている。Each of the flat nozzles A to E has a nozzle body 1
Is made of a material such as stainless steel (SUS) and has an outer diameter of 1
The inner and outer surfaces of the pipe are polished by, for example, puffing, and then the inner surface is further electrolytically polished, and the inner surface of the pipe is made of 7.3 mm and a wall pressure of about 1.6 mm. It is very smooth.
【００１９】前記ノズル本体１の一端部には該ノズル本
体１の外径よりも所定の寸法だけ大きい外径（例えば、
３４mm程度) を有する鍔部１ａが形成されており、ノズ
ル本体１の鍔部１ａから該ノズル本体１の他端部のノズ
ル口１ｂに至る長さ寸法は、例えば、８１mm程度で構成
される。そして、ノズル本体１のノズル口１ｂ側から、
例えば、３６mm程度の位置から該ノズル口１ｂにかけて
扁平加工して所定形状の扁平口型を有して構成される。At one end of the nozzle main body 1, an outer diameter (for example, larger than the outer diameter of the nozzle main body 1 by a predetermined dimension) is used.
(About 34 mm), and the length from the flange 1a of the nozzle body 1 to the nozzle port 1b at the other end of the nozzle body 1 is, for example, about 81 mm. Then, from the nozzle port 1b side of the nozzle body 1,
For example, it is configured to have a flat mouth shape of a predetermined shape by flattening from a position of about 36 mm to the nozzle port 1b.
【００２０】尚、前記鍔部１ａはノズル本体１の端部に
鍔部１ａを有するヘルール配管を溶接等により接続して
構成しても良いし、ノズル本体１の端部をプレス加工等
により押し広げて構成しても良い。The flange 1a may be formed by connecting a ferrule pipe having the flange 1a to the end of the nozzle body 1 by welding or the like, or by pressing the end of the nozzle body 1 by press working or the like. You may expand and comprise.
【００２１】図１に示す第１実施形態の扁平ノズルＡ
は、そのノズル口１ｂの扁平口型が図１（ｂ），（ｃ）
に示すように、長径ａと短径ｂを有する長円形で構成さ
れ、その長径ａは２．０〜１００．０mmの範囲で、且
つ、短径ｂは１．０〜５．０mmの範囲で設定される。本
実施形態では、例えば、長径ａが２０．５mm、短径ｂが
３．０mmで設定される。The flat nozzle A of the first embodiment shown in FIG.
In FIG. 1 (b), (c)
As shown in the figure, the major axis a and the minor axis b have an oval shape, the major axis a is in the range of 2.0 to 100.0 mm, and the minor axis b is in the range of 1.0 to 5.0 mm. Is set. In the present embodiment, for example, the major axis a is set to 20.5 mm and the minor axis b is set to 3.0 mm.
【００２２】また、図２に示す第２実施形態の扁平ノズ
ルＢは、そのノズル口１ｂの扁平口型が図２（ｂ），
（ｃ）に示すように、長径ａと短径ｂを有する楕円形で
構成され、その長径ａは前記第１実施形態と同様に２．
０〜１００．０mmの範囲で、且つ、短径ｂは１．０〜
５．０mmの範囲で設定される。本実施形態では、例え
ば、長径ａが２０．５mm、短径ｂが３．０mmで設定され
る。In the flat nozzle B according to the second embodiment shown in FIG. 2, the nozzle opening 1b has a flat mouth type as shown in FIG.
As shown in (c), it is configured in an elliptical shape having a major axis a and a minor axis b, and the major axis a is set to 2. as in the first embodiment.
Within the range of 0 to 100.0 mm, and the minor axis b is 1.0 to
It is set in the range of 5.0 mm. In the present embodiment, for example, the major axis a is set to 20.5 mm and the minor axis b is set to 3.0 mm.
【００２３】また、図３に示す第３実施形態の扁平ノズ
ルＣは、そのノズル口１ｂの扁平口型が図３（ｂ），
（ｃ）に示すように、長径ａと短径ｂを有する長多角形
で構成され、本実施形態ではその一例として長６角形で
構成したものである。尚、本発明は長６角形に限定され
るものではなく他の多角形で構成することでも良い。そ
して、その長径ａは前記各実施形態と同様に２．０〜１
００．０mmの範囲で、且つ、短径ｂは１．０〜５．０mm
の範囲で設定される。本実施形態では、例えば、長径ａ
が２０．５mm、短径ｂが３．０mmで設定される。The flat nozzle C of the third embodiment shown in FIG. 3 has a flat mouth type nozzle opening 1b as shown in FIG.
