JPS51111075A - Photo etching photo mask - Google Patents

Photo etching photo mask

Info

Publication number
JPS51111075A
JPS51111075A JP3708075A JP3708075A JPS51111075A JP S51111075 A JPS51111075 A JP S51111075A JP 3708075 A JP3708075 A JP 3708075A JP 3708075 A JP3708075 A JP 3708075A JP S51111075 A JPS51111075 A JP S51111075A
Authority
JP
Japan
Prior art keywords
photo
mask
etching
photo mask
high durability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3708075A
Other languages
English (en)
Other versions
JPS5829619B2 (ja
Inventor
Tadahiro Hashimoto
Yasushi Okuyama
Toshio Oguchi
Takayuki Yanagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP50037080A priority Critical patent/JPS5829619B2/ja
Priority to US05/613,427 priority patent/US4068018A/en
Publication of JPS51111075A publication Critical patent/JPS51111075A/ja
Publication of JPS5829619B2 publication Critical patent/JPS5829619B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP50037080A 1974-09-19 1975-03-26 シヤシンシヨツコクヨウホトマスク Expired JPS5829619B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP50037080A JPS5829619B2 (ja) 1975-03-26 1975-03-26 シヤシンシヨツコクヨウホトマスク
US05/613,427 US4068018A (en) 1974-09-19 1975-09-15 Process for preparing a mask for use in manufacturing a semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50037080A JPS5829619B2 (ja) 1975-03-26 1975-03-26 シヤシンシヨツコクヨウホトマスク

Publications (2)

Publication Number Publication Date
JPS51111075A true JPS51111075A (en) 1976-10-01
JPS5829619B2 JPS5829619B2 (ja) 1983-06-23

Family

ID=12487560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50037080A Expired JPS5829619B2 (ja) 1974-09-19 1975-03-26 シヤシンシヨツコクヨウホトマスク

Country Status (1)

Country Link
JP (1) JPS5829619B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55127557A (en) * 1979-03-24 1980-10-02 Sanyo Electric Co Ltd Photomask and production thereof
JPS5652751A (en) * 1979-10-05 1981-05-12 Dainippon Printing Co Ltd Photomask correcting method
WO1989001650A1 (fr) * 1987-08-10 1989-02-23 Idemitsu Petrochemical Company Limited Element durable pour application de motifs

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63165312U (ja) * 1987-04-17 1988-10-27

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55127557A (en) * 1979-03-24 1980-10-02 Sanyo Electric Co Ltd Photomask and production thereof
JPS5652751A (en) * 1979-10-05 1981-05-12 Dainippon Printing Co Ltd Photomask correcting method
WO1989001650A1 (fr) * 1987-08-10 1989-02-23 Idemitsu Petrochemical Company Limited Element durable pour application de motifs
US5051295A (en) * 1987-08-10 1991-09-24 Idemitsu Petrochemical Company Limited Protective film for photo masks and lith films

Also Published As

Publication number Publication date
JPS5829619B2 (ja) 1983-06-23

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