As shown in (c), it is constituted by a long polygon having a major axis a and a minor axis b, and in the present embodiment, it is constituted by a hexagon as an example. It should be noted that the present invention is not limited to a hexagonal shape, but may be constituted by other polygons. The major axis a is 2.0 to 1 as in the above embodiments.
00.0 mm, and the minor axis b is 1.0 to 5.0 mm
Is set in the range. In the present embodiment, for example, the major axis a
Is set to 20.5 mm and the minor diameter b is set to 3.0 mm.
【００２４】また、図４に示す第４実施形態の扁平ノズ
ルＤは、そのノズル口１ｂの扁平口型が図４（ｂ），
（ｃ）に示すように、所定の曲率半径を有する円弧状の
湾曲した長円形で構成され、該長円形の長径ａの全長は
前記各実施形態と同様に２．０〜１００．０mmの範囲
で、且つ、該長円形の短径ｂは１．０〜５．０mmの範囲
で設定される。本実施形態では、例えば、長径ａの全長
が２０．５mm、短径ｂが３．０mmで設定される。The flat nozzle D of the fourth embodiment shown in FIG. 4 has a flat mouth type nozzle opening 1b as shown in FIG.
As shown in (c), it is constituted by an arc-shaped curved ellipse having a predetermined radius of curvature, and the entire length of the major axis a of the ellipse is in the range of 2.0 to 100.0 mm as in the above embodiments. And the minor axis b of the oval is set in the range of 1.0 to 5.0 mm. In the present embodiment, for example, the total length of the major axis a is set to 20.5 mm, and the minor axis b is set to 3.0 mm.
【００２５】尚、図４に示す第４実施形態の扁平ノズル
Ｄは、そのノズル口１ｂの扁平口型が所定の曲率半径を
有する円弧状の湾曲した長円形で構成した場合の一例を
示したが、扁平ノズルＤのノズル口１ｂの扁平口型が湾
曲した長円形の他の構成として、Ｓ字形状や波形形状等
の種々の形状に湾曲した場合であっても良い。The flat nozzle D of the fourth embodiment shown in FIG. 4 shows an example in which the flat mouth of the nozzle port 1b is formed as an arc-shaped curved oval having a predetermined radius of curvature. However, the flat mouth shape of the flat mouth D of the flat nozzle D may be curved into various shapes such as an S-shape or a corrugated shape as another configuration of a curved oval.
【００２６】また、図５に示す第５実施形態の扁平ノズ
ルＥは、そのノズル口１ｂの扁平口型が図５（ｂ），
（ｃ）に示すように、ハット型に折曲した長円形で構成
され、該長円形の長径ａの全長（図５（ｃ）において、
長径ａ＝ｃ＋２ｄ）は前記各実施形態と同様に２．０〜
１００．０mmの範囲で、且つ、該長円形の短径ｂは１．
０〜５．０mmの範囲で設定される。本実施形態では、例
えば、長径ａの全長が２０．５mm、短径ｂが３．０mmで
設定される。In the flat nozzle E according to the fifth embodiment shown in FIG. 5, the nozzle opening 1b has a flat mouth type as shown in FIG.
As shown in FIG. 5 (c), it is composed of a hat-shaped bent oval, and the entire length of the major axis a of the oval (in FIG. 5 (c),
The major axis a = c + 2d) is 2.0 to 2.0 as in the above embodiments.
In the range of 100.0 mm, and the minor axis b of the oval is 1.
It is set in the range of 0 to 5.0 mm. In the present embodiment, for example, the total length of the major axis a is set to 20.5 mm, and the minor axis b is set to 3.0 mm.
【００２７】尚、図５に示す第５実施形態の扁平ノズル
Ｅは、そのノズル口１ｂの扁平口型がハット型に折曲し
た長円形で構成した場合の一例を示したが、扁平ノズル
Ｅのノズル口１ｂの扁平口型が折曲した長円形の他の構
成として、Ｕ字形状、Ｖ字形状、Ｗ字形状、Ｚ字形状等
の種々の形状に折曲した場合であっても良い。The flat nozzle E of the fifth embodiment shown in FIG. 5 shows an example in which the flat mouth of the nozzle port 1b is formed as an oblong bent into a hat shape. As another configuration of the oblong shape where the flat mouth shape of the nozzle port 1b is bent, the nozzle port 1b may be bent into various shapes such as a U-shape, a V-shape, a W-shape, and a Z-shape. .
【００２８】上記構成によれば、各扁平ノズルＡ〜Ｅの
扁平口型で構成されたノズル口１ｂから吐出する粘性液
体は該扁平口型形状に沿って扁平した流動体としてノズ
ル口１ｂから吐出するため、短径ｂの絞りにより該ノズ
ル口１ｂでの粘性液体の表面張力と摩擦による粘性抵抗
により粘性液体の液切れが良く液垂れを防止することが
出来ると共に、長径ａの長さを大きく設定することによ
り供給流量を大きくすることが出来る。According to the above configuration, the viscous liquid discharged from the flat mouth type nozzle port 1b of each of the flat nozzles A to E is discharged from the nozzle mouth 1b as a flattened fluid along the flat mouth shape. Therefore, the narrowing of the short diameter b makes it possible to prevent the viscous liquid from running out due to the surface tension of the viscous liquid at the nozzle port 1b and the viscous resistance due to friction, thereby preventing the liquid from dripping and increasing the length of the long diameter a. By setting, the supply flow rate can be increased.
【００２９】短径ｂの絞り及び長径ａの長さは、各扁平
ノズルＡ〜Ｅのノズル口１ｂを扁平加工する際に適宜設
定して成形される。The length of the narrowing of the short diameter b and the length of the long diameter a are appropriately set and formed when the nozzle ports 1b of the flat nozzles A to E are flattened.
【００３０】前記各実施形態において、供給する粘性液
体の粘度が５０〜２００Ｐｓ（ポアズ）の高粘度である
場合には、圧損を考慮して各扁平ノズルＡ〜Ｅの短径ｂ
を３．０〜５．０mmに設定して絞りを緩めに構成すれば
各扁平ノズルＡ〜Ｅから吐出して供給される粘性液体の
供給流量を大きくすることが出来るので好ましい。In each of the above embodiments, when the viscosity of the supplied viscous liquid is as high as 50 to 200 Ps (poise), the short diameter b of each of the flat nozzles A to E is taken into consideration in consideration of the pressure loss.
Is set to 3.0 to 5.0 mm and the throttle is loosened, so that the supply flow rate of the viscous liquid discharged and supplied from the flat nozzles A to E can be increased, which is preferable.
【００３１】また、該扁平ノズルＡ〜Ｅの長径ａを２０
〜２５mmに設定して長さを大きく構成すれば各扁平ノズ
ルＡ〜Ｅから吐出して供給される粘性液体が高粘度でも
該粘性液体の流量が１kg/min以上の高流量の供給が可能
となり、効率的な供給が可能である。The major diameter a of the flat nozzles A to E is set to 20
If the length is set to about 25 mm and the length is configured to be large, even if the viscous liquid discharged and supplied from each of the flat nozzles A to E has a high viscosity, it is possible to supply the viscous liquid at a high flow rate of 1 kg / min or more. , Efficient supply is possible.
【００３２】前記各扁平ノズルＡ〜Ｅは、図６に示す着
脱手段となるクランプ部材２により着脱可能に構成され
る。クランプ部材２は、図６（ａ）に示すように、各扁
平ノズルＡ〜Ｅの鍔部１ａの外径に対応する内径を有す
る溝部２ａが形成され、ヒンジ２ｂにより開閉自在に連
結された一対の連結リング２ｃ，２ｄを有して構成され
る。Each of the flat nozzles A to E is configured to be detachable by a clamp member 2 as detaching means shown in FIG. As shown in FIG. 6 (a), the clamp member 2 has a pair of grooves 2a each having an inner diameter corresponding to the outer diameter of the flange 1a of each of the flat nozzles A to E, and connected by a hinge 2b to be openable and closable. Are provided with connecting rings 2c and 2d.
【００３３】そして、各扁平ノズルＡ〜Ｅに対して粘性
液体を供給するパイプ３の端部には、図６（ｂ）に示す
ように、ノズル本体１の鍔部１ａと略同形状の鍔部３ａ
が形成されており、鍔部１ａの当接面1a1 と鍔部３ａの
当接面3a1 を当接させて該鍔部１ａ，３ａをクランプ部
材２の溝部２ａに嵌入し、一方の連結リング２ｃの端部
に設けられたボルト２ｅを他方の連結リング２ｄの端部
に設けられたネジ孔２ｆに挿入して螺合締着することで
溝部２ａに形成されたテーパ面2a1 に沿って鍔部１ａ，
３ａに形成されたテーパ面1a2 ，3a2 が摺動して鍔部１
ａの当接面1a1と鍔部３ａの当接面3a1 とが液密に接合
されて扁平ノズルＡ〜Ｅとパイプ３とが連結される。As shown in FIG. 6B, the end of the pipe 3 for supplying the viscous liquid to each of the flat nozzles A to E has a flange having substantially the same shape as the flange 1a of the nozzle body 1. Part 3a
The contact surface 1a1 of the flange portion 1a and the contact surface 3a1 of the flange portion 3a are brought into contact with each other to fit the flange portions 1a, 3a into the groove 2a of the clamp member 2, and one connecting ring 2c Is inserted into a screw hole 2f provided at the end of the other connecting ring 2d and screwed together to form a flange along the tapered surface 2a1 formed in the groove 2a. 1a,
The tapered surfaces 1a2, 3a2 formed on the flange 3a slide and the flange 1
The abutting surface 1a1 and the abutting surface 3a1 of the flange 3a are liquid-tightly joined to connect the flat nozzles A to E to the pipe 3.
【００３４】上記構成のように、各扁平ノズルＡ〜Ｅを
着脱手段となるクランプ部材２により着脱可能に構成し
た場合には、該扁平ノズルＡ〜Ｅのノズル自体の構成が
簡単であると共にクランプ部材２のボルト２ｅを締着或
いは取り外すことで各扁平ノズルＡ〜Ｅを容易に着脱で
きるので粘性液体として、例えば、光や温度によってゲ
ル化して硬化するフォトレジスト等に適用する場合で
も、必要に応じて各扁平ノズルＡ〜Ｅを容易に脱離して
溶媒等の洗浄液に浸しておけば簡単に且つ短時間で扁平
ノズルＡ〜Ｅの清掃作業を実施することが出来る。When the flat nozzles A to E are configured to be detachable by the clamp member 2 serving as the attaching and detaching means as described above, the configuration of the nozzles of the flat nozzles A to E is simple, and the clamp nozzles A to E are simple. Since the flat nozzles A to E can be easily attached and detached by tightening or removing the bolts 2e of the member 2, even when applied to a viscous liquid, for example, a photoresist that gels and hardens due to light or temperature, it is necessary. Accordingly, if the flat nozzles A to E are easily detached and immersed in a cleaning liquid such as a solvent, the cleaning operation of the flat nozzles A to E can be performed easily and in a short time.
【００３５】尚、前記各実施形態では、各扁平ノズルＡ
〜Ｅに鍔部１ａを形成し、着脱手段としてクランプ部材
２を用いて各扁平ノズルＡ〜Ｅを着脱可能に構成した
が、各扁平ノズルＡ〜Ｅの着脱手段は、これに限定され
る必要はなく、他の種々の着脱手段により構成すること
が出来、例えば、各扁平ノズルＡ〜Ｅのノズル本体１の
径が大きい場合には、図７（ａ），（ｂ）に示すよう
に、各扁平ノズルＡ〜Ｅの鍔部１ａ及びパイプ３の鍔部
３ａを４方に径方向に切り込み1a3 ，3a3 を形成したフ
ランジで構成し、鍔部１ａ，３ａの当接面1a1 ，3a1 の
間にパッキン10を介在させてボルト11を前記切り込み1a
3 ，3a3 に嵌入してワッシャ12を鍔部３ａ側からボルト
11に挿入し、該ボルト11にナット13を螺合締着して扁平
ノズルＡ〜Ｅとパイプ３とを液密に連結することでも良
い。In each of the above embodiments, each flat nozzle A
To E, the flat nozzles A to E are configured to be attachable and detachable using the clamp member 2 as the attaching and detaching means. However, the attaching and detaching means for each of the flat nozzles A to E need to be limited to this. However, for example, when the diameter of the nozzle body 1 of each of the flat nozzles A to E is large, as shown in FIGS. 7A and 7B, The flange 1a of each of the flat nozzles A to E and the flange 3a of the pipe 3 are formed by flanges having cuts 4a3 and 3a3 formed radially in four directions, and between the contact surfaces 1a1 and 3a1 of the flanges 1a and 3a. The bolt 11 is cut into the cut 1a with the packing 10
3, 3a3 and the washer 12 is bolted from the flange 3a side.
The flat nozzles A to E and the pipe 3 may be connected in a liquid-tight manner by inserting the flat nozzles A to E into the bolt 11 by screwing a nut 13 to the bolt 11.
【００３６】また、上記構成では、各扁平ノズルＡ〜Ｅ
内に前述した従来例のような摺動部分がないため、該従
来例のように摺動による摩耗によりサブミクロン（１０
-7）オーダのパーティクル（ゴミや不純物等）が発生し
て製品となる粘性液体中に混入し、粘性液体の品質を低
下させることがなく、粘性液体の品質を維持出来る。In the above configuration, each of the flat nozzles A to E
Since there is no sliding part in the conventional example described above, the submicron (10 μm) due to abrasion due to sliding as in the conventional example.
-7 ) The quality of the viscous liquid can be maintained without reducing the quality of the viscous liquid without generating particles of the order (dust, impurities, etc.) and mixing into the viscous liquid to be a product.
【００３７】また、前述した従来例のようにノズルの内
面及び外面に各種のコーティング材をコーティングする
必要もないので製造コストが低減出来ると共に、粘性液
体の供給流量を大きく出来るので各扁平ノズルＡ〜Ｅか
ら供給する粘性液体の供給時間を短縮出来る。Further, since it is not necessary to coat the inner and outer surfaces of the nozzle with various coating materials as in the above-described conventional example, the manufacturing cost can be reduced, and the flow rate of the viscous liquid can be increased. The supply time of the viscous liquid supplied from E can be shortened.
【００３８】図８は上記各扁平ノズルＡ〜Ｅを装備した
粘性液体供給装置の一例を示す。図８において、４は、
例えば、３５Ｐｓ（ポアズ）の粘度を有する粘性液体が
収容された圧送タンクであり、パイプ５から送られた圧
縮空気により該圧送タンク４内に収容された粘性液体が
加圧されてパイプ６を通って圧送され、カートリッジ型
の精密フィルタ７を介して濾過されてパーティクル（ゴ
ミや不純物等）が除去される。FIG. 8 shows an example of a viscous liquid supply device equipped with the flat nozzles A to E described above. In FIG. 8, 4 is
For example, it is a pressure-feeding tank containing a viscous liquid having a viscosity of 35 Ps (poise), and the viscous liquid contained in the pressure-feeding tank 4 is pressurized by compressed air sent from the pipe 5 and passes through the pipe 6. And filtered through a cartridge-type precision filter 7 to remove particles (dust, impurities, etc.).
【００３９】８は合成ゴムやテフロン等の弾性材料を弁
体とするダイヤフラム弁であり、該ダイヤフラム弁８を
作動させて粘性液体の供給或いは停止を行うものであ
る。該ダイヤフラム弁８と精密フィルタ７との間は前述
した着脱手段となるクランプ部材２により着脱可能に接
続されており、必要に応じてクランプ部材２を外してダ
イヤフラム弁８を脱離し、該ダイヤフラム弁８を溶媒等
の洗浄液に浸して清掃するとが出来るようになってい
る。Reference numeral 8 denotes a diaphragm valve having a valve body made of an elastic material such as synthetic rubber or Teflon. The diaphragm valve 8 is operated to supply or stop the viscous liquid. The diaphragm valve 8 and the precision filter 7 are detachably connected to each other by the clamp member 2 serving as the above-described attaching / detaching means. If necessary, the clamp member 2 is removed to detach the diaphragm valve 8, and the diaphragm valve 8 is detached. 8 can be cleaned by immersing it in a cleaning liquid such as a solvent.
【００４０】また、ダイヤフラム弁８の下流側には前述
したように、着脱手段となるクランプ部材２により着脱
可能に構成された前記各扁平ノズルＡ〜Ｅが設けられて
おり、該各扁平ノズルＡ〜Ｅのノズル口１ｂから吐出し
て供給された粘性液体は、数百ccから数リットルの容量
のクリーンボトル９に定量収容される。As described above, the flat nozzles A to E are provided downstream of the diaphragm valve 8 so as to be attachable / detachable by the clamp member 2 serving as attaching / detaching means. The viscous liquid discharged and supplied from the nozzle ports 1b to -E is quantitatively contained in a clean bottle 9 having a capacity of several hundred cc to several liters.
【００４１】ダイヤフラム弁８を作動して粘性液体の供
給を停止した時、上述したように、前記各扁平ノズルＡ
〜Ｅの作用によって粘性液体の液切れが良く液垂れを防
止することが出来、クリーンボトル９に正確に定量の粘
性液体を供給充填することが出来る。これにより、粘性
液体が高価なフォトレジスト等の場合には、余剰充填や
液垂れによる損失が防止できるので経済的である。When the supply of the viscous liquid is stopped by operating the diaphragm valve 8, as described above, each of the flat nozzles A
By virtue of the actions (1) to (E), the viscous liquid can be easily drained and dripping can be prevented, and the clean bottle 9 can be accurately supplied with a fixed amount of viscous liquid. Thus, when the viscous liquid is an expensive photoresist or the like, loss due to excessive filling or dripping can be prevented, which is economical.
【００４２】[0042]
【発明の効果】本発明は、上述の如き構成と作用とを有
するので、粘性液体を吐出して供給するノズルを扁平ノ
ズルにより構成することで、粘性液体の液切れを良くし
て液垂れを防止すると共に、供給流量を大きくすること
が出来、更に粘性液体中にパーティクル（ゴミや不純物
等）が混入することがなく、粘性液体の品質を維持出
来、更に分解清掃作業が容易に出来る。Since the present invention has the above-described configuration and operation, the nozzle for discharging and supplying the viscous liquid is constituted by a flat nozzle, so that the viscous liquid is easily drained and dripping occurs. In addition to this, the supply flow rate can be increased, particles (dust, impurities, etc.) are not mixed into the viscous liquid, the quality of the viscous liquid can be maintained, and the disassembling and cleaning operation can be easily performed.
【図１】（ａ）は本発明に係る粘性液体供給ノズルの第
１実施形態の構成を示す平面説明図、（ｂ）は第１実施
形態の粘性液体供給ノズルを扁平口側から見た図、
（ｃ）は第１実施形態の粘性液体供給ノズルの扁平口型
の形状を示す図である。FIG. 1A is an explanatory plan view showing the configuration of a first embodiment of a viscous liquid supply nozzle according to the present invention, and FIG. 1B is a view of the viscous liquid supply nozzle of the first embodiment viewed from a flat mouth side. ,
(C) is a figure which shows the flat mouth shape of the viscous liquid supply nozzle of 1st Embodiment.
【図２】（ａ）は本発明に係る粘性液体供給ノズルの第
２実施形態の構成を示す平面説明図、（ｂ）は第２実施
形態の粘性液体供給ノズルを扁平口側から見た図、
（ｃ）は第２実施形態の粘性液体供給ノズルの扁平口型
の形状を示す図である。FIG. 2A is a plan explanatory view showing a configuration of a second embodiment of a viscous liquid supply nozzle according to the present invention, and FIG. 2B is a view of the second embodiment of the viscous liquid supply nozzle viewed from a flat mouth side. ,
(C) is a figure which shows the flat mouth shape of the viscous liquid supply nozzle of 2nd Embodiment.
【図３】（ａ）は本発明に係る粘性液体供給ノズルの第
３実施形態の構成を示す平面説明図、（ｂ）は第３実施
形態の粘性液体供給ノズルを扁平口側から見た図、
（ｃ）は第３実施形態の粘性液体供給ノズルの扁平口型
の形状を示す図である。FIG. 3A is a plan view illustrating the configuration of a third embodiment of a viscous liquid supply nozzle according to the present invention, and FIG. 3B is a view of the third embodiment of the viscous liquid supply nozzle viewed from a flat mouth side. ,
(C) is a figure which shows the flat mouth shape of the viscous liquid supply nozzle of 3rd Embodiment.
【図４】（ａ）は本発明に係る粘性液体供給ノズルの第
４実施形態の構成を示す平面説明図、（ｂ）は第４実施
形態の粘性液体供給ノズルを扁平口側から見た図、
（ｃ）は第４実施形態の粘性液体供給ノズルの扁平口型
の形状を示す図である。FIG. 4A is a plan view showing a configuration of a fourth embodiment of a viscous liquid supply nozzle according to the present invention, and FIG. 4B is a view of the viscous liquid supply nozzle of the fourth embodiment viewed from a flat mouth side. ,
(C) is a figure which shows the flat mouth shape of the viscous liquid supply nozzle of 4th Embodiment.
【図５】（ａ）は本発明に係る粘性液体供給ノズルの第
５実施形態の構成を示す平面説明図、（ｂ）は第５実施
形態の粘性液体供給ノズルを扁平口側から見た図、
（ｃ）は第５実施形態の粘性液体供給ノズルの扁平口型
の形状を示す図である。FIG. 5A is a plan view illustrating a configuration of a fifth embodiment of a viscous liquid supply nozzle according to the present invention, and FIG. 5B is a view of the viscous liquid supply nozzle of the fifth embodiment viewed from a flat mouth side. ,
(C) is a figure which shows the flat mouth shape of the viscous liquid supply nozzle of 5th Embodiment.
【図６】（ａ）は着脱手段の構成を示す斜視図、（ｂ）
は着脱手段によりノズルを装着した様子を示す断面図、
（ｃ）は着脱手段によりノズルを装着した様子を示す平
面図である。FIG. 6A is a perspective view illustrating a configuration of a detachable unit, and FIG.
Is a cross-sectional view showing a state where the nozzle is mounted by attaching and detaching means,
(C) is a plan view showing a state where the nozzle is mounted by the attaching / detaching means.
【図７】（ａ）は着脱手段の他の構成を示す斜視図、
（ｂ）は着脱手段の他の構成を示す断面説明図である。FIG. 7A is a perspective view showing another configuration of the attaching / detaching means.
(B) is a sectional explanatory view showing another configuration of the attaching / detaching means.
【図８】本発明に係る粘性液体供給ノズルを装備した粘
性液体供給装置の一例を示す模式図である。FIG. 8 is a schematic diagram showing an example of a viscous liquid supply device equipped with a viscous liquid supply nozzle according to the present invention.
Ａ〜Ｅ…扁平ノズル １…ノズル本体 １ａ…鍔部 1a1 …当接面 1a2 …テーパ面 1a3 …切り込み １ｂ…ノズル口 ２…クランプ部材 ２ａ…溝部 2a1 …テーパ面 ２ｂ…ヒンジ ２ｃ，２ｄ…連結リング ２ｅ…ボルト ２ｆ…ネジ孔 ３…パイプ ３ａ…鍔部 3a1 …当接面 3a2 …テーパ面 3a3 …切り込み ４…圧送タンク ５，６…パイプ ７…精密フィルタ ８…ダイヤフラム弁 ９…クリーンボトル 10…パッキン 11…ボルト 12…ワッシャ 13…ナット ａ…長径 ｂ…短径 AE Flat nozzle 1 Nozzle body 1a Flange 1a1 Contact surface 1a2 Tapered surface 1a3 Cut 1b Nozzle port 2 Clamp member 2a Groove 2a1 Tapered surface 2b Hinge 2c, 2d Connection ring 2e ... Bolt 2f ... Screw hole 3 ... Pipe 3a ... Flange 3a1 ... Abutment surface 3a2 ... Tapered surface 3a3 ... Cut 4 ... Pressure feed tank 5,6 ... Pipe 7 ... Precision filter 8 ... Diaphragm valve 9 ... Clean bottle 10 ... Packing 11 ... bolt 12 ... washer 13 ... nut a ... long diameter b ... short diameter
Claims (7)
粘性液体供給方法において、扁平口型からなる扁平ノズ
ルにより粘性液体を吐出して供給することを特徴とする
粘性液体供給方法。1. A viscous liquid supply method for discharging and supplying a viscous liquid from a nozzle, wherein the viscous liquid is discharged and supplied by a flat nozzle having a flat mouth shape.
給ノズルにおいて、扁平口型からなる扁平ノズルにより
構成されることを特徴とする粘性液体供給ノズル。2. A viscous liquid supply nozzle for discharging and supplying a viscous liquid, comprising a flat nozzle having a flat mouth shape.
径を有する長円形または楕円形または長多角形で構成し
たことを特徴とする請求項２に記載の粘性液体供給ノズ
ル。3. The viscous liquid supply nozzle according to claim 2, wherein the flat nozzle of the flat nozzle has an elliptical shape, an elliptical shape, or a long polygonal shape having a major axis and a minor axis.
０〜１００．０mmの範囲で、且つ、短径が１．０〜５．
０mmの範囲で設定されたことを特徴とする請求項３に記
載の粘性液体供給ノズル。4. The flat nozzle according to claim 1, wherein a long diameter of the flat nozzle is 2.
Within a range of 0 to 100.0 mm and a minor axis of 1.0 to 5.
The nozzle according to claim 3, wherein the nozzle is set within a range of 0 mm.
長円形または折曲した長円形で構成したことを特徴とす
る請求項２に記載の粘性液体供給ノズル。5. The viscous liquid supply nozzle according to claim 2, wherein the flat mouth type of the flat nozzle is constituted by a curved oval or a bent oval.
０．０mmの範囲で、且つ、前記長円形の短径が１．０〜
５．０mmの範囲で設定されたことを特徴とする請求項５
に記載の粘性液体供給ノズル。6. The total length of the major axis of the oval is 2.0 to 10.
0.0 mm, and the minor axis of the oval is 1.0 to
6. The distance is set within a range of 5.0 mm.
4. The viscous liquid supply nozzle according to 4.
とを特徴とする請求項２〜６のいずれか１項に記載の粘
性液体供給ノズル。7. The viscous liquid supply nozzle according to claim 2, wherein the viscous liquid supply nozzle is configured to be detachable by attaching / detaching means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24517397A JP3925995B2 (en) | 1997-09-10 | 1997-09-10 | Viscous liquid supply method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24517397A JP3925995B2 (en) | 1997-09-10 | 1997-09-10 | Viscous liquid supply method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1179102A true JPH1179102A (en) | 1999-03-23 |
| JP3925995B2 JP3925995B2 (en) | 2007-06-06 |
Family
ID=17129701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24517397A Expired - Fee Related JP3925995B2 (en) | 1997-09-10 | 1997-09-10 | Viscous liquid supply method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3925995B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008079695A (en) * | 2006-09-26 | 2008-04-10 | Takazono Sangyo Co Ltd | Nozzle holding mechanism and nozzle holding mechanism in liquid medicine supplier |
| CN103623944A (en) * | 2013-11-27 | 2014-03-12 | 上海烟草集团有限责任公司 | Multifunctional glue nozzle of filter rod making machine |
| JP2018167882A (en) * | 2017-03-30 | 2018-11-01 | 雪印メグミルク株式会社 | Filling nozzle |
| EP4015405A1 (en) * | 2020-12-21 | 2022-06-22 | Soremartec S.A. | Nozzle for dispensing a flowable foodstuff product |
| RU2847359C2 (en) * | 2020-12-21 | 2025-10-03 | Соремартек С.А. | Nozzle for distributing a fluid food product and method for supplying a fluid food product |
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|---|---|---|---|---|
| JP2008079695A (en) * | 2006-09-26 | 2008-04-10 | Takazono Sangyo Co Ltd | Nozzle holding mechanism and nozzle holding mechanism in liquid medicine supplier |
| CN103623944A (en) * | 2013-11-27 | 2014-03-12 | 上海烟草集团有限责任公司 | Multifunctional glue nozzle of filter rod making machine |
| JP2018167882A (en) * | 2017-03-30 | 2018-11-01 | 雪印メグミルク株式会社 | Filling nozzle |
| EP4015405A1 (en) * | 2020-12-21 | 2022-06-22 | Soremartec S.A. | Nozzle for dispensing a flowable foodstuff product |
| RU2847359C2 (en) * | 2020-12-21 | 2025-10-03 | Соремартек С.А. | Nozzle for distributing a fluid food product and method for supplying a fluid food product |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3925995B2 (en) | 2007-06-06 |
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